公开(公告)号：WO2009005157A1

公开(公告)日：2009-01-08

申请号：PCT/JP2008/062241

申请日：2008-06-30

Applicant: CANON KABUSHIKI KAISHA ,  TORASHIMA, Kazutoshi ,  KATO, Takahisa

Inventor： TORASHIMA, Kazutoshi ,  KATO, Takahisa

IPC: G02B26/08 ,  B81B7/00 ,  H03H9/02

CPC classification number: G02B26/085 ,  B81B3/007 ,  B81B2201/042 ,  Y10T29/49609 ,  Y10T29/49826 ,  Y10T74/18856

Abstract: An oscillator device includes a supporting member, a movable member, an elastic supporting member configured to elastically support the supporting member and the movable member around an oscillation axis, and a driving member configured to drive the movable member, wherein the elastic supporting member includes a plurality of springs and at least one spring constant adjusting member configured to couple the plurality of springs with each other.

Abstract translation: 一种振荡器装置，包括支撑构件，可动构件，弹性支撑构件，其构造成围绕摆动轴线弹性地支撑支撑构件和可动构件;以及驱动构件，其构造成驱动可动构件，其中弹性支撑构件包括 多个弹簧和至少一个弹簧恒定调节构件，其构造成将多个弹簧彼此连接。

公开(公告)号：WO2012017978A3

公开(公告)日：2012-11-08

申请号：PCT/JP2011067579

申请日：2011-07-26

Applicant: CANON KK ,  TORASHIMA KAZUTOSHI ,  AKIYAMA TAKAHIRO

Inventor： TORASHIMA KAZUTOSHI ,  AKIYAMA TAKAHIRO

IPC: B06B1/02

CPC classification number: H01L21/185 ,  B06B1/0292 ,  B81B3/0021

Abstract: The present invention relates to an electromechanical transducer and a method of producing it, in which the substrate rigidity is maintained to prevent the substrate from being broken during formation of dividing grooves or a film. The electromechanical transducer includes a plurality of elements each having at least one cell. An insulating layer is formed on a first substrate, and gaps (3) are formed in the insulating layer. A second substrate is bonded to the insulating layer provided with the gaps. Then, dividing grooves are formed in the first substrate and are at least partially filled with an insulating member. Then, the thickness of the second substrate bonded to the insulating layer is reduced to form a film (10).

Abstract translation: 本发明涉及一种机电换能器及其制造方法，其中保持基板的刚度以防止在分隔槽或薄膜形成期间基板被破坏。 机电换能器包括多个元件，每个元件具有至少一个单元。 在第一基板上形成绝缘层，在绝缘层中形成间隙（3）。 第二基板与设置有间隙的绝缘层接合。 然后，分隔槽形成在第一基板中，并且至少部分地填充有绝缘构件。 然后，将与绝缘层接合的第二基板的厚度减小以形成膜（10）。

公开(公告)号：WO2012017978A2

公开(公告)日：2012-02-09

申请号：PCT/JP2011/067579

申请日：2011-07-26

Applicant: CANON KABUSHIKI KAISHA ,  TORASHIMA, Kazutoshi ,  AKIYAMA, Takahiro

Inventor： TORASHIMA, Kazutoshi ,  AKIYAMA, Takahiro

IPC: B06B1/02

CPC classification number: H01L21/185 ,  B06B1/0292 ,  B81B3/0021

Abstract: The present invention relates to an electromechanical transducer and a method of producing it, in which the substrate rigidity is maintained to prevent the substrate from being broken during formation of dividing grooves or a film. The electromechanical transducer includes a plurality of elements each having at least one cell. An insulating layer is formed on a first substrate, and gaps are formed in the insulating layer. A second substrate is bonded to the insulating layer provided with the gaps. Then, dividing grooves are formed in the first substrate and are at least partially filled with an insulating member. Then, the thickness of the second substrate bonded to the insulating layer is reduced to form a film.

