公开(公告)号：EP2415074B1

公开(公告)日：2018-10-24

申请号：EP10757971.6

申请日：2010-03-30

申请人： ATS Automation Tooling Systems Inc.

发明人： RIVOLLIER, Frederic ,  CHUBB, Ryan

IPC分类号： H01L21/687 ,  H01L21/677 ,  B65G49/07 ,  H01L21/68 ,  H01L21/673

CPC分类号： H01L21/67781 ,  H01L21/67383 ,  H01L21/67766 ,  Y10S414/137

摘要： A system for handling wafers comprising: at least one unload station; at least one intermediate station designed to hold the wafers at an angle; a processing station; and a transfer device configured to move the wafers between the stations. The intermediate station may be configured to receive the wafers in a back-to-back arrangement. An apparatus for handling wafers comprising: on one side, a vacuum gripper configured to grip individual wafers; and, on the other side, a gravity gripper configured to support one or more wafers when positioned beneath the wafers and lifted. A method for handling wafers, comprising: unloading wafers; transferring the wafers to an intermediate station; transferring the wafers from the intermediate station to a processing station; treating the wafers; unloading the wafers from the processing station; and reloading the wafers in a carrier, wherein the wafers are unloaded, transferred and reloaded by a transfer device.

公开(公告)号：EP3335607A1

公开(公告)日：2018-06-20

申请号：EP16834886.0

申请日：2016-06-30

申请人： Harmotec Co., Ltd.

发明人： IWASAKA, Hitoshi ,  TOKUNAGA, Hideyuki ,  KASAI, Yuji

IPC分类号： A47L9/16 ,  A47L9/00 ,  B25J15/06 ,  B65G49/07

CPC分类号： B65G21/2027 ,  A23L5/20 ,  A23V2002/00 ,  A47L9/00 ,  A47L9/0072 ,  A47L9/16 ,  B25J15/06 ,  B65G49/07 ,  F04F5/06 ,  H01L21/6838

摘要： Suction device 10 includes swirl flow-forming body 1 that forms a swirl flow to apply suction to material F by use of Bernoulli's principle, and case 2 that houses swirl flow-forming body 1, and guides flow of a fluid flowing out of concave part 12 of swirl flow-forming body 1. Case 2 includes guide part 21, flange part 22, and cover part 23. Guide part 21 controls flow of a fluid flowing out of concave part 12 of swirl flow-forming body 1 and flowing along end face 13, such that the fluid flows in a direction away from a position of material F. Flange part 22 forms, between flange part 22 and end face 13, a flow path for a fluid to flow out of concave part 12. Cover part 23 is fixed on the top surface of main body 11 of swirl flow-forming body 1.

公开(公告)号：EP3174089A4

公开(公告)日：2017-11-15

申请号：EP15824999

申请日：2015-07-08

申请人： SUMITOMO CHEMICAL CO

发明人： FUJIKURA HAJIME ,  KONNO TAICHIRO ,  NONAKA TAKEHIRO ,  NUMATA TAKAYUKI

IPC分类号： H01L21/677 ,  B65G49/07 ,  C23C16/44 ,  C23C16/46 ,  H01L21/205 ,  H01L21/67

CPC分类号： C23C16/46 ,  C23C16/44 ,  H01L21/205 ,  H01L21/67109 ,  H01L21/67115 ,  H01L21/67173 ,  H01L21/67706 ,  H01L21/67739 ,  H01L21/6776

摘要： Techniques are provided to improve the quality of the thin films deposited on substrates. A substrate transporting mechanism is configured to transport a plurality of substrates arranged in a line along a transport path extending in a first container from an entrance to an exit, and to load and unload substrates into and out of a second container in order. The driving units to drive the substrate transporting mechanism are configured to be detachable from the substrate transporting mechanism provided in the first container and are respectively provided in a substrate loading chamber and a substrate unloading chamber.

