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196 条记录 (耗时 0.021 秒)

    Chuck adapted for automated coupling
    2.
    发明授权
    Chuck adapted for automated coupling 有权
    卡盘适用于自动联轴器

    公开(公告)号：US09555479B2

    公开(公告)日：2017-01-31

    申请号：US13818414

    申请日：2011-08-12

    申请人： Wolfgang Tiefenböck ,  Herbert Tiefenböck

    发明人： Wolfgang Tiefenböck ,  Herbert Tiefenböck

    IPC分类号： B23B31/24 ,  B23B31/163 ,  B23B31/39 ,  B25B1/10 ,  B25B1/18 ,  B25B1/24 ,  B23B31/10 ,  B23B31/26 ,  B23Q3/12

    CPC分类号： B23B31/26 ,  B23B31/101 ,  B23B31/16037 ,  B23B31/16079 ,  B23B31/16116 ,  B23B31/24 ,  B23B31/39 ,  B23B2231/42 ,  B23Q3/12 ,  B25B1/103 ,  B25B1/18 ,  B25B1/2484 ,  Y10S279/901 ,  Y10T279/19 ,  Y10T279/27

    摘要： A chuck for clamping workpieces or tools in a clamping space with a clamping force (F). The chuck includes at least two chuck jaws movable in translation along one clamping plane (E) in the direction of one center Z of the clamping space and a gear train located at least largely within the chuck for transfer of a driving torque of a drive motor, which can be coupled to the gear train by coupling means of the gear train, to the chuck jaws for movement of the chuck jaws. The coupling means able to be coupled to a corresponding coupling connection of the drive motor. The movement from the maximum size of the clamping space to the minimum size of the clamping space is executed via the gear train from the drive motor.

    摘要翻译： 用夹紧力（F）将工件或工具夹紧在夹紧空间中的卡盘。 卡盘包括至少两个卡盘爪，其可沿着夹紧空间的一个中心Z的方向沿着一个夹紧平面（E）平移移动，以及至少位于卡盘内的齿轮系，用于传递驱动马达的驱动转矩 ，其可以通过齿轮系的联接装置与齿轮系联接到卡盘爪以用于卡盘爪的移动。 联接装置能够联接到驱动马达的对应的联接连接。 从夹紧空间的最大尺寸到夹紧空间的最小尺寸的移动通过来自驱动马达的齿轮系执行。

    Chuck
    4.
    发明授权
    Chuck 有权
    查克

    公开(公告)号：US09186729B2

    公开(公告)日：2015-11-17

    申请号：US13755153

    申请日：2013-01-31

    申请人： Johann Taglang

    发明人： Johann Taglang

    IPC分类号： B23B31/02 ,  B23B31/36 ,  B23B31/16 ,  B23B31/28 ,  B23B31/177

    CPC分类号： B23B31/36 ,  B23B31/16 ,  B23B31/16262 ,  B23B31/16291 ,  B23B31/28 ,  B23B2215/20 ,  B23B2270/022 ,  Y10T279/21 ,  Y10T279/27 ,  Y10T279/33

    摘要： A chuck has a chuck body rotatable about an axis, a plurality of jaws radially displaceable on the body for gripping a workpiece, a chuck drive for rotating the chuck about the axis, and a center point axially shiftable in the body and axially engageable with the workpiece gripped by the jaws. An electric drive is coupled to the center point for axially shifting same.

    摘要翻译： 卡盘具有可围绕轴线旋转的卡盘主体，可在主体上径向移动以夹持工件的多个夹爪，用于使卡盘围绕轴线旋转的卡盘驱动装置，以及可在主体中轴向移动的中心点， 工件由夹爪夹紧。 电驱动器联接到中心点，用于轴向移动。

    POWER DRILL
    5.
    发明申请
    POWER DRILL 审中-公开
    电动钻机

    公开(公告)号：US20150290719A1

    公开(公告)日：2015-10-15

    申请号：US14749188

    申请日：2015-06-24

    申请人： ROEHM GmbH

    发明人： Peter SCHENK

    IPC分类号： B23B31/12 ,  B23B31/26

    CPC分类号： B23B31/1238 ,  B23B31/102 ,  B23B31/1253 ,  B23B31/26 ,  B23B2231/06 ,  B23B2260/07 ,  Y10T279/17 ,  Y10T279/17615 ,  Y10T279/27 ,  Y10T279/3451 ,  Y10T408/65

    摘要： A drilling apparatus has a housing, a motor in the housing, a drive spindle rotatable about an axis on the housing, a chuck body, and a plurality of jaws shiftable in the chuck body. First and second elements interconnected by a screw thread and engaged between the body and the jaws for shifting the jaws on the housing. A drive sleeve rotationally fixed to the first element is drivable by the motor.

