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公开(公告)号：WO2012071376A3
公开(公告)日：2012-05-31
申请号：PCT/US2011/061771
申请日：2011-11-22
Applicant: ADVANCED TECHNOLOGY MATERIALS, INC. , WARE, Donald , TOM, Glenn , CHISM, Richard , NELSON, Greg , DUBOIS, Lawrence, H.
Inventor： WARE, Donald , TOM, Glenn , CHISM, Richard , NELSON, Greg , DUBOIS, Lawrence, H.
Abstract: The present disclosure relates to novel and advantageous disposable dispensers. The dispenser may include a dispense assembly comprising an outlet channel in fluid communication with a terminal apparatus, and a pressure source providing a limited supply of fluid or gas, and also includes a collapsible liner that contains a material to be dispensed, the liner detachably secured to the dispense assembly with the outlet channel in fluid communication with an interior of the liner, wherein the material in the liner is dispensed out the liner and through the outlet channel to the terminal apparatus.
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2.发明申请
公开(公告)号：WO2011046802A2
公开(公告)日：2011-04-21
申请号：PCT/US2010051786
申请日：2010-10-07
Applicant: ADVANCED TECH MATERIALS , TOM GLENN , O'DOUGHERTY KEVIN T
Inventor： TOM GLENN , O'DOUGHERTY KEVIN T
CPC classification number: B01D19/0036 , B65D83/0055
Abstract: The present disclosure relates to systems and methods which include a material receiving chamber for receiving a material (e.g., fluid containing medium) and an evacuable chamber configured to have vacuum applied thereto, and are configured to eliminate or at least reduce microbubble formation, eliminate or at least reduce unwanted diffusion of gas into the fluid containing medium being stored/dispensed, and/or remove at least a portion of gas or air bubbles entrained or dissolved in the fluid containing medium. Also disclosed are methods for controlling or reducing the concentration of gas in the material which may be subjected to external pressure during storage and/or dispensing.
Abstract translation: 本公开涉及包括用于接收材料（例如，含有流体的介质）的材料接收腔室和被配置成具有施加到其上的真空的可抽空腔室的系统和方法，并且被配置为消除或至少减少微泡形成，消除或 至少减少气体向储存/分配的含流体介质中的不希望的扩散，和/或去除夹带或溶解在含流体介质中的至少一部分气体或气泡。 还公开了用于控制或减少在储存和/或分配期间可能受到外部压力的材料中的气体浓度的方法。
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公开(公告)号：WO2007146892A2
公开(公告)日：2007-12-21
申请号：PCT/US2007/070911
申请日：2007-06-11
Applicant: ADVANCED TECHNOLOGY MATERIALS, INC. , WARE, Donald, D. , TOM, Glenn, M. , DATHE, Paul , KOLAND, Amy , GEROLD, Jason , MIKKELSEN, Kirk , O'DOUGHERTY, Kevin, T. , CISEWSKI, Michael, A.
Inventor： WARE, Donald, D. , TOM, Glenn, M. , DATHE, Paul , KOLAND, Amy , GEROLD, Jason , MIKKELSEN, Kirk , O'DOUGHERTY, Kevin, T. , CISEWSKI, Michael, A.
IPC: B67B7/00
CPC classification number: B67D7/763 , B65D83/62 , B67D7/0261 , Y10T137/313
Abstract: Systems are described for delivery of a wide variety of materials in which liquid and gas or vapor states are concurrently present, from a package preferably including a fluid-containing collapsible liner. Headspace gas is removed from a pressure dispensing package prior to liquid dispensation therefrom, and ingress gas is removed thereafter during dispensation operation. At least one sensor senses presence of gas or a gas-liquid interface in a reservoir or gas-liquid separation region. A gas removal system including an integral reservoir, at least one sensor, and at least one flow control elements may be included within a connector adapted to mate with a pressure dispensing package, for highly efficient removal of gas from the liquid being dispensed from the container.
