- 专利标题: Method to improve fill-in window for embedded memory
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申请号: US16051721申请日: 2018-08-01
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公开(公告)号: US10784270B2公开(公告)日: 2020-09-22
- 发明人: Meng-Han Lin , Te-Hsin Chiu , Wei Cheng Wu
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L27/11536
- IPC分类号: H01L27/11536 ; H01L29/788 ; H01L29/423 ; H01L29/49 ; H01L29/08 ; H01L29/66 ; H01L21/3213 ; H01L21/28 ; H01L21/311 ; H01L21/768 ; H01L21/762 ; H01L21/3105 ; H01L21/321 ; H01L21/027 ; H01L27/11521
摘要:
Various embodiments of the present application are directed to an IC, and associated forming methods. In some embodiments, the IC comprises a memory region and a logic region integrated in a substrate. A plurality of memory cell structures is disposed on the memory region. A plurality of logic devices is disposed on the logic region. A sidewall spacer is disposed along a sidewall surface of the logic devices, but not disposed along a sidewall surface of the memory cell structures. Thus, the inter-layer dielectric (ILD) fill-in window between adjacent memory cell structures is enlarged, compared to the approaches where the sidewall spacer is concurrently formed in both memory region and the logic region. Thereby, voids formation would be reduced or eliminated, and device quality would be improved.
公开/授权文献
- US20190393234A1 METHOD TO IMPROVE FILL-IN WINDOW FOR EMBEDDED MEMORY 公开/授权日:2019-12-26
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