公开(公告)号：WO2010048547A3

公开(公告)日：2010-07-22

申请号：PCT/US2009061911

申请日：2009-10-23

Applicant: ALTA DEVICES INC ,  KIZILYALLI ISIK C ,  ARCHER MELISSA ,  ATWATER HARRY ,  GMITTER THOMAS J ,  HE GANG ,  HEGEDUS ANDREAS ,  HIGASHI GREGG

Inventor： KIZILYALLI ISIK C ,  ARCHER MELISSA ,  ATWATER HARRY ,  GMITTER THOMAS J ,  HE GANG ,  HEGEDUS ANDREAS ,  HIGASHI GREGG

IPC: H01L31/042

CPC classification number: H01L31/0735 ,  H01L31/02168 ,  Y02E10/544

Abstract: Methods and apparatus are provided for converting electromagnetic radiation, such as solar energy, into electric energy with increased efficiency when compared to conventional solar cells. A photovoltaic (PV) device may incorporate front side and/or back side light trapping techniques in an effort to absorb as many of the photons incident on the front side of the PV device as possible in the absorber layer. The light trapping techniques may include a front side antireflective coating, multiple window layers, roughening or texturing on the front and/or the back sides, a back side diffuser for scattering the light, and/or a back side reflector for redirecting the light into the interior of the PV device. With such light trapping techniques, more light may be absorbed by the absorber layer for a given amount of incident light, thereby increasing the efficiency of the PV device.

Abstract translation: 与常规太阳能电池相比，提供了用于将诸如太阳能的电磁辐射转换成电能的方法和装置，其效率提高。 光伏（PV）装置可结合前侧和/或后侧光捕获技术，以试图吸收在吸收层中尽可能多地入射在PV装置的正面上的光子。 光捕获技术可以包括前侧抗反射涂层，多个窗口层，在前侧和/或后侧上的粗糙化或纹理化，用于散射光的背侧散射器，和/或用于将光重新引导到 PV设备的内部。 利用这样的光捕获技术，对于给定量的入射光，更多的光可以被吸收层吸收，从而提高PV装置的效率。

公开(公告)号：WO2010107842A3

公开(公告)日：2011-01-13

申请号：PCT/US2010027545

申请日：2010-03-16

Applicant: ALTA DEVICES INC ,  HE GANG ,  HIGASHI GREGG ,  SORABJI KHURSHED ,  HAMAMJY ROGER ,  HEGEDUS ANDREAS

Inventor： HE GANG ,  HIGASHI GREGG ,  SORABJI KHURSHED ,  HAMAMJY ROGER ,  HEGEDUS ANDREAS

IPC: H01L21/205 ,  H01L31/18 ,  H05H1/34

CPC classification number: C23C16/45565 ,  C23C16/4411 ,  C23C16/4412 ,  C23C16/45519 ,  C23C16/4557 ,  C23C16/4583 ,  C23C16/54

Abstract: Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a showerhead assembly is provided which includes a body having a centralized channel extending through upper and lower portions of the body and extending parallel to a central axis of the body. The showerhead assembly contains an optional diffusion plate having a first plurality of holes and disposed within the centralized channel, an upper tube plate having a second plurality of holes and disposed within the centralized channel below the diffusion plate, a lower tube plate having a third plurality of holes and disposed within the centralized channel below the upper tube plate, and a plurality of tubes extending from the upper tube plate to the lower tube plate. Each tube is coupled to and in fluid communication with individual holes of the upper and lower tube plates.

Abstract translation: 本发明的实施例一般涉及用于化学气相沉积（CVD）工艺的装置。 在一个实施例中，提供了一种喷头组件，其包括具有延伸穿过主体的上部和下部并且平行于主体的中心轴线延伸的集中通道的主体。 淋浴头组件包括具有第一多个孔并且设置在集中通道内的可选扩散板，具有第二多个孔并且设置在扩散板下方的集中通道内的上管板，具有第三多个的下管板 并且设置在上管板下方的集中通道内，以及从上管板延伸到下管板的多个管。 每个管连接到上管和下管板的各个孔中并与其流体连通。

