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公开(公告)号：WO2016054077A1
公开(公告)日：2016-04-07
申请号：PCT/US2015/052995
申请日：2015-09-29
Applicant: NEW WAY MACHINE COMPONENTS, INC.
Inventor： DEVITT, Andrew J.
CPC classification number: F16J15/342 , F04D29/0413 , F04D29/0513 , F04D29/057 , F04D29/104 , F04D29/122 , F04D29/124 , F05D2300/514 , F16C17/04 , F16C33/128 , F16C33/74 , F16C2360/00 , F16J15/162 , F16J15/3404 , F16J15/3496 , F16J15/40 , F16J15/406
Abstract: The use of externally-pressurized porous media in shaft sealing for turbomachinery is provided for single seals, tandem seals, double-opposed seals, and a ventless seal. These arrangements provide for significant benefits, such as the following: (a) external pressurization allows frozen seal faces to lift open before rotation, (b) pressure is distributed uniformly across the seal face, as opposed to allowing leakage to pass over it, (c) low flow rates of injected gas are possible, (d) the seal faces are self-defending due to the uniform pressure in the gap, and (e) complete elimination of venting process gas is possible. By employing externally-pressurized porous media sealing, a drastic simplification of seal design, as well as gas treatment and seal panel design, is possible.
Abstract translation: 用于涡轮机械的轴封密封中使用外部加压的多孔介质用于单个密封件，串联密封件，双相对密封件和无通气密封件。 这些布置提供了显着的好处，例如：（a）外部加压允许冷冻密封面在旋转之前提升，（b）压力均匀地分布在密封面上，而不是允许渗漏通过它 c）注入气体的低流量是可能的，（d）由于间隙中的均匀压力，密封面是自我保护的，（e）完全消除排气过程气体是可能的。 通过采用外部加压的多孔介质密封，可以大大简化密封设计，以及气体处理和密封面板设计。
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公开(公告)号：WO2016054084A1
公开(公告)日：2016-04-07
申请号：PCT/US2015/053008
申请日：2015-09-29
Applicant: NEW WAY MACHINE COMPONENTS, INC.
Inventor： DEVITT, Andrew J.
CPC classification number: F16J15/342 , F04D29/0413 , F04D29/0513 , F04D29/057 , F04D29/104 , F04D29/122 , F04D29/124 , F05D2300/514 , F16C17/04 , F16C33/128 , F16C33/74 , F16C2360/00 , F16J15/162 , F16J15/3404 , F16J15/3496 , F16J15/40 , F16J15/406
Abstract: A porous media ventless thrust bearing seal is disclosed. The porous media thrust bearing may include a primary porous media thrust bearing also serving as a seal ring including porous media positioned over a plenum and a port connected to the plenum, and conductive passages for communicating pressurized fluid to the plenums through the ports of the primary ring. The porous media ventless thrust bearing may also include a treated process gas supplied to a port which is closest to the untreated process gas, at a pressure which is higher than the untreated process gas. An inert gas (or fluid in a liquid state) may be supplied to the remaining port, at a pressure which is the same as the untreated process gas. A certain amount of treated process gas may flow into the untreated process gas, and may prevent the untreated gas from entering the porous media seal.
Abstract translation: 公开了一种多孔介质无通气推力轴承密封件。 多孔介质推力轴承可以包括也用作密封环的主要多孔介质止推轴承，其包括位于增压室上方的多孔介质和连接到集气室的端口，以及用于将加压流体通过主要 环。 多孔介质无通气推力轴承还可以包括在比未经处理的工艺气体高的压力下供应到最接近未处理工艺气体的端口的处理过程气体。 惰性气体（或液体状态）可以以与未经处理的工艺气体相同的压力供应到剩余的端口。 一定量的经处理的工艺气体可能流入未经处理的工艺气体，并且可以防止未处理气体进入多孔介质密封件。
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3.发明申请A METHOD AND A DEVICE FOR DEPOSITING A FILM OF MATERIAL OR OTHERWISE PROCESSING OR INSPECTING, A SUBSTRATE AS IT PASSES THROUGH A VACUUM ENVIRONMENT GUIDED BY A PLURALITY OF OPPOSING AND BALANCED AIR BEARING LANDS AND SEALED BY DIFFERENTIALLY PUMPED GROVES AND SEALING LANDS IN A NON-CONTACT MANNER 审中-公开一种用于沉积材料薄膜或以其他方式加工或检查的方法和装置，作为通过由多种对称和平衡的空气轴承引导并由不同的泵来密封的真空环境引导的基板
公开(公告)号：WO2007016688A1
公开(公告)日：2007-02-08
申请号：PCT/US2006/030331
申请日：2006-08-02
Applicant: NEW WAY MACHINE COMPONENTS, INC. , DEVITT, Andrew J.
Inventor： DEVITT, Andrew J.
CPC classification number: C23C16/458 , B05C13/00 , C03B35/147 , C03C15/00 , C03C17/002 , C03C23/0075 , C23C14/562 , C23C16/4409 , C23C16/50 , C23C16/545 , F16C32/0614 , F16C33/748 , F16C2300/62 , H01J37/3277 , H01J37/32834 , H01L21/67028 , H01L21/67034 , H01L21/67051 , H01L21/67739 , Y02P40/57
Abstract: A method and apparatus for coating and baking and deposition of surfaces on glass substrate or flexible substrate, such as films and thin glass sheets or other similar work pieces as it transitions thru and between small gaps of aero-static or hydro-static porous media bearings and differentially pumped vacuum grooves, in a non-contact manner, in order to process within a vacuum environment. The process is also intended to incorporate simultaneous and immediately sequential ordering of various processes.
Abstract translation: 一种用于在玻璃基板或柔性基板上涂覆和烘烤和沉积表面的方法和装置，例如薄膜和薄玻璃板或其它类似的工件，当它们穿过静电或静电多孔介质轴承的小间隙 以及差分抽真空槽，以非接触的方式，以在真空环境中进行处理。 该过程还旨在并入并且立即顺序排列各种过程。
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