Invention Grant
- Patent Title: Embedded memory with improved fill-in window
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Application No.: US17104686Application Date: 2020-11-25
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Publication No.: US11488971B2Publication Date: 2022-11-01
- Inventor: Meng-Han Lin , Te-Hsin Chiu , Wei Cheng Wu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/11536
- IPC: H01L27/11536 ; H01L21/027 ; H01L21/28 ; H01L21/3105 ; H01L21/311 ; H01L21/321 ; H01L21/3213 ; H01L21/762 ; H01L21/768 ; H01L27/11521 ; H01L29/08 ; H01L29/423 ; H01L29/49 ; H01L29/66 ; H01L29/788 ; H01L27/11524 ; H01L27/11529 ; H01L27/11531 ; H01L27/1157 ; H01L27/11573 ; H01L21/8234

Abstract:
Various embodiments of the present application are directed to an IC, and associated forming methods. In some embodiments, the IC comprises a memory region and a logic region integrated in a substrate. A memory cell structure is disposed on the memory region. A logic device is disposed on the logic region having a logic gate electrode separated from the substrate by a logic gate dielectric. A sidewall spacer is disposed along a sidewall surface of the logic gate electrode. A contact etch stop layer (CESL) is disposed along an upper surface of the substrate, extending upwardly along and in direct contact with sidewall surfaces of the pair of select gate electrodes within the memory region, and extending upwardly along the sidewall spacer within the logic region.
Public/Granted literature
- US20210082932A1 EMBEDDED MEMORY WITH IMPROVED FILL-IN WINDOW Public/Granted day:2021-03-18
Information query
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