公开(公告)号：WO2007148868A1

公开(公告)日：2007-12-27

申请号：PCT/KR2007/000967

申请日：2007-02-26

Applicant: SONG, Seok Kyun

Inventor： SONG, Seok Kyun

IPC: H05H1/32

CPC classification number: H05H1/2406 ,  H05H2001/2418 ,  H05H2001/2437

Abstract: The present invention relates, in general, to an induction concentration remote atmospheric pressure plasma generating apparatus, and more particularly, to an induction concentration remote atmospheric pressure plasma generating apparatus in which induction electrodes, discharge electrodes and a ground electrode are used, so that a plasma can be generated in a plasma cell including several metal discharge electrodes by using one power supply device while not generating arc between the metal electrodes, and a high-density plasma is generated at local regions due to a discharge between the metal electrodes and is thus spouted to the surface of a sample by means of the pressure of a working gas. Thus, a plasma is not generated in unnecessary regions. If the present invention is applied, there are advantages in that flat panel displays, semiconductor samples and so on of a large area can be processed efficiently, and any kinds of materials, such as insulators, conductors and semiconductors, can be cleaned and undergo etching, photo resistor strip and surface-reforming processes regardless of the sample types.

Abstract translation: 本发明一般涉及感应浓度偏远大气压等离子体发生装置，更具体地说，涉及使用感应电极，放电电极和接地电极的感应浓度偏远大气压等离子体发生装置， 在金属电极之间不产生电弧的同时，通过使用一个电源装置，可以在包括数个金属放电电极的等离子体电池中产生等离子体，并且由于金属电极之间的放电而在局部区域产生高密度等离子体，因此 通过工作气体的压力喷射到样品的表面。 因此，在不需要的区域不产生等离子体。 如果应用本发明，则可以有效地处理大面积的平板显示器，半导体样品等，并且可以清洁和蚀刻诸如绝缘体，导体和半导体的任何种类的材料， ，光电阻条和表面重整过程，无论样品类型如何。

公开(公告)号：WO2005029538A3

公开(公告)日：2005-03-31

申请号：PCT/KR2004/002408

申请日：2004-09-21

Applicant: SONG, Seok Kyun

Inventor： SONG, Seok Kyun

IPC: G02F1/13

Abstract: The present invention relates to a plasma generating apparatus and a method of forming an alignment film of a liquid crystal display using the plasma generating apparatus. A high voltage is applied to the main electrode to generate a high non-regular electric field having directivity. Thus, the main electrode generates plasma of a high density having directivity. In this time, plasma is oriented toward a substrate at a proper angle and generates plasma having directivity. Large-area low temperature plasma can be generated through a simple structure, and a flat panel and roll to roll 3-D sample processing condition can be satisfied. Thus, surface reforming and cleaning of any material such as metal, semicondcutor, plastic and ceramics regardless of the type of a sample can be easily made. It is thus possible to effectively form an alignment film of a liquid crystal display using this plasma generating apparatus.

公开(公告)号：WO02061787A3

公开(公告)日：2003-03-13

申请号：PCT/US0202622

申请日：2002-01-31

Applicant: PLASMION CORP ,  KIM STEVEN ,  SONG SEOK-KYUN ,  YU DONG WOO

Inventor： KIM STEVEN ,  SONG SEOK-KYUN ,  YU DONG WOO

IPC: C23C16/44 ,  C23C16/455 ,  C23C16/503 ,  H01J37/32 ,  H05K3/00 ,  H05H1/24

CPC classification number: C23C16/45595 ,  C23C16/503 ,  H01J37/32009 ,  H01J37/32532 ,  H05K3/0055

Abstract: A method and an apparatus for treating a workpiece using a plasma are disclosed in the present invention. In treating a workpiece using a plasma, the apparatus includes at least one pin electrode (11) for receiving a power source(10), a dielectric body (12) having first and second sides, wherein the first side is coupled to the pin electrode (11) and the second side has at least one capillary (13) extending to a direction of the first side of the dielectric body, and each capillary (13) is substantially aligned with each pin electrode (11), and a counter electrode (15) electrically coupled to the pin electrode for generating the plasma from each capillary.

