公开(公告)号：WO0237651A3

公开(公告)日：2002-08-01

申请号：PCT/JP0109689

申请日：2001-11-06

Applicant: HITACHI LTD

Inventor： KIM HOUNG JOONG ,  SEINO HIROMITSU ,  NAGANUMA RYOUICHI ,  TOYODA HIROSHI ,  MAKI KOHJI

IPC: H02K1/18 ,  H02K15/02 ,  H02K15/08 ,  H02K41/02 ,  H02K41/03 ,  H02K41/025

CPC classification number: H02K41/031

Abstract: A linear motor and a method of producing the linear motor are provided to reduce a leak magnetic flux flowing between an armature and a moving element to reduce a one-direction magnetic attraction force generated between the armature and the moving element. The linear motor includes the armature having a core formed of a magnetic body and a winding wound around the core, and the moving element supported so as for the moving element to move relatively to the armature via a gap, magnetic pole teeth disposed above and below the moving element, disposed at predetermined pitches along a moving direction of the moving element and disposed opposite to each other via the moving element, and a winding for exciting the magnetic pole teeth such that adjacent and opposite magnetic pole teeth have different magnetic poles, and the moving element is reciprocated relatively to the armature by exciting the winding according to a predetermined control circuit.

Abstract translation: 本发明提供线性电动机和线性电动机的制造方法，以减少在电枢和移动元件之间流动的漏磁通，从而降低在电枢和移动元件之间产生的单向磁吸引力。 线性电动机包括具有由磁性体形成的铁芯和缠绕在铁芯上的绕组的电枢，并且移动元件被支撑以使得移动元件经由间隙相对于衔铁移动，设置在上方和下方的磁极齿 所述移动元件沿所述移动元件的移动方向以预定间距设置并且经由所述移动元件彼此相对地设置;以及绕组，用于激励所述磁极齿使得相邻和相对的磁极齿具有不同的磁极，以及 通过根据预定的控制电路激励绕组，使移动元件相对于电枢往复运动。

公开(公告)号：WO02056447A2

公开(公告)日：2002-07-18

申请号：PCT/US2001/050594

申请日：2001-12-21

IPC: H02K41/035 ,  H01F7/06 ,  H02K41/03

CPC classification number: H02K41/031 ,  H01F7/066

Abstract: A linear motion device is disclosed which includes an armature assembly, and a field assembly which includes a plurality of permanent magnets each having a length, and a plurality of permanent magnets and the length of the plurality of pole pieces is tailored to achieve a constant force versus stroke characteristic, when sinusoidal commutation is used.

Abstract translation: 公开了一种直线运动装置，其包括电枢组件和包括多个永久磁体的磁场组件，每个永磁体具有长度，并且多个永久磁铁和多个极片的长度被调整以实现恒定的力 当使用正弦换向时，相对于行程特性。

公开(公告)号：WO02054568A1

公开(公告)日：2002-07-11

申请号：PCT/BY2000/000006

申请日：2000-12-28

IPC: H02K41/03

CPC classification number: H02K41/031

Abstract: A linear synchronous motor with improved traction performance linearization increased reliability and ease of maintenance, consist of a stator, comprising at least one ferromagnetic yoke on which permanent magnets having the alternate polarity are secured and bearings on which a frame with armature and windings are mounted. The magnetic caves and the control windings formed by plurality of electromagnetic modules are secured in the frame are mounted relative to each other with a spatial phase shift in the direction of motion. The frame is provided with passages allowing the flow coolant and has openings for mounting the electromagnetic modules.

Abstract translation: 具有改进的牵引性能线性化的线性同步电动机提高了可靠性和易维护性，其包括定子，该定子包括至少一个铁磁轭，其上固定有交替极性的永磁体和其上安装有电枢和绕组的框架的轴承。 由多个电磁模块形成的磁洞和控制绕组被固定在框架中，相对于彼此以运动方向的空间相移来安装。 框架设置有允许流动冷却剂并具有用于安装电磁模块的开口的通道。

