公开(公告)号：EP1001326B1

公开(公告)日：2005-08-31

申请号：EP99922553.5

申请日：1999-05-27

申请人： FUJIKIN Inc. ,  TOKYO ELECTRON LIMITED ,  OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  KAGATSUME, Satoshi ,  IKEDA, Nobukazu ,  NISHINO, Kouji ,  YOSHIKAWA, Kazuhiro ,  IDETA, Eiji ,  DOHI, Ryousuke ,  UNO, Tomio ,  YAMAJI, Michio

IPC分类号： G05D7/06

CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： A gas supply equipment comprising a gas control valve (2), an orifice accommodating valve (9) provided downstream of the control valve (2), a pressure detector (3) provided between the control valve (2) and the orifice accommodating valve (9), an orifice (5) provided downstream of the valve mechanism of the orifice accommodating (9) and an arithmetic and control unit which calculates a flow rate as Qc = KP1 (K; constant) from a detected pressure P1 by the pressure detector (3) and outputs to the drive unit of the control valve (2) the difference between a flow rate instruction signal Qs and a calculated flow rate Qc as a control signal Qy.

公开(公告)号：EP1452221A1

公开(公告)日：2004-09-01

申请号：EP02788714.0

申请日：2002-12-04

申请人： Nippon Sanso Corporation ,  Ohmi, Tadahiro

发明人： OHMI, Tadahiro ,  ISHIHARA, Yoshio, c/o Nippon Sanso Corporation ,  NAKAMURA, Akihiro, c/o Nippon Sanso Corporation

IPC分类号： B01D53/68 ,  B01D53/46 ,  C01B23/00 ,  H01L21/31

CPC分类号： C01B23/0052 ,  B01D53/46 ,  B01D53/68 ,  B01D53/70 ,  B01D53/74 ,  B01D2257/11 ,  B01D2257/2066 ,  C01B23/001 ,  C01B2210/0029 ,  C01B2210/0035 ,  C01B2210/0042 ,  Y02P20/154

摘要： Gas supplying method and system in which effective component gas in exhaust gas can be separated and purified efficiently to be resupplied regardless of variation in the flow rate or composition of the exhaust gas and consumed gas can be replenished efficiently. In a method for collecting exhaust gas discharged from a gas using facility, separating/purifying effective component gas contained in the exhaust gas and supplying the effective component gas thus obtained to the gas using facility, the exhaust gas discharged from the gas using facility is added with a replenishing gas of the same components as the effective component gas before the effective component gas is separated and purified.

公开(公告)号：EP0983791B1

公开(公告)日：2004-07-28

申请号：EP98955950.5

申请日：1998-11-27

申请人： Nippon Sanso Corporation ,  Ohmi, Tadahiro

发明人： OHMI, Tadahiro ,  ISHIHARA, Yoshio, Nippon Sanso Corp.

IPC分类号： B01J3/02 ,  C01B23/00 ,  H01L21/205 ,  H01L21/203 ,  C23C16/50 ,  C23F4/00 ,  C23C16/44

CPC分类号： C01B23/001 ,  B01D53/00 ,  B01D2256/18 ,  B01D2258/0216 ,  B01J3/00 ,  C23C16/4412 ,  Y02C20/30

摘要： A process and an apparatus for recovering a noble gas, which can recover a noble gas exhausted from a noble gas employing system efficiently and also can supply the noble gas of a predetermined purity to the noble gas employing system and which can reduce consumption of the noble gas. In the process and apparatus for recovering a noble gas, when a noble gas contained in an exhaust gas exhausted from a noble gas employing system operated under reduced pressure is recovered, switching between introduction of the exhaust gas to a recovery system and exhaustion of the exhaust gas to an exhaust system is carried out under reduced pressure, and this switching operation is carried out depending on the content of impurity components contained in the exhaust gas or on the running state of the noble gas employing system.

公开(公告)号：EP1376670A1

公开(公告)日：2004-01-02

申请号：EP02708713.9

申请日：2002-03-28

申请人： Tokyo Electron Limited ,  Ohmi, Tadahiro

发明人： OHMI, Tadahiro ,  HIRAYAMA, Masaki School of Engineering Tohoku Uni. ,  SUGAWA, S., School of Engineering Tohoku Univers. ,  GOTO, Tetsuya, School of Engineering Tohoku Uni.

