公开(公告)号：WO2013023092A2

公开(公告)日：2013-02-14

申请号：PCT/US2012/050196

申请日：2012-08-09

Applicant: APPLIED MATERIALS, INC ,  ENGLHARDT, Eric A. ,  GILJUM, Richard ,  HUDGENS, Jeffrey C. ,  KOGAN, Igor G. ,  RICE, Michael Robert ,  KOSHTI, Sushant S.

Inventor： ENGLHARDT, Eric A. ,  GILJUM, Richard ,  HUDGENS, Jeffrey C. ,  KOGAN, Igor G. ,  RICE, Michael Robert ,  KOSHTI, Sushant S.

IPC: H01L21/677 ,  B65G49/07 ,  B25J9/04 ,  H01L21/02

CPC classification number: H01L21/67184 ,  H01L21/67109 ,  H01L21/67115 ,  H01L21/67167 ,  H01L21/67178 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/68742

Abstract: Substrate transport systems, apparatus, and methods are described. In one aspect, the systems are disclosed having vertically stacked transfer chamber bodies. In one embodiment, a common robot apparatus services process chambers or load lock chambers coupled to upper and lower transfer chamber bodies. In another embodiment, separate robot apparatus service the process chambers and/or load lock chambers coupled to upper and lower transfer chamber bodies, and an elevator apparatus transfers the substrates between the various elevations. Degassing apparatus are described, as are numerous other aspects.

Abstract translation: 描述了基板传送系统，设备和方法。 在一个方面，公开了具有垂直堆叠的传送室主体的系统。 在一个实施例中，常见的机器人设备服务于耦合到上部和下部传输室主体的处理室或负载锁定室。 在另一个实施例中，分离的机器人设备服务于联接至上部和下部传送室主体的处理室和/或负载锁定室，并且电梯设备在各种高度之间传送基板。 描述了脱气装置，以及许多其他方面。

公开(公告)号：WO2008147521A1

公开(公告)日：2008-12-04

申请号：PCT/US2008/006584

申请日：2008-05-24

Applicant: APPLIED MATERIALS, INC. ,  KOSHTI, Sushant, S. ,  SHAH, Vinay, K. ,  ENGLHARDT, Eric, A.

Inventor： KOSHTI, Sushant, S. ,  SHAH, Vinay, K. ,  ENGLHARDT, Eric, A.

IPC: G05B19/418 ,  H01L21/00

CPC classification number: H01L21/67276 ,  H01L21/67271

Abstract: In some embodiments, a method of processing substrates is provided that includes (1) grouping substrates in a plurality of substrate carriers as a logical lot; (2) processing the logical lot as if the substrates were stored in a single substrate carrier; and (3) performing metrology on a representative subset of substrates in the logical lot. Numerous other embodiments are provided.

Abstract translation: 在一些实施例中，提供了处理衬底的方法，其包括（1）将多个衬底载体中的衬底分组为逻辑批次; （2）处理逻辑批次，好像基板存储在单个基板载体中; 和（3）在逻辑批次中的基板的代表性子集上执行计量。 提供了许多其它实施例。

公开(公告)号：WO2009029902A1

公开(公告)日：2009-03-05

申请号：PCT/US2008/074931

申请日：2008-08-29

Applicant: APPLIED MATERIALS, INC. ,  BACHRACH, Robert Z. ,  CHAE, Yong-Kee ,  CHOI, Soo Young ,  DE VRIES, Nicholas G. J. ,  ELGAR, Yacov ,  ENGLHARDT, Eric A. ,  FREI, Michel R. ,  GAY, Charles ,  HAWKINS, Parris ,  HO, Choi ,  HUNTER, James Craig ,  KANKANALA, Penchala N. ,  LI, Liwei ,  LO, Wing Hoo ,  LU, Danny Cam Toan ,  MEI, Fang ,  MURPHY, Stephen P. ,  PATEL, Srujal ,  SAUNDERS, Matthew J. B. ,  SCHLEZINGER, Asaf ,  SHENG, Shuran ,  SU, Tzay-Fa ,  SULLIVAN, Jeffrey S. ,  TANNER, David ,  TROWBRIDGE, Teresa ,  WALKER, Brice ,  WHITE, John M. ,  WON, Tae K.

