Abstract:
A robot for explosive environments comprises a purge area (90) configured to comprise a non-explosive gas, and a tool changer (110) configured to receive and withdraw a tool (120). The tool changer (110) is adapted for operating in an explosive environment by providing a switch (150) for switching on and off a supply of electrical power to the tool (120), and by arranging the switch (150) within the purge area (190).
Abstract:
The invention refers to an explosion protection system for electrical apparatuses and machineries, such as manipulators or industrial robots, located in hazardous environments, i.e. environments containing explosive concentrations of inflammable gases, dusts or vapours, comprising means for applying internal pressurized air into an explosion proof enclosure and that has a purging system and electrical components, such as motors, relays, IC-boards, cables etc. The invention is achieved by, that a flow-and pressure sensor is arranged as an integrated unit and designed to stand high dynamic forces by having low inertia, balanced arrangement of moving parts and a movement guide, e.g. an axle with a support guide, with low friction.
Abstract:
Robot wrist mechanisms (8, 8a) mounted on the tip of a robot arm (6) of a robot (4) used in a clean air atmosphere, comprise wrist housings (10, 90) connected to a vacuum line that has a source of negative pressure; wrist-operating units (20, 100) provided at ends of the wrist housings (10, 90); motors (16, 96) provided in said wrist housings (10, 90) to actuate the wrist-operating units (20, 100); and reduction gears (24, 98). The boundary between the wrist housings (10, 90) and the wrist operating units (20, 100) is sealed with a labyrinth sealing means (54), and the output ends of the electric motors (16, 96) and the reduction gears (24, 98) are sealed with sealing means (32, 36, 50, 52, 114) to prevent the leakage of grease.
Abstract:
An industrial robot (1) comprising a first robot part (3) and a second robot part (6) arranged to be moved in relation to each other, and a balancing device (8), arranged there between, wherein the balancing device (8) is arranged to counteract the gravitational force upon relative movement of the robot parts (3, 6). Said balancing device comprising a mechanical spring means (10) and a spring housing (15) arranged enclosing the spring means. The spring housing (15) comprises at least one air inlet (23) adapted for pressurized air supply.
Abstract:
A wafer handling robot (100) is disclosed for transporting workpieces. The robot includes a base (102) comprising a rigid backbone (112) for providing stability to the robot. The base further includes a mast (116), a linear drive system (122) for translating the mast, and a shoulder drive system (120) for rotating the mast. The shoulder drive system includes a harmonic drive reduction system (138) for providing output rotation of the mast for rotation with the mast, and a distal link (106) rotatably mounted to the proximal link. An end effector (108) for supporting workpieces is rotationally mounted to the distal end of the distal link. An elbow drive (150) is mounted to the proximal link, extending down into the mast section, for driving rotation of the distal link with respect to the proximal link.
Abstract:
According to a first embodiment, an apparatus for shielding a movable articulated structure (12) such as robot arm to be protected from a hard working environment comprises one or more shielding sections (14, 18, 22, 26) forming with the outer surface of the robot arm a cavity which is filled with pressurized air. Adjacent portions of the shielding sections are coupled through a rotary joint (35, 52, 82) allowing escape of the pressurized air out of the cavity while maintaining within the cavity a positive pressure relative to the ambient environment pressure which is sufficient to substantially prevent contamination of the robot arm from the working environment. According to a second embodiment, the apparatus (210) comprises a shielding cover comprised of one or more cover sections (214, 218) forming with the outer surface of the robot arm (212) a cavity which is filled with pressurized air. A positive gas pressure relative to environment ambient pressure is maintained which is sufficient to substantially prevent contamination of the robot arm from the working environment. The cover section is essentially made of a substantially gastight and impermeable flexible material which is sufficiently stiff to provide the cover section with sufficiently smooth and stiff outer surface under the positive pressure, to substantially prevent physical contact between the robot arm outer surface and the cover section which could otherwise result in cover damage.
Abstract:
An object transport apparatus (10) is provided for the purpose of transporting an object (19), usually a semiconductor wafer, to various points within a planar circular zone (Z). The transport apparatus (10) includes a motive power subassembly (12) for generating rotational motion and delivering it to an arm subassembly (14) rotating about an elbow axis (20) and, through an eccentric drive subassembly (110) to a hand subassembly (16) adapted to support to wafer (19). The hand subassembly (16) rotates about a wrist axis (21) which is parallel to but displaced from the elbow axis (20) in an independent fashion from the rotation of the arm subassembly (14). The eccentric drive subassembly (110) incorporates complimentary pairs of cam drivers (111, 112) connected by cam linkages (120, 122) to deliver rotational motion from the elbow axis (20) to the wrist axis (21). The apparatus (10) is particularly useful in the semiconductor manufacturing field where it may be used for a variety of tasks, primarily in delivering wafers (19) from one workstation position to another in a precisely controllable manner.
Abstract:
A protective drape for a robotic system is provided. The protective drape may be used with robotic systems that are required to operate in varied environments that illustratively include industrial applications, a sterile surgical suite for patient care, and a clean room for manufacturing sensitive electronic components. In each of these applications, there is a need to prevent contaminants from infiltrating from the environment to the robot and affecting operation of the robot itself or the robotic system, as well to prevent contaminants from the robot from infecting a patient or contaminating an assembly or process product.