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公开(公告)号:US20030170569A1
公开(公告)日:2003-09-11
申请号:US10357472
申请日:2003-02-04
发明人: Hiroshi Takanashi , Tomoya Kudo , Takekazu Obata
IPC分类号: G03F007/075 , G03F007/032 , G03F007/027
CPC分类号: G03F7/0388 , G03F7/027 , G03F7/0758 , Y10S430/111
摘要: Disclosed is a negative-type photosensitive resin composition comprising component (A) that is a product of the Michael addition reaction between an amino group-containing compound (a-1) represented by the general formula (I): 1 (wherein n is an integral number of 1-4), and a polyethyleneglycol di(meth)acrylate (a-2) represented by the general formula (II): 2 (wherein R1 is a hydrogen or a methyl, and m is an integral number of 4-14). The composition of the invention is broadly be applicable in the technical fields of photo masks for etching use in the fabrication of CRT shadow masks, and lead frames for the mounting of IC chips; phosphor patterning of CRT; and further those of photosensitive resin plates, dry films, aqueous photosensitive paints, and aqueous photosensitive adhesives, etc. The composition of the invention has water resistance in spite of its capability of being developed with water and produce effects of enduring acidic wet-etching and repetitive steps of development.
摘要翻译: 公开了一种负型光敏树脂组合物,其包含作为通式(I)表示的含氨基化合物(a-1)之间的迈克尔加成反应的产物的组分(A):(其中n是整数 1-4),和由通式(II)表示的聚乙二醇二(甲基)丙烯酸酯(a-2):其中R1是氢或甲基,m是4-14的整数) 。 本发明的组合物广泛地适用于CRT阴罩的制造中用于蚀刻的光掩模的技术领域,以及用于安装IC芯片的引线框架; CRT的荧光图案化; 以及感光性树脂板,干膜,水性感光性涂料和水性感光性粘合剂等的组合物。本发明的组合物尽管具有用水显影的能力而具有耐水性,并且产生持久的酸性湿蚀刻和 重复的发展步骤。
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公开(公告)号:US20030039916A1
公开(公告)日:2003-02-27
申请号:US10062497
申请日:2002-02-05
发明人: Yutaka Adegawa , Toshiaki Aoai , Ippei Nakamura
IPC分类号: G03F007/038 , G03F007/075 , G03F007/004
CPC分类号: G03F7/0392 , G03F7/0045 , G03F7/0395 , G03F7/0397 , Y10S430/106 , Y10S430/115
摘要: A positive resist composition comprises: a compound capable of directly or indirectly generating a radical (A) on irradiation with an energy ray; or a cyclic ether compound.
摘要翻译: 正性抗蚀剂组合物包含:能量线照射时能够直接或间接产生自由基(A)的化合物; 或环醚化合物。
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公开(公告)号:US20040175655A1
公开(公告)日:2004-09-09
申请号:US10803435
申请日:2004-03-18
发明人: Seiji Toyoda , Saburo Imamura , Satoru Tomaru , Takashi Kurihara , Koji Enbutsu , Shoichi Hayashida , Tohru Maruno
IPC分类号: G03C001/73 , G03F007/075 , G03F007/20 , G03F007/36
CPC分类号: G03F7/0757 , G03F7/038 , Y10S430/106 , Y10S430/115 , Y10S430/117
摘要: A photosensitive composition for optical waveguides comprising of an organic oligomer, a polymerization initiator and a crosslinking agent, the organic oligomer being a silicone oligomer represented by the following formula (1), wherein X denotes hydrogen, deuterium, halogen, an alkyl group or an alkoxy group; m is an integer from 1 to 5; x and y represent the proportion of respective units, and neither x nor y is 0; and R1 denotes a methyl, ethyl, or isopropyl group; a production method thereof, and a polymer optical waveguide pattern formation method using the same. 1
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公开(公告)号:US20040106063A1
公开(公告)日:2004-06-03
申请号:US10615683
申请日:2003-07-09
发明人: Jun Hatakeyama , Youichi Ohsawa , Takeru Watanabe
IPC分类号: G03F007/039 , G03F007/021 , G03F007/038 , G03F007/075
CPC分类号: G03F7/0392 , G03F7/0045 , Y10S430/106
摘要: Although use of a nitrogen-containing compound as a basic compound component of a resist composition makes it possible to ease the T-top problem at an acid dissociation constant pKa falling within a range of 2 to 6, it is accompanied with the problem that the reaction, that is, acid diffusion upon use of a highly-reactive acid-labile group cannot be controlled. In order to overcome this problem, one or more basic compounds selected from those represented by the following formulas (I) to (III) and (1) to (4) are employed. 1 2
摘要翻译: 尽管使用含氮化合物作为抗蚀剂组合物的碱性化合物组分可以使酸解离常数pKa在2至6的范围内缓解T顶部问题,但是伴随着如下问题: 反应,即使用高反应性酸不稳定基团时的酸扩散是不能控制的。 为了克服这个问题,使用一种或多种选自由下式(I)至(III)和(1)至(4)表示的化合物的碱性化合物。
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公开(公告)号:US20040029042A1
公开(公告)日:2004-02-12
申请号:US10412640
申请日:2003-04-11
发明人: Gary N. Taylor , Cheng-Bai Xu
IPC分类号: G03F007/075 , G03F007/11 , G21K005/00 , G03F007/20 , G03F007/40
CPC分类号: G03F7/105
摘要: New photoresist systems are provided that comprise an underlying processing (or barrier) layer composition and an overcoated photoresist layer. Systems of the invention can exhibit significant adhesion to SiON and other inorganic surface layers.