IPC分类号： H01L21/31 ,  H01L21/3065 ,  H05H1/46

CPC分类号： H01J37/3244 ,  H01J37/32192 ,  H01J37/32238

摘要： In a microwave plasma processing apparatus, a shower plate or plasma transmission window facing a substrate to be processed is formed to have a concaved surface at a side facing the substrate to be processes for compensating for a decrease of plasma density in the peripheral region of the substrate to be processed. As a result, stable and uniform plasma is maintained in the vicinity of the surface of the substrate to be processed even in the case a low pressure plasma process such as etching is conducted. Further, such a construction facilitates plasma ignition.

摘要翻译： 在微波等离子体处理装置中，形成面向待​​处理基板的喷淋板或等离子体透射窗，以在面向基板的一侧具有凹面，以补偿在该外围区域的等离子体密度的降低 待处理的基材。 结果，即使在进行诸如蚀刻的低压等离子体处理的情况下，也能够在待加工的基板的表面附近保持均匀的等离子体。 此外，这种结构有助于等离子体点火。

公开(公告)号：EP0823684B1

公开(公告)日：2002-07-17

申请号：EP96907741.1

申请日：1996-04-01

申请人： SHIBATA, Tadashi ,  OHMI, Tadahiro

发明人： SHIBATA, Tadashi ,  OHMI, Tadahiro ,  YU, Ning, Mei, Dept. of Elec. Faculty ,  NAKAI, Tsutomu, Dept. of Elec.Faculty

IPC分类号： G06F7/12 ,  G06G7/32

CPC分类号： G06K9/64 ,  G06F17/16 ,  G06J1/00

公开(公告)号：EP1213953A1

公开(公告)日：2002-06-12

申请号：EP00950063.8

申请日：2000-08-11

申请人： Kabushiki Kaisha Daishodenshi ,  Ohmi, Tadahiro

发明人： OHMI, Tadahiro ,  MURAKAMI, Hidetoshi, Kabushiki Kaisha Daishodenshi

IPC分类号： H05K3/46

CPC分类号： H05K3/4611 ,  Y10T29/49117 ,  Y10T29/49126 ,  Y10T29/4913

摘要： The present invention has an object to provide a producing method and producing apparatus of multilayered printed-circuit board that has eliminated the resin flow and resolved the problems of board thickness discrepancy and misregistration.
A producing method of multilayered printed-circuit board , comprising steps of stacking up a laminated sheet covered with conductive foil or conductor for outer layer, a prepreg and a laminated sheet covered with conductor for inner layer and, thereafter, setting the prepreg by pressurizing/heating, wherein, before conducting the pressurizing/heating, gas is sprayed to the surface of the laminated sheet covered with conductive foil or conductor for outer layer, a prepreg and a laminated sheet covered with conductor for inner layer to eliminate impurities from the surface.

摘要翻译： 本发明的目的是提供一种消除树脂流动的多层印刷电路板的制造方法和制造装置，并且解决了板厚差异和重合不良的问题。 一种多层印刷电路板的制造方法，其特征在于，包括层叠有覆盖有导电箔或外层导体的层压片材，预浸料坯和被内层导体覆盖的层压片材，然后通过加压/ 加热，其中，在进行加压/加热之前，将气体喷射到覆盖有用于外层的导电箔或导体的层叠片材的表面，预浸料和覆盖有内层导体的层压片材以从表面除去杂质。

公开(公告)号：EP1126260A1

公开(公告)日：2001-08-22

申请号：EP00949991.4

申请日：2000-08-03

申请人： Fujikin Incorporated ,  TOKYO ELECTRON LIMITED ,  Ohmi, Tadahiro

发明人： OHMI, Tadahiro ,  HIROSE, Takashi, Fujikin Incorporated ,  IDETA, Eiji, Fujikin Incorporated ,  IKEDA, Nobukazu, Fujikin Incorporated ,  DOHI, Ryousuke, Fujikin Incorporated ,  NISHINO, Kouji, Fujikin Incorporated ,  YOSHIKAWA, Kazuhiro, Fujikin Incorporated ,  KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. ,  HIROSE, Jun, Tokyo Electron Yamanashi Ltd. ,  FUKASAWA, Kazuo, Tokyo Electron Yamanashi Ltd. ,  KOIZUMI, Hiroshi, Tokyo Electron Yamanashi Ltd. ,  NAGAOKA, Hideki, Tokyo Electron Yamanashi Ltd.

