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    EXTERNAL BEAM DELIVERY SYSTEM FOR LASER DARK-FIELD ILLUMINATION IN A CATADIOPTRIC OPTICAL SYSTEM
    1.
    发明申请
    EXTERNAL BEAM DELIVERY SYSTEM FOR LASER DARK-FIELD ILLUMINATION IN A CATADIOPTRIC OPTICAL SYSTEM 审中-公开

    公开(公告)号：WO2008156812A3

    公开(公告)日：2008-12-24

    申请号：PCT/US2008/007652

    申请日：2008-06-18

    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION ,  ARMSTRONG, J., Joseph

    Inventor： ARMSTRONG, J., Joseph

    IPC: G02B17/08 ,  G02B13/18

    Abstract: A catadioptric objective configured to inspect a specimen is provided. The catadioptric objective includes a Mangin element having one surface at a first axial location and an extension element positioned together with the Mangin element. The extension element provides a second surface at a second axial location. Certain light energy reflected from the specimen passes to the second surface of the extension element, the Mangin element, and through a plurality of lenses. An aspheric surface may be provided, and light energy may be provided to the specimen using diverting elements such as prisms or reflective surfaces.

    HIGH PERFORMANCE CATADIOPTRIC IMAGING SYSTEM
    2.
    发明申请
    HIGH PERFORMANCE CATADIOPTRIC IMAGING SYSTEM 审中-公开
    高性能CATTIIOPTRIC成像系统

    公开(公告)号：WO2004077104A2

    公开(公告)日：2004-09-10

    申请号：PCT/US2004/005038

    申请日：2004-02-20

    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION

    Inventor： SHAFER, David, R. ,  CHUANG, Yung-Ho ,  ARMSTRONG, J., Joseph

    IPC: G02B

    CPC classification number: G02B17/0892 ,  G02B17/0812 ,  G02B17/0856 ,  G02B21/04 ,  G03F7/70225 ,  G03F7/70341

    Abstract: A reduced size catadioptric objective and system is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range. Elements are less than 100 mm in diameter. The objective comprises a focusing lens group configured to receive the light energy and comprising at least one focusing lens. The objective further comprises at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy. The objective also includes a Mangin mirror arrangement positioned to receive the intermediate light energy from the field lens and form controlled light energy for transmission to a specimen. The Mangin mirror arrangement imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90, and the design may be employed in various environments.

    Abstract translation: 公开了一种减小尺寸的反射折射物镜和系统。 该目的可以通过红外光范围具有在约190纳米范围内的波长的光能。 元件的直径小于100毫米。 该目的包括被配置为接收光能并且包括至少一个聚焦透镜的聚焦透镜组。 该目的还包括至少一个取向为从聚焦透镜组接收聚焦光能并提供中间光能的场透镜。 该目的还包括Mangin镜布置，其定位成从场透镜接收中间光能并形成受控的光能以传输到样本。 芒格镜配置赋予数值孔径超过0.65并且高达约0.90的受控光能，并且该设计可以用于各种环境中。

    BROAD BAND OBJECTIVE HAVING IMPROVED LATERAL COLOR PERFORMANCE
    3.
    发明申请
    BROAD BAND OBJECTIVE HAVING IMPROVED LATERAL COLOR PERFORMANCE 审中-公开
    具有改进的侧面颜色性能的宽带目标

    公开(公告)号：WO2006127434A2

    公开(公告)日：2006-11-30

    申请号：PCT/US2006/019381

    申请日：2006-05-19

    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION ,  CHUANG, Yung-ho ,  SHAFER, David ,  ARMSTRONG, J., Joseph

    Inventor： CHUANG, Yung-ho ,  SHAFER, David ,  ARMSTRONG, J., Joseph

    IPC: G02B21/02

    CPC classification number: G02B27/0025 ,  G01N21/8806 ,  G02B21/02

    Abstract: A system and method for inspection is disclosed. The design generally employs as many as four design principles, including employing at least one lens from a relatively low dispersion glass, at least one additional lens from an additional material different from the relatively low dispersion glass, generally matching the relatively low dispersion properties of the relatively low dispersion glass. The design also may include at least one further lens from a further material different from and exhibiting a significantly different dispersion power from the relatively low dispersion glass and the additional material. Finally, the design may include lenses positioned to insert a significant amount of color within the objective, a gap, and additional lenses, the gap and additional lenses serving to cancel the color inserted.