公开(公告)号：WO2010107835A3

公开(公告)日：2011-01-13

申请号：PCT/US2010027538

申请日：2010-03-16

Applicant: ALTA DEVICES INC ,  HE GANG ,  HIGASHI GREGG ,  SORABJI KHURSHED ,  HAMAMJY ROGER ,  HEGEDUS ANDREAS

Inventor： HE GANG ,  HIGASHI GREGG ,  SORABJI KHURSHED ,  HAMAMJY ROGER ,  HEGEDUS ANDREAS

IPC: H01L21/205 ,  H05H1/34

CPC classification number: C23C16/45565 ,  C23C16/4411 ,  C23C16/4412 ,  C23C16/45519 ,  C23C16/4557 ,  C23C16/4583 ,  C23C16/54

Abstract: Embodiments of the invention generally relate to apparatuses and methods for chemical vapor deposition (CVD) processes. In one embodiment, a CVD reactor has a reactor lid assembly disposed on a reactor body and containing a first showerhead assembly, an isolator assembly, a second showerhead assembly, and an exhaust assembly consecutively and linearly disposed next to each other on a lid support. The CVD reactor further contains first and second faceplates disposed on opposite ends of the reactor body, wherein the first showerhead assembly is disposed between the first faceplate and the isolator assembly and the exhaust assembly is disposed between the second showerhead assembly and the second faceplate. The reactor body has a wafer carrier disposed on a wafer carrier track and a lamp assembly disposed below the wafer carrier track and containing a plurality of lamps which may be utilized to heat wafers disposed on the wafer carrier.

Abstract translation: 本发明的实施例一般涉及用于化学气相沉积（CVD）工艺的装置和方法。 在一个实施方案中，CVD反应器具有反应器盖组件，反应器盖组件设置在反应器主体上，并且在盖支撑件上彼此相邻并且连续并线性地设置有第一淋浴头组件，隔离器组件，第二淋浴头组件和排气组件。 CVD反应器还包含设置在反应器主体的相对端上的第一和第二面板，其中第一喷头组件设置在第一面板和隔离器组件之间，排气组件设置在第二喷头组件和第二面板之间。 反应器主体具有设置在晶片载体轨道上的晶片载体和设置在晶片载体轨道下方的灯组件，并且容纳可用于加热设置在晶片载体上的晶片的多个灯。

公开(公告)号：WO2010048550A2

公开(公告)日：2010-04-29

申请号：PCT/US2009061914

申请日：2009-10-23

Applicant: ALTA DEVICES INC ,  KIZILYALLI ISIK C ,  ARCHER MELISSA ,  ATWATER HARRY ,  GMITTER THOMAS J ,  HE GANG ,  HEGEDUS ANDREAS ,  HIGASHI GREGG

Inventor： KIZILYALLI ISIK C ,  ARCHER MELISSA ,  ATWATER HARRY ,  GMITTER THOMAS J ,  HE GANG ,  HEGEDUS ANDREAS ,  HIGASHI GREGG

IPC: H01L31/042

CPC classification number: H01L31/022458 ,  H01L31/02167 ,  H01L31/022425 ,  H01L31/022441 ,  H01L31/0304 ,  H01L31/03046 ,  H01L31/035281 ,  H01L31/0735 ,  H01L31/184 ,  H01L31/1844 ,  H01L31/1852 ,  H01L31/1892 ,  Y02E10/544 ,  Y02P70/521

Abstract: Methods and apparatus for converting electromagnetic radiation, such as solar energy, into electric energy with increased efficiency when compared to conventional solar cells are provided. A photovoltaic (PV) device generally includes a window layer; an absorber layer disposed below the window layer such that electrons are generated when photons travel through the window layer and are absorbed by the absorber layer; and a plurality of contacts for external connection coupled to the absorber layer, such that all of the contacts for external connection are disposed below the absorber layer and do not block any of the photons from reaching the absorber layer through the window layer. Locating all the contacts on the back side of the PV device avoids solar shadows caused by front side contacts, typically found in conventional solar cells. Therefore, PV devices described herein with back side contacts may allow for increased efficiency when compared to conventional solar cells.