公开(公告)号：EP2835325A4

公开(公告)日：2016-01-06

申请号：EP13772486

申请日：2013-03-07

申请人： MURATA MACHINERY LTD

发明人： YAMAMOTO MAKOTO

IPC分类号： B65G1/04 ,  B65G1/00 ,  B65G1/137 ,  B65G35/08 ,  B65G49/07 ,  H01L21/677

CPC分类号： B65G1/0421 ,  B65G1/04 ,  B65G1/137 ,  B65G2201/0297 ,  G05B19/418 ,  G05B2219/45031 ,  H01L21/67294 ,  H01L21/67769

摘要： The conveyance system 100 includes: storage racks 20 that are provided near semiconductor manufacturing devices 60 and 62 and store therein objects 10 to be conveyed; a stacker crane 30 that carries the objects 10 into and out of the storage racks 20; vehicles 40 that convey the objects 10; an ID tag reader R that is provided to the stacker crane 30 and reads ID tags T of the objects 10; and a controller 50 that, when identification information acquired by the ID tag reader R coincides with identification information contained in a conveyance command of an object 10, controls the stacker crane 30 to convey the object 10 to a destination specified in the conveyance command. At least one section of each storage rack 20 allows a gripper 44 of each vehicle 40 to take in and out the objects 10.

公开(公告)号：EP2750175A4

公开(公告)日：2015-03-25

申请号：EP12825546

申请日：2012-08-24

申请人： HARMOTEC CO LTD

发明人： IWASAKA HITOSHI ,  TOKUNAGA HIDEYUKI ,  KOSHIISHI KATSUHIRO

IPC分类号： H01L21/677 ,  B65G49/07

CPC分类号： B65G25/00 ,  H01L21/6838 ,  H01L21/68707 ,  H01L21/68728

摘要： The object of the present invention is to suppress rotation of a plate-like member, which is caused when the plate-like member is conveyed in a non-contacting manner. Non-contacting conveyance equipment for conveying a plate-like member in a non-contacting manner comprises a plate-like base body and a plurality of swirl flow-forming bodies provided at the base body. Each of the plurality of swirl flow-forming bodies includes a column-shaped main body, a cylindrical chamber formed inside the main body, that has an opening at one end, a flat end face formed at a surface of the main body, in which the cylindrical chamber is opened, a jetting port provided at an inner circumferential surface of the cylindrical chamber, a fluid introduction port provided at an outer circumferential surface of the main body, and a fluid passage that connects the fluid introduction port to the jetting port. The fluid passage is arranged so that a direction in which a fluid flows out of the cylindrical chamber along the end face is substantially parallel to a line that extends from a center of gravity of the plate-like member being conveyed, toward an outer circumference of the plate-like member.

公开(公告)号：EP2623437A4

公开(公告)日：2015-03-11

申请号：EP11828671

申请日：2011-08-29

申请人： MURATA MACHINERY LTD

发明人： TSUBAKI TATSUO ,  FUJIWARA YUSUKE

IPC分类号： B65G1/00 ,  B65G49/07 ,  B66C13/22 ,  H01L21/67 ,  H01L21/677

CPC分类号： H01L21/67 ,  H01L21/67259 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/68707

摘要： For transferring an article to a desired position, even in a lateral transfer, a transfer system (100) allows transfer of an article (3) between a transport vehicle (2), which conveys the article (3) while travelling along a rail (1) provided on a ceiling, and a placement portion provided below the rail, in a lateral transfer manner. The transfer system includes a memory unit (101) and a controller (102). The memory unit stores (i) placement position information indicating a transfer position of the article when a transfer unit is to place the article onto the placement portion, and (ii) holding position information indicating a transfer position of the article when the transfer unit is to hold the article on the placement portion. The controller controls the transfer unit such that, when the transfer unit is to place the article, the article is transferred at a transfer position indicated in the placement position information and, when the transfer unit is to hold the article, the article is transferred to a transfer position indicated in the holding position information.

公开(公告)号：EP2835325A1

公开(公告)日：2015-02-11

申请号：EP13772486.0

申请日：2013-03-07

申请人： Murata Machinery, Ltd.

发明人： YAMAMOTO Makoto

IPC分类号： B65G1/04 ,  B65G1/00 ,  B65G35/08 ,  B65G49/07 ,  H01L21/677

CPC分类号： B65G1/0421 ,  B65G1/04 ,  B65G1/137 ,  B65G2201/0297 ,  G05B19/418 ,  G05B2219/45031 ,  H01L21/67294 ,  H01L21/67769

摘要： The conveyance system 100 includes: storage racks 20 that are provided near semiconductor manufacturing devices 60 and 62 and store therein objects 10 to be conveyed; a stacker crane 30 that carries the objects 10 into and out of the storage racks 20; vehicles 40 that convey the objects 10; an ID tag reader R that is provided to the stacker crane 30 and reads ID tags T of the objects 10; and a controller 50 that, when identification information acquired by the ID tag reader R coincides with identification information contained in a conveyance command of an object 10, controls the stacker crane 30 to convey the object 10 to a destination specified in the conveyance command. At least one section of each storage rack 20 allows a gripper 44 of each vehicle 40 to take in and out the objects 10.

