公开(公告)号：WO2010144439A2

公开(公告)日：2010-12-16

申请号：PCT/US2010/037759

申请日：2010-06-08

申请人： ADVANCED TECHNOLOGY MATERIALS, INC. ,  LURCOTT, Steven, M. ,  HUGHES, John, E.Q. ,  WRSCHKA, Peter ,  BAUM, Thomas, H. ,  WARE, Donald, D. ,  ZOU, Peng

发明人： LURCOTT, Steven, M. ,  HUGHES, John, E.Q. ,  WRSCHKA, Peter ,  BAUM, Thomas, H. ,  WARE, Donald, D. ,  ZOU, Peng

IPC分类号： H01L21/02 ,  H01L21/027 ,  H01L21/20 ,  H01L21/302 ,  H01L21/304

CPC分类号： B01F15/0203 ,  B01F3/0861 ,  B01F15/0258 ,  B01F2003/0896 ,  B65B3/14 ,  B67D7/025 ,  B67D7/0261 ,  B67D7/0283 ,  B67D7/741

摘要： Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel is subjected to filling by application of vacuum between the liner and overpack. Multiple feed material flow controllers of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materials supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.

摘要翻译： 公开了用于将含流体的进料传送到加工设备的系统和方法。 基于衬管的压力分配容器通过在衬套和外包装之间施加真空而进行填充。 不同校准流量范围的多个进料流量控制器可以针对单个进料进行选择性并行操作。 用于放大的进料混合和测试可以通过由多个基于衬管的压力分配容器供应的进料进行。 重量分析系统可用于测定多组分溶液或混合物中至少一种组分的浓度。

公开(公告)号：WO2007090104A3

公开(公告)日：2007-08-09

申请号：PCT/US2007/061255

申请日：2007-01-29

申请人： ADVANCED TECHNOLOGY MATERIALS, INC. ,  DIMEO, Frank ,  CARRUTHERS, Donald, J. ,  WODJENSKI, Michael, J. ,  MCMANUS, James, V. ,  MARZULLO, Joseph ,  LURCOTT, Steven, M. ,  SWEENEY, Joseph, D. ,  KING, Mackenzie ,  BOBITA, Brian

发明人： DIMEO, Frank ,  CARRUTHERS, Donald, J. ,  WODJENSKI, Michael, J. ,  MCMANUS, James, V. ,  MARZULLO, Joseph ,  LURCOTT, Steven, M. ,  SWEENEY, Joseph, D. ,  KING, Mackenzie ,  BOBITA, Brian

IPC分类号： B01D53/02

摘要： Carbonaceous materials are described, having utility for fluid storage/dispensing. The carbonaceous material in one implementation is a nanoporous carbon composite having porosity that is at least partially filled with material imparting to the composite an enhanced character. Another implementation utilizes porous carbon material as a storage medium for chlorine gas. A further implementation utilizes porous carbon material as a hydrogen storage mediu e g, for hydrogen fuel cells. In another implementation, porous carbon material is employed as a sorbent medium in a fluid storage and dispensing system, in an arrangement of multiple porous carbon articles, and positional stabilization structure is employed to restrain the arrangement against movement. An arrangement in which carbon adsorbent is desorbed of residual fluid by resistive and/or inductive heating of the adsorbent is described.

公开(公告)号：WO2010144439A3

公开(公告)日：2011-03-03

申请号：PCT/US2010037759

申请日：2010-06-08

申请人： ADVANCED TECH MATERIALS ,  LURCOTT STEVEN M ,  HUGHES JOHN E Q ,  WRSCHKA PETER ,  BAUM THOMAS H ,  WARE DONALD D ,  ZOU PENG

发明人： LURCOTT STEVEN M ,  HUGHES JOHN E Q ,  WRSCHKA PETER ,  BAUM THOMAS H ,  WARE DONALD D ,  ZOU PENG

IPC分类号： H01L21/02 ,  H01L21/027 ,  H01L21/20 ,  H01L21/302 ,  H01L21/304

CPC分类号： B01F15/0203 ,  B01F3/0861 ,  B01F15/0258 ,  B01F2003/0896 ,  B65B3/14 ,  B67D7/025 ,  B67D7/0261 ,  B67D7/0283 ,  B67D7/741

摘要： Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel is subjected to filling by application of vacuum between the liner and overpack. Multiple feed material flow controllers of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materials supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.

