公开(公告)号：WO2017185101A1

公开(公告)日：2017-10-26

申请号：PCT/US2017/029215

申请日：2017-04-24

Applicant: KLA-TENCOR CORPORATION

Inventor： BYKANOV, Alexander ,  ARTEMIEV, Nikolay ,  DIREGOLO, Joseph ,  VIATELLA, John

IPC: G02B27/09 ,  G02B6/42 ,  G01N23/04

CPC classification number: G01N23/201 ,  G01N2223/054 ,  G01N2223/309 ,  G01N2223/316 ,  G21K1/04 ,  G21K7/00

Abstract: Methods and systems for reducing the effect of finite source size on illumination beam spot size for Transmission, Small-Angle X-ray Scatterometry (T-SAXS) measurements are described herein. A beam shaping slit having a slender profile is located in close proximity to the specimen under measurement and does not interfere with wafer stage components over the full range of angles of beam incidence. In one embodiment, four independently actuated beam shaping slits are employed to effectively block a portion of an incoming x-ray beam and generate an output beam having a box shaped illumination cross-section. In one aspect, each of the beam shaping slits is located at a different distance from the specimen in a direction aligned with the beam axis. In another aspect, the beam shaping slits are configured to rotate about the beam axis in coordination with the orientation of the specimen.

Abstract translation: 本文描述了用于减小传输小角X射线散射测量（T-SAXS）测量的有限光源尺寸对照射束点大小的影响的方法和系统。 具有细长轮廓的光束成形狭缝位于被测样本附近，并且不会在光束入射角的整个范围内与晶圆台部件相互干扰。 在一个实施例中，采用四个独立致动的光束成形缝隙来有效地阻挡进入的X射线束的一部分并且生成具有盒形照射横截面的输出束。 在一个方面，每个光束成形狭缝在与光束轴线对准的方向上位于与样本不同的距离处。 在另一方面，光束成形狭缝被配置成与样本的方向一致地围绕光束轴线旋转。

公开(公告)号：WO2015127420A1

公开(公告)日：2015-08-27

申请号：PCT/US2015/017218

申请日：2015-02-24

Applicant: RIGAKU INNOVATIVE TECHNOLOGIES, INC.

Inventor： JIANG, Licai ,  PENNARTZ, Paul, Ulrich

IPC: G21K1/02

CPC classification number: G01N23/201 ,  G21K1/02 ,  G21K1/025 ,  G21K1/04 ,  G21K2201/062

Abstract: An assembly for Kratky collimator is provided. The assembly may be used for a small angle x-ray camera or system requiring such filtering. The assembly may include a first block with a first working surface and a second block with a second working surface. The first and second blocks may be aligned with the first working surface pointing an opposite direction of the second working surface and the first working surface being aligned in a common plane with the second working surface. In some implementations, the first block may comprise a crystal material. In some implementations, an extension may of the first block may be configured position a beamstop.

Abstract translation: 提供了Kratky准直器的组件。 组件可用于需要这种过滤的小角度X射线摄像机或系统。 组件可以包括具有第一工作表面的第一块和具有第二工作表面的第二块。 第一和第二块可以与第一工作表面对准，其指向第二工作表面的相反方向，并且第一工作表面与第二工作表面在公共平面中对准。 在一些实施方案中，第一块可以包括晶体材料。 在一些实施方案中，第一块的延伸部可以被配置为定位梁挡。

公开(公告)号：WO2015118540A1

公开(公告)日：2015-08-13

申请号：PCT/IL2015/050135

申请日：2015-02-05

Applicant: BAR ILAN UNIVERSITY

Inventor： ZALEVSKY, Zeev ,  SCHWARZ, Moshe Arie Ariel ,  SHEMER, Amir ,  ZLOTNIK, Alexander

IPC: G02B27/46 ,  G02B26/06

CPC classification number: H04N13/122 ,  G01T1/295 ,  G02B5/201 ,  G02B26/06 ,  G02B27/2264 ,  G02B27/46 ,  G02B2207/129 ,  G06T5/001 ,  G06T5/006 ,  G21K1/04 ,  H04N13/133 ,  H04N13/211 ,  H04N13/218 ,  H04N2013/0081 ,  H04N2013/0092

Abstract: A method and system are provided, for imaging a region of interest with pinhole based imaging. The method comprising: collecting input radiation from the region of interest through a selected set of a plurality of a predetermined number of aperture arrays, each array having a predetermined arrangement of apertures and collecting the input radiation during a collection time period, wherein said selected set of the aperture arrays and the corresponding collection time periods defining a total effective transmission function of the radiation collection, generating image data from the collected input radiation, said image data comprising said predetermined number of image data pieces corresponding to the input radiation collected through the aperture arrays respectively, processing the image data pieces utilizing said total effective transmission function of the radiation collection, and determining a restored image of the region of interest. The set of aperture arrays is preferably selected such that said total effective transmission function provides non-null transmission for spatial frequencies being lower than a predetermined maximal spatial frequency.

