发明申请
- 专利标题: NONVOLATILE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
- 专利标题(中): 非易失性存储器件及其制造方法
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申请号: US13097479申请日: 2011-04-29
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公开(公告)号: US20110204430A1公开(公告)日: 2011-08-25
- 发明人: Se Jun KIM , Eun Seok CHOI , Kyoung Hwan PARK , Hyun Seung YOO , Myung Shik LEE , Young Ok HONG , Jung Ryul AHN , Yong Top KIM , Kyung Pil HWANG , Won Sic WOO , Jae Young PARK , Ki Hong LEE , Ki Seon PARK , Moon Sig JOO
- 申请人: Se Jun KIM , Eun Seok CHOI , Kyoung Hwan PARK , Hyun Seung YOO , Myung Shik LEE , Young Ok HONG , Jung Ryul AHN , Yong Top KIM , Kyung Pil HWANG , Won Sic WOO , Jae Young PARK , Ki Hong LEE , Ki Seon PARK , Moon Sig JOO
- 申请人地址: JP Icheon-si
- 专利权人: HYNIX SEMICONDUCTOR INC.
- 当前专利权人: HYNIX SEMICONDUCTOR INC.
- 当前专利权人地址: JP Icheon-si
- 优先权: KR10-2007-0028001 20070322; KR10-2007-0042979 20070503; KR10-2007-0063605 20070627; KR10-2007-0091555 20070910
- 主分类号: H01L29/792
- IPC分类号: H01L29/792 ; B82Y99/00
摘要:
A nonvolatile memory device and a method of fabricating the same is provided to prevent charges stored in a charge trap layer from moving to neighboring memory cells. The method of fabricating a nonvolatile memory device, includes forming a first dielectric layer on a semiconductor substrate in which active regions are defined by isolation layers, forming a charge trap layer on the first dielectric layer, removing the first dielectric layer and the charge trap layer over the isolation layers, forming a second dielectric layer on the isolation layers including the charge trap layer, and forming a conductive layer on the second dielectric layer.
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