Holding device for a substrate holder for vertical galvanic metal deposition on a substrate to be treated; and a substrate holder for being inserted in such a device
    53.
    发明公开
    Holding device for a substrate holder for vertical galvanic metal deposition on a substrate to be treated; and a substrate holder for being inserted in such a device 审中-公开
    用于在衬底上垂直电金属沉积的衬底夹具保持装置的待处理,并且用于插入一个衬底保持器为这样的设备

    公开(公告)号:EP2813602A1

    公开(公告)日:2014-12-17

    申请号:EP13171962.7

    申请日:2013-06-14

    发明人: Klingl, Heinz

    IPC分类号: C25D17/06 C25D17/08

    摘要: The present invention is related to a holding device for a substrate holder for a vertical galvanic metal, preferably copper, deposition on a substrate to be treated comprising at least a first device element, at least a second device element and at least a third device element, wherein the first device element is a first fastening means for fastening the second and third device element; the second device element and the third device element are supporting elements, which are arranged in such a way that there is defined an at least semi-enclosed receiving hole for a substrate holder by the respective spacing between said second device element and said third device element, preferably defined by the respective spacing between first, second and third device element; wherein said second device element further comprise at least a first recess and said third device element further comprise at least a second recess for an accurate positioning and fixation of a substrate holder.
    The invention is further related to a substrate holder for being inserted in such a holding device.

    摘要翻译: 本发明涉及一种保持装置用于衬底保持器用于垂直电镀金属,优选铜,沉积在基片被处理,其包括至少一个第一设备元件,至少一个第二设备元件和至少一个第三设备元件 ,worin第一器件元件是一个第一紧固装置用于紧固所述第二和第三器件元件; 第二设备元件和第三设备元件的支撑元件,它们在寻求thatthere由所述第二装置元件之间的间距respectivement至少半封闭的容纳孔限定了衬底保持器和所述的方式布置第三设备元件 ,优选通过respectivement之间的间隔的第一,第二和第三设备元件限定; worin所述第二装置元件进一步包括至少一个第一凹部和所述第三设备元件进一步包括至少一个第二凹部,用于向保持器基板的准确的定位和固定。 本发明涉及一种另外的基材支架用于插入在寻求保持装置。

    Aqueous composition for etching of copper and copper alloys
    58.
    发明公开
    Aqueous composition for etching of copper and copper alloys 有权
    WässrigeZusammensetzung zurÄtzungvon Kupfer und Kupferlegierungen

    公开(公告)号:EP2754732A1

    公开(公告)日:2014-07-16

    申请号:EP13151243.6

    申请日:2013-01-15

    摘要: The present invention relates to an aqueous composition for and a process for etching copper and copper alloys applying said aqueous composition. The aqueous composition comprises a source for Fe 3+ ions, at least one acid, at least one triazole or tetrazole derivative, and at least one etching additive selected from N-alkylated iminodipropionic acid, salts thereof, modified polyglycol ethers and quaternary ureylene polymers. The aqueous composition is particularly useful for making of fine structures in the manufacture of printed circuit boards, IC substrates and the like.

    摘要翻译: 本发明涉及一种用于蚀刻应用所述含水组合物的铜和铜合金的水性组合物和方法。 含水组合物包含Fe 3+离子源,至少一种酸,至少一种三唑或四唑衍生物,以及至少一种选自N-烷基化亚氨基二丙酸,其盐,改性聚乙二醇醚和季戊烯聚合物的蚀刻添加剂。 含水组合物特别可用于制造印刷电路板,IC基板等中的精细结构。