摘要:
The invention relates to a sensor (4) for detecting a rotation rate (8) of an object (6, 20), comprising: - a sensor element (2), which is designed to vibrate at an angle to the rotation axis (10) of the rotation rate (8) to be detected at an excitation frequency on a resetting element (14) fastened in a spatially fixed manner to the object (6, 20), such that the sensor element (2) is deflected at a reaction frequency in a reaction direction (18) at an angle to the rotation axis (10) and at an angle to the vibration direction (16) owing to the Coriolis force (18); and - a measuring transducer (32), which is designed to detect the vibration in the reaction direction (18) - wherein the vibratable sensor element (2) is formed in such a manner that a comparison of a temperature-dependent displacement of a frequency spacing between the excitation frequency and the reaction frequency and a temperature-dependent position (50) of the sensor element (2) on the object (6, 20) satisfies a predefined condition.
摘要:
The invention relates to a micromechanical element (123a), to a component (100) having a micromechanical element (123a), and to a method for producing a component (100). The micromechanical element (123a) comprises a plurality of individual sensor elements (1'a, 2'a, 3'a, 23a), wherein a first physical measurement variable can be measured by means of a first individual sensor element (1'a, 2'a, 3'a, 23a) and a second physical measurement variable can be measured by means of a second individual sensor element (1'a, 2'a, 3'a, 23a).
摘要:
The invention relates to a method for the precise measuring operation of a micromechanical rotation rate sensor, comprising at least one deflectably suspended seismic mass (1, 15, 20), at least one drive system for driving the seismic mass (1, 15, 20), and at least one first (2, 11, 18) and one second (3, 12, 19) trimming electrode element, which are jointly associated directly or indirectly with the seismic mass (1, 15, 20), wherein a first electrical trimming voltage (U T01 , U TL01 , U TR01 ) is set between the first trimming electrode element (2, 11, 18) and the seismic mass (1, 15, 20) and a second electrical trimming voltage (U T02 , U TL02 , U TR02 ) is set between the second trimming electrode element (3, 12, 19) and the seismic mass (1, 15, 20), wherein the first and the second electrical trimming voltage are set at least according to a quadrature parameter (U T ) and a resonance parameter (U f ).
摘要:
Micromechanical acceleration sensor, comprising at least one substrate (1), one or more frames (2, 2a, 2b), of which at least one first frame (2, 2b) is directly or indirectly suspended on the substrate (1) by means of at least one spring element (3, 3b) and is deflected upon the action of at least one first acceleration with respect to the substrate (1), and at least one first seismic mass (9, 9a), which is suspended on the first (2, 2b) or an additional frame (2a) by means of at least one spring element (7, 7a) and is deflected upon the action of an acceleration, which, in particular, differs from the first acceleration, with respect to said frame (2, 2a).
摘要:
Micromechanical rate-of-rotation sensor comprising at least one substrate (30), wherein the base area of the substrate is oriented parallel to the x-y plane of a system of Cartesian coordinates, at least two seismic masses (1, 1a, 1b) and at least one respective suspension spring element (10, 11) for suspension of the seismic mass (1, 1a, 1b) on the substrate (30), wherein the at least two seismic masses (1, 1a, 1b) are coupled to one another by at least one coupling beam (2, 2a, 2b) and at least one of the suspension spring elements (10) comprises at least two beam sections (11) which, in the undeflected state, are oriented substantially parallel to one another or have an angular width of less than 45° with respect to one another, and one or a plurality of connecting sections (12) which connect the beam sections (11) to one another, wherein the beam sections can be displaced relative to one another with regard to their longitudinal direction.