公开(公告)号：WO01068499A1

公开(公告)日：2001-09-20

申请号：PCT/DE2001/001042

申请日：2001-03-14

IPC: B65G49/07 ,  B66B11/04 ,  H02K7/09 ,  H02K41/03 ,  H02K41/02

CPC classification number: H02K41/031 ,  B66B11/0407 ,  H02K7/09

Abstract: The invention relates to a device for vertically transporting products, especially semiconductor wafers and discs. The aim of the invention is to configure such a device in such a way that mechanical abrasion cannot be caused and that mechanical impacts are basically prevented. According to the invention, a device contains a load unit and a drive for vertically moving the load unit. The load unit and the drive are configured in such a way that said unit and drive are coupled to one another without touching each other and that friction pairing is not involved by virtue of magnetic components. Magnetised superconducting moulded parts having a frozen magnetic field are provided. Said parts form a magnetic track holding device for the load unit and guarantee a constant air gap between the load unit and the permanent magnet rails by engaging with vertical permanent magnet rails. The moulded parts are cooled down to a temperature by means of a cooling agent, whereby said temperature is required for the superconducting state. The drive is provided with one or more electromagnetic linear drives. The device can be used in a particularly advantageous manner in clean rooms for vertically transporting products between different levels.

Abstract translation: 本发明涉及一种设备，用于垂直输送的产品，特别是用于半导体晶片和光盘。 本发明具有的目的是设计这样的装置，使得可以不发生机械磨损和机械冲击werden.Diese很大程度上避免物体在包括负载单元和用于竖直地移动所述负载单元的驱动的装置来实现，根据解决本发明 负载单元和驱动通过磁性元件的应用形成reibpaarungsfrei和耦合到相互不接触。 为了这个目的，有具有冷冻磁场与垂直导轨永久磁铁，用于负载单元的磁跟踪装置，并获得负载单元和永久磁铁轨道之间的恒定气隙合作形成磁化超导模件。 所述模制品通过冷却剂到所需的超导状态的温度冷却。 该驱动器由一个或多个电磁线性驱动器来实现。 该装置是在洁净室是特别有利的用于垂直输送适用不同水平之间的产品。

公开(公告)号：WO01063732A2

公开(公告)日：2001-08-30

申请号：PCT/US2001/004059

申请日：2001-02-08

IPC: G03F7/20 ,  H02K41/03 ,  H02K41/00

CPC classification number: G03F7/70758 ,  H02K41/031 ,  Y10S414/135

Abstract: Method and apparatus are provided for selectively tailoring electromagnetic fields, and in particular for providing rapidly vanishing magnetic far-fields for magnet arrays, coils and the like. The method involves selectively combining magnetic, coil or other arrays having fields that vanish as 1/r to achieve and array having a selectively increase l value. Various techniques for achieving such combinations in one, two or three dimensions, and the arrays resulting from such combination are disclosed.

Abstract translation: 提供了用于选择性地调整电磁场的方法和装置，特别是用于为磁体阵列，线圈等提供快速消失的磁远场。 该方法包括选择性地组合具有消除为1 / r 1的场的磁性，线圈或其它阵列以实现具有选择性增加的值的阵列。 公开了用于实现一维，二维或三维的这种组合的各种技术以及由这种组合产生的阵列。

公开(公告)号：WO0017724A9

公开(公告)日：2001-04-05

申请号：PCT/US9920932

申请日：1999-09-13

Applicant: GEN SCANNING INC

Inventor： CAHILL STEVEN P ,  HUNTER BRADLEY L

IPC: G01B11/00 ,  G01B21/00 ,  G01S17/06 ,  G05D3/00 ,  G12B5/00 ,  H01L21/027 ,  H01L21/68 ,  H02K41/03 ,  G05F1/00 ,  H02K41/00

CPC classification number: H02K41/031 ,  H02K7/08 ,  H02K7/14 ,  H02K16/00 ,  H02K2201/18

Abstract: A high-speed precision positioning apparatus has a stage (102) supported by a platen (104). The stage is driven by a plurality of drive motors (112a, 112b, 112c, 112d) that are co-planar with the stage and arranged symmetrically around the stage. The drive motors apply drive forces directly to the stage without any mechnical contact to the stage. The drive forces impart planar motion to the stage in at least three degrees of freedom of motion. In the remaining three degrees of freedom the motion is constrained by a plurality of fluid bearings (144a, 144b, 144c, 144d) that operate between the stage and the platen. The drive motors are configured as magnets, attached to the stage, moving in a gap formed in-between top and bottom stationary coils. Integral force cancellation is implemented by a force cancellation system that applies cancellation forces to the stage. The cancellation forces, which are co-planar with a center of gravity of the stage and any components that move with the stage, cancel forces generated by planar motion of the stage. Interferometric encoders are used as position detectors.

