摘要:
Apparatus for sensing information regarding a surface (12) including a first plurality of optical elements (50, 70, 74, 53, 80, 84, 54, 60) arranged to acquire two dimensional information (20) about a surface (12), a second plurality of optical elements (90, 42, 94) arranged to acquire topographical information (22) about the surface (12), wherein the first plurality (50, 70, 74, 53, 80, 84, 54, 60) and the second plurality of optical elements (90, 42, 94) are arranged to simultaneously provide the two dimensional information (20) and the topographical information (22) to at least partially non-overlapping portions of a single sensor array (14).
摘要:
Apparatus for detecting radiation emitted from a number of volume elements of a body. The apparatus includes a first plurality of detector elements, each detector element being configured to output signals indicative of an intensity of radiation that is incident thereon. The apparatus also includes a first plurality of adjustable collimator channels, each adjustable collimator channel being associated with and being positioned between a respective detector element and the body, each adjustable collimator channel having a second plurality of dimensional configurations defining respective different sets of the volume elements from which emitted radiation impinges on the respective detector element. A processor computes a radiation intensity from at least a portion of the volume elements in response to the signals output by the detector elements in at least two of the dimensional configurations of the adjustable collimator channels.
摘要:
A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.
摘要:
Apparatus for producing high repetition rate optical pulses, including: a beam generator that produces an initial pulsed light beam having an initial pulse repetition rate; a pulse repetition rate multiplier, which receives the initial pulsed light beam and produces at least one pulsed light beam having a higher pulse repetition rate than the initial rate.
摘要:
Apparatus for producing high repetition rate optical pulses, including: a beam generator that produces an initial pulsed light beam having an initial pulse repetition rate; a pulse repetition rate multiplier, which receives the initial pulsed light beam and produces at least one pulsed light beam having a higher pulse repetition rate than the initial rate.
摘要:
An inspection system for providing high contrast images of two materials of an article to be inspected is disclosed. Light with variable spectral range and large angular coverage is passed from the source through a polarizer, reflects from or is transmitted through the article to be inspected, passes through an analyzer and is detected by a sensor. A phase compensator is disposed either between the polarizer and the sample or the sample and the analyzer. Two of the three polarization optical components, that is, the polarizer, the compensator and the analyzer, are separately adjusted until the maximum contrast is found in the image. This enables high contrast imaging of surfaces of objects of similar optical reflectivity, (such as surfaces consisting of two similar specular materials, or surfaces partly covered with transparent films) which cannot be imaged using normal reflective image forming techniques. The system of the invention can also be operated to measure the thickness or index of refraction of transparent thin films.
摘要:
A telecentric imaging system is described comprising a Fresnel lens (2) mountable in proximity to an object (8) to be imaged, a source of light (12) for illuminating the object, and an aperture stop (6) located at least in vicinity of the back focal point of the Fresnel lens (2). There is also described an optical inspection machine incorporating the telecentric imaging system and a method for software correction of the optical distortion produced by the telecentric imaging system.
摘要:
Inspection of workpieces traveling along a production line includes on-line inspection of the workpieces at an upstream inspection station to detect possible flaws without interrupting the progression of workpieces along the production line. Possible flaws in the inspected workpieces are imaged, and images of possible flaws are stored in a memory in a way that associates a stored image with the workpiece containing the possible flaw. Off-line, a stored image is retrieved from the memory before the workpiece with which the image is associated reaches a downstream sorting station. The retrieved image is displayed on a monitor for verifying, by visual inspection, whether the possible flaw in the workpiece with which the retrieved image is associated, is valid. Workpieces are diverted at the downstream sorting station in response to verification of flaws.