Abstract translation: 在本发明中公开了一种使用等离子体处理工件的方法和装置。 在使用等离子体处理工件时，该装置包括用于接收电源（10）的至少一个引脚电极（11），具有第一和第二侧面的电介质体（12），其中第一侧耦合到引脚电极 （11），并且所述第二侧具有延伸到所述电介质体的第一侧的方向的至少一个毛细管（13），并且每个毛细管（13）与每个针电极（11）基本对准，并且对电极 15），电耦合到引脚电极，用于从每个毛细管产生等离子体。

公开(公告)号：WO2005029538A2

公开(公告)日：2005-03-31

申请号：PCT/KR2004002408

申请日：2004-09-21

Applicant: SONG SEOK KYUN

Inventor： SONG SEOK KYUN

IPC: C23C16/26 ,  C23C16/50 ,  G02F1/13 ,  G02F1/1337 ,  H01J37/32 ,  H01L20060101 ,  H01L

CPC classification number: C23C16/26 ,  C23C16/50 ,  G02F1/133723 ,  G02F1/13378 ,  H01J37/32366 ,  H01J37/32532 ,  H01J37/32825

Abstract: The present invention relates to a plasma generating apparatus and a method of forming an alignment film of a liquid crystal display using the plasma generating apparatus. A high voltage is applied to the main electrode to generate a high non-regular electric field having directivity. Thus, the main electrode generates plasma of a high density having directivity. In this time, plasma is oriented toward a substrate at a proper angle and generates plasma having directivity. Large-area low temperature plasma can be generated through a simple structure, and a flat panel and roll to roll 3-D sample processing condition can be satisfied. Thus, surface reforming and cleaning of any material such as metal, semicondcutor, plastic and ceramics regardless of the type of a sample can be easily made. It is thus possible to effectively form an alignment film of a liquid crystal display using this plasma generating apparatus.

Abstract translation: 等离子体发生装置及其制造方法技术领域本发明涉及使用等离子体生成装置形成液晶显示装置的取向膜的等离子体产生装置和方法。 向主电极施加高电压以产生具有方向性的高非均匀电场。 因此，主电极产生具有方向性的高密度等离子体。 此时，等离子体以适当的角度朝向衬底取向，并产生具有方向性的等离子体。 可以通过简单的结构产生大面积低温等离子体，可以满足平板和滚动滚动3-D样品处理条件。 因此，无论样品的种类如何，都可以容易地进行任何材料如金属，半切割器，塑料和陶瓷的表面重整和清洁。 因此，可以使用该等离子体产生装置有效地形成液晶显示器的取向膜。

公开(公告)号：WO0188944A3

公开(公告)日：2003-03-13

申请号：PCT/US0115458

申请日：2001-05-14

Applicant: PLASMION DISPLAYS LLC ,  TRUSTEES STEVENS INST TECH ,  KIM STEVEN ,  KUNHARDT ERICH E ,  SONG SEOK-KYUN ,  SHIN BHUM-JAE ,  PARK SOOHO

Inventor： KIM STEVEN ,  KUNHARDT ERICH E ,  SONG SEOK-KYUN ,  SHIN BHUM-JAE ,  PARK SOOHO

IPC: H01J17/49

CPC classification number: H01J11/12 ,  H01J2211/22 ,  H01J2211/38

Abstract: The present invention discloses a plasma display panel device and a method of fabricating the same including first and second substrates (30, 39), a first electrode (31) on the first substrate (30), a second electrode (38) on the second substrate (39), a dielectric layer (33) on the first substrate (30) including the first electrode (31), a plurality of third electrodes (32) completely buried in the dielectric layer (33), a plurality of barrier ribs (37) connecting the first and second substrates formed on the second substrate (39), a UV-visible conversion layer (35) on the second substrate (39) including the second substrate between the barrier ribs, and a discharge chamber (36) where discharge occurs between the first and second substrates (30, 39), wherein the discharge chamber (36) faces toward the first electrode (31) through a single row of one or more capillaries (34) formed in the dielectric layer (33).

Abstract translation: 本发明公开了一种等离子体显示面板装置及其制造方法，包括第一和第二基板（30,39），第一基板（30）上的第一电极（31），第二基板 基板（39），包括第一电极（31）的第一基板（30）上的介电层（33），完全埋入介电层（33）中的多个第三电极（32），多个隔壁 37），连接形成在第二基板（39）上的第一和第二基板，在包括阻挡肋之间的第二基板的第二基板（39）上的UV-可见转换层（35）和排出室（36） 在第一和第二衬底（30,39）之间发生放电，其中放电室（36）通过形成在电介质层（33）中的一排或多个毛细管（34）朝向第一电极（31）。

公开(公告)号：WO0191156A3

公开(公告)日：2003-01-16

申请号：PCT/US0115961

申请日：2001-05-17

Applicant: PLASMION DISPLAYS LLC ,  TRUSTEES STEVENS INST TECH ,  KIM STEVEN ,  KUNHARDT ERICH E ,  SONG SEOK-KYUN ,  SHIN BHUM-JAE ,  PARK SOOHO

Inventor： KIM STEVEN ,  KUNHARDT ERICH E ,  SONG SEOK-KYUN ,  SHIN BHUM-JAE ,  PARK SOOHO

IPC: H01J11/14 ,  H01J11/16 ,  H01J17/49

CPC classification number: H01J11/16 ,  H01J11/14 ,  H01J2211/38 ,  H01J2211/44

Abstract: The present invention discloses a plasma display panel and a method of fabricating the same. The plasma display panel of the present invention includes a first electrode (4) on the first substrate (1), a first dielectric layer (6) on the first substrate including the first electrode, a plurality of second electrodes (7) completely buried in the first dielectric layer, a second dielectric layer (8) on the first dielectric layer including the first electrode, a third dielectric layer (12) on the second substrate (2), a plurality of UV visible photon conversion layers (3) on the third dielectric layer, a plurality of barrier ribs (10) between each of the UV visible photon conversion layers and connecting the first and second substrates, and a discharge chamber between the first and second substrates defined by the barrier ribs, wherein the first dielectric layer (6) includes at least one trench type discharge space (9) exposing a portion of the first electrode (4) to the discharge chamber.

