Barcoded Indicators for Quality Management
    3.
    发明申请

    公开(公告)号:US20200226439A1

    公开(公告)日:2020-07-16

    申请号:US16775005

    申请日:2020-01-28

    Applicant: Varcode Ltd.

    Abstract: A barcoded indicator operative to provide a machine-readable indication of exceedance of at least one threshold by at least one product quality affecting parameter, the barcoded indicator including at least a first barcode and at least a second barcode, the at least a second barcode being in a second barcode unreadable state prior to exceedance of the at least one threshold and upon exceedance of the at least one threshold the at least a first barcode becoming unreadable and generally simultaneously the at least a second barcode becoming readable.

    Barcoded indicators for quality management

    公开(公告)号:US10572785B2

    公开(公告)日:2020-02-25

    申请号:US16124107

    申请日:2018-09-06

    Applicant: Varcode Ltd.

    Abstract: A barcoded indicator operative to provide a machine-readable indication of exceedance of at least one threshold by at least one product quality affecting parameter, the barcoded indicator including at least a first barcode and at least a second barcode, the at least a second barcode being in a second barcode unreadable state prior to exceedance of the at least one threshold and upon exceedance of the at least one threshold the at least a first barcode becoming unreadable and generally simultaneously the at least a second barcode becoming readable.

    BARCODED INDICATORS FOR QUALITY MANAGEMENT
    5.
    发明申请

    公开(公告)号:US20190362206A1

    公开(公告)日:2019-11-28

    申请号:US16534603

    申请日:2019-08-07

    Applicant: Varcode Ltd.

    Abstract: A barcoded indicator operative to provide a machine-readable indication of exceedance of at least one threshold by at least one product quality affecting parameter, the barcoded indicator including a first barcode including a first plurality of barcode bars and at least a first colorable area, at least a second barcode including a second plurality of barcode bars and at least a second colorable area, and at least one interposed line extending between the first barcode and the second barcode, the interposed line being capable of preventing a barcode reader from reading parts of the first barcode and of the second barcode as part of a single barcode.

    System And Method For Quality Management Utilizing Barcode Indicators

    公开(公告)号:US20190332908A1

    公开(公告)日:2019-10-31

    申请号:US16409209

    申请日:2019-05-10

    Applicant: Varcode Ltd.

    Abstract: A quality management system for products including a multiplicity of barcoded quality indicators, a barcode indicator reader and a product type responsive indication interpreter, each of the barcoded quality indicators including a first barcode including at least one first colorable area, the first barcode being machine-readable before exceedance of the at least one time and temperature threshold, at least a second barcode including at least one second colorable area, the second barcode not being machine-readable before exceedance of the at least one time and temperature threshold, a coloring agent located at a first location on the indicator and a coloring agent pathway operative to allow the coloring agent to move, from the first location to the first and second colorable areas simultaneously thereby causing the first barcode to become unreadable and at the same time causing the second barcode to become machine-readable.

    SYSTEM AND METHOD FOR QUALITY MANAGEMENT UTILIZING BARCODE INDICATORS

    公开(公告)号:US20190286957A1

    公开(公告)日:2019-09-19

    申请号:US16364618

    申请日:2019-03-26

    Applicant: VARCODE LTD.

    Abstract: A quality management system for products including a multiplicity of barcoded quality indicators each operative to provide a machine-readable indication of exceedance of at least one threshold by at least one product quality affecting parameter, a barcode indicator reader operative to read the barcoded quality indicators and to provide output indications, the barcoded quality indicators being readable by the barcode indicator reader at all times after first becoming readable, including times prior to, during and immediately following exceedance of the at least one threshold by the at least one product quality affecting parameter, and a product type responsive indication interpreter operative to receive the output indications and to provide human sensible, product quality status outputs.

    METHOD OF MEASURING TEMPERATURE OF COMPONENT IN PROCESSING CHAMBER OF SUBSTRATE PROCESSING APPARATUS
    10.
    发明申请
    METHOD OF MEASURING TEMPERATURE OF COMPONENT IN PROCESSING CHAMBER OF SUBSTRATE PROCESSING APPARATUS 有权
    测量基板加工设备的组件温度的方法

    公开(公告)号:US20130308681A1

    公开(公告)日:2013-11-21

    申请号:US13954021

    申请日:2013-07-30

    CPC classification number: G01K11/14 G01K5/48 H01L21/67248

    Abstract: A component in a processing chamber of a substrate processing apparatus, where a temperature may be accurately measured by using a temperature measuring apparatus using an interference of a low-coherence light, even when a front surface and a rear surface are not parallel due to abrasion, or the like. A focus ring used in a vacuum atmosphere and of which a temperature is measured includes an abrasive surface exposed to an abrasive atmosphere according to plasma, a nonabrasive surface not exposed to the abrasive atmosphere, a thin-walled portion including a top surface and a bottom surface that are parallel to each other, and a coating member coating the top surface of the thin-walled portion, wherein a mirror-like finishing is performed on each of the top and bottom surfaces of the thin-walled portion.

    Abstract translation: 在基板处理装置的处理室中的部件,其中即使当前表面和后表面由于磨损而不平行时,也可以通过使用具有低相干光干涉的温度测量装置来精确地测量温度 ,等等。 在真空气氛中使用并且测量温度的聚焦环包括暴露于等离子体的研磨气氛的研磨表面,未暴露于研磨性气氛的非磨损表面,包括顶表面和底部的薄壁部分 表面彼此平行;以及涂覆部件,其涂覆在薄壁部分的顶表面上,其中在薄壁部分的每个顶表面和底表面上执行镜像整理。

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