Inventor： BACHRACH, Robert Z. ,  CHAE, Yong-Kee ,  CHOI, Soo Young ,  DE VRIES, Nicholas G. J. ,  ELGAR, Yacov ,  ENGLHARDT, Eric A. ,  FREI, Michel R. ,  GAY, Charles ,  HAWKINS, Parris ,  HO, Choi ,  HUNTER, James Craig ,  KANKANALA, Penchala N. ,  LI, Liwei ,  LO, Wing Hoo ,  LU, Danny Cam Toan ,  MEI, Fang ,  MURPHY, Stephen P. ,  PATEL, Srujal ,  SAUNDERS, Matthew J. B. ,  SCHLEZINGER, Asaf ,  SHENG, Shuran ,  SU, Tzay-Fa ,  SULLIVAN, Jeffrey S. ,  TANNER, David ,  TROWBRIDGE, Teresa ,  WALKER, Brice ,  WHITE, John M. ,  WON, Tae K.

IPC: G06F7/10 ,  H01L31/06 ,  H01L21/4763

CPC classification number: H01L21/67236 ,  B23K26/364 ,  B26F3/002 ,  B26F3/004 ,  B65G49/064 ,  B65G2249/02 ,  B65G2249/04 ,  C03B33/03 ,  C03B33/033 ,  H01L21/67132 ,  H01L21/67712 ,  H01L21/67715 ,  H01L21/67721 ,  H01L21/67727 ,  H01L21/6776 ,  H01L31/022425 ,  H01L31/03921 ,  H01L31/0504 ,  H01L31/075 ,  H02S50/00 ,  H02S50/10 ,  Y02E10/548 ,  Y02P40/57 ,  Y10T29/49002 ,  Y10T29/49355 ,  Y10T29/5196 ,  Y10T29/53113 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53187 ,  Y10T29/53365 ,  Y10T29/53417 ,  Y10T225/10 ,  Y10T225/325 ,  Y10T225/329

Abstract: The present invention relates to a system that can be used to form a photovoltaic device using processing modules that are adapted to perform steps in the solar cell formation process The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.

Abstract translation: 本发明涉及一种可用于使用处理模块来形成光伏器件的系统，所述处理模块适于在太阳能电池形成过程中执行步骤。自动化太阳能电池制造厂通常是自动化 处理模块和用于形成太阳能电池器件的自动化设备。 因此，自动化太阳能加工厂通常将包括适于接纳衬底的衬底接收模块，具有至少一个处理室的一个或多个吸收层沉积群集工具，该处理室适于在衬底的表面上沉积含硅层 ，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压灭菌器模块，自动化接线盒附接模块，以及一个或多个质量保证模块，其适于测试和限定完全形成 太阳能电池装置。

公开(公告)号：WO2008031031A2

公开(公告)日：2008-03-13

申请号：PCT/US2007/077883

申请日：2007-09-07

Applicant: APPLIED MATERIALS, INC. ,  ENGLHARDT, Eric A. ,  RICE, Michael R. ,  HUDGENS, Jeffrey C. ,  HONGKHAM, Steve ,  PINSON, Jay D. ,  SALEK, Mohsen ,  CARLSON, Charles ,  WEAVER, William T. ,  ARMER, Helen R.

Inventor： ENGLHARDT, Eric A. ,  RICE, Michael R. ,  HUDGENS, Jeffrey C. ,  HONGKHAM, Steve ,  PINSON, Jay D. ,  SALEK, Mohsen ,  CARLSON, Charles ,  WEAVER, William T. ,  ARMER, Helen R.

IPC: B65H1/00 ,  C23F1/00 ,  H01L21/306 ,  C23C16/00

CPC classification number: G03F7/70991 ,  H01L21/67173 ,  H01L21/67178 ,  H01L21/67225 ,  H01L21/67742 ,  H01L21/67745

Abstract: The present invention generally provides an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that is easily configurable, has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. In one embodiment, the cluster tool is adapted to perform a track lithography process in which a substrate is coated with a photosensitive material, is then transferred to a stepper/scanner, which exposes the photosensitive material to some form of radiation to form a pattern in the photosensitive material, and then certain portions of the photosensitive material are removed in a developing process completed in the cluster tool.