摘要翻译： 公开了用于将含流体的进料传送到加工设备的系统和方法。 基于衬管的压力分配容器通过在衬套和外包装之间施加真空而进行填充。 不同校准流量范围的多个进料流量控制器可以针对单个进料进行选择性并行操作。 用于放大的进料混合和测试可以通过由多个基于衬管的压力分配容器供应的进料进行。 重量分析系统可用于测定多组分溶液或混合物中至少一种组分的浓度。

公开(公告)号：WO2006047410A2

公开(公告)日：2006-05-04

申请号：PCT/US2005038173

申请日：2005-10-24

申请人： ADVANCED TECH MATERIALS ,  DIETZ JAMES ,  BISHOP STEVEN E ,  MCMANUS JAMES V ,  LURCOTT STEVEN M ,  WODJENSKI MICHAEL J ,  KAIM ROBERT ,  DIMEO FRANK JR

发明人： DIETZ JAMES ,  BISHOP STEVEN E ,  MCMANUS JAMES V ,  LURCOTT STEVEN M ,  WODJENSKI MICHAEL J ,  KAIM ROBERT ,  DIMEO FRANK JR

IPC分类号： H01L21/66 ,  B67D7/06 ,  B67D99/00

CPC分类号： G01N33/00 ,  F17C11/00 ,  G01F15/063 ,  G01F22/02 ,  G01F23/0076 ,  G01M3/32 ,  G01M3/3236 ,  G06Q10/087 ,  G06Q30/04 ,  G06Q50/04 ,  H01L21/561 ,  H01L21/568 ,  H01L21/6835 ,  H01L22/10 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/48 ,  H01L24/82 ,  H01L25/03 ,  H01L25/0652 ,  H01L25/16 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/24011 ,  H01L2224/2518 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01058 ,  H01L2924/01076 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/14 ,  H01L2924/19042 ,  H05K1/185 ,  H05K3/4602 ,  H05K2203/0165 ,  H05K2203/085 ,  H05K2203/1469 ,  Y02P90/30 ,  Y10T29/4913 ,  Y10T29/49133 ,  Y10T29/49165 ,  Y10T29/53183 ,  H01L2224/45099

摘要： A monitoring system (100) for monitoring fluid in a fluid supply vessel (22, 24, 26, 28, 108) during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors (114, 126) for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module (40, 132, 146) operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor (50, 150) and display (52, 150) operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.

摘要翻译： 一种监视系统（100），用于在操作期间监视流体供给容器（22,24,26,28,108）中的流体，包括从流体供给容器分配流体。 监测系统包括（i）用于监测流体供应容器或从其分配的流体的特性的一个或多个传感器（114,126），（ii）数据采集模块（40,132,146），其可操作地耦合到所述一个 或更多传感器以从其接收监测数据并响应地产生与由所述一个或更多个传感器监测的特性相关的输出，以及（iii）处理器（50,150）和显示器（52,150），可操作地与所述数据采集模块 并且布置成处理来自数据采集模块的输出并且响应地输出流体供应容器中的流体的图形表示，计费文档，使用报告和/或再供应请求。

公开(公告)号：WO2009076276A3

公开(公告)日：2009-08-06

申请号：PCT/US2008085826

申请日：2008-12-08

申请人： ADVANCED TECH MATERIALS ,  HUGHES JOHN E Q ,  WARE DONALD D ,  LURCOTT STEVEN M ,  WRSCHKA PETER

发明人： HUGHES JOHN E Q ,  WARE DONALD D ,  LURCOTT STEVEN M ,  WRSCHKA PETER

IPC分类号： H01L21/304

CPC分类号： H01L21/3212 ,  B24B57/02 ,  H01L21/6715 ,  Y10T137/2499 ,  Y10T137/4807 ,  Y10T137/8593

摘要： Common sources of different (e.g., concentrated) process materials are controllably supplied to multiple blending manifolds associated with multiple process tools, processing stations, or other points of use, to create an independently controllable process material blend for each tool, station, or point of use. Multi-constituent process materials may be circulated from a supply container through a blending manifold to a return container to ensure homogeneity until immediately prior to blending and use. Such containers may include liner- based containers adapted for pressure dispensation.

