公开(公告)号：WO2017050506A1

公开(公告)日：2017-03-30

申请号：PCT/EP2016/069879

申请日：2016-08-23

Applicant: ASML NETHERLANDS B.V. ,  CYMER INC.

Inventor： EVERTS, Frank ,  OP 'T ROOT, Wilhelmus, Patrick, Elisabeth, Maria ,  GODFRIED, Herman, Philip ,  THORNES, Joshua, Jon ,  O'BRIEN, Kevin, Michael ,  SAANEN, Leon, Pieter, Paul ,  AGGARWAL, Tanuj

IPC: G03F7/20

CPC classification number: G03F7/70558 ,  G03F7/70066 ,  G03F7/70525

Abstract: A method of controlling output of a radiation source, the method including: periodically monitoring an output energy of the radiation source; determining a difference between a reference energy signal and the monitored output energy; determining a feedback value; determining a desired output energy of the radiation source for a subsequent time period; and controlling an input parameter of the radiation source in dependence on the determined desired output energy during the subsequent time period. If the magnitude of the determined difference between the monitored output energy of the radiation source and the reference energy signal exceeds a threshold value: the determined difference does not contribute to the feedback value; and the determined difference is spread over the subsequent time period according to a reference energy signal adjustment profile and the reference energy signal adjustment profile is added to the reference energy signal for the subsequent time period.

Abstract translation: 一种控制辐射源输出的方法，所述方法包括：周期性地监测辐射源的输出能量; 确定参考能量信号和所监视的输出能量之间的差异; 确定反馈值; 在随后的时间段内确定辐射源的期望输出能量; 以及根据所确定的期望的输出能量在随后的时间段期间控制辐射源的输入参数。 如果所监测的辐射源的输出能量与参考能量信号之间所确定的差值的大小超过阈值：所确定的差值对反馈值无贡献; 并且根据参考能量信号调整曲线将确定的差分扩展到随后的时间段，并且将参考能量信号调整曲线添加到随后时间段的参考能量信号。

公开(公告)号：WO2017112060A1

公开(公告)日：2017-06-29

申请号：PCT/US2016/057552

申请日：2016-10-18

Applicant: CYMER, LLC ,  ASML NETHERLANDS B.V.

Inventor： THORNES, Joshua, Jon ,  AGGARWAL, Tanuj ,  O'BRIEN, Kevin, Michael ,  EVERTS, Frank ,  GODFRIED, Herman, Phillip ,  BURDT, Russell, Allen

IPC: G01J1/42 ,  G01J3/28 ,  G03F7/20 ,  H01S3/13

CPC classification number: G01J11/00 ,  G01J1/0228 ,  G01J1/0448 ,  G01J1/4257 ,  G03F7/70041 ,  G03F7/70516 ,  G03F7/7055 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/0014 ,  H01S3/10046 ,  H01S3/10069

Abstract: Online calibration of laser performance as a function of the repetition rate at which the laser is operated is disclosed. The calibration can be periodic and carried out during a scheduled during a non-exposure period. Various criteria can be used to automatically select the repetition rates that result in reliable in-spec performance. The reliable values of repetition rates are then made available to the scanner as allowed values and the laser/scanner system is then permitted to use those allowed repetition rates.

Abstract translation: 公开了作为激光器工作重复频率的函数的在线校准激光器性能。 校准可以是周期性的，并且在非暴露期间的计划期间进行。 可以使用各种标准来自动选择导致可靠规格性能的重复率。 重复频率的可靠值然后被提供给扫描仪，因为允许的值和激光/扫描仪系统然后被允许使用那些允许的重复率。