IPC分类号： G01L19/00 ,  G01L7/08

CPC分类号： G01L19/0023 ,  G01L19/0645 ,  G01L19/145 ,  G01L19/147

摘要： A construction for mounting a pressure detector prevents the detector diaphragm from being strained by stress applied to the pressure detector as the detector is mounted in a fixture main body provided in a pipe line or the like, thereby keeping the output characteristics and temperature characteristics of the detector from greatly differing before and after the mounting. The pressure detector is constructed by combining and fastening together a diaphragm base having a diaphragm and a sensor base having a sensor element therein that is activated by displacement of the diaphragm base. The pressure detector, with a gasket placed thereunder, is disposed in a mounting hole of a fixture main body that is mounted in a pipe line. The pressure detector is airtightly pressed and fastened by a presser member inserted from above in the mounting hole. The presser member is brought in contact with a block upper surface of the diaphragm base, and the gasket is also brought in contact with the block lower surface of the diaphragm base. A shallow groove is defined in the form of a ring on the lower surface of the block at a place inward of the portion contacting the metal gasket so that the shallow groove absorbs strain caused by the presser member.

摘要翻译： 用于安装压力检测器的结构防止了检测器膜片被施加到压力检测器上的应力而被应变，因为检测器安装在设置在管线等中的夹具主体中，从而保持了输出特性和温度特性 检测器在安装前后有很大差异。 压力检测器通过将具有隔膜的隔膜基座和具有传感器元件的传感器基座组合并紧固在一起而构成，该传感器基座通过隔膜基座的位移而被激活。 压力检测器，其上放置有垫圈，设置在安装在管道中的固定器主体的安装孔中。 压力检测器通过从安装孔中从上方插入的压紧构件气密地按压并紧固。 压板构件与隔膜基座的块上表面接触，并且垫圈也与隔膜基座的块下表面接触。 在与金属垫片接触的部分的内侧的位置处，在块的下表面上以环的形式形成浅槽，使得浅槽吸收由压紧构件引起的应变。

公开(公告)号：EP1087533A1

公开(公告)日：2001-03-28

申请号：EP99913695.5

申请日：1999-04-19

申请人： Ohmi, Tadahiro ,  Ultraclean Technology Research Institute, Co. Ltd

发明人： OHMI, Tadahiro ,  KOTANI, Koji ,  NAKADA, Akira ,  IMAI, Makoto ,  KONDA, Masahiro ,  MORIMOTO, Tatsuo ,  YONEZAWA, Takemi ,  NOZAWA, Toshiyuki ,  NAKAYAMA, Takahiro ,  FUJIBAYASHI, Masanori ,  NITTA, Takahisa,

IPC分类号： H03M7/30 ,  H04N1/41 ,  H04N7/28

CPC分类号： H04N19/94 ,  G06T9/008 ,  H03M7/3082

摘要： With reference to one or more pieces of data (for example, the data at the left end in a block of 4 × 4 pixels) in a data string constituting one code vector in a code book, a code vector is generated by giving a value which increases in an increment of a predetermined value from the reference data value K to each piece of the other data in the block. A greatly versatile code book can be made at least for data on a pattern, for example, a face image, whose data value gradually varies by a small change.

摘要翻译： 与在构成码本中的一个码矢量数据串参照数据的一条或多条（例如，该数据在4×4像素的块的左端），通过给一个值所生成的代码矢量 这增加了在从基准数据值K到块中的每个块的其它数据的预定值的增量。 甲大大多功能码本可以至少进行用于数据上的图案，例如，面部图像，谁的dataValue逐步由一个小型变化而变化。

公开(公告)号：EP1026566A1

公开(公告)日：2000-08-09

申请号：EP99935121.6

申请日：1999-08-09

申请人： Fujikin Incorporated ,  TOKYO ELECTRON LIMITED ,  OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. ,  HIROSE, Jun, Tokyo Electron Yamanashi Ltd. ,  NISHINO, Kouji, Fujikin Incorporated

