公开(公告)号：US12106928B2

公开(公告)日：2024-10-01

申请号：US17938466

申请日：2022-10-06

Applicant: NuFlare Technology, Inc.

Inventor： Ryoei Kobayashi

IPC: H01J37/065 ,  H01J9/04 ,  H01J9/18 ,  H01J37/075 ,  H01J37/317

CPC classification number: H01J37/065 ,  H01J9/04 ,  H01J9/18 ,  H01J37/075 ,  H01J37/3177 ,  H01J2237/032

Abstract: A cathode mechanism of an electron emission source includes a crystal that includes an upper part being columnar, truncated conical, or their combined shape, and having a first surface to emit thermoelectrons, and a lower part, integrated with the upper part, having a second surface substantially parallel to the first surface, and a diameter larger than the maximum diameter of the upper part, a holding part that is a column having, in order from the holding part upper side, different inner diameters of a first diameter and a second diameter larger than the first one, and that holds the crystal in the state where the crystal first surface is projecting from the upper surface, and the crystal second surface contacts the holding part inside the column, and a retaining part that retains the crystal, at the back of the crystal lower part, not to be separated from the holding part.

公开(公告)号：US09251990B2

公开(公告)日：2016-02-02

申请号：US14459121

申请日：2014-08-13

Applicant: NUFLARE TECHNOLOGY, INC.

Inventor： Ryoei Kobayashi

IPC: H01J9/04

CPC classification number: H01J9/04

Abstract: A method for producing a thermoelectron emission source for an electron gun used in an electron beam writing apparatus, the thermoelectron emission source producing method comprising, preparing a first material that emits a thermoelectron, coating the first material with a second material having a work function larger than that of the first material, exposing the first material from part of the second material by machine processing, and decreasing a diameter of the exposed portion of the first material by heating treatment when the diameter of the exposed portion is larger than a predetermined diameter value.

Abstract translation: 一种用于电子束书写装置的电子枪热电子发射源的制造方法，该热电子发射源的制造方法包括：制备发射热电子的第一材料，用功函数较大的第二材料涂覆第一材料 比第一材料的第一材料，通过机械加工从第二材料的一部分露出第一材料，并且当暴露部分的直径大于预定直径值时，通过加热处理来减小第一材料的暴露部分的直径 。

公开(公告)号：US11430628B1

公开(公告)日：2022-08-30

申请号：US17647198

申请日：2022-01-06

Applicant: NuFlare Technology, Inc.

Inventor： Ryoei Kobayashi

IPC: H01J29/45 ,  H01J29/48 ,  H01J29/51

Abstract: A cathode mechanism of an electron gun includes a crystal to emit a thermal electron from an end surface by being heated, a holding part to hold the crystal in a state where the end surface is exposed and at least a part of other surfaces of the crystal is covered, a first supporting post and a second supporting post each to support the holding part and extend while maintaining an unchanged sectional size, a first base part to fix the first supporting post, and a second base part to fix the second supporting post, wherein the holding part, the first supporting post, the second supporting post, the first base part, and the second base part are formed in an integrated structure made of the same material, and the crystal is heated by supplying a current to the integrated structure.

公开(公告)号：US09412551B2

公开(公告)日：2016-08-09

申请号：US14721380

申请日：2015-05-26

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi Saito ,  Ryoei Kobayashi

IPC: H01J9/42 ,  H01J1/13 ,  H01J9/02 ,  H01J37/06 ,  H01J37/317

CPC classification number: H01J9/022 ,  H01J3/022 ,  H01J9/025 ,  H01J37/06 ,  H01J37/3174 ,  H01J2237/061 ,  H01J2237/06308

Abstract: A cathode obtaining method includes producing a plurality of cathodes each including an electron emission member and a cover part, provided with a gap, which covers a side surface of the electron emission member, measuring an outer dimension of the upper surface of the electron emission member, for each of a plurality of cathodes, measuring an outer dimension of the gap at the same surface as the upper surface of the electron emission member, for each of a plurality of cathodes, calculating an area ratio by dividing the area of the gap, for each of a plurality of cathodes, obtaining an upper limit of the area ratio corresponding to a desired brightness by using a correlation between brightness and the area ratio, and selecting a cathode having the area ratio less than or equal to the upper limit from a plurality of cathodes that have been produced.

Abstract translation: 一种阴极获得方法包括制造多个阴极，每个阴极包括电子发射部件和覆盖部分，盖子部分覆盖电子发射部件的侧表面，间隙测量电子发射部件的上表面的外部尺寸 对于多个阴极中的每一个，对于多个阴极中的每一个，测量与电子发射构件的上表面相同的表面处的间隙的外部尺寸，通过划分间隙的面积来计算面积比， 对于多个阴极中的每一个，通过使用亮度和面积比之间的相关性来获得对应于期望亮度的面积比的上限，并且从a中选择具有小于或等于上限的面积比​​的阴极 已经生产的多个阴极。

公开(公告)号：US09299525B2

公开(公告)日：2016-03-29

申请号：US14047827

申请日：2013-10-07

Applicant: NUFLARE TECHNOLOGY, INC.

Inventor： Ryoei Kobayashi

IPC: H01J1/148 ,  H01J9/04 ,  H01J37/065

CPC classification number: H01J1/148 ,  H01J9/04 ,  H01J37/065 ,  H01J2237/06308 ,  H01J2237/26 ,  H01J2237/31754

Abstract: A thermionic cathode of an embodiment includes a carbon coating applied to an outer surface of the side, the carbon coating comprising a contiguous extended portion surrounding the upper section and spaced apart from said upper section by a gap having 1 μm or more and 10 μm or less in width and having a difference of 1 μm or less in the width between a maximum value and a minimum value in a periphery of the electron emitting surface.

Abstract translation: 实施方案的热离子阴极包括施加到侧面的外表面的碳涂层，碳涂层包括围绕上部的邻接的延伸部分并且与上部分隔开具有1μm或更大和10μm的间隙，或 宽度较小，并且在电子发射表面的周围的最大值和最小值之间的宽度上具有1μm或更小的差。