摘要翻译： 传送系统100包括：设置在半导体制造装置60和62附近并存储待传送的物体10的存储架20; 将物体10带入和离开储存架20的堆垛机30; 运送物体10的车辆40; ID标签读取器R，其被提供到堆叠起重机30并读取对象10的ID标签T; 以及控制器50，当由ID标签读取器R获取的识别信息与包含在对象10的传送命令中的识别信息一致时，控制堆垛机30将物体10传送到在传送命令中指定的目的地。 每个存储架20的至少一个部分允许每个车辆40的夹持器44进出物体10。

公开(公告)号：EP2834840A1

公开(公告)日：2015-02-11

申请号：EP13794179.5

申请日：2013-05-16

申请人： Luxvue Technology Corporation

发明人： GOLDA, Dariusz ,  BIBL, Andreas

IPC分类号： H01L21/677 ,  B81C1/00 ,  B65G49/07

CPC分类号： B81C99/0025 ,  B81C2201/0194 ,  H01L21/67144 ,  H01L24/75 ,  H01L2224/7598

摘要： A micro device transfer head array and method of forming a micro device transfer array from an SOI substrate are described. In an embodiment, the micro device transfer head array includes a base substrate and a patterned silicon layer over the base substrate. The patterned silicon layer may include a silicon interconnect and an array of silicon electrodes electrically connected with the silicon interconnect. Each silicon electrode includes a mesa structure protruding above the silicon interconnect. A dielectric layer covers a top surface of each mesa structure.

公开(公告)号：EP2433299A4

公开(公告)日：2014-10-22

申请号：EP10778177

申请日：2010-05-14

申请人： CROSSING AUTOMATION INC

发明人： BONORA ANTHONY C ,  GOULD RICHARD H ,  KROLAK MICHAEL

IPC分类号： H01L21/677 ,  B65G1/04 ,  B65G49/07 ,  B66C17/06

CPC分类号： H01L21/6773 ,  H01L21/67769 ,  Y10S414/14

公开(公告)号：EP2674827A1

公开(公告)日：2013-12-18

申请号：EP11858125.5

申请日：2011-12-06

申请人： Murata Machinery, Ltd.

发明人： FUJIOKA, Shinji

IPC分类号： G05D1/02 ,  B61B3/02 ,  B65G49/07 ,  H01L21/677

CPC分类号： B60T8/1705 ,  B61B3/02 ,  B61B13/04 ,  E01B7/00 ,  H01L21/67715 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/67733

摘要： In a rail guided vehicle system, unnecessary slowing down and stopping of a vehicle passing through a divergence point and a merge point is avoided. The rail guided vehicle system comprises a rail 100 including a guidepath wire 600 in a predetermined area including the divergence point and the merge point, and a plurality of vehicles 200 that travel while being supported and guided by the rail. Each of the plurality of vehicles includes a generating unit 910, 920 configured to generate each of a plurality of signals each having different frequencies from the others, a transmitting unit 810, 820 configured to send each of the plurality of signals generated by the generating unit to the guidepath wire, a receiving unit 710, 720 configured to receive each of the plurality of signals transmitted via the guidepath wire, a determining unit 955 configured to determine, based on the kind of the signal received by the receiving unit, whether the vehicle is slowed down, stopped, or kept travelling, and a controlling unit 960 configured to control the vehicle in accordance with a result of a determination determined by the determining unit.

摘要翻译： 在轨道导引车辆系统中，避免了通过发散点和合并点的车辆的不必要的减速和停止。 轨道导向车辆系统包括轨道100，该轨道100包括在包括发散点和合并点的预定区域中的导轨线600以及在被轨道支撑和引导的同时行进的多个车辆200。 多个车辆中的每一个包括生成单元910,920，其被配置为生成各自具有与其他频率不同的频率的多个信号中的每一个;发送单元810,820，被配置为发送由生成单元生成的多个信号中的每一个 接收单元710,720，其被配置为接收经由所述路线导线发送的所述多个信号中的每一个;确定单元955，被配置为基于由所述接收单元接收的信号的种类来确定所述车辆 停止或保持行驶，以及控制单元960，被配置为根据由确定单元确定的确定结果来控制车辆。