Invention Grant
- Patent Title: Rotary EUV collector
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Application No.: US15249989Application Date: 2016-08-29
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Publication No.: US09665007B2Publication Date: 2017-05-30
- Inventor: Shang-Chieh Chien , Shu-Hao Chang , Jui-Ching Wu , Tsung-Yu Chen , Tzu-Hsiang Chen , Ming-Chin Chien , Chia-Chen Chen , Jeng-Horng Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: G02B7/182
- IPC: G02B7/182 ; G02B27/32 ; G02B27/52 ; G02B27/54 ; G03F7/20 ; G02B5/08 ; G21K1/06

Abstract:
An EUV collector is rotated between or during operations of an EUV photolithography system. Rotating the EUV collector causes contamination to distribute more evenly over the collector's surface. This reduces the rate at which the EUV photolithography system loses image fidelity with increasing contamination and thereby increases the collector lifetime. Rotating the collector during operation of the EUV photolithography system can induce convection and reduce the contamination rate. By rotating the collector at sufficient speed, some contaminating debris can be removed through the action of centrifugal force.
Public/Granted literature
- US20160370705A1 ROTARY EUV COLLECTOR Public/Granted day:2016-12-22
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