公开(公告)号：WO2008121561A1

公开(公告)日：2008-10-09

申请号：PCT/US2008/057539

申请日：2008-03-19

Applicant: KLA-TENCOR CORPORATION ,  ZHAO, Guoheng ,  BELYAEV, Alexander ,  WOLTERS, Christian H. ,  DOYLE, Paul Andrew ,  DANDO, Howard W. ,  VAEZ-IRAVANI, Mehdi

Inventor： ZHAO, Guoheng ,  BELYAEV, Alexander ,  WOLTERS, Christian H. ,  DOYLE, Paul Andrew ,  DANDO, Howard W. ,  VAEZ-IRAVANI, Mehdi

IPC: F16C32/06 ,  B21D53/10

CPC classification number: B25B11/005 ,  F16C29/025 ,  F16C32/0603 ,  H01L21/67784 ,  H01L21/6838

Abstract: Substrate processing method and apparatus are disclosed. The apparatus includes a chuck having a surface with one or more gas flow openings configured to provide a flow of gas to the surface. The surface includes one or more vacuum channels distributed across the surface. The vacuum channels permit vacuum to be drawn therethrough. In the method a substrate may be supported proximate the chuck surface with a back surface of the substrate sufficiently close to the chuck surface that a flow of gas and vacuum can maintain the substrate back surface and the chuck surface in a spaced-apart relationship. Gas flow is provided to the chuck surface through the gas flow openings and vacuum is drawn through one or more vacuum channels. The substrate is moved along a direction substantially perpendicular to the surface of the substrate.

Abstract translation: 公开了基板处理方法和装置。 该装置包括具有一个表面的卡盘，该表面具有一个或多个气体流动开口，该气体流动开口被配置为向表面提供气体流。 表面包括分布在表面上的一个或多个真空通道。 真空通道允许真空从中抽出。 在该方法中，衬底可以靠近卡盘表面支撑，衬底的后表面足够靠近卡盘表面，气体和真空流可以以间隔的关系保持衬底背面和卡盘表面。 通过气体流动开口将气流提供给卡盘表面，并通过一个或多个真空通道抽真空。 衬底沿着基本上垂直于衬底表面的方向移动。

公开(公告)号：WO2010077865A3

公开(公告)日：2010-07-08

申请号：PCT/US2009/068060

申请日：2009-12-15

Applicant: KLA-TENCOR CORPORATION ,  ZHAO, Guoheng ,  ZAPALAC, George H. ,  NGAI, Samuel S. H. ,  VAEZ-IRAVANI, Mehdi ,  LEVY, Ady ,  DHARMADHIKARI, Vineet

Inventor： ZHAO, Guoheng ,  ZAPALAC, George H. ,  NGAI, Samuel S. H. ,  VAEZ-IRAVANI, Mehdi ,  LEVY, Ady ,  DHARMADHIKARI, Vineet

IPC: H01L21/66 ,  H01L31/042

Abstract: To increase inspection throughput, the field of view of an infrared camera can be moved over the sample at a constant velocity. Throughout this moving, a modulation can be provided to the sample and infrared images can be captured using the infrared camera. Moving the field of view, providing the modulation, and capturing the infrared images can be synchronized. The infrared images can be filtered to generate the time delay lock-in thermography, thereby providing defect identification. This filtering can account for the number of pixels of the infrared camera in a scanning direction. For the case of optical modulation, a dark field region can be provided for the field of view throughout the moving, thereby providing an improved signal-to-noise ratio during filtering. Localized defects can be repaired by a laser integrated into the detection system or marked by ink for later repair in the production line.

公开(公告)号：WO2006076484A3

公开(公告)日：2006-07-20

申请号：PCT/US2006/001067

申请日：2006-01-11

Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION ,  BAREKET, Noah ,  WACK, Daniel, C. ,  ZHAO, Guoheng

Inventor： BAREKET, Noah ,  WACK, Daniel, C. ,  ZHAO, Guoheng

IPC: G01N21/00

Abstract: To measure the critical dimensions and other parameters of a one- or two-dimensional diffracting structure of a film, the calculation may be simplified by first performing a measurement of the thickness of the film, employing a film model that does not vary the critical dimension or parameters related to other characteristics of the structure. The thickness of the film may be estimated using the film model sufficiently accurately so that such estimate may be employed to simplify the structure model for deriving the critical dimension and other parameters related to the two-dimensional diffracting structure.