Abstract translation: 本发明总体上提供了一种用于使用容易配置的多室处理系统（例如，集群工具）处理衬底的装置和方法，具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片 处理历史（或晶圆历史），减少占地面积。 在一个实施例中，簇工具适于执行其中衬底被感光材料涂覆的轨道光刻工艺，然后转移到步进/扫描器，其将感光材料暴露于某种形式的辐射以形成图案 感光材料，然后在簇组工具中完成的显影过程中去除感光材料的某些部分。

公开(公告)号：WO2008008727A3

公开(公告)日：2008-01-17

申请号：PCT/US2007/073055

申请日：2007-07-09

Applicant: APPLIED MATERIALS, INC. ,  HONGKHAM, Steve, S. ,  ENGLHARDT, Eric, A. ,  RICE, Michael, R. ,  OH, Hilario, L. ,  ARMER, Helen, R. ,  WANG, Chongyang, Chris

Inventor： HONGKHAM, Steve, S. ,  ENGLHARDT, Eric, A. ,  RICE, Michael, R. ,  OH, Hilario, L. ,  ARMER, Helen, R. ,  WANG, Chongyang, Chris

IPC: G06F19/00 ,  G05B13/00

Abstract: Methods and apparatus for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput and repeatable wafer processing history are provided. In one embodiment a first substrate is transferred from a first position to a second position and then the first substrate is transferred from the second position to a third position using a first robot. A second substrate is transferred from a first position to a second position and then the second substrate is transferred from the second position to a third position using a second robot. The movement of the first and second robots is synchronized so that the movement from the first position to the second position by the first and second robot is performed within a first time interval.

公开(公告)号：WO2013023092A3

公开(公告)日：2013-04-04

申请号：PCT/US2012050196

申请日：2012-08-09

Applicant: APPLIED MATERIALS INC ,  ENGLHARDT ERIC A ,  GILJUM RICHARD ,  HUDGENS JEFFREY C ,  KOGAN IGOR G ,  RICE MICHAEL ROBERT ,  KOSHTI SUSHANT S

Inventor： ENGLHARDT ERIC A ,  GILJUM RICHARD ,  HUDGENS JEFFREY C ,  KOGAN IGOR G ,  RICE MICHAEL ROBERT ,  KOSHTI SUSHANT S

IPC: H01L21/677 ,  B25J9/04 ,  B65G49/07 ,  H01L21/02

CPC classification number: H01L21/67184 ,  H01L21/67109 ,  H01L21/67115 ,  H01L21/67167 ,  H01L21/67178 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/68742

Abstract: Substrate transport systems, apparatus, and methods are described. In one aspect, the systems are disclosed having vertically stacked transfer chamber bodies. In one embodiment, a common robot apparatus services process chambers or load lock chambers coupled to upper and lower transfer chamber bodies. In another embodiment, separate robot apparatus service the process chambers and/or load lock chambers coupled to upper and lower transfer chamber bodies, and an elevator apparatus transfers the substrates between the various elevations. Degassing apparatus are described, as are numerous other aspects.

Abstract translation: 描述了基底输送系统，装置和方法。 在一个方面，公开了具有垂直堆叠的传送室主体的系统。 在一个实施例中，常见的机器人装置服务处理室或联接到上部和下部传送室主体的加载锁定室。 在另一个实施例中，分离的机器人装置服务于联接到上传送室主体和下传送室主体的处理室和/或加载锁定室，并且电梯装置在不同高度之间传送基板。 除了脱气装置之外，还描述了许多其它方面。

公开(公告)号：WO2009029902A4

公开(公告)日：2009-08-06

申请号：PCT/US2008074931

申请日：2008-08-29

Applicant: APPLIED MATERIALS INC ,  BACHRACH ROBERT Z ,  CHAE YONG-KEE ,  CHOI SOO YOUNG ,  DE VRIES NICHOLAS G J ,  ELGAR YACOV ,  ENGLHARDT ERIC A ,  FREI MICHEL R ,  GAY CHARLES ,  HAWKINS PARRIS ,  HO CHOI ,  HUNTER JAMES CRAIG ,  KANKANALA PENCHALA N ,  LI LIWEI ,  LO WING HOO ,  LU DANNY CAM TOAN ,  MEI FANG ,  MURPHY STEPHEN P ,  PATEL SRUJAL ,  SAUNDERS MATTHEW J B ,  SCHLEZINGER ASAF ,  SHENG SHURAN ,  SU TZAY-FA ,  SULLIVAN JEFFREY S ,  TANNER DAVID ,  TROWBRIDGE TERESA ,  WALKER BRICE ,  WHITE JOHN M ,  WON TAE K

