摘要:
A tunable element in the microwave frequency range is described that may include one or more tunable elements that are directly digitally controlled by a digital bus connecting a digital control circuit to each controlled element. In particular, each digital signal is filtered by a digital isolation technique so that the signal reaches the tunable elements with very low noise. The low noise digital signals are then converted to analog control voltages. The direct D/A conversion is accomplished by a special D/A converter which is manufactured as an integral part of a substrate. This D/A converter in accordance with the invention may consist of a resistor ladder or a directly digitally controlled capacitor. The direct digitally controlled capacitor may be a cantilevered type capacitor having multiple separate electrodes or sub-plates representing binary bits that may be used to control the capacitor. A low cost microwave oscillator is disclosed in which some of the filters and oscillators are direct digitally tuned elements.
摘要:
An inter-digital capacitor may be used in a power socket for a microelectronic device. In one embodiment an integrated, low-resistance power and ground terminal configuration is disclosed. The capacitor plates are alternatively coupled to the power and ground terminals. Two polarity types are disclosed. A method of operation is also described.
摘要:
A monolithic or essentially monolithic single layer capacitor with high structural strength and capacitance. Sheets of green-state ceramic dielectric material and ceramic/metal composite material are laminated together, diced into individual chips, and fired to sinter the ceramic together. The composite material may contain an amount of metal sufficient to render the composite conductive whereby the composite may be used for one or both electrodes and for mounting the capacitor. Alternatively, the composite material may contain an amount of metal insufficient to render the composite conductive but sufficient to act as seed points for an electroplating process wherein the composite is preferentially coated with conductive metal, the coated composite is mounted, and the coating provides an electrical connection to an internal electrode. Vertically-oriented surface mountable capacitors and hybrid capacitors are provided.
摘要:
In a capacitive structure of an integrated circuit a comb-like configuration or other thin element configuration provides for capacitive coupling between electrode elements in one plane. By forming electrodes in a plurality of planes and selectively shifting the positioning of the electrodes in one plane relative to those in another plane, capacitive coupling between the electrodes in the different planes is achieved. In this way capacitance and stability with process variations can be affected. Furthermore, by using the metal interconnect layers to form the capacitive structures, the need for additional process steps in defining poly-layers, is avoided.
摘要:
Electrostatic chucks are disclosed for holding a wafer or other substrate during microlithographic transfer of a pattern from a reticle to a surface of the substrate using a charged particle beam or other energy beam. The chucks are configured especially to hold the substrate easily and completely for better substrate planarity and better conduction of heat from the substrate to the chuck during exposure. An embodiment of the chuck includes a base plate including a first region and a second region. The first region includes a central region and a peripheral segment region, and the second region includes a general peripheral region that, in combination with the peripheral segment region, surrounds the central region. An insulating layer overlies the base plate and defines a wafer-mounting surface. First and second electrode sets are situated between the base plate and insulating layer. The first electrode set is located in the first region so as to occupy the central region and peripheral segment region, and the second electrode set is located in the second region so as to occupy the general peripheral region. When initiating attachment of the substrate to the chuck, the first electrode set is energized before energizing the second electrode set.
摘要:
A capacitor electrode includes a film base member having connection means located thereon so that the capacitor electrode may be connected to an external component, and a segmented metallized layer connected to the connection means, the metallized layer being made of metallized segments interconnected by current gates. The segmented,metallized layer has a thickness which varies or differs continuously along a length thereof, and the current gates have a width which increases as the thickness of the segmented metallized layer decreases.
摘要:
An electronic part enabling a further efficient attenuation of high-frequency noises is provided. The first dielectric paste is applied onto a PET film (30) to form a ceramic sheet (31) having a dielectric constant ∈1 thereupon; and ceramic films (22—3, 22—4) are formed by applying the second dielectric paste on the ceramic sheet (31). Next, the pattern of the signal line (22—2) is printed by applying the conductive paste to the center of ceramic sheet (31) such that the right side (22—3a) of ceramic film (22—3) in the lengthwise direction and the left side (22—4a) of ceramic film (22—4) in the lengthwise direction are covered with the conductive paste; after that, further ceramic films (22—5, 22—6) are formed such that the lateral ends (22—2d, 22—2e) of the signal line (22—2) are sandwiched between the ceramic films (22—5, 22—6; and 22—3, 22—4).
摘要:
An improved high quality factor capacitive device is implemented on a single, monolithic integrated circuit. The new layout techniques improve the quality factor (Q) of the capacitor by reducing intrinsic resistance of the capacitor by reducing the distance between the metal contacts of the top and bottom conductive plates. The layout techniques require laying out the top conductive plate of the capacitor in strips such that metal contacts from the bottom conductive plate pass in between the strips and through the dielectric layer. Alternatively, the apertures may be etched into the top conductive plate so that metal contacts pass through the apertures and connect to the bottom conductive plate.
摘要:
A method for constructing a capacitor having an increased equivalent series resistance (ESR) is disclosed. In one embodiment, a capacitor includes a plurality of capacitor plates comprised of a conductive material and first and second capacitor terminals. At least one of the capacitor plates is coupled to the first terminal and at least one of the capacitor plates is coupled to the second terminal. At least one of the plurality of capacitor plates includes a pattern, wherein the pattern is void of conductive material. The void in the conductive material formed by the pattern may cause a path of current flow through the capacitor plate to be substantially altered in comparison to a capacitor plate that is continuous. By using capacitor plates having voids of conductive material that cause the current path to be altered in comparison to continuous capacitor plates, a capacitor can be constructed having a higher ESR.
摘要:
Thin layer capacitors are formed from a first flexible metal layer, a dielectric layer between about 0.03 and about 2 microns deposited thereon, and a second flexible metal layer deposited on the dielectric layer. The first flexible metal layer may either be a metal foil, such as a copper, aluminum, or nickel foil, or a metal layer deposited on a polymeric support sheet. Depositions of the layers is by or is facilitate by combustion chemical vapor deposition or controlled atmosphere chemical vapor deposition.