Abstract translation: 高速精密定位装置具有由压盘（104）支撑的台（102）。 该台由与舞台共同平行并且围绕舞台对称布置的多个驱动马达（112a，112b，112c，112d）驱动。 驱动电机将驱动力直接施加到舞台上，而不会与舞台机械接触。 驱动力以至少三个自由度赋予平台运动。 在剩余的三个自由度中，运动由在台架和压板之间操作的多个流体轴承（144a，144b，144c，144d）约束。 驱动电动机被配置为附接到平台的磁体，在形成在顶部和底部固定线圈之间的间隙中移动。 积分力消除由力消除系统实现，该系统将抵消力施加到舞台。 与舞台的重心和与舞台一起移动的任何组件共平行的消除力消除了舞台的平面运动产生的力。 干涉测量编码器用作位置检测器。

公开(公告)号：WO0003301A9

公开(公告)日：2000-05-25

申请号：PCT/US9915278

申请日：1999-07-07

Applicant: NIPPON KOGAKU KK ,  HAZELTON ANDREW J ,  TANAKA KEIICHI ,  EATON JOHN K

Inventor： HAZELTON ANDREW J ,  TANAKA KEIICHI ,  EATON JOHN K

IPC: H01J37/20 ,  G03F7/20 ,  H01L21/027 ,  H01L21/68 ,  H02K41/02 ,  H02K41/03 ,  H02K41/00 ,  G03B27/42

CPC classification number: G03F7/70716 ,  G03F7/70758 ,  G03F7/70858 ,  H02K41/031 ,  H02K2201/18

Abstract: Disclosed is a planar motor device capable of effectively restraining thermal influence on the environment. When an electric current is supplied to armature coils (38) opposed to the magnet of a movable member (51), the movable member (51) is driven along a movement surface (21a) by electromagnetic force. When the movable member (51) is continued to be driven in a certain direction, electric current is supplied to the armature coils (38) opposed to the magnet for each movement position of the movable member (51), whereby the armature coils (38) supplied with electric current generate heat. The armature coils (38) are accommodated in a vacuum chamber (41) in a base (21), and are arranged so as to be in contact with a stator yoke (43), with a predetermined gap being defined between them and a ceramic plate (36) forming the vacuum chamber (41). Thus, the heat transmission from the armature coils (38) to the movement surface (21a) side is effected substantially by radiation alone, so that it is possible to effectively restrain thermal influence on the environment.

Abstract translation: 公开了一种能够有效抑制热对环境的影响的平面电动机装置。 当电流供应到与可移动部件（51）的磁体相对的电枢线圈（38）时，可移动部件（51）通过电磁力沿着移动表面（21a）被驱动。 当可动部件（51）继续沿一定方向被驱动时，对于可动部件（51）的每个移动位置，电流被提供给与磁体相对的电枢线圈（38），由此电枢线圈 ）提供电流产生热量。 电枢线圈38容纳在基座21内的真空室41内，与定子磁轭43接触配置，在它们之间形成规定的间隙， 板（36）形成真空室（41）。 因此，从电枢线圈（38）到移动表面（21a）侧的热传递基本上仅通过辐射来实现，从而可以有效地抑制热对环境的影响。

公开(公告)号：WO00024663A1

公开(公告)日：2000-05-04

申请号：PCT/CH1999/000508

申请日：1999-10-28

IPC: B65H54/28 ,  H02K41/03

CPC classification number: H02K41/031 ,  B65H54/2827 ,  B65H54/2833 ,  B65H54/2881 ,  B65H2701/31

Abstract: The aim of the invention is to change the yarn (F) in a winding frame (1) within a traverse (H) and at a high speed by using a pointer-shaped yarn guide, hereafter referred to as the pointer. To this end, the pointer is tapered with regard to shape and weight toward the free end, whereby in a preferred embodiment, a polynomial of at least one degree is used. In addition, the yarn is guided on a guide plate (6). The control (12) of the motor (8) is provided such that the pointer (7) can not only be provided for guiding the yarn (F) within the traverse (H), but such that the pointer stops in a position (C) within the changing traverse (H) in order to form an end bead on a ready-made spool. The pointer also stops in a position (A and B) outside the changing traverse (H) in order to permit the yarn to be grasped by a new core when drawn in (8) during a changing of the spool, whereas in position (B), the yarn is wound on said core to form a yarn reserve winding before the yarn is driven back once again in the traverse (H) by the pointer (7). The selected reverse points can be entered into the control, and the control and the motor are able to reverse the pointer at a selected reverse point. For that purpose, reverse means are provided which preferably operate in a contactless manner, e.g. electromagnetically. The same principles can also be used for other applications in which a lever must effect a swiveling movement over a predetermined traverse.