摘要翻译： 不同（例如，浓缩的）工艺材料的常见来源可控制地提供给与多个工艺工具，加工站或其他使用点相关联的多个混合歧管，从而为每个工具，工位或点 使用。 多组分工艺材料可以从供应容器通过混合歧管循环到返回容器以确保均匀性，直到混合和使用之前。 这种容器可以包括适用于压力分配的基于内衬的容器。

公开(公告)号：WO2009076276A2

公开(公告)日：2009-06-18

申请号：PCT/US2008/085826

申请日：2008-12-08

申请人： ADVANCED TECHNOLOGY MATERIALS, INC. ,  HUGHES, John, E., Q. ,  WARE, Donald, D. ,  LURCOTT, Steven, M. ,  WRSCHKA, Peter

发明人： HUGHES, John, E., Q. ,  WARE, Donald, D. ,  LURCOTT, Steven, M. ,  WRSCHKA, Peter

IPC分类号： H01L21/304

CPC分类号： H01L21/3212 ,  B24B57/02 ,  H01L21/6715 ,  Y10T137/2499 ,  Y10T137/4807 ,  Y10T137/8593

摘要： Common sources of different (e.g., concentrated) process materials are controllably supplied to multiple blending manifolds associated with multiple process tools, processing stations, or other points of use, to create an independently controllable process material blend for each tool, station, or point of use. Multi-constituent process materials may be circulated from a supply container through a blending manifold to a return container to ensure homogeneity until immediately prior to blending and use. Such containers may include liner- based containers adapted for pressure dispensation.

摘要翻译： 不同（例如，浓缩）工艺材料的常见来源可控地供应到与多个工艺工具，加工站或其他使用点相关联的多个混合歧管，以创建用于每个工具，工位或点的 使用。 多组分加工材料可以从供应容器通过混合歧管循环到返回容器，以确保在混合和使用之前的均匀性。 这种容器可以包括适于压力分配的基于衬垫的容器。

公开(公告)号：WO2007090104A2

公开(公告)日：2007-08-09

申请号：PCT/US2007061255

申请日：2007-01-29

申请人： ADVANCED TECH MATERIALS ,  DIMEO FRANK ,  CARRUTHERS DONALD J ,  WODJENSKI MICHAEL J ,  MCMANUS JAMES V ,  MARZULLO JOSEPH ,  LURCOTT STEVEN M ,  SWEENEY JOSEPH D ,  KING MACKENZIE ,  BOBITA BRIAN

发明人： DIMEO FRANK ,  CARRUTHERS DONALD J ,  WODJENSKI MICHAEL J ,  MCMANUS JAMES V ,  MARZULLO JOSEPH ,  LURCOTT STEVEN M ,  SWEENEY JOSEPH D ,  KING MACKENZIE ,  BOBITA BRIAN

IPC分类号： B60K15/06

CPC分类号： B01D53/0415 ,  B01D53/0446 ,  B01D2253/102 ,  B01D2253/1122 ,  B01D2253/202 ,  B01D2253/308 ,  B01D2253/311 ,  B01D2253/342 ,  B01D2256/24 ,  B01D2257/30 ,  B01D2258/0216 ,  B01D2259/40096 ,  B01D2259/4146 ,  B01D2259/4525 ,  B01D2259/455 ,  B01J20/20 ,  B01J20/28011 ,  B01J20/28014 ,  B01J20/28023 ,  B01J20/28033 ,  B01J20/28042 ,  B01J20/28052 ,  B01J20/2808 ,  B01J20/28097 ,  B01J2220/66 ,  B82Y30/00 ,  C01B3/0021 ,  C01B13/0251 ,  C10G25/003 ,  C10G45/02 ,  C10G67/06 ,  C10G2300/1033 ,  C10G2300/1044 ,  C10G2300/1051 ,  C10G2300/1055 ,  C10G2300/202 ,  C10G2300/207 ,  F17C11/00 ,  F17C11/007 ,  Y02E60/321 ,  Y02E60/325 ,  Y10S95/903 ,  Y10T428/249956 ,  Y10T428/249957