Abstract translation: 提供了与常规太阳能电池相比，用于将电磁辐射如太阳能转换成电能的方法和装置，其效率提高。 光伏（PV）装置通常包括窗口层; 设置在窗口层下方的吸收层，使得当光子穿过窗口层并被吸收层吸收时，产生电子; 以及用于外部连接的多个触点，其耦合到吸收层，使得用于外部连接的所有触点设置在吸收层下方，并且不阻挡任何光子通过窗口层到达吸收体层。 定位PV设备背面的所有触点避免了由常规太阳能电池中常见的前端触点引起的太阳阴影。 因此，与传统的太阳能电池相比，具有背面接触的本文描述的PV器件可以提高效率。

公开(公告)号：WO2010048537A3

公开(公告)日：2010-08-05

申请号：PCT/US2009061898

申请日：2009-10-23

Applicant: ALTA DEVICES INC ,  KIZILYALLI ISIK C ,  ARCHER MELISSA ,  ATWATER HARRY ,  GMITTER THOMAS J ,  HE GANG ,  HEGEDUS ANDREAS ,  HIGASHI GREGG

Inventor： KIZILYALLI ISIK C ,  ARCHER MELISSA ,  ATWATER HARRY ,  GMITTER THOMAS J ,  HE GANG ,  HEGEDUS ANDREAS ,  HIGASHI GREGG

IPC: H01L31/042

CPC classification number: H01L31/0304 ,  H01L31/022441 ,  H01L31/0236 ,  H01L31/02363 ,  H01L31/03046 ,  H01L31/065 ,  H01L31/0682 ,  H01L31/0693 ,  H01L31/0735 ,  Y02E10/50 ,  Y02E10/52 ,  Y02E10/544

Abstract: Methods and apparatus are provided for converting electromagnetic radiation, such as solar energy, into electric energy with increased efficiency when compared to conventional solar cells. A photovoltaic (PV) unit, according to embodiments of the invention, may have a very thin absorber layer produced by epitaxial lift-off (ELO), all electrical contacts positioned on the back side of the PV device to avoid shadowing, and/or front side and back side light trapping employing a diffuser and a reflector to increase absorption of the photons impinging on the front side of the PV unit. Several PV units may be combined into PV banks, and an array of PV banks may be connected to form a PV module with thin strips of metal or conductive polymer applied at low temperature. Such innovations may allow for greater efficiency and flexibility in PV devices when compared to conventional solar cells.

Abstract translation: 与常规太阳能电池相比，提供了用于将诸如太阳能的电磁辐射转换成电能的方法和装置，其效率提高。 根据本发明的实施例，光伏（PV）单元可具有通过外延剥离（ELO）产生的非常薄的吸收层，位于PV设备的背侧以避免遮蔽的所有电触点，和/或 使用漫射器和反射器的前侧和后侧光捕获以增加撞击在PV单元的前侧上的光子的吸收。 多个光伏组件可以组合到光伏组中，并且可以连接光伏组阵列以形成具有在低温下施加的金属或导电聚合物的薄条带的PV模块。 与传统太阳能电池相比，这种创新可以提高PV器件的效率和灵活性。

公开(公告)号：WO2010107843A3

公开(公告)日：2011-01-13

申请号：PCT/US2010027547

申请日：2010-03-16

Applicant: ALTA DEVICES INC ,  HE GANG ,  HIGASHI GREGG ,  SORABJI KHURSHED ,  HAMAMJY ROGER ,  HEGEDUS ANDREAS

Inventor： HE GANG ,  HIGASHI GREGG ,  SORABJI KHURSHED ,  HAMAMJY ROGER ,  HEGEDUS ANDREAS

IPC: H01L21/205 ,  H01L31/18 ,  H05H1/34

CPC classification number: C23C16/45565 ,  C23C16/4411 ,  C23C16/4412 ,  C23C16/45519 ,  C23C16/4557 ,  C23C16/4583 ,  C23C16/54

Abstract: Embodiments of the invention generally relate to apparatuses for chemical vapor deposition (CVD) processes. In one embodiment, a reactor lid assembly for vapor deposition is provided which includes a first showerhead assembly and an isolator assembly disposed next to each other on a lid support, and a second showerhead assembly and an exhaust assembly disposed next to each other on the lid support, wherein the isolator assembly is disposed between the first and second showerhead assemblies and the second showerhead assembly is disposed between the isolator assembly and the exhaust assembly.