摘要翻译: 提供了新的光致抗蚀剂体系,其包括下面的处理(或阻挡)层组合物和外涂光致抗蚀剂层。 本发明的系统可以显示出对SiON和其它无机表面层的显着粘着。
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公开(公告)号:US20040023145A1
公开(公告)日:2004-02-05
申请号:US10209788
申请日:2002-07-31
申请人: 3D Systems, Inc.
发明人: Khalil M. Moussa , Jiaching Liu
IPC分类号: G03F007/075 , G03F007/028 , G03F007/029 , G03F007/031 , G03F007/032 , G03F007/26 , B29C035/08
CPC分类号: G03F7/0037 , B33Y10/00 , B33Y70/00 , G03F7/038 , Y10S430/106 , Y10S430/121
摘要: A liquid radiation-curable composition that comprises (A) at least one polymerizing organic substance; (B) at least one free-radical polymerizing organic substance; (C) at least one cationic polymerization initiator; (D) at least one free-radical polymerization initiator; (E) at least one hydroxyl-functional compound; and (F) at least one epoxy interpenetrating polymer compound;
摘要翻译: 一种液体可辐射固化组合物,其包含(A)至少一种聚合有机物质; (B)至少一种自由基聚合有机物质; (C)至少一种阳离子聚合引发剂; (D)至少一种自由基聚合引发剂; (E)至少一种羟基官能化合物; 和(F)至少一种环氧互穿高分子化合物;
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公开(公告)号:US20030228538A1
公开(公告)日:2003-12-11
申请号:US10447729
申请日:2003-05-28
IPC分类号: G03F007/075 , G03F007/038 , G03F007/039
CPC分类号: G03F7/0392 , G03F7/2024 , G03F7/2059 , G03F7/40
摘要: One embodiment of the present invention is a photoresist formulation that includes e-beam cross-linkable substituents, which substituents include one or more of the following functional groups: (a) carbon-carbon double bonds; (b) a strained ring system; (c) a halogenated compound; and (d) one or more organo-silicon moieties.
摘要翻译: 本发明的一个实施方案是包含电子束可交联取代基的光致抗蚀剂制剂,该取代基包括一个或多个以下官能团:(a)碳 - 碳双键; (b)应变环系统; (c)卤代化合物; 和(d)一个或多个有机硅部分。
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公开(公告)号:US20030113666A1
公开(公告)日:2003-06-19
申请号:US10270599
申请日:2002-10-16
发明人: Akihiro Endo
IPC分类号: G03F007/075
CPC分类号: B41C1/1041 , Y10S430/165
摘要: A lithographic printing plate precursor comprises a support and a hydrophilic layer capable of hydrophobicizing by heat, wherein the hydrophilic layer comprises: a particulate hydrophobicizing precursor; a photo-heat converting agent; a hydrophilic polymer having a silane coupling group, and a metal complex catalyst.
摘要翻译: 平版印刷版前体包括支持体和能够通过热疏水化的亲水层,其中亲水层包括:颗粒疏水化前体; 光热转换剂; 具有硅烷偶联基团的亲水性聚合物和金属络合物催化剂。
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公开(公告)号:US20020061465A1
公开(公告)日:2002-05-23
申请号:US09963465
申请日:2001-09-27
发明人: Koji Hasegawa , Takeshi Kinsho , Takeru Watanabe , Mutsuo Nakashima , Seiichiro Tachibana , Tsunehiro Nishi , Jun Hatakeyama
IPC分类号: G03F007/039 , G03F007/30 , G03F007/075 , G03F007/40 , C08F030/08 , C08F032/08
CPC分类号: G03F7/0758 , G03F7/0045
摘要: A polymer bearing specific silicon-containing groups is novel. A resist composition comprising the polymer as a base resin is sensitive to high-energy radiation and has excellent sensitivity and resolution at a wavelength of less than 300 nm, and high resistance to oxygen plasma etching. The resist composition lends itself to micropatterning for the fabrication of VLSIs.
摘要翻译: 具有特定含硅基团的聚合物是新颖的。 包含作为基础树脂的聚合物的抗蚀剂组合物对高能辐射敏感,并且在小于300nm的波长下具有优异的灵敏度和分辨率,以及高耐氧等离子体蚀刻性。 抗蚀剂组合物本身可用于制造VLSI的微图案。
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公开(公告)号:US20040219457A1
公开(公告)日:2004-11-04
申请号:US10416397
申请日:2003-10-16
IPC分类号: G03F007/075 , G03F007/00 , G03C001/73 , G03C005/16 , G03H001/04 , G03F007/40
CPC分类号: G03F7/0758 , G03F7/001 , G03F7/0755 , G03F7/0757 , G03H1/02 , G03H2260/12 , Y10S430/117 , Y10T428/1023
摘要: A photopolymerisable system is disclosed which can be polymerised by exposure to UV light, for example, to form a solid, light-transmitting sheet material having volume refractive index variations defining an optical diffuser or a hologram, for example. The system includes a silicone monomer, prepolymer, macromonomer or co-monomer capable of undergoing free radical initiated polymerization and further includes a photoinitiator.
摘要翻译: 公开了一种可光聚合系统,其可以通过暴露于UV光聚合,例如形成具有限定光学扩散器或全息图的体积折射率变化的固体透光片材。 该系统包括能够进行自由基引发聚合的硅氧烷单体,预聚物,大分子单体或共聚单体,并且还包括光引发剂。
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