Abstract translation: 本发明涉及一种机电换能器及其制造方法，其中保持基板的刚度以防止在分隔槽或薄膜形成期间基板被破坏。 机电换能器包括多个元件，每个元件具有至少一个单元。 在第一基板上形成绝缘层，并且在绝缘层中形成间隙。 第二基板与设置有间隙的绝缘层接合。 然后，分隔槽形成在第一基板中，并且至少部分地填充有绝缘构件。 然后，将与绝缘层接合的第二基板的厚度减小以形成膜。

公开(公告)号：WO2009075381A1

公开(公告)日：2009-06-18

申请号：PCT/JP2008/072905

申请日：2008-12-10

Applicant: CANON KABUSHIKI KAISHA ,  MIYAGAWA, Suguru ,  FUJII, Kazunari ,  KATO, Takahisa ,  TORASHIMA, Kazutoshi ,  AKIYAMA, Takahiro

Inventor： MIYAGAWA, Suguru ,  FUJII, Kazunari ,  KATO, Takahisa ,  TORASHIMA, Kazutoshi ,  AKIYAMA, Takahiro

IPC: G02B26/08

CPC classification number: G02B26/0833 ,  G02B26/085

Abstract: A method of manufacturing an oscillator device having a fixed member and an oscillation plate supported by the fixed member through a supporting member for oscillation around a torsion axis, the oscillation plate being driven at a resonance frequency around the torsion axis, includes a frequency regulating step based on an extension member for adjustment of a mass of the oscillation plate, for forming the extension member on the oscillation plate and for adjusting the mass of the oscillation plate by cutting a portion of the extension member with the irradiation of a laser beam, an oscillator assembling step for fixing the fixed member to a fixed base, and a driving member assembling step for fixing a driving member for driving the oscillation plate to the fixed base, wherein at least the driving member assembling step is carried out after the frequency regulating step based on the extension member is performed.

Abstract translation: 一种振荡器装置的制造方法，其特征在于，具有固定部件和由所述固定部件支撑的摆动板，通过绕所述扭转轴摆动的支撑部件，所述振动板以扭转轴为中心的共振频率被驱动，所述振荡器具有频率调整步骤 基于用于调整振动板的质量的延伸构件，用于在振动板上形成延伸构件并且通过用激光束的照射切割延伸构件的一部分来调节振动板的质量， 用于将固定构件固定到固定基座的振荡器组装步骤以及用于将用于驱动振荡板的驱动构件固定到固定基座的驱动构件组装步骤，其中至少在频率调节步骤之后执行驱动构件组装步骤 基于扩展成员进行。

公开(公告)号：WO2009057801A1

公开(公告)日：2009-05-07

申请号：PCT/JP2008/069996

申请日：2008-10-28

Applicant: CANON KABUSHIKI KAISHA ,  MIYAGAWA, Suguru ,  AKIYAMA, Takahiro ,  TORASHIMA, Kazutoshi ,  KATO, Takahisa ,  FUJII, Kazunari

Inventor： MIYAGAWA, Suguru ,  AKIYAMA, Takahiro ,  TORASHIMA, Kazutoshi ,  KATO, Takahisa ,  FUJII, Kazunari

IPC: G02B26/08 ,  B81B3/00

CPC classification number: G02B26/085

Abstract: A method of manufacturing an oscillator device having an oscillator supported relative to a fixed member by a torsion spring for oscillation around a torsion axis and arranged to be driven at a resonance frequency, which method includes a first step for determining an assumed value of an inertia moment weight of the oscillator, a second step for measuring the resonance frequency, a third step for calculating a spring constant of the torsion spring, from the assumed value of the inertia moment weight and the measured resonance frequency obtained at said first and second steps, a fourth step for calculating an adjustment amount for the inertia moment of the oscillator or for the spring constant of the torsion spring, based on the spring constant calculated at said third step and a target resonance frequency determined with respect to the resonance frequency of the oscillator, so as to adjust the resonance frequency to the target resonance frequency, and a fifth step for adjusting the resonance frequency of the oscillator to the target resonance frequency based on the calculated adjustment amount.