Abstract translation: 本发明的实施例一般涉及用于化学气相沉积（CVD）工艺的装置。 在一个实施例中，提供了一种用于气相沉积的反应器盖组件，其包括在盖支撑件上彼此相邻设置的第一淋浴器组件和隔离器组件，以及彼此靠近设置在盖上的第二淋浴喷头组件和排气组件 支撑件，其中隔离器组件设置在第一和第二喷头组件之间，并且第二喷头组件设置在隔离器组件和排气组件之间。

公开(公告)号：WO2010048555A3

公开(公告)日：2010-07-22

申请号：PCT/US2009061920

申请日：2009-10-23

Applicant: ALTA DEVICES INC ,  KIZILYALLI ISIK C ,  ARCHER MELISSA ,  ATWATER HARRY ,  GMITTER THOMAS J ,  HE GANG ,  HEGEDUS ANDREAS ,  HIGASHI GREGG

Inventor： KIZILYALLI ISIK C ,  ARCHER MELISSA ,  ATWATER HARRY ,  GMITTER THOMAS J ,  HE GANG ,  HEGEDUS ANDREAS ,  HIGASHI GREGG

IPC: H01L31/042

CPC classification number: H01L31/0516 ,  H01L31/022441 ,  H01L31/035281 ,  H01L31/0512 ,  H01L31/0735 ,  Y02E10/544

Abstract: Methods and apparatus are provided for converting electromagnetic radiation, such as solar energy, into electric energy with increased efficiency when compared to conventional solar cells. A photovoltaic (PV) unit may have all electrical contacts positioned on the back side of the PV device to avoid shadowing and increase absorption of the photons impinging on the front side of the PV unit. Several PV units may be combined into PV banks, and an array of PV banks may be connected to form a PV module with thin strips of metal or conductive polymer formed at low temperature. Such innovations may allow for greater efficiency and flexibility in PV devices when compared to conventional solar cells.

Abstract translation: 与常规太阳能电池相比，提供了用于将诸如太阳能的电磁辐射转换成电能的方法和装置，其效率提高。 光伏（PV）单元可以具有位于PV设备的背侧上的所有电触点，以避免遮蔽并增加撞击在PV单元的前侧上的光子的吸收。 多个光伏单元可以组合到光伏组中，并且可以连接一排光伏组以形成具有在低温下形成的薄金属条或导电聚合物的光伏组件。 与传统太阳能电池相比，这种创新可以提高PV器件的效率和灵活性。

公开(公告)号：WO2010077616A2

公开(公告)日：2010-07-08

申请号：PCT/US2009067027

申请日：2009-12-07

Applicant: ALTA DEVICES INC ,  HE GANG ,  HEGEDUS ANDREAS

Inventor： HE GANG ,  HEGEDUS ANDREAS

IPC: H01L21/20 ,  H01L21/306

CPC classification number: C30B29/42 ,  C30B29/40 ,  C30B33/06 ,  H01L21/02463 ,  H01L21/02546 ,  H01L31/0304 ,  H01L31/03046 ,  H01L31/0725 ,  H01L31/0735 ,  H01L31/184 ,  H01L31/1844 ,  Y02E10/544 ,  Y02P70/521

Abstract: Embodiments of the invention are provided for a thin film stack containing a plurality of epitaxial stacks disposed on a substrate and a method for forming such a thin film stack. In one embodiment, the epitaxial stack contains a first sacrificial layer disposed over the substrate, a first epitaxial film disposed over the first sacrificial layer, a second sacrificial layer disposed over the first epitaxial film, and a second epitaxial film disposed over the second sacrificial layer. The thin film stack may further contain additional epitaxial films disposed over sacrificial layers. Generally, the epitaxial films contain gallium arsenide alloys and the sacrificial layers contain aluminum arsenide alloys. Methods provide the removal of the epitaxial films from the substrate by etching away the sacrificial layers during an epitaxial lift off (ELO) process. The epitaxial films are useful as photovoltaic cells, laser diodes, or other devices or materials.

Abstract translation: 提供本发明的实施例用于包含设置在基板上的多个外延叠层的薄膜堆叠和用于形成这种薄膜叠层的方法。 在一个实施例中，外延堆叠包含设置在衬底上的第一牺牲层，设置在第一牺牲层上的第一外延膜，设置在第一外延膜上的第二牺牲层，以及设置在第二牺牲层上的第二外延膜 。 薄膜叠层还可以包含设置在牺牲层上的额外的外延膜。 通常，外延膜含有砷化镓合金，牺牲层含有砷化铝合金。 方法提供了在外延剥离（ELO）工艺期间通过蚀刻掉牺牲层从衬底去除外延膜。 外延膜可用作光伏电池，激光二极管或其它器件或材料。

