DIAMOND ELECTRONIC PACKAGES FEATURING BONDED METAL
    4.
    发明申请
    DIAMOND ELECTRONIC PACKAGES FEATURING BONDED METAL 审中-公开
    金刚石电子包装特色粘合金属

    公开(公告)号:WO1997005757A1

    公开(公告)日:1997-02-13

    申请号:PCT/US1996012574

    申请日:1996-07-31

    Abstract: The present invention pertains to the packaging of electronic circuit. More particularly, the present invention pertains to methods for adherently bonding metals (4) to diamond (1) (i.e. the formation of a metal-diamond bonded structure) to yield metal-diamond substrates which are suitable for use in the fabrication of electronic packaging. These metal-diamond substrates exhibit both high thermal conductivity and dielectric isolation (where necessary), while being compatible with electronic package fabrication and the attachment of most semiconductor devices. The methods of the present invention include the formation of adherently bonded metal (5) by: the metallization of a bare diamond surface by the deposition of base coat or primer coat comprising certain carbide-forming metals such as molybdenum and tungsten; the metalization of a bare diamond surface using an active braze alloy; and by the growth of a diamond layer on a carbide-forming substrate by chemical vapor deposition (CVD).

    Abstract translation: 本发明涉及电子电路的封装。 更具体地说,本发明涉及将金属(4)与金刚石(1)粘合地结合(即,形成金属 - 金刚石键合结构)以产生适合用于制造电子封装的金属 - 金刚石基底的方法 。 这些金属 - 金刚石基底表现出高导热性和介电隔离(必要时),同时兼容电子封装制造和大多数半导体器件的连接。 本发明的方法包括:通过以下方式形成粘合的金属(5):通过沉积包含某些碳化物形成金属如钼和钨的底涂层或底漆涂层对裸金刚石表面进行金属化; 使用活性钎焊合金对裸钻石表面进行金属化; 以及通过化学气相沉积(CVD)在碳化物形成衬底上生长金刚石层。

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