Abstract:
An apparatus (5) for dicing an integrated circuit substrate having a loader (30) for loading the substrate to the apparatus, said substrate loaded in a first direction corresponding to a loading axis, an inlet rail (35) said inlet rail including a first block (75) movable along said inlet rail (35) to which is loaded the substrate from said loader, wherein said inlet rail is arranged to deliver the first block (75) and substrate towards a chuck table (60) in a second direction orthogonal to the loading axis.
Abstract:
A system for processing a substrate comprising a loading station for receiving the substrate; a bottom surface inspection station for inspecting the bottom surface of the substrate; a top surface inspection station for inspecting the top surface of the substrate and; a sorting station for sorting the substrate into a predetermined category based upon the bottom surface inspection and top surface inspection.
Abstract:
A method for inspecting and sorting a plurality of IC units comprising the steps of: delivering a frame containing said IC units to a unit picking station; conducting a first inspection of said units during the delivering step and recording the subsequent result; removing said units from the frame, and moving said units from the unit picking station to a flipping station; conducting a second inspection of said units during the moving step and recording the subsequent result; flipping said units to expose an opposed face said units; conducting a third inspection of said opposed face and recording the subsequent result, then; sorting said units into categories based on the recorded results from the first, second and third inspecting steps.
Abstract:
A unit picker assembly for engaging singulated IC units, the assembly comprising; a plurality of unit pickers, each unit picker having an engagement end for engagement of an IC unit; each of said unit pickers movably mounted to permit movement from a retracted position to a unit engagement position; an actuator assembly arranged to move to a plurality of actuating positions, each of said positions corresponding to one of said unit pickers from the retracted position to the unit engagement position; wherein whilst in any of said actuating positions the actuator assembly is arranged to move the corresponding unit picker from the retracted position to the engagement position.
Abstract:
A method for processing a plurality of IC units (87) comprising the steps of: inspecting said units (87) at a first inspection station (90); moving said IC units (87) along a linearly defined path to a second inspection station (115); inspecting the units (87) at said second inspection station (115); flipping said units; inspecting the units (87) at said third inspection station (125), and; sorting said units into pre-defined categories.
Abstract:
A system for dicing substrates to singulate integrated circuit units includes a dicing machine (Z) which operates with a chuck table (4). A lifting assembly (Ax, Ay) deposits substrates to be singulated onto the chuck table (4) at substantially the same time as it removes previously singulated units from the chuck table (4). Also disclosed is a support device fixing the diced chips by vacuum to an insert of a soft material.