公开(公告)号：WO2010104799A2

公开(公告)日：2010-09-16

申请号：PCT/US2010/026557

申请日：2010-03-08

Applicant: KLA-TENCOR CORPORATION ,  LEVY, Ady ,  NGAI, Samuel ,  BEVIS, Christopher F. ,  CONCINA, Stefano ,  FIELDEN, John ,  MIEHER, Walter ,  MUELLER, Dieter ,  RICHARDSON, Neil ,  WACK, Dan ,  WAGNER, Larry

Inventor： LEVY, Ady ,  NGAI, Samuel ,  BEVIS, Christopher F. ,  CONCINA, Stefano ,  FIELDEN, John ,  MIEHER, Walter ,  MUELLER, Dieter ,  RICHARDSON, Neil ,  WACK, Dan ,  WAGNER, Larry

IPC: H01L21/66

CPC classification number: G01N21/9505 ,  G01N21/3581 ,  H01L22/12

Abstract: Systems and methods for determining one or more characteristics of a specimen using radiation in the terahertz range are provided. One system includes an illumination subsystem configured to illuminate the specimen with radiation. The system also includes a detection subsystem configured to detect radiation propagating from the specimen in response to illumination of the specimen and to generate output responsive to the detected radiation. The detected radiation includes radiation in the terahertz range. In addition, the system includes a processor configured to determine the one or more characteristics of the specimen using the output.

Abstract translation: 提供了使用太赫兹范围内的辐射来确定样本的一个或多个特征的系统和方法。 一个系统包括被配置为用辐射照射样本的照明子系统。 该系统还包括检测子系统，该检测子系统被配置为响应于样本的照射来检测从样本传播的辐射，并响应于检测到的辐射产生输出。 检测到的辐射包括太赫兹范围内的辐射。 另外，该系统包括配置成使用该输出来确定样本的一个或多个特性的处理器。

公开(公告)号：WO2012138460A2

公开(公告)日：2012-10-11

申请号：PCT/US2012028910

申请日：2012-03-13

Applicant: KLA TENCOR CORP ,  ZHAO GUOHENG ,  LEVY ADY ,  SALNIK ALEX ,  VAEZ-IRAVANI MEHDI ,  NICOLAIDES LENA ,  NGAI SAMUEL S H

Inventor： ZHAO GUOHENG ,  LEVY ADY ,  SALNIK ALEX ,  VAEZ-IRAVANI MEHDI ,  NICOLAIDES LENA ,  NGAI SAMUEL S H

IPC: G01N21/01 ,  F21S2/00 ,  F21V8/00 ,  G01R31/26

CPC classification number: H05B33/0803

Abstract: An apparatus for illuminating a target surface, the apparatus having a plurality of LED arrays, where each of the arrays has a plurality of individually addressable LEDs, and where at least one of the arrays is disposed at an angle of between about forty-five degrees and about ninety degrees relative to the target surface, where all of the arrays supply light into a light pipe, the light pipe having interior walls made of a reflective material, where light exiting the light pipe illuminates the target surface, and a controller for adjusting an intensity of the individually addressable light sources.

Abstract translation: 一种用于照射目标表面的装置，该装置具有多个LED阵列，其中每个阵列具有多个独立可寻址的LED，并且其中至少一个阵列以大约四十五度之间的角度设置 并且相对于目标表面大约九十度，其中所有阵列将光提供到光管中，光管具有由反射材料制成的内壁，其中离开光管的光照射目标表面，以及用于调节的控制器 独立寻址光源的强度。

公开(公告)号：WO2012138460A3

公开(公告)日：2012-10-11

申请号：PCT/US2012/028910

申请日：2012-03-13

Applicant: KLA-TENCOR CORPORATION ,  ZHAO, Guoheng ,  LEVY, Ady ,  SALNIK, Alex ,  VAEZ-IRAVANI, Mehdi ,  NICOLAIDES, Lena ,  NGAI, Samuel S.H.

Inventor： ZHAO, Guoheng ,  LEVY, Ady ,  SALNIK, Alex ,  VAEZ-IRAVANI, Mehdi ,  NICOLAIDES, Lena ,  NGAI, Samuel S.H.

IPC: G01N21/01 ,  F21V8/00 ,  F21S2/00 ,  G01R31/26

Abstract: An apparatus for illuminating a target surface, the apparatus having a plurality of LED arrays, where each of the arrays has a plurality of individually addressable LEDs, and where at least one of the arrays is disposed at an angle of between about forty-five degrees and about ninety degrees relative to the target surface, where all of the arrays supply light into a light pipe, the light pipe having interior walls made of a reflective material, where light exiting the light pipe illuminates the target surface, and a controller for adjusting an intensity of the individually addressable light sources.