Abstract translation: 本发明公开了一种等离子体显示面板及其制造方法。 本发明的等离子体显示面板包括在第一基板（1）上的第一电极（4），包括第一电极的第一基板上的第一介电层（6），完全埋入 所述第一介电层，所述第一介电层上的第二介电层（8）包括所述第一电极，所述第二基板（2）上的第三介电层（12），在所述第二介电层上的多个UV可见光子转换层 在每个UV可见光子转换层之间并且连接第一和第二基板的多个阻挡肋（10）以及由隔壁限定的第一和第二基板之间的放电室，其中第一介电层 （6）包括将第一电极（4）的一部分暴露于放电室的至少一个沟槽型放电空间（9）。

公开(公告)号：WO0188943A3

公开(公告)日：2003-08-28

申请号：PCT/US0115375

申请日：2001-05-14

Applicant: PLASMION DISPLAYS LLC ,  TRUSTEES STEVENS INST TECH ,  KIM STEVEN ,  KUNHARDT ERICH E ,  SONG SEOK-KYUN ,  SHIN BHUM-JAE ,  PARK SOOHO

Inventor： KIM STEVEN ,  KUNHARDT ERICH E ,  SONG SEOK-KYUN ,  SHIN BHUM-JAE ,  PARK SOOHO

IPC: H01J9/02 ,  H01J17/49

CPC classification number: H01J11/12 ,  H01J9/02 ,  H01J2211/22 ,  H01J2211/38

Abstract: The present invention provides a plasma display panel device and a method of fabricating the same including a first electrode (3) on the first substrate (1), a second electrode (4) on the second substrate (2), a dielectric layer (7) on the second electrode (4) including the second substrate (2), a plurality of third electrodes (5) completely buried in the dielectric layer (7), a pair of barrier ribs (8) connecting the first and second substrates (1, 2) on the dielectric layer (7), and a discharge chamber (10) where discharge occurs between the first and second substrates (1, 2), wherein the discharge chamber (10) faces toward the second electrode (4) through a plurality of rows of capillaries (9), each of the rows includes one or more capillaries (9), formed in the dielectric layer (7).

Abstract translation: 本发明提供一种等离子体显示面板装置及其制造方法，其包括在第一基板（1）上的第一电极（3），第二基板（2）上的第二电极（4），介电层（7） ），包括第二基板（2）的第二电极（4）上，完全埋在电介质层（7）中的多个第三电极（5），连接第一和第二基板（1）的一对隔板 ，2）在介电层（7）上，以及在第一和第二基板（1,2）之间发生放电的放电室（10），其中，放电室（10）通过一个 多行毛细管（9），每行包括形成在电介质层（7）中的一个或多个毛细管（9）。

公开(公告)号：WO2002061787A2

公开(公告)日：2002-08-08

申请号：PCT/US2002/002622

申请日：2002-01-31

Applicant: PLASMION CORPORATION ,  KIM, Steven ,  SONG, Seok-Kyun ,  YU, Dong, Woo

Inventor： KIM, Steven ,  SONG, Seok-Kyun ,  YU, Dong, Woo

IPC: H01J

CPC classification number: C23C16/45595 ,  C23C16/503 ,  H01J37/32009 ,  H01J37/32532 ,  H05K3/0055

Abstract: A method and an apparatus for treating a workpiece using a plasma are disclosed in the present invention. In treating a workpiece using a plasma, the apparatus includes at least one pin electrode for receiving a power source, a dielectric body having first and second sides, wherein the first side is coupled to the pin electrode and the second side has at least one capillary extending to a direction of the first side of the dielectric body, and each capillary is substantially aligned with each pin electrode, and a counter electrode electrically coupled to the pin electrode for generating the plasma from each capillary.

Abstract translation: 在本发明中公开了一种使用等离子体处理工件的方法和装置。 在使用等离子体处理工件时，该装置包括用于接收电源的至少一个引脚电极，具有第一和第二侧面的电介质体，其中第一侧耦合到引脚电极，而第二侧具有至少一个毛细管 延伸到电介质体的第一侧的方向，并且每个毛细管基本上与每个针电极对准，以及电极耦合到针电极的对电极，用于从每个毛细管产生等离子体。