Abstract translation: 提供了一种方法和系统，用于利用针孔成像来成像感兴趣的区域。 该方法包括：通过选定的多个预定数量的孔阵列收集来自感兴趣区域的输入辐射，每个阵列具有预定排列的孔，并在收集时间段收集输入辐射，其中所述选定的组 并且相应的收集时间段定义了辐射采集的总有效传输功能，从收集的输入辐射产生图像数据，所述图像数据包括与通过孔收集的输入辐射对应的所述预定数量的图像数据片段 分别利用所述辐射采集的所述总有效传输功能处理所述图像数据片段，以及确定所述感兴趣区域的恢复图像。 优选选择一组孔径阵列，使得所述总有效传输功能为空间频率低于预定最大空间频率提供非零传输。

公开(公告)号：WO2014054755A1

公开(公告)日：2014-04-10

申请号：PCT/JP2013/076988

申请日：2013-10-03

Applicant: 株式会社日立製作所

Inventor： 鈴木　敦郎 ,  石津　崇章 ,  高橋　勲 ,  竹内　渉 ,  小橋　啓司

IPC: G01T7/00 ,  G01T1/161 ,  G01T1/164

CPC classification number: G21K1/02 ,  G01N23/046 ,  G01T1/1648 ,  G21K1/025 ,  G21K1/04

Abstract: コリメータと検出器との位置ずれを修正し、アーチファクトのない画像が得られる放射線撮像装置を提供する。放射線を測定する検出器（２１）と、１つまたは複数の検出器（２１）が配置される貫通穴（２７）を有し、放射線の入射方向を制限するコリメータ（２６）と、所定の検出器（２１）に対応して配置された線源に基づいて検出器（２１）が測定した線源のプロファイルにより、検出器（２１）とコリメータ（２６）との位置ずれを測定する位置ずれ測定手段と、を具備した構成とした。

Abstract translation: 提供了一种放射线成像装置，其校正准直器和检测器之间的位置偏移，并且可以获得无伪影的图像。 该装置被配置成设置有用于测量辐射的检测器（21），具有通孔（27）的准直器（26），其中设置有一个或多个检测器（21）并限制其中的方向 以及位置偏移测量装置，其通过由检测器（21）基于辐射测量的辐射源的轮廓来测量检测器（21）和准直器（26）之间的位置偏移 源设置成对应于规定的检测器（21）。

公开(公告)号：WO2013182928A1

公开(公告)日：2013-12-12

申请号：PCT/IB2013/054003

申请日：2013-05-16

Applicant: KONINKLIJKE PHILIPS N.V. ,  PHILIPS DEUTSCHLAND GMBH

Inventor： BREDNO, Joerg ,  HANSIS, Eberhard Sebastian

IPC: A61B6/00 ,  G06T11/00 ,  A61B6/03

CPC classification number: A61B6/584 ,  A61B6/032 ,  A61B6/4035 ,  A61B6/42 ,  A61B6/4233 ,  A61B6/4441 ,  A61B6/5205 ,  A61B6/58 ,  A61B6/582 ,  A61B6/583 ,  G01N23/046 ,  G06T11/005 ,  G06T2211/412 ,  G21K1/025 ,  G21K1/04

Abstract: An x-ray computed tomography system (14) includes a gantry (15), a plurality of elements (18), and one or more processors (28). The gantry (15) moves to different orientations and generates x-ray data which includes image projection data at a plurality of the orientations. The plurality of elements (18) connect to the gantry and cause x-ray attenuation of the generated projection data. The one or more processors (28) are programmed to receive (60) the generated x-ray data and decompose (62) the received image projection data into indications of relative positions of the plurality of elements at different orientations of the gantry.