公开(公告)号：WO2009155122A3

公开(公告)日：2010-02-25

申请号：PCT/US2009045715

申请日：2009-05-29

Applicant: ALTA DEVICES INC ,  ARCHER MELISSA ,  ATWATER HARRY ,  GMITTER THOMAS ,  HE GANG ,  HEGEDUS ANDREAS ,  HIGASHI GREGG ,  SONNENFELDT STEWART

Inventor： ARCHER MELISSA ,  ATWATER HARRY ,  GMITTER THOMAS ,  HE GANG ,  HEGEDUS ANDREAS ,  HIGASHI GREGG ,  SONNENFELDT STEWART

IPC: H01L21/302

CPC classification number: H01L21/7813 ,  H01L21/02543 ,  H01L21/02546 ,  H01L21/30612 ,  H01L21/6835 ,  H01L21/6836 ,  H01L21/7806 ,  H01L2221/6835 ,  H01L2221/68381

Abstract: Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices and methods used to form such films and devices. The ELO thin films generally contain epitaxially grown layers which are formed on a sacrificial layer disposed on or over a substrate, such as a wafer. A support handle may be disposed on the opposite side of the epitaxial material than the substrate. The support handle may be used to stabilize the epitaxial material, such as by providing compression to the epitaxial material. Furthermore, the support handle may be used to grip and hold the epitaxial material during the etching and removal steps of the ELO process. In various embodiments, the support handle may include a pre-curved handle, a multi-layered handle, a non-uniform wax handle, and two shrinkage-induced handles which universally or unidirectional shrink to provide compression to the epitaxial material.

Abstract translation: 本发明的实施例一般涉及外延剥离（ELO）薄膜，以及用于形成这种膜和装置的装置和方法。 ELO薄膜通常含有外延生长层，其形成在设置在诸如晶片的基底上或上方的牺牲层上。 支撑柄可以设置在与衬底相反的外延材料的相对侧上。 支撑手柄可用于稳定外延材料，例如通过向外延材料提供压缩。 此外，在ELO工艺的蚀刻和去除步骤期间，支撑手柄可用于夹持和保持外延材料。 在各种实施例中，支撑手柄可以包括预弯曲手柄，多层手柄，不均匀蜡手柄和两个收缩诱导的手柄，其通常或单向收缩以向外延材料提供压缩。

公开(公告)号：WO2010107839A3

公开(公告)日：2011-01-13

申请号：PCT/US2010027542

申请日：2010-03-16

Applicant: ALTA DEVICES INC ,  HE GANG ,  HIGASHI GREGG ,  SORABJI KHURSHED ,  HAMAMJY ROGER ,  HEGEDUS ANDREAS

Inventor： HE GANG ,  HIGASHI GREGG ,  SORABJI KHURSHED ,  HAMAMJY ROGER ,  HEGEDUS ANDREAS

IPC: H01L21/205 ,  H01K7/00

CPC classification number: C23C16/45565 ,  C23C16/4411 ,  C23C16/4412 ,  C23C16/45519 ,  C23C16/4557 ,  C23C16/4583 ,  C23C16/54

Abstract: Embodiments of the invention generally relate to apparatuses and methods for chemical vapor deposition (CVD). In one embodiment, a heating lamp assembly for a CVD reactor system is provided which includes a lamp housing disposed on an upper surface of a support base and containing a plurality of lamps extending from a first lamp holder to a second lamp holder. The lamps may have split filament lamps and/or non-split filament lamps, and in some examples, split and non-split filament may be alternately disposed between the first and second lamp holders. A reflector may be disposed on the upper surface of the support base between the first and second lamp holders. In another embodiment, the method includes exposing a lower surface of a wafer carrier to energy emitted from the heating lamp assembly and heating the wafer carrier to a predetermined temperature.

Abstract translation: 本发明的实施方案一般涉及用于化学气相沉积（CVD）的装置和方法。 在一个实施例中，提供了一种用于CVD反应器系统的加热灯组件，其包括设置在支撑基座的上表面上并包含从第一灯座延伸到第二灯座的多个灯的灯壳体。 灯可以具有裂开的灯丝灯和/或非分裂灯丝灯，并且在一些示例中，分裂和非分裂灯丝可以​​交替地设置在第一和第二灯座之间。 反射器可以设置在第一和第二灯座之间的支撑基座的上表面上。 在另一个实施例中，该方法包括将晶片载体的下表面暴露于从加热灯组件发射的能量并将晶片载体加热至预定温度。