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公开(公告)号：US20180358952A1
公开(公告)日：2018-12-13
申请号：US15983463
申请日：2018-05-18
发明人： Hideyuki SEKINE
CPC分类号： H03H9/706 , H03H3/02 , H03H9/205 , H03H9/54 , H03H9/587 , H03H9/589 , H03H9/60 , H03H2003/021
摘要： An acoustic wave device includes: a substrate; a first piezoelectric thin film resonator including a first resonance region in which a first lower electrode and a first upper electrode sandwich a first piezoelectric film; a second piezoelectric thin film resonator including a second resonance region in which a second lower electrode and a second upper electrode sandwich a second piezoelectric film; and a wiring layer that is located from an upper surface of the first lower electrode in a first extraction region, in which the first lower electrode is extracted from the first resonance region, to an upper surface of the second upper electrode located in a second extraction region, in which the second upper electrode is extracted from the second resonance region, and has a film thickness on the first lower electrode greater than a film thickness of the second piezoelectric film.
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公开(公告)号：US20180076794A1
公开(公告)日：2018-03-15
申请号：US15697658
申请日：2017-09-07
申请人： Qorvo US, Inc.
发明人： Nadim Khlat , Robert Aigner
CPC分类号： H03H9/584 , H03H9/0095 , H03H9/02637 , H03H9/13 , H03H9/14502 , H03H9/14591 , H03H9/60
摘要： A filter circuit includes a first input node and a second input node for receiving an input signal, and a first output node and a second output node for providing an output signal. A first series acoustic resonator is coupled in series between the first input node and the first output node. At least one coupled resonator filter (CRF) includes first and second transducers, which may be acoustically coupled to one another. The first transducer has a first electrode coupled to the first input node, a second electrode coupled to the second input node, and a first piezoelectric layer between the first electrode and the second electrode. A second transducer has a third electrode coupled to the first output node, a fourth electrode coupled to the second output node, and a second piezoelectric layer between the third electrode and the fourth electrode.
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公开(公告)号：US08576024B2
公开(公告)日：2013-11-05
申请号：US12950908
申请日：2010-11-19
申请人： Jean-Luc Erb , Maha Achour
发明人： Jean-Luc Erb , Maha Achour
CPC分类号： H03H9/0095 , H03H9/542 , H03H9/60
摘要： A device includes a plurality of electrode actuated acoustic resonators coupled to form complementary paths to operate as a filter. Each acoustic resonator has an electrical input and an electrical output that contributes to a static capacitance. A compensation impedance is coupled to at least one of the paths to reduce adverse effects from the static capacitances of the acoustic resonators.
摘要翻译： 一种装置包括多个电极致动的声谐振器，其耦合以形成用作过滤器的互补路径。 每个声谐振器具有有助于静电容的电输入和电输出。 补偿阻抗耦合到至少一个路径以减少来自声谐振器的静态电容的不利影响。
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公开(公告)号：US20100301968A1
公开(公告)日：2010-12-02
申请号：US12831479
申请日：2010-07-07
IPC分类号： H03H9/58
CPC分类号： H03H9/584 , H03H9/02228 , H03H9/589 , H03H9/60
摘要： A power amplifier filter for radio-frequency signals having an outphasing type architecture comprising a first stage (2) capable of generating, from an input signal s(t), two signals s1(t), s2(t) having an identical amplitude but phase shifted relative to each other, a second amplifier stage (3) for said signals s1(t), s2(t), and a third recombining stage (4) capable of summing the two signals s′1(t), s′2(t) obtained from second stage (3), characterized in that recombining stage (4) includes an assembly of acoustic wave resonators coupled to each other, some of these resonators referred to as “input resonators” being connected to the outputs of second stage (4) and others of these resonators referred to as “output resonators” being connected to the output terminals of the filter.
摘要翻译： 一种用于具有外相型架构的射频信号的功率放大器滤波器，包括能够从输入信号s（t）产生具有相同幅度的两个信号s1（t），s2（t）的第一级（2），但是 相对于彼此相移，用于所述信号s1（t），s2（t）的第二放大级（3）和能够将两个信号s'1（t），s'（t）相加的第三重组级 2（t），其特征在于，复合级（4）包括彼此耦合的声波谐振器的组合，这些被称为“输入谐振器”的这些谐振器中的一些被连接到第二级 被称为“输出谐振器”的这些谐振器的级（4）等连接到滤波器的输出端。
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公开(公告)号：US07791435B2
公开(公告)日：2010-09-07
申请号：US11863720
申请日：2007-09-28
申请人： Tiberiu Jamneala
发明人： Tiberiu Jamneala
摘要： A coupled acoustic resonator adapted for single-ended input to differential output signal transformation, comprises a single stack. The single stack comprises: a first film bulk acoustic resonator (FBAR) comprising a single-ended input; a second FBAR disposed over the first FBAR comprising a first differential output and a second differential output; an acoustic decoupling layer disposed between the first FBAR and the second FBAR; and a resonant element comprising a resonant inductor and a parasitic capacitor connected in parallel. The resonant element is connected to the first differential output and is operative to substantially balance a signal from the first differential output with a signal from the second differential output. The first differential output is connected to an external circuit comprising a parasitic impedance, and the resonant inductor has an inductance selected to substantially maintain the balance.
