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    METHOD OF MEASURING TEMPERATURE OF COMPONENT IN PROCESSING CHAMBER OF SUBSTRATE PROCESSING APPARATUS
    3.
    发明申请
    METHOD OF MEASURING TEMPERATURE OF COMPONENT IN PROCESSING CHAMBER OF SUBSTRATE PROCESSING APPARATUS 有权
    测量基板加工设备的组件温度的方法

    公开(公告)号：US20130308681A1

    公开(公告)日：2013-11-21

    申请号：US13954021

    申请日：2013-07-30

    申请人： Tokyo Electron Limited

    发明人： Jun YAMAWAKU ,  Chishio KOSHIMIZU ,  Tatsuo MATSUDO

    IPC分类号： G01K11/14

    CPC分类号： G01K11/14 ,  G01K5/48 ,  H01L21/67248

    摘要： A component in a processing chamber of a substrate processing apparatus, where a temperature may be accurately measured by using a temperature measuring apparatus using an interference of a low-coherence light, even when a front surface and a rear surface are not parallel due to abrasion, or the like. A focus ring used in a vacuum atmosphere and of which a temperature is measured includes an abrasive surface exposed to an abrasive atmosphere according to plasma, a nonabrasive surface not exposed to the abrasive atmosphere, a thin-walled portion including a top surface and a bottom surface that are parallel to each other, and a coating member coating the top surface of the thin-walled portion, wherein a mirror-like finishing is performed on each of the top and bottom surfaces of the thin-walled portion.

    摘要翻译： 在基板处理装置的处理室中的部件，其中即使当前表面和后表面由于磨损而不平行时，也可以通过使用具有低相干光干涉的温度测量装置来精确地测量温度 ，等等。 在真空气氛中使用并且测量温度的聚焦环包括暴露于等离子体的研磨气氛的研磨表面，未暴露于研磨性气氛的非磨损表面，包括顶表面和底部的薄壁部分 表面彼此平行;以及涂覆部件，其涂覆在薄壁部分的顶表面上，其中在薄壁部分的每个顶表面和底表面上执行镜像整理。

    COMPONENT IN PROCESSING CHAMBER OF SUBSTRATE PROCESSING APPARATUS AND METHOD OF MEASURING TEMPERATURE OF THE COMPONENT
    4.
    发明申请
    COMPONENT IN PROCESSING CHAMBER OF SUBSTRATE PROCESSING APPARATUS AND METHOD OF MEASURING TEMPERATURE OF THE COMPONENT 有权
    基板处理装置的加工室中的部件和测量部件温度的方法

    公开(公告)号：US20120251759A1

    公开(公告)日：2012-10-04

    申请号：US13432617

    申请日：2012-03-28

    申请人： Jun YAMAWAKU ,  Chishio KOSHIMIZU ,  Tatsuo MATSUDO

    发明人： Jun YAMAWAKU ,  Chishio KOSHIMIZU ,  Tatsuo MATSUDO

    IPC分类号： B32B3/14 ,  G01K11/00 ,  B32B18/00 ,  B05C11/00 ,  B32B33/00

    CPC分类号： G01K11/14 ,  G01K5/48 ,  H01L21/67248

    摘要： A component in a processing chamber of a substrate processing apparatus, where a temperature may be accurately measured by using a temperature measuring apparatus using an interference of a low-coherence light, even when a front surface and a rear surface are not parallel due to abrasion, or the like. A focus ring used in a vacuum atmosphere and of which a temperature is measured includes an abrasive surface exposed to an abrasive atmosphere according to plasma, a nonabrasive surface not exposed to the abrasive atmosphere, a thin-walled portion including a top surface and a bottom surface that are parallel to each other, and a coating member coating the top surface of the thin-walled portion, wherein a mirror-like finishing is performed on each of the top and bottom surfaces of the thin-walled portion.

