公开(公告)号：WO2003092053A1

公开(公告)日：2003-11-06

申请号：PCT/JP2003/005120

申请日：2003-04-22

Applicant: 東レエンジニアリング株式会社 ,  山内 朗 ,  寺田 勝美 ,  奈良場 聰 ,  晴 孝志

Inventor： 山内 朗 ,  寺田 勝美 ,  奈良場 聰 ,  晴 孝志

IPC: H01L21/02

CPC classification number: H01L24/81 ,  H01L21/67092 ,  H01L24/75 ,  H01L2224/0554 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/056 ,  H01L2224/16 ,  H01L2224/75 ,  H01L2224/75743 ,  H01L2224/81203 ,  H01L2224/81801 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/01006 ,  H01L2924/01033 ,  H01L2924/0105 ,  H01L2924/01057 ,  H01L2924/01078 ,  H01L2924/014 ,  H01L2924/07802 ,  H01L2924/07811 ,  H01L2924/14 ,  H01L2924/00 ,  H01L2224/05599 ,  H01L2224/0555 ,  H01L2224/0556

Abstract: A mounting method and a mounting device, the method comprising the steps of, after positioning connected matters relative to each other, moving a movable wall positioned therearound until coming into contact with one connected matter holding means to form a local chamber having a local closed space, closing both connected matters in the chamber, depressurizing the inside of the chamber, moving the connected matter holding means in a direction for reducing the volume of the chamber and moving the movable wall according to the movement, and connecting both connected matters to each other by pressing, whereby, since the connected part and its periphery can be locally and efficiently enclosed separably from surroundings, and the local chamber capable of properly varying the shape of the enclosed space can be formed interlockingly with the connecting operation while maintaining the enclosed state even at the time of connection, a specified mounting can be easily performed by a small device.

Abstract translation: 一种安装方法和安装装置，所述方法包括以下步骤：在连接的物体相对于彼此定位之后，移动位于其周围的可移动壁，直到与一个连接物保持装置接触，以形成具有局部闭合空间 闭合室内的两个连接物体，使室内部减压，使连接物保持装置沿着减小室的体积的方向移动，并根据移动移动可移动壁，并将两个连接物彼此连接 通过按压，由此，由于连接部分及其周边可以与周围环境分离地局部且有效地封闭，并且能够适当地改变封闭空间的形状的局部室可以与连接操作互锁地形成，同时保持封闭状态 在连接时，可以通过小型装置容易地执行指定的安装。

公开(公告)号：WO2003041478A1

公开(公告)日：2003-05-15

申请号：PCT/JP2002/011496

申请日：2002-11-05

Applicant: 東レエンジニアリング株式会社 ,  山内 朗 ,  寺田 勝美

Inventor： 山内 朗 ,  寺田 勝美

IPC: H05K13/04

CPC classification number: H05K13/08 ,  H01L2224/75

Abstract: A mounter mounts a first bonding wrokpiece 2 with a register mark 4 on a below-arranged second bonding workpiece 3 with a register mark 5. This mounter is provided in a first bonding workpiece holder 6 with an optical path direction conversion means 9 which sideways converts a position reading optical path 10 from each register mark 4, 5, and by side the holder 6 with a recognition means 11 for adjusting a position and focal distance to read each register mark. During bonding, the first bonding workpiece 2 is pressurized at the center to prevent misregistration, and to finely control the pressurization force, resulting in a marked improvement in mounting precision and reliability.

Abstract translation: 安装器在具有对准标记5的下部配置的第二接合工件3上安装具有对准标记4的第一接合片W 2。该贴片机设置在第一接合工件保持器6中，光路方向转换装置9侧向转换 来自每个对准标记4,5的位置读取光路10和具有用于调整位置和焦距以读取每个对准标记的识别装置11的保持器6的侧面。 在接合期间，第一接合工件2在中心被加压以防止不对准，并且精细地控制加压力，导致安装精度和可靠性的显着提高。