公开(公告)号：WO2005065246A3

公开(公告)日：2006-01-05

申请号：PCT/US2004043129

申请日：2004-12-17

Applicant: KLA TENCOR TECH CORP ,  VAEZ-IRAVANI MEHDI ,  ZHAO GUOHENG ,  STOWKOWSKI STANLEY E

Inventor： VAEZ-IRAVANI MEHDI ,  ZHAO GUOHENG ,  STOWKOWSKI STANLEY E

IPC: G02B6/00 ,  G02B6/04 ,  G02B6/32 ,  G02B27/48

CPC classification number: G02B27/48 ,  G02B6/0001 ,  G02B6/04

Abstract: Disclosed are apparatus and methods for illuminating a sample,

Abstract translation: 公开了用于照亮样品的装置和方法，

公开(公告)号：WO2013016469A1

公开(公告)日：2013-01-31

申请号：PCT/US2012/048210

申请日：2012-07-26

Applicant: KLA-TENCOR CORPORATION ,  YOUNG, Scott ,  ZHAO, Guoheng ,  LEVY, Ady ,  GUEVREMONT, Marco ,  KHANNA, Neeraj

Inventor： YOUNG, Scott ,  ZHAO, Guoheng ,  LEVY, Ady ,  GUEVREMONT, Marco ,  KHANNA, Neeraj

IPC: G01N21/62 ,  H01L31/042 ,  H01L31/18

CPC classification number: G01N21/6489 ,  G01N21/9501 ,  H02S50/10

Abstract: Methods and apparatus are presented to measure the photoluminescence of incoming wafers and extract parameters such as minority carrier life time, diffusion length, and defect density that may be used to predict final solar cell efficiency. In some examples, illumination light is supplied to a side of an as-cut silicon wafer and the induced luminescence measured from the same side and the opposite side of the wafer is used to determine an indication of the minority carrier lifetime. In another example, the luminescence induced by two instances of illumination light of different wavelength is used to determine an indication of the minority carrier lifetime. In another example, the spatial distribution of luminescence intensity over an area surrounding a focused illumination spot is used to determine an indication of the minority carrier lifetime. Other apparatus useful to passivate the surface of a wafer for inspection are also presented.

Abstract translation: 提出了测量进入晶片的光致发光的方法和装置，并提取可用于预测最终太阳能电池效率的参数，例如少数载流子寿命，扩散长度和缺陷密度。 在一些示例中，将照明光提供给切割硅晶片的一侧，并且使用从晶片的相同侧和相对侧测量的感应发光来确定少数载流子寿命的指示。 在另一示例中，由两个不同波长的照明光实例引起的发光用于确定少数载流子寿命的指示。 在另一示例中，使用聚焦照明点周围的区域上的发光强度的空间分布来确定少数载流子寿命的指示。 还提出了可用于钝化晶片表面以进行检查的其它装置。

公开(公告)号：WO2009151984A3

公开(公告)日：2010-03-18

申请号：PCT/US2009045704

申请日：2009-05-29

Applicant: KLA TENCOR CORP ,  DOYLE PAUL ,  ZHAO GUOHENG ,  BELYAEV ALEXANDER ,  RUNYON J REX

Inventor： DOYLE PAUL ,  ZHAO GUOHENG ,  BELYAEV ALEXANDER ,  RUNYON J REX

IPC: H01L21/66

CPC classification number: H01L21/6838

Abstract: A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.

Abstract translation: 一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。 空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。 压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。 通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。

公开(公告)号：WO2009151984A2

公开(公告)日：2009-12-17

申请号：PCT/US2009/045704

申请日：2009-05-29

Applicant: KLA-TENCOR CORPORATION ,  DOYLE, Paul ,  ZHAO, Guoheng ,  BELYAEV, Alexander ,  RUNYON, J., Rex

Inventor： DOYLE, Paul ,  ZHAO, Guoheng ,  BELYAEV, Alexander ,  RUNYON, J., Rex

IPC: H01L21/66

CPC classification number: H01L21/6838

Abstract: A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.

Abstract translation: 一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。 空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。 压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。 通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。

公开(公告)号：WO2009137706A2

公开(公告)日：2009-11-12

申请号：PCT/US2009/043185

申请日：2009-05-07

Applicant: KLA-TENCOR CORPORATION ,  VAEZ-IRAVANI, Mehdi ,  NASSER GHODSI, Mehran ,  ZHAO, Guoheng

Inventor： VAEZ-IRAVANI, Mehdi ,  NASSER GHODSI, Mehran ,  ZHAO, Guoheng

IPC: G01J3/00 ,  G01J3/42

CPC classification number: H01J37/244 ,  G01N2223/079 ,  G01N2223/086 ,  G01N2223/33 ,  H01J37/256 ,  H01J2237/24495 ,  H01J2237/2511 ,  H01J2237/2807

Abstract: A spectrometer having an electron beam generator for generating an electron beam that is directed at a sample. An electron beam positioner directs the electron beam onto a position of the sample, and thereby produces a secondary emitted stream from the sample, where the secondary emitted stream includes at least one of electrons and x-rays. An secondary emitted stream positioner positions the secondary emitted stream onto a detector array, which receives the secondary emitted stream and detects both the amounts and the received positions of the secondary emitted stream. A modulator modulates the electron beam that is directed onto the sample, and thereby sweeps the electron beam between a first position and a second position on the sample. An extractor is in signal communication with both the modulator and the detector array.