Abstract translation: 一种制造振荡器装置的方法，该振荡器装置具有通过用于围绕扭转轴线摆动并被以共振频率驱动的扭转弹簧相对于固定构件支撑的振荡器的方法，该方法包括用于确定惯性的假定值的第一步骤 振荡器的力矩，用于测量共振频率的第二步骤，用于计算扭簧的弹簧常数的第三步骤，根据在所述第一和第二步骤获得的惯性力矩的假定值和测得的共振频率， 基于在所述第三步骤计算的弹簧常数和相对于振荡器的共振频率确定的目标共振频率，计算用于振荡器的惯性矩或扭簧的弹簧常数的调节量的第四步骤 ，以便将谐振频率调节到目标谐振频率，以及用于调整res的第五步骤 基于计算出的调整量，振荡器的频率与目标谐振频率成正比。

公开(公告)号：WO2012108283A2

公开(公告)日：2012-08-16

申请号：PCT/JP2012/051903

申请日：2012-01-24

Applicant: CANON KABUSHIKI KAISHA ,  KATO, Ayako ,  TORASHIMA, Kazutoshi ,  SOEDA, Yasuhiro ,  WATANABE, Shinichiro

Inventor： KATO, Ayako ,  TORASHIMA, Kazutoshi ,  SOEDA, Yasuhiro ,  WATANABE, Shinichiro

IPC: B81C1/00

CPC classification number: H01L41/33 ,  B06B1/0292 ,  B81B3/0072 ,  B81B2201/0271 ,  B81B2203/0127 ,  B81C1/00158 ,  B81C2201/0191

Abstract: Provided is a method of manufacturing a capacitive electromechanical transducer using fusion bonding, which is capable of reducing fluctuations in initial deformation among diaphragms caused at positions having different boundary conditions such as the bonding area, thereby enhancing the uniformity of the transducer and stabilizing the sensitivity and the like. The method of manufacturing a capacitive electromechanical transducer includes: forming an insulating layer on a first silicon substrate and forming at least one recess; fusion bonding a second silicon substrate onto the insulating layer; and thinning the second silicon substrate and forming a silicon film. The method further includes, before the bonding of the second silicon substrate onto the insulating layer, forming a groove in the insulating layer at the periphery of the at least one recess.

Abstract translation: 提供一种使用熔接的制造电容式机电换能器的方法，其能够减少在具有不同边界条件（例如接合面积）的位置处引起的膜片之间的初始变形的波动，从而增强换能器的均匀性并稳定灵敏度， 类似。 制造电容式机电换能器的方法包括：在第一硅衬底上形成绝缘层并形成至少一个凹槽; 将第二硅衬底熔合到所述绝缘层上; 并使第二硅衬底变薄并形成硅膜。 该方法还包括在将第二硅衬底接合到绝缘层之前，在至少一个凹部的周边处在绝缘层中形成凹槽。

公开(公告)号：WO2009014244A1

公开(公告)日：2009-01-29

申请号：PCT/JP2008/063487

申请日：2008-07-22

Applicant: CANON KABUSHIKI KAISHA ,  KATO, Takahisa ,  TORASHIMA, Kazutoshi

Inventor： KATO, Takahisa ,  TORASHIMA, Kazutoshi

IPC: G02B7/182 ,  G02B26/08

CPC classification number: G02B7/1821 ,  G02B26/0833

Abstract: An oscillator device includes a supporting base plate, a torsion spring, and a movable member, wherein the movable member is supported by the torsion spring, for torsional oscillation relative to the supporting base plate about a torsional axis, wherein the torsion spring has an X-shaped section being perpendicular to the torsional axis and a top surface and a bottom surface each being defined by a ( 100 ) -equivalent surface of monocrystal silicon, and wherein a distance Ll connecting bottoms of concavities formed at the top surface and bottom surface, respectively, and a distance L2 connecting bottoms of concavities defined at side surfaces of the X- shaped torsion spring as well as a rate of change αi of inertia moment of the movable member around the torsion axis, with a change of a thickness t of the supporting base plate, satisfy the following relation: L1/L2 = Cl-Exp{C2- (α i +C3) }+C4-α i +C5 where C1 = 5.0*10 ∧ =-1, C2 = -4.4, C3 = 4.6*10 ∧ -2, C4 = -6.0*10 ∧ -1 and 1.5

