公开(公告)号：EP4113573A1

公开(公告)日：2023-01-04

申请号：EP21182936.1

申请日：2021-06-30

申请人： FEI Company

发明人： Bischoff, Maarten ,  Freitag, Bert

IPC分类号： H01J37/26

摘要： The disclosure relates to a method for examining a sample in a scanning transmission charged particle microscope. The method comprises the steps of providing a scanning transmission charged particle microscope, having an illuminator and a scanning unit. The method comprises the steps of providing a desired dose for at least a first sample location of said plurality of sample locations; and determining, using a controller of the microscope, a first set of parameter settings for said illuminator and said scanning unit for substantially achieving said desired dose at said first sample location.

公开(公告)号：EP3951829A1

公开(公告)日：2022-02-09

申请号：EP21189151.0

申请日：2021-08-02

申请人： FEI Company

发明人： Kieft, Erik ,  Freitag, Bert

IPC分类号： H01J37/04 ,  H01J37/28

摘要： Disclosed herein are systems and methods for pulsing electron beams and synchronizing the pulsed electron beam with scanning a sample at a plurality of scan locations. An example method at least includes pulsing an electron beam to form a pulsed electron beam having a pulse period, moving the pulsed electron beam to interact with a sample at a plurality of locations, the interaction at each of the plurality of locations occurring for a dwell time, and synchronizing data acquisition of the interaction of the pulsed electron beam with the sample based on the pulsing and the translating of the electron beam, wherein the dwell time is based on a derivative of the pulse period.

公开(公告)号：EP2197019B1

公开(公告)日：2016-03-23

申请号：EP09178789.5

申请日：2009-12-11

申请人： FEI Company

发明人： Von Harrach, Hanno ,  Freitag, Bert ,  Dona, Pleun

IPC分类号： H01J37/244 ,  H01J37/26

CPC分类号： H01J37/244 ,  G01N23/225 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/2442 ,  H01J2237/28 ,  H01J2237/2802

公开(公告)号：EP2387062B1

公开(公告)日：2012-10-17

申请号：EP11165383.8

申请日：2011-05-10

申请人： FEI Company

发明人： Tiemeijer, Peter ,  Freitag, Bert ,  Lazar, Sorin

IPC分类号： H01J37/28 ,  H01J37/05

CPC分类号： H01J37/05 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/2802 ,  H01J2237/2804

公开(公告)号：EP2388796A1

公开(公告)日：2011-11-23

申请号：EP10163505.0

申请日：2010-05-21

申请人： FEI Company

发明人： Tiemeijer, Peter ,  Freitag, Bert ,  Lazar, Sorin

IPC分类号： H01J37/28 ,  H01J37/05

CPC分类号： H01J37/05 ,  H01J37/28 ,  H01J2237/057 ,  H01J2237/2802 ,  H01J2237/2804

摘要： The invention provides multiple detectors (334,426;340,420,502,826L,702) that detect electrons that have passed through a sample. The detectors preferably detect electrons after the electrons have been passed through a prism (322,412) that separates electrons according to their energies. Electrons in different energy ranges are then detected by different detectors, with preferably at least one (334,426) of the detectors measuring the energy lost by the electrons as they pass through the sample. One embodiment of the invention provides EELS on core-loss electrons while simultaneously providing a bright-field STEM signal from low-loss electrons.

摘要翻译： 本发明提供了检测已经通过样品的电子的多个检测器（334,426; 340,420,502,826L，702）。 检测器优选在电子通过通过根据其能量分离电子的棱镜（322,412）之后检测电子。 不同能量范围的电子然后由不同的检测器检测，优选地，至少一个（334,426）检测器测量当电子通过样品时由电子损失的能量。 本发明的一个实施例在核心损耗电子上提供EELS，同时从低损耗电子提供亮场STEM信号。

公开(公告)号：EP2197019A2

公开(公告)日：2010-06-16

申请号：EP09178789.5

申请日：2009-12-11

申请人： FEI Company

发明人： Von Harrach, Hanno ,  Freitag, Bert ,  Dona, Pleun

IPC分类号： H01J37/244 ,  H01J37/26

CPC分类号： H01J37/244 ,  G01N23/225 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/2442 ,  H01J2237/28 ,  H01J2237/2802

摘要： Multiple detectors (202) arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors (202) preferably include a shutter (108) and a cold shield (110) that reduce ice formation on the detector (202). By providing detectors (202) surrounding the sample (204), a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample (204) tilt.