Abstract translation: 具有用于产生针对样品的电子束的电子束发生器的光谱仪。 电子束定位器将电子束引导到样品的位置，从而产生来自样品的二次发射流，其中二次发射流包括电子和X射线中的至少一个。 二次发射流定位器将二次发射流定位在检测器阵列上，检测器阵列接收二次发射流并检测二次发射流的量和接收位置。 调制器调制被引导到样品上的电子束，从而在样品上的第一位置和第二位置之间扫描电子束。 提取器与调制器和检测器阵列进行信号通信。

公开(公告)号：WO2005065246A2

公开(公告)日：2005-07-21

申请号：PCT/US2004/043129

申请日：2004-12-17

Applicant: KLA- TENCOR TECHNOLOGIES CORPORATION ,  VAEZ-IRAVANI, Mehdi ,  ZHAO, Guoheng ,  STOWKOWSKI, Stanley E.

Inventor： VAEZ-IRAVANI, Mehdi ,  ZHAO, Guoheng ,  STOWKOWSKI, Stanley E.

IPC: G02B6/00 ,  G02B6/04 ,  G02B6/32 ,  G02B27/48

CPC classification number: G02B27/48 ,  G02B6/0001 ,  G02B6/04

Abstract: Disclosed are apparatus and methods for illuminating a sample, e.g. , during an inspection of such sample for defects. In one aspect, the illumination apparatus includes a bundle of fibers that each have a first end and a second end. The illumination apparatus further includes an illumination selector for selectively transmitting one or more incident beams into one or more corresponding first ends of the optical fibers so that the selected one or more incident beams are output from one or more corresponding second ends of the fibers. The illumination apparatus also includes a lens arrangement for receiving the selected one or more incidents beams output from the corresponding one or more second ends of the fibers and directing the selected one or more incident beams towards the sample. The lens arrangement and the fibers are arranged with respect to each other so as to image an imaging plane of the sample at the second ends of the fibers. In one aspect, the incident beams are laser beams. In a specific application of the invention, the sample is selected from a group consisting of a semiconductor device, a semiconductor wafer, and a semiconductor reticle.

Abstract translation: 公开了用于照亮样品的装置和方法，例如在检查这种样品的缺陷时。 一方面，照明装置包括一束纤维，每束纤维具有第一端和第二端。 照明装置还包括照明选择器，用于选择性地将一个或多个入射光束传输到光纤的一个或多个对应的第一端中，使得所选择的一个或多个入射光束从光纤的一个或多个对应的第二端输出。 照明设备还包括透镜装置，用于接收从光纤的对应的一个或多个第二端输出的所选择的一个或多个事件光束，并将所选择的一个或多个入射光束引向样品。 透镜布置和光纤相对于彼此布置，以便在纤维的第二端成像样品的成像平面。 一方面，入射光束是激光束。 在本发明的具体应用中，样品选自半导体器件，半导体晶片和半导体掩模版。

公开(公告)号：WO2012138460A2

公开(公告)日：2012-10-11

申请号：PCT/US2012028910

申请日：2012-03-13

Applicant: KLA TENCOR CORP ,  ZHAO GUOHENG ,  LEVY ADY ,  SALNIK ALEX ,  VAEZ-IRAVANI MEHDI ,  NICOLAIDES LENA ,  NGAI SAMUEL S H

Inventor： ZHAO GUOHENG ,  LEVY ADY ,  SALNIK ALEX ,  VAEZ-IRAVANI MEHDI ,  NICOLAIDES LENA ,  NGAI SAMUEL S H

IPC: G01N21/01 ,  F21S2/00 ,  F21V8/00 ,  G01R31/26

CPC classification number: H05B33/0803

Abstract: An apparatus for illuminating a target surface, the apparatus having a plurality of LED arrays, where each of the arrays has a plurality of individually addressable LEDs, and where at least one of the arrays is disposed at an angle of between about forty-five degrees and about ninety degrees relative to the target surface, where all of the arrays supply light into a light pipe, the light pipe having interior walls made of a reflective material, where light exiting the light pipe illuminates the target surface, and a controller for adjusting an intensity of the individually addressable light sources.

Abstract translation: 一种用于照射目标表面的装置，该装置具有多个LED阵列，其中每个阵列具有多个独立可寻址的LED，并且其中至少一个阵列以大约四十五度之间的角度设置 并且相对于目标表面大约九十度，其中所有阵列将光提供到光管中，光管具有由反射材料制成的内壁，其中离开光管的光照射目标表面，以及用于调节的控制器 独立寻址光源的强度。