摘要： Carbonaceous materials are described, having utility for fluid storage/dispensing and desulfurization applications. The carbonaceous material in one implementation is a nanoporous carbon composite having porosity that is at least partially filled with material imparting to the composite an enhanced character with respect to characteristics selected from the group consisting of hardness, wear-resistance and toughness, as compared with the nanoporous carbon alone. Another implementation utilizes porous carbon material as a storage medium for chlorine gas. A further implementation utilizes porous carbon material as a hydrogen storage medium, e.g., for hydrogen fuel cells. In another implementation, porous carbon material is employed as a sorbent medium in a fluid storage and dispensing system, in an arrangement of multiple porous carbon articles, and positional stabilization structure is employed to restrain the arrangement against movement. Infrared emitter devices are described, which utilize carbon adsorbent to store silane for reaction with oxygen in a controlled manner. An arrangement in which carbon adsorbent is desorbed of residual fluid by resistive and/or inductive heating of the adsorbent is described. Also described is a method of increasing the loading capacity of a porous carbon adsorbent, by contacting of the carbon adsorbent with a swelling agent, followed by contacting of the carbon adsorbent with a pressurized gaseous penetration agent, and by removal of the swelling agent and penetration agent.

摘要翻译： 描述了碳质材料，其用于流体储存/分配和脱硫应用。 一种实施方案中的含碳材料是具有孔隙率的纳米多孔碳复合材料，其与至少部分填充有赋予复合材料的材料相比，与由硬度，耐磨性和韧性组成的组相比的特性相比具有增强特性 纳米多孔碳。 另一个实施方案是利用多孔碳材料作为氯气的储存介质。 另外的实施例使用多孔碳材料作为储氢介质，例如用于氢燃料电池。 在另一个实施方案中，多孔碳材料用作流体储存和分配系统中的吸附剂介质，在多个多孔碳制品的布置中，并且使用位置稳定结构来限制该装置的移动。 描述了红外发射器件，其利用碳吸附剂以可控的方式存储硅烷与氧反应。 描述了通过吸附剂的电阻和/或感应加热使碳吸附剂解吸剩余流体的布置。 还描述了一种通过使碳吸附剂与溶胀剂接触，然后使碳吸附剂与加压的气体渗透剂接触，并且通过除去溶胀剂和渗透物来增加多孔碳吸附剂的负载能力的方法 剂。

公开(公告)号：WO03040882A3

公开(公告)日：2003-09-12

申请号：PCT/US0235415

申请日：2002-11-05

申请人： ADVANCED TECH MATERIALS ,  LURCOTT STEVEN M ,  TOM GLENN M ,  DUBOIS RAY ,  DIETZ JAMES A ,  ZITZMANN OLIVER A

发明人： LURCOTT STEVEN M ,  TOM GLENN M ,  DUBOIS RAY ,  DIETZ JAMES A ,  ZITZMANN OLIVER A

IPC分类号： G05B23/02 ,  G06F19/00 ,  G06F11/30

CPC分类号： G05B21/02 ,  G05B2219/13 ,  G05B2219/25204 ,  G05B2219/31457 ,  Y02P80/40 ,  Y02P90/86

摘要： A method and apparatus (400) are provided for remotely configuring, operating and monitoring equipment (320, 330) in a manufacturing facility. An interface (230) is provided that allows a remote user to establish a connection with desired equipment (320, 330) in order to configure, operate or monitor the equipment (320,330). The disclosed interface (230) performs any required translation between the diverse equipment (320, 330) and protocols of different equipment manufacturers. A web-based connection to remote equipment allows a variety of diverse equipment systems to be accessed and controlled in a uniform manner. Historical data can be analyzed following a failure using pattern recognition techniques to identify data patterns that suggest an imminent failure.

摘要翻译： 提供了一种方法和装置（400），用于在制造设施中远程配置，操作和监视设备（320,330）。 提供了一种接口（230），其允许远程用户与所需设备（320,330）建立连接，以便配置，操作或监视设备（320,330）。 公开的接口（230）执行不同设备（320,330）和不同设备制造商的协议之间的任何所需的转换。 与远程设备的基于Web的连接允许以统一的方式访问和控制各种各样的设备系统。 历史数据可以在故障之后使用模式识别技术进行分析，以识别提示即将发生故障的数据模式。

公开(公告)号：WO2010138930A3

公开(公告)日：2011-02-17

申请号：PCT/US2010036747

申请日：2010-05-28

申请人： ADVANCED TECH MATERIALS ,  ARNO JOSE I ,  DESPRES JOSEPH ,  LETAJ SHKELQIM ,  LURCOTT STEVEN M ,  BAUM THOMAS H ,  ZOU PENG