Abstract translation: 描述了用于递送液体和气体或气体状态同时存在的各种材料的系统，优选地包括含有流体的可折叠衬垫。 在从其分配液体之前，从压力分配包装中取出顶空气体，然后在分配操作期间移除入口气体。 至少一个传感器感测储存器或气液分离区域中气体或气 - 液界面的存在。 包括整体储存器，至少一个传感器和至少一个流量控制元件的气体去除系统可以包括在适于与压力分配包装件配合的连接器内，用于从容器中分配的液体高效地去除气体 。
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4.发明申请LINER-BASED LIQUID STORAGE AND DISPENSING SYSTEMS WITH EMPTY DETECTION CAPABILITY 审中-公开基于液体的液体存储和分配系统具有空白检测能力
公开(公告)号：WO2006116572A3
公开(公告)日：2007-12-06
申请号：PCT/US2006015964
申请日：2006-04-25
Applicant: ADVANCED TECH MATERIALS , HOVINEN MINNA , KINGERY JOHN R , TOM GLENN M , O'DOUGHERTY KEVIN T , MIKKELSEN KIRK , WARE DONALD D , VAN BUSKIRK PETER C
Inventor： HOVINEN MINNA , KINGERY JOHN R , TOM GLENN M , O'DOUGHERTY KEVIN T , MIKKELSEN KIRK , WARE DONALD D , VAN BUSKIRK PETER C
IPC: B67D99/00
CPC classification number: B65D83/0061 , B01J4/02 , B01J2219/00065 , B01J2219/00067 , B01J2219/00069 , B01J2219/00164 , G01F23/18
Abstract: Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the contained liquid is at or approaching depletion during dispensing operation. Fluid delivery systems employing empty detect arrangements are described, including pressure transducer monitoring of dispensed material intermediate the supply package and a servo-hydraulic dispense pump, or monitoring of dispenser chamber replenishment times in a dispenser being replenished on a cyclic schedule to flow material from the dispenser to a downstream tool utilizing the dispensed material.
Abstract translation: 用于储存和分配化学试剂和组合物的流体供应系统，例如用于制造微电子器件产品的高纯度液体试剂和化学机械抛光组合物，具有在所含液体处于或等待时检测空或近空状态的能力， 在分配操作期间接近耗尽。 描述了使用空的检测装置的流体输送系统，包括压力传感器监测供应包装中间的分配材料和伺服液压分配泵，或监测在分配器中的分配器室补充时间，该分配器在循环调度中被补充以从 分配器利用所分配的材料到下游工具。
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公开(公告)号：WO2007027496A2
公开(公告)日：2007-03-08
申请号：PCT/US2006033044
申请日：2006-08-24
Applicant: ADVANCED TECH MATERIALS , TOM GLENN M
Inventor： TOM GLENN M
CPC classification number: F16K1/303 , F16K1/32 , F16K1/385 , F16K1/42 , F16K25/00 , F16K25/005 , F17C2205/0338 , F17C2205/0391 , Y10T137/0318 , Y10T137/7793 , Y10T137/7823 , Y10T137/86759
Abstract: A valve assembly. for controlling gas delivery from a higher pressure fluid source to a lower pressure processing tool. The valve assembly includes a valve poppet movingly engageable with a valve seating member and a fluid permeable insert positioned between the valve poppet and the valve seating member that is unexposed to flowing fluid when the valve poppet is in a closed position thereby preventing fluid flow through the valve assembly and providing a diffusional path for transfer of all flowing fluid when the valve poppet is in an open position. The permeable insert can be inserted into the sealable and engageable surface of either the valve seat member or the valve poppet.