Abstract translation: X射线计算机断层摄影系统（14）包括台架（15），多个元件（18）和一个或多个处理器（28）。 台架（15）移动到不同的方向，并产生包括多个取向的图像投影数据的X射线数据。 所述多个元件（18）连接到所述台架并且引起所产生的投影数据的x射线衰减。 一个或多个处理器（28）被编程为接收（60）生成的x射线数据，并且将接收到的图像投影数据分解（62）成为在台架的不同取向处的多个元件的相对位置的指示。

公开(公告)号：WO2012089535A1

公开(公告)日：2012-07-05

申请号：PCT/EP2011/073051

申请日：2011-12-16

Applicant: DEUTSCHES KREBSFORSCHUNGSZENTRUM ,  ECHNER, Gernot

Inventor： ECHNER, Gernot

IPC: A61N5/10 ,  G21K1/04

CPC classification number: G21K1/04 ,  A61N5/1045 ,  G21K1/046

Abstract: The invention relates to a multi-leaf collimator (1) with leaf drives (2), with two sets (4, 4') of displaceable leaves (3, 3', 3",...) arranged side by side of each other and facing each other in order to impress a high-energy beam (5) with the shape of an irregularly formed treatment object (6) by enabling each of the leaves (2) to assume a position oriented along the shape of the treatment object (6) by means of a leaf drive (2), with the leaf drives (2) being designed in such a way that the leaves (3, 3', 3",...) are each equipped with a gear rod-like drive engagement (8, 8', 8",....) in the direction of the displacement (7). The invention facilitates a design of leaf drives as compact and lightweight as possible and an advantageous arrangement in an irradiation head due to the fact that a leaf-side pivotable gear segment (9, 9', 9",... ) located, together with a motor-side gear segment (10, 10', 10",...), on a segment disk (11, 11', 11",...) engages with the gear rod-like drive engagement (8, 8', 8",....), with a pinion (13) drivable by a motor (12) engaging with the motor-side gear segment (10, 10', 10',...); that the segment discs (11, 11', 11",...) are arranged side by side for each set (4, 4') of leaves (3, 3', 3",...) as a package (15) on one axis (14); and that the motor-side gear segments (10, 10', 10",...) of two segment disks (11, 11', 11",...) located next to each other are staggered in such a way that they will not abut each other; that the segment disks (11, 11', 11",...) are positioned on a radiation source-facing side (46) of the leaves (3, 3', 3",...); and that the segment disks (11, 11', 11",...) have a radius (R) that is comparable to a predefined range of displacement (D) of the leaves (3, 3', 3",...).

Abstract translation: 本发明涉及具有叶驱动器（2）的多叶准直器（1），具有两个（2,4'，4'）的可移位叶片（3,3'，3“，...）并排布置 另一个并且彼此面对以通过使得每个叶子（2）能够呈现沿着处理对象的形状定位的位置来压印具有不规则形成的处理对象（6）的形状的高能束（5） （6）通过叶片驱动器（2），叶片驱动器（2）被设计成使叶子（3,3'，3“，...）各自装备有齿轮杆 - 类似的驱动接合（8,8'，8“，...）在移动方向（7）上。本发明有利于叶片驱动器的设计尽可能紧凑和轻便，并且在照射头中有利的布置 与叶片侧可枢转齿轮段（9,9'，9“，...）一起位于马达侧齿轮段（10,10'，10”，...）上的事实上， 分段盘（11,11'，11“，...）与齿轮杆状驱动装置啮合 具有与电动机侧齿轮段（10,10'，10'...）接合的电动机（12）驱动的小齿轮（13），其中，所述电动机（8,8'，8“，...） ; 对于作为包装的叶片（3,3'，3“，...）的每组（4,4'），分段盘片（11,11'，11”，...）并排布置 15）在一个轴（14）上; 彼此相邻的两个分段盘（11,11'，11“，...）的电机侧齿轮段（10,10'，10”，...）交错排列，使得 他们不会相互抵触; 分段盘（11,11'，11“，...）位于叶片（3,3'，3”，...）的面向辐射源的一侧（46）上; 并且分段盘（11,11'，11“，...）具有与叶片（3,3'，3”，...的预定位移范围（D）相当的半径（R） ）。

公开(公告)号：WO2010133920A1

公开(公告)日：2010-11-25

申请号：PCT/IB2009/052121

申请日：2009-05-20

Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V. ,  PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH ,  SIMON, Matthias ,  VOGTMEIER, Gereon

Inventor： SIMON, Matthias ,  VOGTMEIER, Gereon

IPC: G21K1/02

CPC classification number: G21K1/025 ,  A61B6/032 ,  A61B6/037 ,  A61B6/4028 ,  A61B6/4291 ,  A61B6/587 ,  G21K1/04

Abstract: The invention relates to an anti-scatter arrangement as well as to a radiation detector (110) and an examination apparatus comprising such an arrangement. The anti-scatter arrangement comprises an actuator (113) by which an anti-scatter grid (111) can be tilted such that its focus axis (A) can be adjusted to different focal spots (F) of a radiation source (120).

