Abstract:
A power tool and spindle lock. The spindle lock includes a spring and a detent arrangement to control and buffer the rotation of the spindle and to delay the engagement of the locking elements. In some aspects, the invention provides a spindle lock including a spring element which applies substantially equal spring force to delay the operation of the spindle lock when the spindle is rotated in the forward direction or in the reverse direction. In some aspects, the invention provides two spring members which cooperate to apply the substantially equal force to delay the operation of the spindle lock when the spindle is rotated in the forward direction or in the reverse direction.
Abstract:
The present invention relates to a quick-change saw blade clamping device which includes an output shaft, a cylindrical rotatable sleeve and a torsion spring. The output shaft is coupled to a blade carrier which is disposed within the cylindrical rotatable sleeve. A rotatable member is disposed within the cylindrical rotatable sleeve. A locking member pivotally connected to the blade carrier lies in a guide groove which is formed on the blade carrier. A spiral surface is formed on the front end of the rotatable member. When the cylindrical rotatable sleeve is manually rotated, the spiral surface urges the locking member to press the blade into a locking position. The present invention provides an easily-operated clamping device of simple structure and small size.
Abstract:
A platen for electrostatic wafer clamping apparatus comprising a platen body of dielectric material and grains of electrically conductive material diffused in the dielectric material so that the platen has a relatively large electrostatic capacitance due to the diffusion of the conductive grains with the result that the platen provides an increased clamping force regardless of humidity. In accordance with another aspect of the invention, the thickness of the platen body can be decreased by an amount sufficient to maintain a constant clamping force with reduced applied voltage, to eliminate any residual voltage on the platen and to increase the speed of wafer release. The grains of electrically conductive material are present in an amount of from about 2.5 percent to about 15.0 percent of the volume of the platen body, and the grains of electrically conductive material are selected from the group consisting of carbonated transition metals, nitrified transition metals and carbonated grains. The dielectric material preferably is Al2O3, and the grains of electrically conductive material preferably are TiC and preferably in an amount of about 5% of the volume of the platen.
Abstract translation:一种用于静电晶片夹紧装置的压板,包括电介质材料的压板体和导电材料颗粒在电介质材料中扩散,使得压板由于导电颗粒的扩散而具有相对较大的静电电容,结果是压板提供 增加夹紧力,而不管湿度如何。 根据本发明的另一方面,压板体的厚度可以减小足够的量以保持具有降低的施加电压的恒定夹紧力,以消除压板上的任何残余电压并增加晶片释放的速度。 导电材料的颗粒以压板体的体积的约2.5%至约15.0%的量存在,并且导电材料颗粒选自碳酸过渡金属,硝化过渡金属和 碳酸化谷物。 电介质材料优选为Al 2 O 3,导电材料的颗粒优选为TiC,优选为压板体积的约5%。
Abstract:
An electrostatic chuck having a bonded structure comprising a ceramic electrostatic chuck member, a metal member and a bonding layer; the bonding layer having at least a first most outer bonding layer being joined to the ceramic electrostatic chuck member, a second most outer bonding layer being joined to the metal member, and a polyimide layer as an intermediate layer disposed between the first and second most outer bonding layers, and each of the most outer bonding layers being made of a silicone layer or an acrylic layer, and a method for manufacturing the same are provided: the bonding layer being excellent in airtightness, bonding strength, and corrosion resistance, free from bleeding of a bonding material even under high pressures at time of joining, and the junction body being good in heat conductivity, and having a good flatness of its adsorption surface, with a small deformation due to temperature change.
Abstract:
A removable chuck has a chuck member for holding a drill bit. Also, a mechanism is coupled with the chuck body to retain the chuck body to a drill spindle. The retention mechanism, in a first position, a biasing member in a non-biasing condition, retains the chuck on the drill spindle and in a second position, with the biasing member in a biased condition, the chuck is enabled to be removed from the spindle.
Abstract:
A method and apparatus for repairing an automobile wheel is provided. The apparatus includes a rotatable center shaft assembly. An anchor anchors a wheel to the center shaft assembly. The center shaft assembly being rotatable so that anchoring the wheel rotates the wheel with the anchor. A centering device is disposed about the center shaft assembly between the center shaft assembly and the wheel for centering the wheel about the center shaft assembly.
Abstract:
An electrostatic chuck 55 comprises an electrostatic member 100 including a dielectric 115 having a surface 120 adapted to receive a substrate 30. The dielectric 115 covers an electrode 105 that is chargeable to electrostatically hold the substrate 30. The base 175 comprises a composite of a plurality of materials, such as, ceramic and metal, for example silicon carbide and aluminum. Optionally, a support 190 can be provided to support the base 175.
Abstract:
A shrinkage device for rapidly shrinking and outshrinking tools, especially hard metal tools, in so-called shrinkage tension chucks using an induction heating coil, wherein a plurality of shrinkage chucks of paramagnetic or ferromagnetic materials can be positioned on a turntable and brought from a position below the induction coil, which can be lowered, into a cooling position.