Inventor： BACHRACH ROBERT Z ,  CHAE YONG-KEE ,  CHOI SOO YOUNG ,  DE VRIES NICHOLAS G J ,  ELGAR YACOV ,  ENGLHARDT ERIC A ,  FREI MICHEL R ,  GAY CHARLES ,  HAWKINS PARRIS ,  HO CHOI ,  HUNTER JAMES CRAIG ,  KANKANALA PENCHALA N ,  LI LIWEI ,  LO WING HOO ,  LU DANNY CAM TOAN ,  MEI FANG ,  MURPHY STEPHEN P ,  PATEL SRUJAL ,  SAUNDERS MATTHEW J B ,  SCHLEZINGER ASAF ,  SHENG SHURAN ,  SU TZAY-FA ,  SULLIVAN JEFFREY S ,  TANNER DAVID ,  TROWBRIDGE TERESA ,  WALKER BRICE ,  WHITE JOHN M ,  WON TAE K

IPC: G06F7/10 ,  H01L21/4763 ,  H01L31/075

CPC classification number: H01L21/67236 ,  B23K26/364 ,  B26F3/002 ,  B26F3/004 ,  B65G49/064 ,  B65G2249/02 ,  B65G2249/04 ,  C03B33/03 ,  C03B33/033 ,  H01L21/67132 ,  H01L21/67712 ,  H01L21/67715 ,  H01L21/67721 ,  H01L21/67727 ,  H01L21/6776 ,  H01L31/022425 ,  H01L31/03921 ,  H01L31/0504 ,  H01L31/075 ,  H02S50/00 ,  H02S50/10 ,  Y02E10/548 ,  Y02P40/57 ,  Y10T29/49002 ,  Y10T29/49355 ,  Y10T29/5196 ,  Y10T29/53113 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53187 ,  Y10T29/53365 ,  Y10T29/53417 ,  Y10T225/10 ,  Y10T225/325 ,  Y10T225/329

Abstract: The present invention relates to a system that can be used to form a photovoltaic device using processing modules that are adapted to perform steps in the solar cell formation process The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.

Abstract translation: 本发明涉及可用于使用适于在太阳能电池形成过程中执行步骤的处理模块形成光伏器件的系统。自动化太阳能电池制造厂通常是使用的自动化处理模块和自动化设备的布置 形成太阳能电池装置。 因此，自动化太阳能工厂将通常包括适于接收衬底的衬底接收模块，一个或多个吸收层沉积簇工具，其具有至少一个适于在衬底的表面上沉积含硅层的处理室 ，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压釜模块，自动接线盒附接模块和一个或多个质量保证模块，其适于测试和限定完全形成 太阳能电池装置。

公开(公告)号：WO2009029901A1

公开(公告)日：2009-03-05

申请号：PCT/US2008/074930

申请日：2008-08-29

Applicant: APPLIED MATERIALS, INC. ,  BACHRACH, Robert, Z. ,  CHAE, Yong-Kee ,  CHOI, Soo, Young ,  DE VRIES, Nicholas, G., J. ,  ELGAR, Yacov ,  ENGLHARDT, Eric, A. ,  FREI, Michel, R. ,  GAY, Charles ,  HAWKINS, Parris ,  HO, Choi ,  HUNTER, James, Craig ,  KANKANALA, Penchala, N. ,  LI, Liwei ,  LO, Wing, Hoo ,  LU, Danny, Cam, Toan ,  MEI, Fang ,  MURPHY, Stephen, P. ,  PATEL, Srujal ,  SAUNDERS, Matthew, J., B. ,  SCHLEZINGER, Asaf ,  SHENG, Shuran ,  SU, Tzay-Fa ,  SULLIVAN, Jeffrey, S. ,  TANNER, David ,  TROWBRIDGE, Teresa ,  WALKER, Brice ,  WHITE, John, M. ,  WON, Tae, K.

Inventor： BACHRACH, Robert, Z. ,  CHAE, Yong-Kee ,  CHOI, Soo, Young ,  DE VRIES, Nicholas, G., J. ,  ELGAR, Yacov ,  ENGLHARDT, Eric, A. ,  FREI, Michel, R. ,  GAY, Charles ,  HAWKINS, Parris ,  HO, Choi ,  HUNTER, James, Craig ,  KANKANALA, Penchala, N. ,  LI, Liwei ,  LO, Wing, Hoo ,  LU, Danny, Cam, Toan ,  MEI, Fang ,  MURPHY, Stephen, P. ,  PATEL, Srujal ,  SAUNDERS, Matthew, J., B. ,  SCHLEZINGER, Asaf ,  SHENG, Shuran ,  SU, Tzay-Fa ,  SULLIVAN, Jeffrey, S. ,  TANNER, David ,  TROWBRIDGE, Teresa ,  WALKER, Brice ,  WHITE, John, M. ,  WON, Tae, K.