Abstract translation: 为了在卷绕机（1），一个行程（H）内的线（F）的横移中，具有指针形导纱器，在下文中称为指针以高速执行是锥形相对于指针的形状和重量与对应于自由端 提供，其中，至少第一级的多项式设为在一个优选的实施方式中使用。 该线程是除了导向板（6）时，其特征在于，所述电动机的控制装置（12）（8），使得所提供的指针（7）不仅对行程（H）内引导所述螺纹（F）提供 可以是，但在一方面，在横动行程（H）内的位置（C）的指针是静止的，以形成成品线圈具有端部小珠，并在横动行程（H）外侧的位置（A和B）还是静止的，以 使，一方面移动时由一个新的套筒的纱线捕捉（8）线轴变化，而在位置（B）中的纱线是由指针缠绕在套筒给一个线程储备绕组，线程之前再次（7）（在行程h 被执行）。 所需的换向点可被输入到控制器，并且所述控制器和电机在一起能够在反转的选定点反转指针。 通过反转工具能够提供，例如，优选非接触 电磁工作。 相同的原理可用于其中一个杠杆的枢转运动必须执行在预定行程的其它应用。

公开(公告)号：WO00010186A1

公开(公告)日：2000-02-24

申请号：PCT/EP1999/005918

申请日：1999-08-12

IPC: H01H11/00 ,  H01H33/36 ,  H02K41/03

CPC classification number: H02K41/031 ,  H01H11/0062 ,  H01H33/36 ,  H01H2003/268

Abstract: The invention relates to a drive element for the movable contact point of a high voltage power circuit breaker, especially an SF6 power circuit breaker. According to the invention, the movable contact point can be connected to the moveable part of an electric linear motor which is controlled according to the power consumption and/or to the specified opening speed. The linear motor is advantageous in that internal frictional forces do not exist, leakages such as those in hydraulic drive elements do not occur and, therefore, the drive element requires low maintenance.

Abstract translation: 作为驱动用于移动的接触件的高压断路器，特别是SF6电路断路器中，可动接触片可以连接到的相应控制的功率需求和/或目标的关断速度线性电动机的可动部。 线性电机的优点是，内部摩擦力不存在，无泄漏 - 如液压驱动 - 发生，并相应地驱动器更少的维护。

公开(公告)号：WO00001059A1

公开(公告)日：2000-01-06

申请号：PCT/DE1999/001765

申请日：1999-06-16

IPC: H02K41/03

CPC classification number: H02K41/031 ,  H02K2201/06

Abstract: The aim of the invention is to eliminate dynamic undulation almost entirely in a linear synchronous motor.To achieve this, said motor comprises at least one primary component (1) and at least one secondary component (6) that has a series of poles (10) formed by permanent magnets and is also longer in the direction of movement (5) than the primary component (1). The primary component (1) has grooves (9) that are suitable for accommodating single-phase or multi-phase windings. The primary component (1) also comprises means that modify the magnetic force in the direction of movement (5) of said linear synchronous motor in the vicinity of the end parts (2) of the primary component (1). The front faces (14) of the end parts (2) run perpendicular to the direction of movement (5) of the linear motor.

Abstract translation: 为了几乎完全地抑制同步线性电动机的推力波动，具有以下特征。 至少一个主部件（1）和（6），其具有由杆（10）形成的永磁体的序列的至少一个次级部分以及在运动方向（5）比主部件（1）的长度大。 初级部分（1）具有主凹槽（9），其适于接收单相或多相绕组。 此外，初级部分（1）至装置，它导致在运动方向中的磁力的变化（5）在所述端件的主要部分（1）的（2）的区域中的线性马达。 端件的端面（14）（2）垂直地延伸到线性电机的运动（5）的方向。