    Abstract translation: 公开了一种用于检查的系统和方法。 该设计通常采用多达四个设计原理，包括使用来自相对低色散玻璃的至少一个透镜，来自不同于相对低色散玻璃的附加材料的至少一个附加透镜，通常匹配相对低色散玻璃的相对低的色散特性 相对低的分散玻璃。 该设计还可以包括来自与相对低的分散玻璃和附加材料不同并表现出显着不同的色散功率的另外材料的至少一个另外的透镜。 最后，设计可以包括定位成在物镜内插入大量颜色的透镜，间隙和附加透镜，间隙和附加透镜用于抵消所插入的颜色。

    INSPECTION SYSTEM USING BACK SIDE ILLUMINATED LINEAR SENSOR
    5.
    发明申请
    INSPECTION SYSTEM USING BACK SIDE ILLUMINATED LINEAR SENSOR 审中-公开
    检查系统使用背面照明线性传感器

    公开(公告)号：WO2008153770A2

    公开(公告)日：2008-12-18

    申请号：PCT/US2008/006654

    申请日：2008-05-23

    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION ,  ARMSTRONG, J., Joseph ,  CHUANG, Yung-Ho ,  BROWN, David, Lee

    Inventor： ARMSTRONG, J., Joseph ,  CHUANG, Yung-Ho ,  BROWN, David, Lee

    IPC: H01L21/66

    CPC classification number: G01N21/9501 ,  G01N21/95623 ,  G01N2021/8822 ,  G01N2021/95676

    Abstract: An improved inspection system using back-side illuminated linear sensing for propagating charge through a sensor is provided. Focusing optics may be used with a back side illuminated linear sensor to inspect specimens, the back side illuminated linear sensor operating to advance an accumulated charge from one side of each pixel to the other side. The design comprises controlling voltage profiles across pixel gates from one side to the other side in order to advance charge between to a charge accumulation region. Controlling voltage profiles comprises attaching a continuous polysilicon gate across each pixel within a back side illuminated linear sensor array. Polysilicon gates and voltages applied thereto enable efficient electron advancement using a controlled voltage profile.

    Abstract translation: 提供了一种使用背面照明线性检测的改进的检测系统，用于通过传感器传播电荷。 聚焦光学元件可以与背面照明的线性传感器一起使用以检查样品，背面照射的线性传感器操作以将累积的电荷从每个像素的一侧推进到另一侧。 该设计包括控制从一侧到另一侧的像素栅极之间的电压分布，以便在电荷累积区域之间推进电荷。 控制电压分布包括在背侧照明线性传感器阵列内的每个像素上连接连续的多晶硅栅极。 多晶硅栅极和施加于其上的电压使得能够使用受控电压分布进行有效的电子前进。

    NON-CRITICAL PHASE MATCHING IN CLBO TO GENERATE SUB-213NM WAVELENGHTS
    6.
    发明申请
    NON-CRITICAL PHASE MATCHING IN CLBO TO GENERATE SUB-213NM WAVELENGHTS 审中-公开
    CLBO中的非关键相位匹配生成SUB-213NM波长

    公开(公告)号：WO2007016217A2

    公开(公告)日：2007-02-08

    申请号：PCT/US2006/029135

    申请日：2006-07-26

    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION ,  ARMSTRONG, J., Joseph ,  CHUANG, Yung-Ho

    Inventor： ARMSTRONG, J., Joseph ,  CHUANG, Yung-Ho

    IPC: H04B1/707

    CPC classification number: H01S3/06708 ,  G01N21/8806 ,  G01N21/9501 ,  G02F1/3501 ,  G02F1/3534 ,  G02F1/3536 ,  G02F1/3544 ,  G02F1/3551 ,  G02F1/3553 ,  G02F1/3558 ,  G02F1/37 ,  G02F2001/3507 ,  G02F2001/354 ,  H01S3/06712 ,  H01S3/06741 ,  H01S3/0675 ,  H01S3/06791 ,  H01S3/094007 ,  H01S3/09415 ,  H01S3/1118 ,  H01S3/23 ,  H01S3/2383

    Abstract: A laser illuminator and illumination method for use in an inspection system, such as a semiconductor wafer inspection system or photomask inspection system is provided. The design comprises generating fundamental frequency laser energy at different fundamental wavelengths, such as 998nm, converting a portion of the fundamental frequency laser energy to 2 nd harmonic frequency laser energy, further converting the 2" harmonic frequency laser energy to 4 th harmonic frequency laser energy, and mixing the 4 th harmonic frequency laser energy with a portion of the fundamental frequency laser energy to produce laser energy at a sum frequency. Mixing is accomplished by non-critical phase matching in a crystal of Cesium Lithium Borate (CLBO). Alternately, the design may employ shifting a portion of the fundamental frequency laser energy to laser energy at a Raman line and/or mixing the 2 nd harmonic frequency laser energy with a portion of the fundamental frequency laser energy to produce 3 rd harmonic frequency laser energy.