    摘要翻译： 在基板处理装置的处理室中的部件，其中即使当前表面和后表面由于磨损而不平行时，也可以通过使用具有低相干光干涉的温度测量装置来精确地测量温度 ，等等。 在真空气氛中使用并且测量温度的聚焦环包括暴露于等离子体的研磨气氛的研磨表面，未暴露于研磨性气氛的非磨损表面，包括顶表面和底部的薄壁部分 表面彼此平行;以及涂覆部件，其涂覆在薄壁部分的顶表面上，其中在薄壁部分的每个顶表面和底表面上执行镜像整理。

    Thermochromic material
    6.
    发明申请
    Thermochromic material 有权
    热变色材料

    公开(公告)号：US20040182284A1

    公开(公告)日：2004-09-23

    申请号：US10477978

    申请日：2004-05-17

    发明人： Anna Vasilievna Belykh ,  Alexandr Mikhailovich Efremov ,  Mikhail Dmitrievich Mikhailov

    IPC分类号： C09C001/02

    CPC分类号： C04B35/42 ,  C03C8/00 ,  C04B35/453 ,  C04B35/457 ,  C04B35/48 ,  C04B35/495 ,  C04B35/6262 ,  C04B35/6303 ,  C04B35/6309 ,  C04B35/6313 ,  C04B35/6316 ,  C04B2235/3201 ,  C04B2235/3203 ,  C04B2235/3205 ,  C04B2235/3206 ,  C04B2235/3208 ,  C04B2235/3213 ,  C04B2235/3215 ,  C04B2235/3217 ,  C04B2235/3222 ,  C04B2235/3232 ,  C04B2235/3241 ,  C04B2235/3244 ,  C04B2235/3251 ,  C04B2235/3256 ,  C04B2235/3258 ,  C04B2235/3262 ,  C04B2235/3272 ,  C04B2235/3275 ,  C04B2235/3279 ,  C04B2235/3281 ,  C04B2235/3284 ,  C04B2235/3286 ,  C04B2235/3293 ,  C04B2235/3296 ,  C04B2235/3298 ,  C04B2235/3409 ,  C04B2235/3418 ,  C04B2235/3427 ,  C04B2235/36 ,  C04B2235/447 ,  C04B2235/448 ,  C09K9/00 ,  G01K11/14

    摘要： Thermochromic material comprising a thermochromic component and a binder, wherein the thermochromic component is crystal phases based on oxides of heavy metals of I, II, III, IV, V, VI, VII, VIII groups of the Periodic System selected from the group consisting of compounds of the following general formulae: (i) (Bi2O3)1-z(MxOy)z where znull0-0.5, wherein M is selected from the group consisting of heavy, alkali, alkaline earth metals and mixtures thereof; (ii) (MxOy)m(Bi2O3)nNb(Ta)2O5, where mnull0-1, nnull1-2, wherein M is selected from the group consisting of heavy, alkali, alkaline earth metals and mixtures thereof; (iii) (MxOy)m (Bi2O3)nMo(W)O3 where mnull0-1, nnull0-12, wherein M is selected from the group consisting of alkali, alkaline earth, heavy metals and mixtures thereof. (iv) (MxOy)m(MexOy)nMo(W,Cr)O3 where mnull0-1, nnull0-1, wherein M is selected from the group consisting of alkali/alkaline earth, heavy metals and mixtures thereof, and Me is a heavy metal; (v) (MxOy)m(MexOy)nNb(Ta)2O5, where mnull0-1, nnull0-1, wherein M is selected from the group consisting of alkali, alkaline earth, heavy metals and mixtures thereof, and Me is selected from the group consisting of Cu(II), Mn(II), Mn(III), Co(II), Ni(II), Cr(III), the ratio in terms of weight percentage of thermochromic component versus binder being from 2:98 to 98:2, and use of compounds (i) to (v) as thermochromic components are disclosed.

