公开(公告)号：US11988511B2

公开(公告)日：2024-05-21

申请号：US17908081

申请日：2021-04-14

申请人： Robert Bosch GmbH

发明人： Matthias Kuehnel ,  Nils Felix Kuhlmann ,  Robert Maul ,  Rolf Scheben ,  Steffen Markisch ,  Thorsten Balslink ,  Wolfram Geiger

IPC分类号： G01C19/5712 ,  G01C19/5684 ,  G01C25/00

CPC分类号： G01C19/5712 ,  G01C19/5684 ,  G01C25/00

摘要： A micromechanical component for a rotation rate sensor. The micromechanical component includes two rotor masses, mirror symmetrical with respect to a first plane of symmetry aligned perpendicularly to a substrate surface and passing through the center of the two rotor masses, which may be set in rotational vibrating motion about rotational axes aligned perpendicularly to the substrate surface, and four seismic masses, mirror symmetrical with respect to the first plane of symmetry, deflectable in parallel to the first plane of symmetry using the two rotor masses set in their respective rotational vibrating motion. The first rotor mass and a first pair of the four seismic masses connected thereto are mirror symmetrical to the second rotor mass and to a second pair of the four seismic masses connected thereto with respect to a second plane of symmetry aligned perpendicularly to the substrate surface and to the first plane of symmetry.

公开(公告)号：US20240019249A1

公开(公告)日：2024-01-18

申请号：US18209454

申请日：2023-06-13

申请人： THE REGENTS OF THE UNIVERSITY OF MICHIGAN

发明人： Khalil NAJAFI ,  Sajal SINGH ,  Jae Yoong CHO

IPC分类号： G01C19/5783 ,  G01C19/00 ,  B81B3/00 ,  H03H3/007 ,  G01C19/5691 ,  H03H9/02 ,  G01C19/5684 ,  B81C1/00 ,  H03H9/24

CPC分类号： G01C19/5783 ,  G01C19/005 ,  B81B3/0021 ,  H03H3/0072 ,  G01C19/5691 ,  H03H9/02259 ,  G01C19/5684 ,  B81C1/00444 ,  H03H9/2405 ,  B81B2201/0242 ,  H03H2009/02496 ,  B81B2201/0271 ,  B81C2201/0143

摘要： Three-dimensional (3D) micro-scale shells are presented with selectively removed regions/openings and which can be used in sensors and actuators, including gyroscopes. Example shells consisting of a suspended ring-shaped resonator that is supported using multiple beams that are not in the plane of the ring and are attached to a support post can be formed. Shells with various sizes and geometries of selectively removed regions and openings allow the creation of micro electromechanical systems (MEMS) sensors and actuators with a wide range of engineered mechanical and electrical properties. These shells can be used to form stacked 3D structures for various types of MEMS sensor and actuator devices, such as resonant gyroscopes, with sense and drive electrodes that conform to the curved profile of the resonant shell using for gyroscopes. 3D shells formed from a starting parent substrate are released and separated from their parent substrate using a number of techniques.

公开(公告)号：US10928199B2

公开(公告)日：2021-02-23

申请号：US16261813

申请日：2019-01-30

申请人： Atlantic Inertial Systems Limited

发明人： Kevin Townsend

IPC分类号： G01C19/5677 ,  H03H9/02 ,  B81B3/00 ,  G01C19/5684 ,  G01C19/5783

摘要： A vibrating structure angular rate sensor is provided which comprises a substrate; a plurality of flexible supporting structures fixed to the substrate; an annular member which is flexibly supported by the plurality of supporting structures to move elastically relative to the substrate; and an electrical drive system configured to drive the annular member to oscillate in a primary mode of oscillation with a resonant frequency f1. The plurality of supporting structures comprises at least one active supporting structure which carries an active electrical connection from the annular member to the drive system; and at least one passive supporting structure which does not carry an active electrical connection from the annular member to the drive system.

公开(公告)号：US20210033399A1

公开(公告)日：2021-02-04

申请号：US16713427

申请日：2019-12-13

申请人： Atlantic Inertial Systems Limited

发明人： John Keith SHEARD ,  Matthew WILLIAMSON

IPC分类号： G01C19/5776 ,  G01C19/5684 ,  H03D3/00

摘要： A method of demodulating a MEMS sensor pickoff signal from a vibrating resonator of said sensor, the method comprising: sampling the pickoff signal with an asynchronous ADC at a sampling rate of at least 50 times the resonant frequency of the resonator to generate a stream of samples; generating a first value by combining samples from said stream of samples according to a selected operation, said operation being selected in dependence on a synchronous clock signal that is synchronous to the resonant frequency of the resonator, said synchronous clock signal having a frequency at least twice the resonant frequency of the resonator; and counting the number of samples contributing to the first value. The increased sampling rate of the pickoff signal allows a much higher number of samples to be taken into account, thereby reducing noise. However, the ADC asynchronously from the resonator of the MEMS sensor.

公开(公告)号：US10794700B1

公开(公告)日：2020-10-06

申请号：US15337681

申请日：2016-10-28

申请人： Garmin International, Inc.