    Abstract translation: 提供了一种用于检查系统中的激光照明器和照明方法，例如半导体晶片检查系统或光掩模检查系统。 该设计包括在不同的基本波长（例如998nm）处产生基频激光能量，将基频激光能量的一部分转换为二次谐波激光能量，进一步转换2“谐波激光能量 谐波频率激光能量，并将第4次谐波激光能量与基频激光能量的一部分混合，以产生激光能量的和频率 可以通过在硼酸铯（CLBO）的晶体中的非临界相位匹配来实现，或者，该设计可以使用将一部分基频激光能量转换成拉曼线上的激光能量和/ 谐波频率激光能量与基频激光能量的一部分产生3阶谐波激光能量。

    REDUCING VARIATIONS IN ENERGY REFLECTED FROM A SAMPLE DUE TO THIN FILM INTERFERENCE
    7.
    发明申请
    REDUCING VARIATIONS IN ENERGY REFLECTED FROM A SAMPLE DUE TO THIN FILM INTERFERENCE 审中-公开
    减少因薄膜干扰而从样品反射的能量中的变化

    公开(公告)号：WO2006130432A2

    公开(公告)日：2006-12-07

    申请号：PCT/US2006/020288

    申请日：2006-05-26

    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION ,  CHUANG, Yung-Ho ,  ARMSTRONG, J., Joseph

    Inventor： CHUANG, Yung-Ho ,  ARMSTRONG, J., Joseph

    CPC classification number: G01N21/9501 ,  G01B11/0625 ,  G01N21/21 ,  G01N21/95607 ,  G01N2021/8809

    Abstract: A system and method for inspecting a multi-layer sample, such as a silicon wafer, is disclosed. The design reduces variations in total reflected energy due to thin film interference. The design includes illuminating the sample at two incident angle ranges, where the two incident angle ranges are such that variation in total reflected energy at a first incident angle range may be employed to balance variation in total reflected energy at a second incident angle range. Defects are detected using die-to-die subtraction of the sample illuminated at the two incident angle ranges.

    Abstract translation: 公开了一种用于检查诸如硅晶片的多层样品的系统和方法。 该设计减少了由于薄膜干扰导致的总反射能量的变化。 该设计包括以两个入射角度范围照射样品，其中两个入射角范围使得可以采用在第一入射角范围的总反射能量的变化来平衡在第二入射角范围内的总反射能量的变化。 使用在两个入射角度范围照射的样品的模 - 阴相减去检测缺陷。

    CATADIOPTRIC IMAGING SYSTEM FOR BROAD BAND MICROSCOPY
    8.
    发明申请
    CATADIOPTRIC IMAGING SYSTEM FOR BROAD BAND MICROSCOPY 审中-公开

    公开(公告)号：WO2005022204A3

    公开(公告)日：2005-03-10

    申请号：PCT/US2004/026782

    申请日：2004-08-18

    Applicant: KLA-TENCOR TECHNOLOGIES CORPORATION ,  SHAFER, David, R. ,  CHUANG, Yung-Ho ,  ARMSTRONG, J., Joseph

    Inventor： SHAFER, David, R. ,  CHUANG, Yung-Ho ,  ARMSTRONG, J., Joseph

    IPC: G02B17/00

    Abstract: A system and method for inspection is disclosed. The design includes an objective employed for use with light energy having a wavelength in various ranges, including approximately 266 to 1000nm, 157nm through infrared, and other ranges. The objective comprises a focusing lens group (311) comprising at least one focusing lens (304) configured to receive light, a field lens (305) oriented to receive focused light energy from said focusing lens group (311) and provide intermediate light energy, and a Mangin mirror arrangement (312) positioned to receive the intermediate light energy from the field lens (305) and form controlled light energy. Each focusing lens has a reduced diameter, such as a diameter of less than approximately 100mm, and a maximum corrected field size of approximately 0.15mm. An immersion substance, such as oil, water, or silicone gel, may be employed prior to passing controlled light energy to the specimen (310) inspected.

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