    摘要翻译： 包含热变色组分和粘合剂的热变色材料，其中所述热变色组分是基于选自以下组中的I，II，III，IV，V，VI，VII，VIII族重金属的氧化物的结晶相： 以下通式的化合物：（i）（Bi 2 O 3）1-z（M x O y）z其中z = 0-0.5，其中M选自重质，碱金属，碱土金属及其混合物; （ⅱ）（MxOy）m（Bi2O3）nNb（Ta）2O5，其中m = 0-1，n = 1-2，其中M选自重质，碱金属，碱土金属及其混合物; （iii）（M x O y）m（Bi 2 O 3）nM（W）O 3，其中m = 0-1，n = 0-12，其中M选自碱金属，碱土金属，重金属及其混合物。 （iv）（MxOy）m（MexOy）nMo（W，Cr）O3，其中m = 0-1，n = 0-1，其中M选自碱金属/碱土金属，重金属及其混合物， 我是重金属; （v）（MxOy）m（MexOy）nNb（Ta）2O5，其中m = 0-1，n = 0-1，其中M选自碱金属，碱土金属，重金属及其混合物，以及 Me选自Cu（II），Mn（II），Mn（III），Co（II），Ni（II），Cr（III）），热变色组分与粘合剂的重量比 为2:98至98:2，并且公开了使用化合物（i）至（v）作为热致变色组分。

    Temperature indicating paint
    7.
    发明申请
    Temperature indicating paint 有权
    温度指示油漆

    公开(公告)号：US20030044986A1

    公开(公告)日：2003-03-06

    申请号：US10226188

    申请日：2002-08-23

    发明人： Hugh M L Watson

    IPC分类号： G01N031/00 ,  G01N033/00

    CPC分类号： C09D5/26 ,  F05D2260/80 ,  F05D2260/83 ,  F05D2270/80 ,  F05D2300/44 ,  G01K3/04 ,  G01K11/14 ,  G01K13/08

    摘要： An irreversible temperature indicating paint comprise 15 to 18 wt % cobalt ammonium phosphate, 5.0 to 6.0 wt % sodium alumino sulpho silicate, 8.5 to 10.5 wt % silica, 7.0 to 8.5 wt % alumina, 0.5 to 0.7 wt % toluidine red, 35 to 43 wt % acrylic resin and 19 to 23 wt % silicone resin excluding solvent. A particular irreversible temperature indicating paint comprising 16.4 wt % cobalt ammonium phosphate, 5.5 wt % sodium alumino sulpho silicate, 9.4 wt % silica, 7.8 wt % alumina, 0.6 wt % toluidine red, 39.1 wt % acrylic resin and 21.1 wt % silicone resin excluding solvent. The irreversible temperature indicating paint has at least six colour changes in the temperature range 550null C. to 1250null C. The irreversible temperature indicating paint is used to determine the temperatures to which various parts of turbine blades, turbine vanes or other components are subjected in operation of a gas turbine engine.

    摘要翻译： 不可逆温度指示涂料包含15-18重量％的磷酸钴铵，5.0-6.0重量％的硅铝酸钠，8.5-10.5重量％的二氧化硅，7.0-8.5重量％的氧化铝，0.5-0.7重量％的甲苯胺红，35-43 丙烯酸树脂和19〜23重量％的有机硅树脂，不包括溶剂。 特别是不可逆的温度指示涂料，其包含16.4重量％的磷酸钴铵，5.5重量％的硅铝酸钠，9.4重量％的二氧化硅，7.8重量％的氧化铝，0.6重量％的甲苯胺红，39.1重量％的丙烯酸树脂和21.1重量％ 溶剂。 不可逆温度指示涂料在550℃至1250℃的温度范围内具有至少六种颜色变化。不可逆温度指示涂料用于确定涡轮机叶片，涡轮叶片或其他部件受到的各种部件的温度 在燃气轮机的运行中。

    Color temperature indicator
    8.
    发明申请
    Color temperature indicator 失效
    色温指示器

    公开(公告)号：US20020055578A1

    公开(公告)日：2002-05-09

    申请号：US09884772

    申请日：2001-06-19

    发明人： Jun Wu ,  Yaomin Xia ,  Joseph W. Stucki

    IPC分类号： C08K003/34

    CPC分类号： G01K11/14

    摘要： The invention relates to temperature indicating compositions which display temperature dependent color changes. The invention encompasses temperature indicating compositions, materials, devices and methods of their use. The temperature indicating compositions of the invention are clays that can be used to detect temperature and temperature changes at sub-ambient and particularly sub-zero null C. temperatures. Temperature of a selected environment can be monitored by placing a temperature-sensitive composition comprising the clay material of this invention in contact with that environment and monitoring the color of the composition.