摘要翻译： 适用于单端输入到差分输出信号变换的耦合声谐振器包括单个堆叠。 单个堆叠包括：包括单端输入的第一膜体声波谐振器（FBAR）; 布置在所述第一FBAR上的第二FBAR，包括第一差分输出和第二差分输出; 设置在第一FBAR和第二FBAR之间的声学解耦层; 以及包括并联连接的谐振电感器和寄生电容器的谐振元件。 谐振元件连接到第一差分输出，并且可操作以使来自第一差分输出的信号与来自第二差分输出的信号基本平衡。 第一差分输出连接到包括寄生阻抗的外部电路，并且谐振电感器具有被选择为基本上保持平衡的电感。
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公开(公告)号：US07563475B2
公开(公告)日：2009-07-21
申请号：US11203003
申请日：2005-08-11
IPC分类号： B05D5/12
CPC分类号： H03H9/605 , H03H9/587 , H03H9/60 , Y10T29/42 , Y10T29/49005 , Y10T29/49155
摘要： An apparatus including vertically separated acoustic resonators are disclosed. The apparatus includes a first acoustic resonator on a substrate and a second acoustic resonator vertically separated above the first acoustic resonator. Because the resonators are vertically separated above another, total area required to implement the resonators is reduced thereby savings in die size and cost are realized. The vertically separated resonators are supported by standoffs that are fabricated on the substrate, or on a resonator.
摘要翻译： 公开了一种包括垂直分离的声谐振器的装置。 该装置包括在基板上的第一声谐振器和在第一声谐振器之上垂直分离的第二声谐振器。 由于谐振器在另一个上方垂直分离，所以实现谐振器所需的总面积减小，从而实现了芯片尺寸和成本的节省。 垂直分离的谐振器由制造在衬底上或在谐振器上的支座支撑。
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公开(公告)号：US20090096550A1
公开(公告)日：2009-04-16
申请号：US11871711
申请日：2007-10-12
IPC分类号： H03H9/58
摘要： An apparatus includes a stacked crystal filter and a bulk acoustic wave resonator, which are acoustically coupled.
摘要翻译： 一种装置包括声耦合的堆叠晶体滤波器和体声波谐振器。
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公开(公告)号：US20060273866A1
公开(公告)日：2006-12-07
申请号：US11146118
申请日：2005-06-07
申请人： Ari Vilander
发明人： Ari Vilander
IPC分类号： H03H9/56
CPC分类号： H03H9/60 , H03H9/02125 , H03H9/175 , H03H9/566 , H03H9/589
摘要： The present invention relates to a resonator structure, such as a film bulk acoustic wave (FBAW) resonator structure, which is modified to approximate a parasitic input characteristic to a parasitic output characteristic and thus enable use of the resonator structure in a differential topology. Thereby, crystal-based resonator structures can be replaced by the proposed differential resonator structure, which enables higher integration, reduced costs and higher frequencies. A crystal based oscillator cannot handle frequencies above 40 MHz in fundamental mode.
摘要翻译： 本发明涉及一种诸如薄膜体声波（FBAW）谐振器结构的谐振器结构，其被修改为将寄生输入特性近似为寄生输出特性，从而使得能够在差分拓扑中使用谐振器结构。 因此，晶体谐振器结构可以由所提出的差分谐振器结构代替，这使得能够实现更高的集成度，降低的成本和更高的频率。 基于晶振的振荡器在基本模式下不能处理高于40 MHz的频率。
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公开(公告)号：US20060152305A1
公开(公告)日：2006-07-13
申请号：US11373355
申请日：2006-03-09
申请人： Richard Ruby , John Larson
发明人： Richard Ruby , John Larson
IPC分类号： H03H9/58
CPC分类号： H03H9/605 , H03H9/587 , H03H9/60 , Y10T29/42 , Y10T29/49005 , Y10T29/49155
摘要： An apparatus including vertically separated acoustic resonators are disclosed. The apparatus includes a first acoustic resonator on a substrate and a second acoustic resonator vertically separated above the first acoustic resonator. Because the resonators are vertically separated above another, total area required to implement the resonators is reduced thereby savings in die size and cost are realized. The vertically separated resonators are supported by standoffs that are fabricated on the substrate, or on a resonator.
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公开(公告)号：US20060091978A1
公开(公告)日：2006-05-04
申请号：US10980562
申请日：2004-11-03
申请人： Kun Wang , Paul Bradley , Richard Ruby , Hongjun Feng
发明人： Kun Wang , Paul Bradley , Richard Ruby , Hongjun Feng
IPC分类号： H03H9/58
摘要： Acoustically coupled resonators include a first and a second acoustic resonator. Both the first and second acoustic resonators include a first electrode, a layer of piezoelectric material, and a second electrode. The first electrode is adjacent a first surface of the layer of piezoelectric material. The second electrode is adjacent a second surface of the layer of piezoelectric material. At least the second electrode has an edge that is tapered.
摘要翻译： 声耦合谐振器包括第一和第二声谐振器。 第一和第二声谐振器都包括第一电极，压电材料层和第二电极。 第一电极邻近压电材料层的第一表面。 第二电极邻近压电材料层的第二表面。 至少第二电极具有渐缩的边缘。
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