    摘要翻译： 钻孔装置具有壳体，壳体中的马达，可围绕壳体上的轴线旋转的驱动主轴，卡盘主体和可在卡盘主体中移动的多个卡爪。 第一和第二元件通过螺纹相互连接并且接合在主体和夹爪之间，以将夹爪移动到壳体上。 旋转地固定到第一元件的驱动套筒可由电动机驱动。

    CLAMPING UNIT, IN PARTICULAR FOR USE IN A MACHINING CENTER, OR A TURNING OR MILLING CENTER
    6.
    发明申请
    CLAMPING UNIT, IN PARTICULAR FOR USE IN A MACHINING CENTER, OR A TURNING OR MILLING CENTER 有权
    夹紧单元，特别用于加工中心，或铣削或铣削中心

    公开(公告)号：US20150048565A1

    公开(公告)日：2015-02-19

    申请号：US14459669

    申请日：2014-08-14

    申请人： SMW-AUTOBLOK Spannsysteme GmbH

    发明人： Harald Deininger ,  Eckhard Maurer

    IPC分类号： B23Q3/06 ,  B23Q1/26

    CPC分类号： B23Q3/06 ,  B23B31/28 ,  B23B2260/11 ,  B23B2260/136 ,  B23B2260/158 ,  B23Q1/0009 ,  B23Q1/26 ,  Y10T279/27

    摘要： A clamping unit, in particular for use in a machining center, or a turning or milling center, wherein the clamping unit comprises an external housing (12), preferably having a cylindrical basic design, an internal housing (15) accommodated in the external housing (12), and an internal cylinder (11) that is retained in the internal housing (15) such that it can be displaced in a vertical adjustment direction A when in the operating state, which is designed for transferring a pressure or tensile force for clamping purposes, wherein the internal housing (15) is supported in the external housing (12) by means of springs (13, 14), and is supported with respect to the external housing (12) such that it can be displaced in the adjustment direction A, and thus forms a spring force storage unit (21), and wherein an electric motor (16) is disposed inside the clamping unit, integrated therein, preferably encompassed by the external housing (12), furthermore, preferably accommodated inside the internal housing (15), in order to apply a force in the adjustment direction A to the internal cylinder (11) via drive means (17-20) disposed therein.

    摘要翻译： 一种夹紧单元，特别用于加工中心或车削或铣削中心，其中夹紧单元包括优选具有圆柱形基本设计的外壳（12），容纳在外壳中的内壳体 （12），以及内筒（11），其保持在所述内壳体（15）中，使得当处于操作状态时，所述内筒（11）能够在垂直调节方向A上移位，所述操作状态被设计成用于传递压力或拉力 夹紧目的，其中通过弹簧（13,14）将内部壳体（15）支撑在外部壳体（12）中，并且相对于外部壳体（12）支撑，使得其可以在调节中移位 方向A，从而形成弹簧力存储单元（21），并且其中电动机（16）设置在夹紧单元内，整合在其中，优选地由外壳（12）包围，此外优选地容纳在内部 （15），以通过设置在其中的驱动装置（17-20）将调节方向A上的力施加到内筒（11）。

    Remotely controllable rotary switch actuator
    8.
    发明授权
    Remotely controllable rotary switch actuator 有权
    遥控旋转开关执行器

    公开(公告)号：US08534676B2

    公开(公告)日：2013-09-17

    申请号：US12693411

    申请日：2010-01-25

    申请人： Jeff Whisenand ,  Wayne Russell

    发明人： Jeff Whisenand ,  Wayne Russell

    IPC分类号： B23B31/18

    CPC分类号： B60R25/00 ,  Y10T70/5978 ,  Y10T70/7802 ,  Y10T70/8676 ,  Y10T74/1424 ,  Y10T74/1488 ,  Y10T279/13 ,  Y10T279/17521 ,  Y10T279/27 ,  Y10T279/34

    摘要： A rotary actuator comprises a rotatable chuck assembly and an actuating mechanism. The chuck assembly may include a chuck housing movable between retracted and deployed positions. The chuck assembly may further include a pair of jaws pivotable between open and closed positions in correspondence to the retracted and deployed positions of the chuck housing. The actuating mechanism may be coupled to the chuck assembly for rotation between “Off”, “Neutral”, and/or “On” positions.