发明人： ARNO JOSE I ,  DESPRES JOSEPH ,  LETAJ SHKELQIM ,  LURCOTT STEVEN M ,  BAUM THOMAS H ,  ZOU PENG

IPC分类号： H01L21/66

CPC分类号： C23C16/52 ,  C23C16/14 ,  C23C16/455 ,  G01N21/3504

摘要： Apparatus and method for monitoring a vapor deposition installation in which a gas mixture can undergo gas phase nucleation (GPN) and/or chemically attack the product device, under process conditions supportive of such behavior. The apparatus includes a radiation source arranged to transmit source radiation through a sample of the gas mixture, and a thermopile detector assembly arranged to receive output radiation resulting from interaction of the source radiation with the gas mixture sample, and to responsively generate an output indicative of onset of the gas phase nucleation and/or chemical attack when such onset occurs. Such monitoring apparatus and methodology is useful in tungsten CVD processing to achieve high rate tungsten film growth without GPN or chemical attack.

摘要翻译： 用于监测气相沉积装置的装置和方法，其中气体混合物可以在支持这种行为的工艺条件下经历气相成核（GPN）和/或化学侵蚀产品装置。 该装置包括被布置成通过气体混合物的样本传送源辐射的辐射源，以及布置成接收由源辐射与气体混合物样品的相互作用产生的输出辐射的热电堆检测器组件，并且响应地产生指示 发生这种发生时气相成核和/或化学侵蚀的发生。 这种监测装置和方法在钨CVD处理中可用于实现无GPN或化学侵蚀的高速率钨膜生长。

公开(公告)号：WO2006047410A8

公开(公告)日：2006-07-27

申请号：PCT/US2005038173

申请日：2005-10-24

申请人： ADVANCED TECH MATERIALS ,  DIETZ JAMES ,  BISHOP STEVEN E ,  MCMANUS JAMES V ,  LURCOTT STEVEN M ,  WODJENSKI MICHAEL J ,  KAIM ROBERT ,  DIMEO FRANK JR

发明人： DIETZ JAMES ,  BISHOP STEVEN E ,  MCMANUS JAMES V ,  LURCOTT STEVEN M ,  WODJENSKI MICHAEL J ,  KAIM ROBERT ,  DIMEO FRANK JR

IPC分类号： H01L21/66 ,  B67D7/06 ,  B67D99/00

CPC分类号： G01N33/00 ,  F17C11/00 ,  G01F15/063 ,  G01F22/02 ,  G01F23/0076 ,  G01M3/32 ,  G01M3/3236 ,  G06Q10/087 ,  G06Q30/04 ,  G06Q50/04 ,  H01L21/561 ,  H01L21/568 ,  H01L21/6835 ,  H01L22/10 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/48 ,  H01L24/82 ,  H01L25/03 ,  H01L25/0652 ,  H01L25/16 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/24011 ,  H01L2224/2518 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01058 ,  H01L2924/01076 ,  H01L2924/01078 ,  H01L2924/01082 ,  H01L2924/014 ,  H01L2924/09701 ,  H01L2924/14 ,  H01L2924/19042 ,  H05K1/185 ,  H05K3/4602 ,  H05K2203/0165 ,  H05K2203/085 ,  H05K2203/1469 ,  Y02P90/30 ,  Y10T29/4913 ,  Y10T29/49133 ,  Y10T29/49165 ,  Y10T29/53183 ,  H01L2224/45099

摘要： A monitoring system (100) for monitoring fluid in a fluid supply vessel (22, 24, 26, 28, 108) during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors (114, 126) for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module (40, 132, 146) operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor (50, 150) and display (52, 150) operatively coupled with the data acquisition module and arranged to process the output from the data acquisition module and responsively output a graphical representation of fluid in the fluid supply vessel, billing documents, usage reports, and/or resupply requests.

摘要翻译： 一种用于在操作期间监测流体供应容器（22,24,26,28,108）中的流体的监测系统（100），包括从所述流体供应容器分配流体。 监测系统包括（i）用于监测流体供应容器或从其分配的流体的特性的一个或多个传感器（114,126），（ii）可操作地耦合到一个的数据采集模块（40,132,146） 或多个传感器以从其接收监测数据并且响应地产生与由所述一个或多个传感器监测的特性相关的输出，以及（iii）处理器（50,150）和显示器（52,150），其与所述数据采集模块 并且被布置成处理来自数据采集模块的输出并且响应地输出流体供应容器中的流体的图形表示，计费凭证，使用报告和/或再供应请求。