Abstract translation: 振荡器装置包括支撑基板，扭转弹簧和可动构件，其中可动构件由扭转弹簧支撑，用于围绕扭转轴线相对于支撑基板的扭转振动，其中扭转弹簧具有X 形状部分垂直于扭转轴线，顶表面和底表面各自由单晶硅的（100）等效表面限定，并且其中连接在顶表面和底表面处形成的凹部的底部的距离L1， 以及连接在X形扭转弹簧的侧面限定的凹部的底部的距离L2以及可动件围绕扭转轴线的惯性力矩的变化率，随着厚度t的变化， 满足以下关系：L1 / L2 = Cl-Exp {C2-（ai + C3）} + C4-ai + C5其中C1 = 5.0 * 10？= -1，C2 = -4.4，C3 = 4.6 * 10？-2，C4 = -6.0 * 10？-1和1.5

公开(公告)号：WO2012108283A3

公开(公告)日：2012-10-18

申请号：PCT/JP2012051903

申请日：2012-01-24

Applicant: CANON KK ,  KATO AYAKO ,  TORASHIMA KAZUTOSHI ,  SOEDA YASUHIRO ,  WATANABE SHINICHIRO

Inventor： KATO AYAKO ,  TORASHIMA KAZUTOSHI ,  SOEDA YASUHIRO ,  WATANABE SHINICHIRO

IPC: B81B3/00 ,  B06B1/02 ,  G01N29/24

CPC classification number: H01L41/33 ,  B06B1/0292 ,  B81B3/0072 ,  B81B2201/0271 ,  B81B2203/0127 ,  B81C1/00158 ,  B81C2201/0191

Abstract: Provided is a method of manufacturing a capacitive electromechanical transducer using fusion bonding, which is capable of reducing fluctuations in initial deformation among diaphragms caused at positions having different boundary conditions such as the bonding area, thereby enhancing the uniformity of the transducer and stabilizing the sensitivity and the like. The method of manufacturing a capacitive electromechanical transducer includes: forming an insulating layer on a first silicon substrate and forming at least one recess; fusion bonding a second silicon substrate onto the insulating layer; and thinning the second silicon substrate and forming a silicon film. The method further includes, before the bonding of the second silicon substrate onto the insulating layer, forming a groove in the insulating layer at the periphery of the at least one recess.

Abstract translation: 提供一种使用熔接的制造电容式机电换能器的方法，其能够减少在具有不同边界条件（例如接合面积）的位置处引起的膜片之间的初始变形的波动，从而增强换能器的均匀性并稳定灵敏度， 类似。 制造电容式机电换能器的方法包括：在第一硅衬底上形成绝缘层并形成至少一个凹槽; 将第二硅衬底熔合到所述绝缘层上; 并使第二硅衬底变薄并形成硅膜。 该方法还包括在将第二硅衬底接合到绝缘层之前，在至少一个凹部的周边处在绝缘层中形成凹槽。

公开(公告)号：WO2012108252A1

公开(公告)日：2012-08-16

申请号：PCT/JP2012/051281

申请日：2012-01-16

Applicant: CANON KABUSHIKI KAISHA ,  KATO, Ayako ,  TORASHIMA, Kazutoshi ,  SOEDA, Yasuhiro ,  WATANABE, Shinichiro

Inventor： KATO, Ayako ,  TORASHIMA, Kazutoshi ,  SOEDA, Yasuhiro ,  WATANABE, Shinichiro

IPC: B06B1/02

CPC classification number: H01L29/84 ,  B06B1/0292

Abstract: Provided is a capacitive electromechanical transducer manufactured by fusion bonding, which is capable of enhancing the performance by reducing fluctuations in initial deformation among diaphragms caused at positions having difference boundary conditions such as the bonding area. The capacitive electromechanical transducer includes a device (101), the device including at least one cellular structure (102) including: a silicon substrate; a diaphragm; and a diaphragm supporting portion configured to support the diaphragm so that a gap is formed between one surface of the silicon substrate and the diaphragm. The device has, in its periphery, a groove (103) formed in a layer shared with the diaphragm supporting portion.

Abstract translation: 提供一种通过熔接制造的电容式机电换能器，其能够通过减少在诸如接合面积的不同边界条件的位置处引起的膜片之间的初始变形的波动来提高性能。 所述电容式机电换能器包括装置（101），所述装置包括至少一个蜂窝结构（102），包括：硅衬底; 隔膜 以及隔膜支撑部，其构造成支撑所述隔膜，使得在所述硅基板的一个表面和所述隔膜之间形成间隙。 该装置在其周边具有形成在与隔膜支撑部分共享的层中的凹槽（103）。