Abstract translation: 本发明涉及一种防散射装置以及一种辐射检测器（110）和包括这种装置的检查装置。 防散射布置包括致动器（113），通过该致动器113可以使防散射栅格（111）倾斜，使得其焦点轴线（A）可以被调节到辐射源（120）的不同焦点（F）。

公开(公告)号：WO2007012933A3

公开(公告)日：2008-07-17

申请号：PCT/IB2006001899

申请日：2006-02-28

Applicant: CADMAN PATRICK F

IPC: A61N5/10 ,  G21K1/04

CPC classification number: A61N5/1042 ,  G21K1/04 ,  G21K1/046

Abstract: An apparatus and method to deliver intensity modulated radiation therapy by irradiating a treatment volume with rotation of the radiation beam. The system includes a collimation device comprising a two-dimensional array of pivoting attenuating leaves, which are temporarily placed into the radiation beam path as the gantry rotates around the patient. The leaves are independently movable between a first position and a second position. The radiation beam intensity is modulated by controlling the time that each leaf is present to attenuate the beam.

Abstract translation: 一种通过辐射束旋转照射治疗体积来递送强度调制放射治疗的装置和方法。 该系统包括准直装置，其包括枢转衰减叶片的二维阵列，当台架围绕患者旋转时临时放置在辐射束路径中。 叶片可独立地在第一位置和第二位置之间移动。 通过控制每个叶片存在的时间来衰减光束来调制辐射束强度。

公开(公告)号：WO2008076035A1

公开(公告)日：2008-06-26

申请号：PCT/SE2007/001090

申请日：2007-12-07

Applicant: C-RAD INNOVATION AB ,  SVENSSON, Roger ,  BRAHME, Anders

Inventor： SVENSSON, Roger ,  BRAHME, Anders

IPC: G21K1/04 ,  A61N5/10 ,  G02B27/30 ,  G21K5/00

CPC classification number: A61N5/1042 ,  A61N5/1037 ,  G02B27/30 ,  G21K1/04 ,  G21K1/046

Abstract: The invention relates to a collimator (1) primarily adapted for usage in a narrow scanned pencil beam radiation therapy system (100). The collimator comprises adjacent pairs (5) of collimator leaves (10, 20). An inner portion (12) of a collimator leaf (10) facing the opposite leaf (20) of a pair (5) is made of a first material having high linear radiation attenuation. The remaining, major portion (14) of the leaf (10) is made of a second material having a comparatively low density, weight and radiation attenuation. The collimator (1) provides effective penumbra trimming of a radiation beam (60), while simultaneously protecting healthy tissue around a tumor in an irradiated patient (80) from the radiation. The new design results in a significantly more compact, lighter and less expensive collimator (1) as compared to traditional collimators.

Abstract translation: 本发明涉及一种主要适用于窄扫描线束辐射治疗系统（100）的准直仪（1）。 准直器包括准直器叶片（10,20）的相邻对（5）。 准直仪叶片（10）的面对一对（5）的相对叶片（20）的内部部分（12）由具有高线性辐射衰减的第一材料制成。 叶片（10）的剩余的主要部分（14）由具有相对低密度，重量和辐射衰减的第二材料制成。 准直器（1）提供对辐射束（60）的有效半暗带修剪，同时保护被照射的患者（80）中的辐射周围的肿瘤周围的健康组织。 与传统的准直仪相比，新的设计产生了更小巧，更轻和更便宜的准直仪（1）。

公开(公告)号：WO2007111672A9

公开(公告)日：2008-02-14

申请号：PCT/US2006049047

申请日：2006-12-21

Applicant: AMERICAN SCIENCE & ENG INC ,  CASON WILLIAM RANDALL ,  ROTHSCHILD PETER J

Inventor： CASON WILLIAM RANDALL ,  ROTHSCHILD PETER J

IPC: G02B26/10 ,  G02B21/00 ,  G21K5/04

CPC classification number: G21K1/04 ,  G02B26/10 ,  G21K1/043

Abstract: Devices and methods for collimation of a penetrating radiation source, such as an x- ray source, for the purpose of creating a scanning beam, as might be employed for purposes of imaging. A first scanning element, constrained to move about a first axis, has at least one aperture for scanning radiation from inside the first scanning element to outside the first scanning element. A second- scanning element constrained to move with respect to a second axis, typically identical to the first, has at least one aperture for scanning radiation that has been transmitted through the first scanning element across a region of an inspected object.

Abstract translation: 用于准直透射辐射源（例如x射线源）的装置和方法，用于产生可能用于成像目的的扫描光束。 被限制为围绕第一轴线移动的第一扫描元件具有至少一个用于将第一扫描元件内部的辐射扫描到第一扫描元件之外的孔。 被限制为相对于第二轴移动的第二扫描元件通常与第一轴相同，具有至少一个用于扫描通过第一扫描元件穿过被检查对象的区域的辐射的孔。