Abstract translation: 阀组件。 用于控制从较高压力流体源到较低压力处理工具的气体输送。 阀组件包括可与阀座构件可移动地接合的阀提升阀和位于阀提升阀和阀座构件之间的流体可渗透插入件，当阀提升阀处于关闭位置时，该提升阀和阀座构件未暴露于流体流体，从而防止流体流过 阀组件并且当阀提升阀处于打开位置时提供用于传送所有流动流体的扩散路径。 可渗透插入件可以插入到阀座构件或阀提升阀的可密封和可接合的表面中。
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Patent Agency Ranking
公开(公告)号：WO03040882A3
公开(公告)日：2003-09-12
申请号：PCT/US0235415
申请日：2002-11-05
Applicant: ADVANCED TECH MATERIALS , LURCOTT STEVEN M , TOM GLENN M , DUBOIS RAY , DIETZ JAMES A , ZITZMANN OLIVER A
Inventor： LURCOTT STEVEN M , TOM GLENN M , DUBOIS RAY , DIETZ JAMES A , ZITZMANN OLIVER A
CPC classification number: G05B21/02 , G05B2219/13 , G05B2219/25204 , G05B2219/31457 , Y02P80/40 , Y02P90/86
Abstract: A method and apparatus (400) are provided for remotely configuring, operating and monitoring equipment (320, 330) in a manufacturing facility. An interface (230) is provided that allows a remote user to establish a connection with desired equipment (320, 330) in order to configure, operate or monitor the equipment (320,330). The disclosed interface (230) performs any required translation between the diverse equipment (320, 330) and protocols of different equipment manufacturers. A web-based connection to remote equipment allows a variety of diverse equipment systems to be accessed and controlled in a uniform manner. Historical data can be analyzed following a failure using pattern recognition techniques to identify data patterns that suggest an imminent failure.
Abstract translation: 提供了一种方法和装置（400），用于在制造设施中远程配置，操作和监视设备（320,330）。 提供了一种接口（230），其允许远程用户与所需设备（320,330）建立连接，以便配置，操作或监视设备（320,330）。 公开的接口（230）执行不同设备（320,330）和不同设备制造商的协议之间的任何所需的转换。 与远程设备的基于Web的连接允许以统一的方式访问和控制各种各样的设备系统。 历史数据可以在故障之后使用模式识别技术进行分析，以识别提示即将发生故障的数据模式。
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公开(公告)号：WO2013028746A2
公开(公告)日：2013-02-28
申请号：PCT/US2012/051843
申请日：2012-08-22
Applicant: ADVANCED TECHNOLOGY MATERIALS, INC. , TOM, Glenn , ELLINGSON, Thea Annette , KOLAND, Amy , MOWREY, Dale Gene
Inventor： TOM, Glenn , ELLINGSON, Thea Annette , KOLAND, Amy , MOWREY, Dale Gene
CPC classification number: B65D11/18 , B29D22/003 , B65D1/0292 , B65D1/40 , B65D21/08
Abstract: The present disclosure relates to a blow-molded, rigid collapsible container that can be suitable for storage and dispensing systems of practically any size. The rigid collapsible container may be a stand-alone container. The container may be blow-molded as a unitary piece that may include folds or pre-folds that allows the container to collapse into a relatively flat position. In an expanded state, the container may have a generally trapezoidal prism shape.
Abstract translation: 本公开涉及吹塑成型的刚性可折叠容器，其可适用于几乎任何尺寸的存储和分配系统。 刚性可折叠容器可以是独立的容器。 该容器可以作为整体件吹塑而成，该整体件可以包括折叠或预折叠，从而允许该容器折叠成相对平坦的位置。 在展开状态下，容器可能有一个普通的梯形棱镜形状。
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公开(公告)号：WO2012058384A3
公开(公告)日：2012-08-16
申请号：PCT/US2011058013
申请日：2011-10-27
Applicant: ADVANCED TECH MATERIALS , TOM GLENN , DUBOIS LAWRENCE H
Inventor： TOM GLENN , DUBOIS LAWRENCE H
CPC classification number: F17C13/02 , B32B1/02 , B32B2307/724 , B32B2439/00 , B65D1/0215 , B65D23/02 , B65D25/14 , B65D25/16 , B65D81/24 , B65D85/84 , F17C11/00 , Y10T428/1321 , Y10T428/1352 , Y10T428/1359 , Y10T428/3154
Abstract: The present disclosure relates to a liner for storing a material, the liner including at least two layers, wherein a layer that is in contact with the material is an active layer. The active layer may be made active by incorporating a scavenger into the layer. At least one layer of the liner may comprise a polymer or a fluoropolymer. In some embodiments, the active layer may be configured for removing microbridging components in photoresists. In some embodiments, the active layer may be made active by coating the interior of the layer with an inert material, such as glass. In further embodiments, the liner may be positioned within a stainless steel canister. The present disclosure also relates to a liner-based assembly including a liner for storing a material, an overpack within which the liner is positioned, and a purifying packet positioned between the liner and the overpack.