发明人： Kirill V. Shcheglov ,  David Smukowski ,  Nolan F. Maggipinto

IPC分类号： G01C19/5684 ,  G01C25/00

摘要： To isolate an active portion of a gyroscope resonator from mounting stresses propagating through a resonator attachment center, the resonator includes a stress isolation feature that includes alternating concentric symmetric regions of high and low stiffness. The resonator may be separated into a large number of thin, compliant spring elements and larger stiff mass elements, the aggregate areas of which optimized for an aggregate resonator spring constant (by selecting a width and a length of the spring elements), an aggregate mass (by selecting a size of the mass elements), a thermoelastic loss maximum (by selecting a width of the spring elements) and an operating frequency (by selecting a ratio of the aggregate spring to the aggregate mass).

公开(公告)号：US20200088518A1

公开(公告)日：2020-03-19

申请号：US16505340

申请日：2019-07-08

申请人： Honeywell International Inc.

发明人： Daniel Endean

IPC分类号： G01C19/5614 ,  G01C19/5621 ,  G01C19/5684

摘要： A gyroscope assembly includes a sense proof mass and a compensation proof mass. The sense proof mass has a sense frequency response in a sense dimension and is configured to move in a drive dimension in response to a drive signal, and to move in the sense dimension in response to experiencing an angular velocity about a sense input axis while moving in the drive dimension. And the compensation proof mass has, in the sense dimension, a compensation frequency response that is related to the sense frequency response.

公开(公告)号：US10551190B1

公开(公告)日：2020-02-04

申请号：US15337627

申请日：2016-10-28

申请人： Garmin International, Inc.

发明人： Kirill V. Shcheglov ,  David Smukowski ,  Yingxiang Cheng ,  Nolan F. Maggipinto

IPC分类号： G01C19/5684

摘要： A resonator paradigm, where the resonator structure is made up of a very large number of small, coupled Coriolis sensitive units arranged in a periodic 1D or 2D (and, possibly, in the future, 3D) structure to create a Coriolis-sensitive “fabric” that supports a large number of Coriolis-coupled “supermodes. Such a “fabric” can be shaped into arbitrary “waveguides” that propagate either pulses of excitation that are Coriolis-coupled, thus enabling an acoustic version of a FOG-type gyroscope (where a pulse of excitation travels along a passive waveguide and it's phase/time delay is measured), or support multiple “stationary” Coriolis-coupled vibration modes analogous to optical laser modes in an RLG where counter-propagating modes of oscillation are maintained at constant amplitude via a continuous addition of energy.

公开(公告)号：US20200011667A1

公开(公告)日：2020-01-09

申请号：US16549760

申请日：2019-08-23

申请人： General Electric Company

发明人： Sergey Alexandrovich Zotov ,  Christopher Fred Keimel ,  Todd Frederick Miller ,  Yizhen Lin

IPC分类号： G01C19/5684 ,  G01P15/02

摘要： A gyroscope includes at least one anchor and a plurality of gyroscope spring elements coupled to the at least one anchor. The gyroscope also includes a plurality of concentric rings coupled to the plurality of gyroscope spring elements and configured to encircle the plurality of gyroscope spring elements. The gyroscope further includes an excitation/detection/tuning unit electrostatically coupled to the plurality of concentric rings.

公开(公告)号：US20190242708A1

公开(公告)日：2019-08-08

申请号：US16261813

申请日：2019-01-30

申请人： Atlantic Inertial Systems Limited

发明人： Kevin Townsend

IPC分类号： G01C19/5684

CPC分类号： G01C19/5684 ,  G01C19/5783

摘要： A vibrating structure angular rate sensor is provided which comprises a substrate; a plurality of flexible supporting structures fixed to the substrate; an annular member which is flexibly supported by the plurality of supporting structures to move elastically relative to the substrate; and an electrical drive system configured to drive the annular member to oscillate in a primary mode of oscillation with a resonant frequency f1. The plurality of supporting structures comprises at least one active supporting structure which carries an active electrical connection from the annular member to the drive system; and at least one passive supporting structure which does not carry an active electrical connection from the annular member to the drive system.

公开(公告)号：US20190145771A1

公开(公告)日：2019-05-16

申请号：US16143634

申请日：2018-09-27

申请人： Atlantic Inertial Systems Limited

发明人： Kevin Townsend ,  Andrew Kazer

IPC分类号： G01C19/5684

CPC分类号： G01C19/5684

摘要： A vibrating structure gyroscope includes an annular resonator arranged to vibrate in a plane in response to electrostatic driving forces and a set of capacitive drive electrodes arranged to apply a voltage creating an electrostatic driving force to excite a primary cos nθ resonance along a primary axis at a primary frequency fP, such that Coriolis forces, resulting from an angular rate applied about an out-of-plane axis, induce a secondary cos nθ resonance along a secondary axis at a secondary frequency fS. The gyroscope also includes digitally-controlled first and second sets to creating a static electrostatic balancing.