IPC分类号： G05D7/06

CPC分类号： G05D7/0658 ,  G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： A fluid-switchable flow rate control system that permits free changing of the full scale flow rate and which can control a plurality of kinds of fluids with high precision.
The fluid-switchable flow rate control system controls the flow rate of fluid with the pressure P 1 on the upstream side of the orifice member held about twice or more higher than the downstream pressure P 2 , the fluid-switchable flow rate control system comprising an orifice member 8 replaceable with another to provide a suitable orifice diameter according to the kind of fluid and the flow rate range, a control valve 2 provided on the upstream side thereof, a pressure detector 6 provided between the control valve 2 and the orifice member 8, and a flow rate calculation circuit 14 where, from the pressure P 1 detected by the pressure detector, the flow rate Qc is calculated by the equation Qc = KP 1 (K: constant), a flow rate-setting circuit 16 for outputting flow rate setting signal Qe, a flow rate conversion circuit 18 for multiplying the calculated flow rate signal Qc by the flow rate conversion rate k into switch-over calculated flow rate signal Qf ( Qf = kQc ) to change the full scale flow rate, and a calculation control circuit 20 to output the difference between the switch-over calculation flow rate signal Qf and the flow rate setting signal Qe as control signal Qy to the drive 4 of the control valve 2, thereby opening or closing the control valve to bring the control signal Qy to zero, thus controlling the flow rate on the downstream side of the orifice member.

摘要翻译： 一种可流体切换的流量控制系统，其允许满量程流量的自由变化并且可以高精度地控制多种流体。 流体切换流量控制系统控制流体的流量，其中孔口部件的上游侧的压力P1保持在比下游压力P2大约两倍或更多的高度，流体可切换流量控制系统包括孔口部件 8可替换为另一个，以根据流体种类和流量范围提供合适的孔径，设置在其上游侧的控制阀2，设置在控制阀2和孔口构件8之间的压力检测器6，以及 流量计算电路14，其中根据由压力检测器检测到的压力P1通过公式Qc = KP1（K：常数）计算流量Qc;流量设定电路16，用于输出流量设定信号Qe ，用于将计算出的流量信号Qc乘以流量转换率k的流量转换电路18转换为切换计算流量信号Qf（Qf = kQc），以改变满量程fl 以及将切换计算流量信号Qf和流量设定信号Qe之间的差作为控制信号Qy输出到控制阀2的驱动器4的计算控制电路20，由此打开或关闭控制 使控制信号Qy为零，从而控制孔构件下游侧的流量。

公开(公告)号：EP0922667A1

公开(公告)日：1999-06-16

申请号：EP98924654.1

申请日：1998-06-12

申请人： FUJIKIN Inc. ,  OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  MINAMI, Yukio ,  KAWADA, Koji ,  TANABE, Yoshikazu ,  IKEDA, Nobukazu ,  MORIMOTO, Akihiro

IPC分类号： C01B5/00

CPC分类号： C01B5/00

摘要： Process for generating moisture for use in semiconductor manufacturing, the process comprising feeding hydrogen and oxygen into a reactor provided with a platinum-coated catalyst layer on an interior wall, thus enhancing the reactivity between hydrogen and oxygen by catalytic action and instantaneously reacting the reactivity-enhanced hydrogen and oxygen at a temperature below the ignition point to produce moisture without undergoing combustion at a high temperature, wherein the amount of unreacted hydrogen occurring in the generated moisture in starting up or terminating the moisture generating reaction is minimized and wherein undesired reactions such as undesired silicon oxide film coating are avoided. When the generation of moisture is started up by feeding hydrogen and oxygen into the reactor provided with a platinum-coated catalyst layer on the inside wall thereof, oxygen first starts to be fed and, some time after that, the supply of hydrogen is begun. In terminating the moisture generating operation by cutting off the supply of hydrogen and oxygen into the reactor, the feeding of hydrogen is first stopped and, some time after that, the supply of oxygen is shut off.

摘要翻译： 用于产生用于半导体制造中的湿气的方法，该方法包括将氢和氧进料到在内壁上设置有铂涂覆的催化剂层的反应器中，从而通过催化作用增强氢和氧之间的反应性，并使反应性 - 在低于点火点的温度下增强氢气和氧气，以产生水分，而不会在高温下经历燃烧，其中在产生水分的反应中启动或终止发生的水分中发生的未反应的氢气的量最小化，并且其中不期望的反应如 避免了不需要的氧化硅膜涂层。 当通过在其内壁上提供有铂包覆的催化剂层的反应器中加入氢气和氧气来启动水分的产生时，首先开始供给氧气，然后一段时间开始供应氢气。 在通过切断氢气和氧气进入反应器来终止湿气产生操作时，首先停止氢的供给，一段时间后，关闭氧气供应。