公开(公告)号：WO2013023092A3

公开(公告)日：2013-04-04

申请号：PCT/US2012050196

申请日：2012-08-09

Applicant: APPLIED MATERIALS INC ,  ENGLHARDT ERIC A ,  GILJUM RICHARD ,  HUDGENS JEFFREY C ,  KOGAN IGOR G ,  RICE MICHAEL ROBERT ,  KOSHTI SUSHANT S

Inventor： ENGLHARDT ERIC A ,  GILJUM RICHARD ,  HUDGENS JEFFREY C ,  KOGAN IGOR G ,  RICE MICHAEL ROBERT ,  KOSHTI SUSHANT S

IPC: H01L21/677 ,  B25J9/04 ,  B65G49/07 ,  H01L21/02

CPC classification number: H01L21/67184 ,  H01L21/67109 ,  H01L21/67115 ,  H01L21/67167 ,  H01L21/67178 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/68742

Abstract: Substrate transport systems, apparatus, and methods are described. In one aspect, the systems are disclosed having vertically stacked transfer chamber bodies. In one embodiment, a common robot apparatus services process chambers or load lock chambers coupled to upper and lower transfer chamber bodies. In another embodiment, separate robot apparatus service the process chambers and/or load lock chambers coupled to upper and lower transfer chamber bodies, and an elevator apparatus transfers the substrates between the various elevations. Degassing apparatus are described, as are numerous other aspects.

Abstract translation: 描述了基底输送系统，装置和方法。 在一个方面，公开了具有垂直堆叠的传送室主体的系统。 在一个实施例中，常见的机器人装置服务处理室或联接到上部和下部传送室主体的加载锁定室。 在另一个实施例中，分离的机器人装置服务于联接到上传送室主体和下传送室主体的处理室和/或加载锁定室，并且电梯装置在不同高度之间传送基板。 除了脱气装置之外，还描述了许多其它方面。

公开(公告)号：WO2008079239A3

公开(公告)日：2008-08-14

申请号：PCT/US2007025962

申请日：2007-12-19

Applicant: APPLIED MATERIALS INC ,  KOSHTI SUSHANT S ,  ENGLHARDT ERIC A ,  SHAH VINAY K

Inventor： KOSHTI SUSHANT S ,  ENGLHARDT ERIC A ,  SHAH VINAY K

IPC: H01L21/677

CPC classification number: H01L21/67265 ,  H01L21/67259

Abstract: In some aspects, a method is provided for mapping contents of a substrate carrier. The method includes (1) moving a carrier to a sensor; and (2) determining, with the sensor, a presence or an absence of a substrate in the carrier based upon a position of a substrate clamp in the carrier. Numerous other aspects are provided.

Abstract translation: 在一些方面中，提供了一种用于映射衬底载体的内容的方法。 该方法包括（1）将载体移动到传感器; （2）基于载体中的衬底夹具的位置，利用传感器来确定载体中衬底的存在或不存在。 许多其他方面提供。

公开(公告)号：WO2008079239A2

公开(公告)日：2008-07-03

申请号：PCT/US2007/025962

申请日：2007-12-19

Applicant: APPLIED MATERIALS, INC. ,  KOSHTI, Sushant, S. ,  ENGLHARDT, Eric, A. ,  SHAH, Vinay, K.

Inventor： KOSHTI, Sushant, S. ,  ENGLHARDT, Eric, A. ,  SHAH, Vinay, K.

IPC: H01L21/677 ,  B65D79/00 ,  B65D25/56

CPC classification number: H01L21/67265 ,  H01L21/67259

Abstract: In some aspects, a method is provided for mapping contents of a substrate carrier. The method includes (1) moving a carrier to a sensor; and (2) determining, with the sensor, a presence or an absence of a substrate in the carrier based upon a position of a substrate clamp in the carrier. Numerous other aspects are provided.

Abstract translation: 在一些方面，提供了一种用于映射衬底载体的内容的方法。 该方法包括（1）将载体移动到传感器; 以及（2）基于所述载体中的基板夹具的位置，使用所述传感器确定所述载体中基板的存在或不存在。 提供了许多其他方面。

公开(公告)号：WO2013023092A2

公开(公告)日：2013-02-14

申请号：PCT/US2012/050196

申请日：2012-08-09

Applicant: APPLIED MATERIALS, INC ,  ENGLHARDT, Eric A. ,  GILJUM, Richard ,  HUDGENS, Jeffrey C. ,  KOGAN, Igor G. ,  RICE, Michael Robert ,  KOSHTI, Sushant S.

Inventor： ENGLHARDT, Eric A. ,  GILJUM, Richard ,  HUDGENS, Jeffrey C. ,  KOGAN, Igor G. ,  RICE, Michael Robert ,  KOSHTI, Sushant S.

IPC: H01L21/677 ,  B65G49/07 ,  B25J9/04 ,  H01L21/02

CPC classification number: H01L21/67184 ,  H01L21/67109 ,  H01L21/67115 ,  H01L21/67167 ,  H01L21/67178 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/68742

Abstract: Substrate transport systems, apparatus, and methods are described. In one aspect, the systems are disclosed having vertically stacked transfer chamber bodies. In one embodiment, a common robot apparatus services process chambers or load lock chambers coupled to upper and lower transfer chamber bodies. In another embodiment, separate robot apparatus service the process chambers and/or load lock chambers coupled to upper and lower transfer chamber bodies, and an elevator apparatus transfers the substrates between the various elevations. Degassing apparatus are described, as are numerous other aspects.

Abstract translation: 描述了基板传送系统，设备和方法。 在一个方面，公开了具有垂直堆叠的传送室主体的系统。 在一个实施例中，常见的机器人设备服务于耦合到上部和下部传输室主体的处理室或负载锁定室。 在另一个实施例中，分离的机器人设备服务于联接至上部和下部传送室主体的处理室和/或负载锁定室，并且电梯设备在各种高度之间传送基板。 描述了脱气装置，以及许多其他方面。

公开(公告)号：WO2008147521A1

公开(公告)日：2008-12-04

申请号：PCT/US2008/006584

申请日：2008-05-24

Applicant: APPLIED MATERIALS, INC. ,  KOSHTI, Sushant, S. ,  SHAH, Vinay, K. ,  ENGLHARDT, Eric, A.

Inventor： KOSHTI, Sushant, S. ,  SHAH, Vinay, K. ,  ENGLHARDT, Eric, A.

IPC: G05B19/418 ,  H01L21/00

CPC classification number: H01L21/67276 ,  H01L21/67271

Abstract: In some embodiments, a method of processing substrates is provided that includes (1) grouping substrates in a plurality of substrate carriers as a logical lot; (2) processing the logical lot as if the substrates were stored in a single substrate carrier; and (3) performing metrology on a representative subset of substrates in the logical lot. Numerous other embodiments are provided.

Abstract translation: 在一些实施例中，提供了处理衬底的方法，其包括（1）将多个衬底载体中的衬底分组为逻辑批次; （2）处理逻辑批次，好像基板存储在单个基板载体中; 和（3）在逻辑批次中的基板的代表性子集上执行计量。 提供了许多其它实施例。