    摘要翻译： 旋转致动器包括可旋转卡盘组件和致动机构。 卡盘组件可以包括可在缩回位置和展开位置之间移动的卡盘壳体。 卡盘组件还可以包括一对夹爪，其对应于卡盘壳体的缩回和展开位置可在打开位置和关闭位置之间枢转。 致动机构可以联接到卡盘组件，以在“关闭”，“中立”和/或“开”位置之间旋转。

    Z-STAGE WITH DYNAMICALLY DRIVEN STAGE MIRROR AND CHUCK ASSEMBLY
    9.
    发明申请
    Z-STAGE WITH DYNAMICALLY DRIVEN STAGE MIRROR AND CHUCK ASSEMBLY 有权
    Z型舞台动态舞台和大型组合

    公开(公告)号：US20130176548A1

    公开(公告)日：2013-07-11

    申请号：US13784402

    申请日：2013-03-04

    申请人： Salam Harb ,  Kent Douglas ,  Marek Zywno ,  James Haslim ,  Jon Hamilton

    发明人： Salam Harb ,  Kent Douglas ,  Marek Zywno ,  James Haslim ,  Jon Hamilton

    IPC分类号： G03F7/20

    CPC分类号： G03F7/70758 ,  H01L21/68 ,  H01L21/6831 ,  Y10T74/20006 ,  Y10T279/21 ,  Y10T279/23 ,  Y10T279/27

    摘要： Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion. The cantilever portion may include a parallelogram flexure coupled between the base portion and a free end of the cantilever portion.

    摘要翻译： 公开了基板支撑装置和方法。 衬底卡盘相对于舞台反射镜的运动可以通过感测衬底卡盘相对于舞台镜的位移而被动态地补偿，并将与一个或多个反馈回路中的位移成比例的信号与Z级致动器和/或XY平台 耦合到舞台镜的致动器。 或者，基板支撑装置可以包括Z平台板，平台反射镜，附接到Z平台板的一个或多个致动器以及安装到平台反射镜的基板卡盘，其具有基板卡盘的六个自由度的限制。 当Z平台板在与Z方向垂直的平面中扫描时，执行器在Z方向上向Z平台施加移动。 致动器可以包括具有附接到Z平台板的基部部分和从基部沿横向方向延伸的悬臂部分的力弯曲。 悬臂部分可以包括耦合在基部和悬臂部分的自由端之间的平行四边形弯曲部。

    Electrostatic chuck power supply
    10.
    发明授权
    Electrostatic chuck power supply 有权
    静电卡盘电源

    公开(公告)号：US08169769B2

    公开(公告)日：2012-05-01

    申请号：US12749999

    申请日：2010-03-30

    申请人： Kenneth P. Regan

    发明人： Kenneth P. Regan

    IPC分类号： H01L21/683 ,  H01T23/00

    CPC分类号： H01L21/6831 ,  G01R31/2865 ,  H01L21/67265 ,  Y10T279/23 ,  Y10T279/27

    摘要： A detection circuit is provided for a power supply for an electrostatic chuck generating a trapezoidal waveform with approximately flat tops and minimal dead-time between phase reversals. The detection circuit includes an amplifying circuit which receives inputs from a secondary winding of a transformer of the power supply and produces an amplified buffered signal. A chucking detect circuit receives the signal from the amplifying circuit and is configured to produce a first signal indicative of a substrate on the electrostatic chuck and a second signal indicative of an electrostatic chuck without a substrate. A chucking quality circuit receives the signal from the amplifying circuit and produces a signal indicative of a quality of the chucking of the substrate. A movement detection circuit receives the signal from the amplifying circuit and produces a signal indicative of movement of the substrate on the electrostatic chuck.

    摘要翻译： 为静电卡盘的电源提供检测电路，该静电卡盘产生具有大致平坦的顶部的梯形波形和相位反转之间的最小死区时间。 检测电路包括放大电路，其接收来自电源的变压器的次级绕组的输入，并产生放大的缓冲信号。 卡盘检测电路接收来自放大电路的信号，并且被配置为产生指示静电卡盘上的基板的第一信号和指示静电卡盘而没有基板的第二信号。 夹持质量电路接收来自放大电路的信号，并产生指示衬底夹持质量的信号。 移动检测电路接收来自放大电路的信号，产生指示基板在静电卡盘上的运动的信号。