    摘要翻译： 本发明涉及显示温度依赖性颜色变化的温度指示组合物。 本发明包括其使用的温度指示组合物，材料，装置和方法。 本发明的温度指示组合物是可以用于在亚环境温度和特别是低于零℃的温度下检测温度和温度变化的粘土。 可以通过将包含本发明的粘土材料的温度敏感组合物与该环境接触并监测组合物的颜色来监测所选环境的温度。

    Optical temperature sensor using thermochromic semiconductors
    9.
    发明授权
    Optical temperature sensor using thermochromic semiconductors 失效
    使用热变色半导体的光学温度传感器

    公开(公告)号：US5772328A

    公开(公告)日：1998-06-30

    申请号：US667058

    申请日：1996-06-20

    申请人： James W. Kronberg

    发明人： James W. Kronberg

    IPC分类号： G01K1/14 ,  G01K11/14 ,  G01K11/12

    CPC分类号： B23K37/006 ,  G01K1/14 ,  G01K11/14 ,  Y10S252/962

    摘要： An optical temperature measuring device utilizes thermochromic semiconductors which vary in color in response to changes in temperature. The thermochromic material is sealed in a glass matrix which allows the temperature sensor to detect high temperatures without breakdown. Cuprous oxide and cadmium sulfide are among the semiconductor materials which provide the best results. The changes in color may be detected visually using a sensor chip and an accompanying color card.

    摘要翻译： 光学温度测量装置利用响应于温度变化而变色的热变色半导体。 热变色材料被密封在玻璃基质中，允许温度传感器检测高温而不破裂。 氧化亚铜和硫化镉是提供最佳效果的半导体材料之一。 可以使用传感器芯片和伴随的色卡在目视上检测颜色的变化。

    Optical apparatus and method for measuring temperature of a substrate material with a temperature dependent band gap
    10.
    发明授权
    Optical apparatus and method for measuring temperature of a substrate material with a temperature dependent band gap 失效
    用于测量具有温度依赖带隙的衬底材料的温度的光学装置和方法

    公开(公告)号：US5568978A

    公开(公告)日：1996-10-29

    申请号：US343097

    申请日：1994-11-21

    申请人： Shane R. Johnson ,  Christian Lavoie ,  Mark K. Nissen ,  J. Thomas Tiedje

    发明人： Shane R. Johnson ,  Christian Lavoie ,  Mark K. Nissen ,  J. Thomas Tiedje

    IPC分类号： G01K11/14 ,  G01K11/00 ,  G01J5/48

    CPC分类号： G01K11/14

    摘要： An optical method for measuring the temperature of a substrate material with a temperature dependent bandgap. The substrate is illuminated with a broad spectrum lamp and the bandgap is determined from the spectrum of the diffusely scattered light. The spectrum of the light from the lamp is sufficiently broad that it covers the spectral range above and below the bandgap of the substrate. Wavelengths corresponding to photon energies less than the bandgap of the substrate are transmitted through the substrate and are reflected from the back surface of the substrate as well as from the front surface while the wavelengths corresponding to photon energies larger than the bandgap are reflected only from the front surface. If the front surface is polished the front surface reflection will be specular while if the back surface is rough the reflection from the back surface will be non-specular. The back surface reflection is detected with a detector in a non-specular location. From the wavelength of the onset of the non-specular reflection the bandgap can be determined which gives the temperature. The temperature is determined from the knee in the diffuse reflectance spectrum near the bandgap.

    摘要翻译： 一种用于测量具有温度依赖带隙的衬底材料的温度的光学方法。 用广谱灯照射衬底，并从扩散散射光的光谱确定带隙。 来自灯的光的光谱足够宽，以使其覆盖在衬底的带隙之上和之下的光谱范围。 对应于小于衬底的带隙的光子能量的波长透射通过衬底，并且从衬底的背面以及从正面反射，而对应于大于带隙的光子能量的波长仅从 前面 如果前表面被抛光，则前表面反射将是镜面的，而如果背面粗糙，则背面的反射将是非镜面的。 用非镜面位置的检测器检测背面反射。 从非镜面反射的起始波长可以确定给出温度的带隙。 在带隙附近的漫反射光谱中，从膝盖确定温度。