公开(公告)号：WO2010077865A2

公开(公告)日：2010-07-08

申请号：PCT/US2009068060

申请日：2009-12-15

Applicant: KLA TENCOR CORP ,  ZHAO GUOHENG ,  ZAPALAC GEORGE H ,  NGAI SAMUEL S H ,  VAEZ-IRAVANI MEHDI ,  LEVY ADY ,  DHARMADHIKARI VINEET

Inventor： ZHAO GUOHENG ,  ZAPALAC GEORGE H ,  NGAI SAMUEL S H ,  VAEZ-IRAVANI MEHDI ,  LEVY ADY ,  DHARMADHIKARI VINEET

IPC: H01L21/66 ,  H01L31/042

CPC classification number: G06T7/001 ,  G01N25/72 ,  G02F1/1309 ,  G06T2207/10048 ,  G06T2207/30148

Abstract: To increase inspection throughput, the field of view of an infrared camera can be moved over the sample at a constant velocity. Throughout this moving, a modulation can be provided to the sample and infrared images can be captured using the infrared camera. Moving the field of view, providing the modulation, and capturing the infrared images can be synchronized. The infrared images can be filtered to generate the time delay lock-in thermography, thereby providing defect identification. This filtering can account for the number of pixels of the infrared camera in a scanning direction. For the case of optical modulation, a dark field region can be provided for the field of view throughout the moving, thereby providing an improved signal-to-noise ratio during filtering. Localized defects can be repaired by a laser integrated into the detection system or marked by ink for later repair in the production line.

Abstract translation: 为了提高检查吞吐量，红外摄像机的视野可以以恒定的速度移动到样品上。 在整个移动过程中，可以向样品提供调制，并可以使用红外摄像机捕获红外图像。 可以同步移动视野，提供调制和捕获红外图像。 可以对红外图像进行滤波以产生延时锁定热成像，从而提供缺陷识别。 该过滤可以解释红外摄像机在扫描方向上的像素数。 对于光调制的情况，可以在整个移动期间为视场提供暗场区域，从而在滤波期间提供改善的信噪比。 局部缺陷可以通过集成到检测系统中的激光器或由墨水标记来修复，以便在生产线中进行后续修复。

公开(公告)号：WO2010077865A3

公开(公告)日：2010-07-08

申请号：PCT/US2009/068060

申请日：2009-12-15

Applicant: KLA-TENCOR CORPORATION ,  ZHAO, Guoheng ,  ZAPALAC, George H. ,  NGAI, Samuel S. H. ,  VAEZ-IRAVANI, Mehdi ,  LEVY, Ady ,  DHARMADHIKARI, Vineet

Inventor： ZHAO, Guoheng ,  ZAPALAC, George H. ,  NGAI, Samuel S. H. ,  VAEZ-IRAVANI, Mehdi ,  LEVY, Ady ,  DHARMADHIKARI, Vineet

IPC: H01L21/66 ,  H01L31/042

Abstract: To increase inspection throughput, the field of view of an infrared camera can be moved over the sample at a constant velocity. Throughout this moving, a modulation can be provided to the sample and infrared images can be captured using the infrared camera. Moving the field of view, providing the modulation, and capturing the infrared images can be synchronized. The infrared images can be filtered to generate the time delay lock-in thermography, thereby providing defect identification. This filtering can account for the number of pixels of the infrared camera in a scanning direction. For the case of optical modulation, a dark field region can be provided for the field of view throughout the moving, thereby providing an improved signal-to-noise ratio during filtering. Localized defects can be repaired by a laser integrated into the detection system or marked by ink for later repair in the production line.

公开(公告)号：WO2010104799A3

公开(公告)日：2011-01-27

申请号：PCT/US2010026557

申请日：2010-03-08

Applicant: KLA TENCOR CORP ,  LEVY ADY ,  NGAI SAMUEL ,  BEVIS CHRISTOPHER F ,  CONCINA STEFANO ,  FIELDEN JOHN ,  MIEHER WALTER ,  MUELLER DIETER ,  RICHARDSON NEIL ,  WACK DAN ,  WAGNER LARRY

Inventor： LEVY ADY ,  NGAI SAMUEL ,  BEVIS CHRISTOPHER F ,  CONCINA STEFANO ,  FIELDEN JOHN ,  MIEHER WALTER ,  MUELLER DIETER ,  RICHARDSON NEIL ,  WACK DAN ,  WAGNER LARRY

IPC: H01L21/66

CPC classification number: G01N21/9505 ,  G01N21/3581 ,  H01L22/12

Abstract: Systems and methods for determining one or more characteristics of a specimen using radiation in the terahertz range are provided. One system includes an illumination subsystem configured to illuminate the specimen with radiation. The system also includes a detection subsystem configured to detect radiation propagating from the specimen in response to illumination of the specimen and to generate output responsive to the detected radiation. The detected radiation includes radiation in the terahertz range. In addition, the system includes a processor configured to determine the one or more characteristics of the specimen using the output.

Abstract translation: 提供了使用太赫兹范围内的辐射来确定样本的一个或多个特征的系统和方法。 一个系统包括被配置为用辐射照射样本的照明子系统。 该系统还包括检测子系统，该检测子系统被配置为响应于样本的照射来检测从样本传播的辐射，并响应于检测到的辐射产生输出。 检测到的辐射包括太赫兹范围内的辐射。 另外，该系统包括配置成使用该输出来确定样本的一个或多个特性的处理器。