Invention Grant
- Patent Title: Device, system and method for improved magnetic anisotropy of a magnetic tunnel junction
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Application No.: US16097801Application Date: 2016-07-01
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Publication No.: US10804460B2Publication Date: 2020-10-13
- Inventor: MD Tofizur Rahman , Christopher J. Wiegand , Brian Maertz , Daniel G. Ouellette , Kevin P. O'Brien , Kaan Oguz , Brian S. Doyle , Mark L. Doczy , Daniel B. Bergstrom , Justin S. Brockman , Oleg Golonzka , Tahir Ghani
- Applicant: MD Tofizur Rahman , Christopher J. Wiegand , Brian Maertz , Daniel G. Ouellette , Kaan Oguz , Brian S. Doyle , Mark L. Doczy , Daniel B. Bergstrom , Justin S. Brockman , Oleg Golonzka , Tahir Ghani , Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2016/040875 WO 20160701
- International Announcement: WO2018/004698 WO 20180104
- Main IPC: H01L29/82
- IPC: H01L29/82 ; H01L43/12 ; H01L43/08 ; H01L43/10 ; G11C11/16 ; H01L43/02

Abstract:
Material layer stack structures to provide a magnetic tunnel junction (MTJ) having improved perpendicular magnetic anisotropy (PMA) characteristics. In an embodiment, a free magnetic layer of the material layer stack is disposed between a tunnel barrier layer and a cap layer of magnesium oxide (Mg). The free magnetic layer includes a Cobalt-Iron-Boron (CoFeB) body substantially comprised of a combination of Cobalt atoms, Iron atoms and Boron atoms. A first Boron mass fraction of the CoFeB body is equal to or more than 25% (e.g., equal to or more than 27%) in a first region which adjoins an interface of the free magnetic layer with the tunnel barrier layer. In another embodiment, the first Boron mass fraction is more than a second Boron mass fraction in a second region of the CoFeB body which adjoins an interface of the free magnetic layer with the cap layer.
Public/Granted literature
- US20190140166A1 DEVICE, SYSTEM AND METHOD FOR IMPROVED MAGNETIC ANISOTROPY OF A MAGNETIC TUNNEL JUNCTION Public/Granted day:2019-05-09
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