OPTICAL INSPECTION DEVICE AND LITHOGRAPHIC APPARATUS PROVIDED WITH SUCH A DEVICE
    22.
    发明公开
    OPTICAL INSPECTION DEVICE AND LITHOGRAPHIC APPARATUS PROVIDED WITH SUCH A DEVICE 失效
    光学测试仪和利用这样的装置提供的石版

    公开(公告)号:EP0894262A1

    公开(公告)日:1999-02-03

    申请号:EP97940305.0

    申请日:1997-09-29

    Abstract: A description is given of an optical inspection device for inspecting two oppositely located surfaces (3, 4) of a transparent object (1), for example a lithographic mask. The device is constructed in such a manner that for each inspection beam (a, c) the radiation path to the surface to be inspected (3, 4) is substantially equal to the radiation path from the surface to be inspected to a detector (29, 40), so that these paths comprise the same scanning element (10), preferably a mirror polygon. By virtue thereof, the radiation spots formed on the detectors are stationary and an inspection signal having a good signal-to-noise ratio is obtained.

    SENSOR AND METHOD FOR MEASURING ALCOHOL CONCENTRATION IN AN ALCOHOL-GASOLINE MIXTURE
    24.
    发明公开
    SENSOR AND METHOD FOR MEASURING ALCOHOL CONCENTRATION IN AN ALCOHOL-GASOLINE MIXTURE 失效
    传感器和测量酒精浓度在酒精汽油混合料的方法。

    公开(公告)号:EP0436636A1

    公开(公告)日:1991-07-17

    申请号:EP89911332.0

    申请日:1989-09-27

    Inventor: BOOS, Donald, L.

    Abstract: Détecteur et procédé de mesure de la concentration d'acool dans un mélange alcool/hydrocarbure utilisé pour des véhicules ayant des caractéristiques flexibles d'utilisation de carburant. Le détecteur et le procédé se caractérisent par une paire d'éléments de détection (27, 28) qui détectent l'absorbance de deux bandes de longueur d'ondes différentes d'énergie transmise par le carburant. La première bande ayant une première longueur d'onde est absorbée par l'alcool et n'est pratiquement pas absorbée par les hydrocarbures et autres non-alcools dans le mélange de carburant. La seconde bande de seconde longueur d'onde ou bande de référence est sélectionnée lorsque l'absorbance des alcools et des hydrocarbures est essentiellement la même et de préférence égale à zéro. La sortie des deux détecteurs (27, 28) est proportionnée pour produire un signal représentatif de la teneur en alcool du mélange de carburant. Dans un mode préférentiel de réalisation, les éléments de détection (27, 28) sont inclus dans une thermopile différentielle.

    Analyzer
    25.
    发明公开
    Analyzer 失效
    Analysiergerät。

    公开(公告)号:EP0227062A2

    公开(公告)日:1987-07-01

    申请号:EP86117745.9

    申请日:1986-12-19

    Applicant: HORIBA, LTD.

    CPC classification number: G01J3/108 G01N2201/0636

    Abstract: For enhancing the sensitivity and achieving a more accu­rate measurement with an analyzer comprising a light sour­ce (ll) surrounded by an inside reflective housing connect­ed to a cell (l) and having a detector (l2) arranged at an outlet side (3), the reflective housing is formed by a two curved surfaces body with a light source (l5) and one end side of the cell (l) as focuses so that the scattered light radiating from the light source (l5) is reflected by the inside circumferential surface of the double curved sur­faces body to turn to one end side of the cell (l), the light input side of which is positioned in the other focus (l6). The invention is particularly advantageous for fluid-­modulation type analyzers and avoids expensive collector lenses and/or laser light sources.

    Abstract translation: 为了提高灵敏度并且利用分析器来实现更准确的测量,所述分析器包括被连接到电池(1)并且具有布置在出口侧(3)处的检测器(12))的内部反射壳体包围的光源(11) 反射壳体由具有光源(15)和电池单元(l)的一个端侧的两个弯曲表面体形成为焦点,使得从光源(15)辐射的散射光被反射的内部圆周表面 所述双曲面体转向所述单元(1)的一端侧,所述单元(1)的光输入侧位于所述另一焦点(16)中。 本发明对于流体调制型分析器特别有利,并避免了昂贵的收集透镜和/或激光光源。

    APPARATUS, METHOD AND COMPUTER PROGRAM PRODUCT FOR INSPECTION OF AT LEAST SIDE FACES OF SEMICONDUCTOR DEVICES
    29.
    发明公开
    APPARATUS, METHOD AND COMPUTER PROGRAM PRODUCT FOR INSPECTION OF AT LEAST SIDE FACES OF SEMICONDUCTOR DEVICES 审中-公开
    用于检查半导体器件的最小侧面的装置,方法和计算机程序产品

    公开(公告)号:EP3281219A1

    公开(公告)日:2018-02-14

    申请号:EP15894487.6

    申请日:2015-07-27

    Inventor: TRUYENS, Carl

    Abstract: An apparatus, a method and a computer program product for inspecting at least side faces of a semiconductor device are disclosed. A frame construction is provided, which holds a camera, defining an imaging beam path. The semiconductor device is inserted into a mirror block. The mirror block has a first mirror, a second mirror, a third mirror and a fourth mirror, wherein the mirrors are arranged such that they surround a free space in the form of a rectangle. The opposing first mirror and third mirror are fixedly mounted and the opposing second mirror and fourth mirror movably mounted. A tilted mirror directs an image of the side faces of the semiconductor substrate generated by the mirror block to the camera.

    GAS SENSOR WITH RADIATION GUIDE
    30.
    发明授权
    GAS SENSOR WITH RADIATION GUIDE 有权
    带辐射指南的气体传感器

    公开(公告)号:EP2526404B1

    公开(公告)日:2018-01-10

    申请号:EP11704836.3

    申请日:2011-01-18

    CPC classification number: G01N21/3504 G01N21/031 G01N2201/0636 Y10T156/10

    Abstract: An optical absorption gas sensor includes a radiation source, detector and radiation guide which has a rectangular cross section and curves around a side of the cross section. Locating elements locate a support element relative to the radiation guide to align the radiation source and detector with the guide. Radiation from the reference radiation source may be transmitted through a transparent measurement radiation source. Radiation from a reference radiation source may be directed around the measurement reference source. A light emitting diode may generate radiation which is detected by a photodiode and the photodiode may be driven to generate radiation having a different emission spectrum detectable using the light emitting diode, in another operating mode. Two or more abutting L-shaped radiation guide portions may form the radiation guide.

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