Abstract translation: 本公开涉及一种用于存储材料的衬垫，所述衬垫包括至少两层，其中与材料接触的层是活性层。 活性层可以通过将清除剂并入该层而被制成活性层。 衬垫的至少一层可以包含聚合物或含氟聚合物。 在一些实施方案中，活性层可以被配置用于除去光致抗蚀剂中的微桥接组分。 在一些实施方案中，活性层可以通过用惰性材料（例如玻璃）涂覆该层的内部来制成活性层。 在另外的实施例中，衬套可以定位在不锈钢罐内。 本公开还涉及一种基于衬垫的组件，其包括用于存储材料的衬垫，衬垫定位在其中的外包装以及位于衬垫和外包装之间的净化包。
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9.发明申请
公开(公告)号：WO2012078977A3
公开(公告)日：2012-06-14
申请号：PCT/US2011/064141
申请日：2011-12-09
Applicant: ADVANCED TECHNOLOGY MATERIALS, INC. , CHISM, Richard , KOLAND, Amy , LIU, Wei , DAVIS, John , TOM, Glenn , KUSZ, Matt , BOGGS, Karl
Inventor： CHISM, Richard , KOLAND, Amy , LIU, Wei , DAVIS, John , TOM, Glenn , KUSZ, Matt , BOGGS, Karl
Abstract: A liner having a tubular body portion with a top circumferential edge and a bottom circumferential edge, a generally circular bottom portion sealed to the tubular body portion along the bottom circumferential edge, and a generally circular top portion sealed to the tubular body portion along the top circumferential edge. The top portion may include a fitment sealed thereto. The tubular body portion may include at least one weld seam extending from the top circumferential edge to the bottom circumferential edge. In a particular embodiment, the tubular body portion may include two sheets welded together to form a tubular body, the tubular body portion thus having two weld seams extending from the top circumferential edge to the bottom circumferential edge.
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公开(公告)号：WO2012071376A2
公开(公告)日：2012-05-31
申请号：PCT/US2011061771
申请日：2011-11-22
Applicant: ADVANCED TECH MATERIALS , WARE DONALD , TOM GLENN , CHISM RICHARD , NELSON GREG , DUBOIS LAWRENCE H
Inventor： WARE DONALD , TOM GLENN , CHISM RICHARD , NELSON GREG , DUBOIS LAWRENCE H
CPC classification number: B65D83/0055 , B05B9/0811 , B05B9/0833 , B05B9/0838 , B65D85/84 , B67D1/0412 , B67D1/0462 , B67D7/0255 , B67D7/72
Abstract: The present disclosure relates to novel and advantageous disposable dispensers. The dispenser may include a dispense assembly comprising an outlet channel in fluid communication with a terminal apparatus, and a pressure source providing a limited supply of fluid or gas, and also includes a collapsible liner that contains a material to be dispensed, the liner detachably secured to the dispense assembly with the outlet channel in fluid communication with an interior of the liner, wherein the material in the liner is dispensed out the liner and through the outlet channel to the terminal apparatus.
Abstract translation: 本公开涉及新颖和有利的一次性分配器。 分配器可以包括分配组件，该分配组件包括与终端设备流体连通的出口通道和提供有限供应的流体或气体的压力源，并且还包括容纳待分配材料的可折叠衬套，衬垫可拆卸地固定 到分配组件，其中出口通道与衬套的内部流体连通，其中衬里中的材料被分配出衬套并且通过出口通道分配到终端设备。
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