Abstract:
First, a box 5 molded from a resin is prepared such as to have a rectangular parallelepiped outer form with a pair of grooves on the bottom face and a semispherical recess 9. Subsequently, a photocurable resin agent 27 is applied to a bottom area 12 of the recess 10 in the box 5. Then, while a light transmitting mold 28 having a bottom face formed with a plurality of grating grooves arranged in a row along a predetermined direction is pressed against the applied resin agent 27, the resin agent 27 is cured by irradiation with light, so as to provide the area 12 in the recess 10 with the grating 29 formed with a plurality of grating grooves. Next, Al, Au, or the like is vapor-deposited so as to cover the grating 29, thereby forming a reflecting film 15. Then, a photodetector 4 is accommodated in a package 2. This can easily manufacture a highly reliable spectrometer.
Abstract:
To monitor light pulses from a light source, such as a laser, sense signals are provided to a photosensing component or array, causing photosensing during a series of one or more sense periods for the light pulse. Each light pulse can be provided through a transmission structure, such as a layered structure, that provides output light with an energy-dependent position on the photosensing component. A pulse's sensing results can be used to obtain a set of one or more differential quantities; for example, with a photosensing array, two cells of the array can be read out and compared. For a narrow band light pulse, a transmission structure can provide a spot on the photosensing component, and the light spot position can be sensed.
Abstract:
A spectroscopy device that separates input light into a plurality of wavelength ranges includes a metal body (10) with a hole or aperture (20; 21) which is open on the upper side. The hole or aperture (20; 21) is formed in a polygonal shape having at least a pair of opposite faces (11,12; 1103) not parallel to each other in horizontal cross-section, and inner side faces of the hole or aperture are finished as mirror-reflective surfaces (11,12; 1103). Polarized input light inputted from the opening to the hole or aperture is reflected by the reflection surfaces (11,12; 1103) and a standing wave is generated inside of the hole or aperture (20; 21) by self interference, whereby the input light is separated into a plurality of wavelength ranges.
Abstract:
The invention relates to a bispectral detection device (20 ; 80), in particular for infrared radiation and visible radiation, that comprises: a solid-state substrate (21); a matrix of bolometric microbridges (23, 24) sensitive to infrared radiation, the bolometric microbridges (23, 24) being suspended above a first face (45) of the substrate by bearing and connection arms (31, 32); and a matrix of photoelectric elements (39, 40) formed in the substrate (21) and sensitive to the visible radiation, the bolometric microbridges (23, 24) and the photoelectric elements (39, 40) being superimposed. According to the invention, the portion of the substrate (43) included between the photoelectric elements (39, 40) and a second face (44) of the substrate opposite the first face (45) thereof is made thinner so that the photoelectric elements (39, 40) are capable of detecting an incident of visible radiation on the second face (44).
Abstract:
In the spectroscopy module 1, a light absorbing layer 6 having a light-passing hole 6a through which light L1 advancing into a spectroscopic portion 3 passes and a light-passing hole 6b through which light L2 advancing into a light detecting portion 4a of a light detecting element 4 passes is integrally formed by patterning. Therefore, it is possible to prevent deviation of the relative positional relationship between the light-passing hole 6a and the light-passing hole 6b. Further, since the occurrence of stray light is suppressed by the light absorbing layer 6 and the stray light is absorbed, the light detecting portion 4a of the light detecting element 4 can be suppressed from being made incident. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.
Abstract:
Alignment marks 12a, 12b, 12c, and 12d are formed on the flat plane 11a of the peripheral edge portion 11 formed integrally with the diffracting layer 8, and when the lens portion 7 is mounted onto the substrate 2, these alignment marks 12a, 12b, 12c and 12d are positioned to the substrate 2, thereby making exact alignment of the diffracting layer 8 with respect to the light detecting portion 4a of the light detecting element 4, for example, not by depending on a difference in curvature radius of the lens portion 7. In particular, the alignment marks 12a, 12b, 12c and 12d are formed on the flat plane 11a, thereby image recognition is given to exactly detect positions of the alignment marks 12a, 12b, 12c and 12d, thus making it possible to make exact alignment.
Abstract:
In a state that the body portion 4 is regulated by inner wall planes 27, 29, 28 of the package 3 so as not to move in parallel or perpendicularly with respect to the rear plane 4b, the spectroscopic module is directly supported by the package 3, thereby when the spectrometer is downsized, the spectroscopic module 2 can be supported securely and also there is provided securely a positional accuracy between the light incident opening 22a of the package 3, the spectroscopic portion 6 of the spectroscopic module 2 and the light detecting element 7. Further, the lead 23 is buried into the package 3 to give derivation and support by the lead deriving portion 26, thereby the lead deriving portion 26 in itself of the package 3 is allowed to act as a base when wire bonding is conducted to electrically connect the lead 23 with the light detecting element 7, thus preventing breakage and deviation of the spectroscopic module 2.
Abstract:
Disclosed is an optical spectroscopy device (1) and a method for the production thereof. The inventive device comprises at least one light source (8) and at least one integrated spectrometer (3). The optical components of the at least one spectrometer (3) are optical microcomponents (11, 13, 16, 19, 20, 21) which are integrated into the top and/or bottom side (9, 12) of a support plate (2). According to the inventive method, at least one light source (8) is arranged on a support plate (2) and at least one spectrometer (3) is monolithically produced in a three dimensionally integrated form on said support plate (2). The spectrometer produced according to the inventive method (3) is made from optical microcomponents (11, 13, 16, 19, 20, 21).
Abstract:
The invention relates to an optical filter and a method for its production, and to a device for the examination of the spectral and spatial distribution of an electromagnetic radiation irradiated from an object. The invention is based on the task of providing an optical filter of the above described type that is inexpensive to produce, which can be used to detect a plurality of wavelengths, in which, however, tuning of the DBR mirrors by means of displacement is not necessary. Furthermore, a method for the production of such a filter is provided. According to a first aspect of the present invention this task is solved by a method for the production of an optical filter array having two DBR mirrors, and a cavity present between the same, comprising cavity sections having a plurality of different heights, each forming one Fabry Perot filter element, characterized by the following steps: applying a first DBR mirror onto a substrate, forming of a layer comprised of a cavity material on the DBR mirror, wherein this layer is equipped with a plurality of cavity sections forming the filter elements by means of utilizing a nanoimprint method, and applying the second DBR mirror on the cavity material having a structuring that is defined by the different heights of the cavity sections.
Abstract:
A monolithic Offner spectrometer is described herein as are various components like a diffraction grating and a slit all of which are manufactured by using a state-of-the-art diamond machining process. In one embodiment, a monolithic Offner spectrometer is directly manufactured by using a diamond machining process. In another embodiment, a monolithic Offner spectrometer is manufactured by using molds which are made by a diamond machining process. In yet another embodiment, a diffraction grating is directly manufactured by using a diamond machining process. In still yet another embodiment, a diffraction grating is manufactured by using a mold which is made by a diamond machining process. In yet another embodiment, a slit is directly manufactured by using a diamond machining process.