IPC: B26D3/06 ,  H01L21/00

CPC classification number: H01L21/67236 ,  B23K26/364 ,  B26F3/002 ,  B26F3/004 ,  B65G49/064 ,  B65G2249/02 ,  B65G2249/04 ,  C03B33/03 ,  C03B33/033 ,  H01L21/67132 ,  H01L21/67712 ,  H01L21/67715 ,  H01L21/67721 ,  H01L21/67727 ,  H01L21/6776 ,  H01L31/022425 ,  H01L31/03921 ,  H01L31/0504 ,  H01L31/075 ,  H02S50/00 ,  H02S50/10 ,  Y02E10/548 ,  Y02P40/57 ,  Y10T29/49002 ,  Y10T29/49355 ,  Y10T29/5196 ,  Y10T29/53113 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53187 ,  Y10T29/53365 ,  Y10T29/53417 ,  Y10T225/10 ,  Y10T225/325 ,  Y10T225/329

Abstract: The present invention generally relates to a sectioning module positioned within an automated solar cell device fabrication system. The solar cell device fabrication system is adapted to receive a single large substrate and form multiple silicon thin film solar cell devices from the single large substrate.

Abstract translation: 本发明一般涉及一种位于自动化太阳能电池器件制造系统内的切片模块。 太阳能电池器件制造系统适于接收单个大型衬底并从单个大衬底形成多个硅薄膜太阳能电池器件。

公开(公告)号：WO2008045375A3

公开(公告)日：2008-07-10

申请号：PCT/US2007021481

申请日：2007-10-04

Applicant: APPLIED MATERIALS INC ,  RICE MICHAEL R ,  ENGLHARDT ERIC A ,  HUDGENS JEFFREY C ,  VAN KATWYK KIRK

Inventor： RICE MICHAEL R ,  ENGLHARDT ERIC A ,  HUDGENS JEFFREY C ,  VAN KATWYK KIRK

IPC: G06F19/00

CPC classification number: H01L21/67769 ,  H01L21/67259 ,  H01L21/67724 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67775 ,  H01L21/681

Abstract: The present invention provides systems and methods for loading and unloading substrate carriers onto and off of a transport system. The invention includes a substrate carrier handler adapted to transfer a substrate earner between a docking station and a transport system/ the substrate carrier handler including an end effector adapted to support the substrate carrier; a controller coupled to the substrate carrier handler and operative to control the substrate carrier handler such that the end effector of the substrate carrier handler is operative to selectively engage and disengage the substrate carrier to and from the transport system while the substrate carrier is in motion; and a sensor coupled to the controller and operative to provide a signal to the controller indicative of information about the substrate carrier.

Abstract translation: 本发明提供了用于将基板载体装载和卸载到运输系统上的系统和方法。 本发明包括一种衬底载体处理器，其适用于在对接站和传送系统/衬底载体处理器之间传送衬底承载器，其包括适于支撑衬底载体的端部执行器; 控制器，其耦合到所述衬底载体处理器并且可操作以控制所述衬底载体处理器，使得所述衬底载体处理器的末端执行器可操作以在所述衬底载体运动时选择性地将所述衬底载体接合和脱离所述传输系统; 以及耦合到所述控制器并且可操作地向控制器提供指示关于衬底载体的信息的信号的传感器。

公开(公告)号：WO2004068563A2

公开(公告)日：2004-08-12

申请号：PCT/US2004/002402

申请日：2004-01-27

Applicant: APPLIED MATERIALS, INC. ,  RICE, Michael, R. ,  LOWRANCE, Robert, B. ,  ELLIOTT, Martin, R. ,  HUDGENS, Jeffrey, C. ,  ENGLHARDT, Eric, A.

Inventor： RICE, Michael, R. ,  LOWRANCE, Robert, B. ,  ELLIOTT, Martin, R. ,  HUDGENS, Jeffrey, C. ,  ENGLHARDT, Eric, A.

IPC: H01L21/00

CPC classification number: H01L21/67706 ,  B65G17/20 ,  B65G37/02 ,  B65G2201/0297 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67769 ,  H01L21/67778 ,  Y10S414/135

Abstract: According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.

Abstract translation: 根据第一方面，提供了一种适于在半导体器件制造设备内传送衬底载体的第一传送系统。 第一输送机系统包括沿半导体器件制造设备的至少一部分形成闭合回路的带状物。 该带适于（1）在水平面上具有柔性并且在垂直平面中是刚性的; 和（2）在所述半导体器件制造设备的至少一部分内传输多个衬底载体。 还提供了许多其他方面，以及根据这些和其它方面的系统，方法和计算机程序产品。