摘要翻译： 设置在试样室内的环中的多个检测器（202）提供大的立体收集角。 检测器（202）优选地包括减少检测器（202）上的冰的快门（108）和冷屏蔽（110）。 通过提供围绕样品（204）的检测器（202），提供大的立体角以改善检测，并且检测X射线，而不管样品（204）倾斜的方向如何。

公开(公告)号：EP2151847A1

公开(公告)日：2010-02-10

申请号：EP09167310.3

申请日：2009-08-06

申请人： FEI COMPANY

发明人： Botman, Aurelién ,  Freitag, Bert ,  Mulders, Johannes

IPC分类号： H01J37/317 ,  G01N1/28 ,  H01L21/31 ,  H01L21/3205

CPC分类号： G01N1/286 ,  G01N1/32 ,  H01J37/317 ,  H01J37/3178 ,  H01J2237/31745

摘要： The invention relates to a method for producing high-quality samples for e.g. TEM inspection. When thinning samples with e.g. a Focused Ion Beam apparatus (FIB), the sample often oxidizes when taken from the FIB due to the exposure to air. This results in low-quality samples, that may be unfit for further analysis. By forming a passivation layer, preferably a hydrogen passivation layer, on the sample in situ , that is: before taking the sample from the FIB, high quality samples are obtained.

摘要翻译： 生产高质量样品的方法本发明涉及一种生产高质量样品的方法， TEM检查。 当用例如 聚焦离子束装置（FIB）中，由于暴露于空气中，从FIB中取样时样品经常会氧化。 这导致低质量的样品，这可能不适合进一步分析。 通过在样品上原位形成钝化层，优选氢钝化层，即：在从FIB取样品之前，获得高质量样品。

公开(公告)号：EP2063449A1

公开(公告)日：2009-05-27

申请号：EP08169468.9

申请日：2008-11-20

申请人： FEI COMPANY

发明人： Sourty, Erwan ,  Luecken, Uwe ,  Freitag, Bert ,  Yakushevska, Alevtyna

IPC分类号： H01J37/28

CPC分类号： H01J37/263 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2802 ,  H01J2237/2803 ,  H01J2237/2809

摘要： The invention discloses a method for Scanning Transmission Electron Microscopy (STEM). In STEM a sample (1) is scanned with a focused beam of electrons (2). The diameter of the cross-over (3) can be as low as 0.1 nm. As known to the person skilled in the art the diameter of the cross-over depends on the opening half-angle α of the beam. Therefore for optimum resolution an opening half-angle is chosen at which the diameter of the cross-over R(α) shows a minimum.
For thick samples however the resolution is, for those parts of the sample removed from the cross-over plane, limited by the convergence of the beam, resulting in a diameter D of the beam at the surface of the sample.
According to the invention the opening angle is chosen to balance the contribution of convergence and of diameter of the cross-over by choosing an opening half-angle smaller than the optimum opening half-angle. Effectively the sample is then scanned with a beam that has a substantially constant diameter over the length of the sample material through which the electrons have to travel.

摘要翻译： 本发明公开了一种扫描透射电子显微镜（STEM）的方法。 在STEM中，用聚焦的电子束扫描样品（1）（2）。 交叉（3）的直径可以低至0.1nm。 如本领域技术人员所知，交叉的直径取决于梁的开口半角±。 因此，为了获得最佳分辨率，选择开口半角，其中交叉R（±）的直径显示为最小值。 然而，对于厚样品，对于从交叉平面移除的样品的那些部分，由束的会聚限制，导致样品表面处的束的直径D。 根据本发明，通过选择小于最佳开口半角的开口半角度来选择打开角度以平衡会聚的贡献和交叉的直径。 然后有效地将样品用在电子必须行进的样品材料的长度上具有基本恒定直径的光束进行扫描。