MIKROMEMBRANPUMPE
    2.
    发明公开
    MIKROMEMBRANPUMPE 失效
    微型隔膜泵

    公开(公告)号:EP0722538A1

    公开(公告)日:1996-07-24

    申请号:EP94927548.0

    申请日:1994-09-02

    IPC分类号: F04B53 F04B43

    CPC分类号: F04B43/043

    摘要: The invention relates to a micro-diaphragm pump consisting of two valve chambers, a pump chamber between them, each valve chamber being connected to the pump chamber by a channel, a pump drive and a diaphragm sealing the three chambers. The diaphragm has an inlet valve in the region of one valve chamber and an outlet valve in the region of the other. The aim of the invention is to design a pump in such a way that both valves may be fitted on the same side of the diaphragm and substantially to simplify the construction process of the pump body. For this purpose, the valves are integrated into the diaphragm and the valve component structures on the diaphragm are on the same side thereof, and a pump body containing the pump and valve chambers is made in one piece.

    SCHALTERMATRIX MIT OPTISCH NICHTLINEAREN ELEMENTEN UND VERFAHREN ZUR HERSTELLUNG DERSELBEN
    8.
    发明授权
    SCHALTERMATRIX MIT OPTISCH NICHTLINEAREN ELEMENTEN UND VERFAHREN ZUR HERSTELLUNG DERSELBEN 失效
    根据上述制造相同的光学非线性元件和方法开关矩阵。

    公开(公告)号:EP0367778B1

    公开(公告)日:1994-04-20

    申请号:EP88905685.9

    申请日:1988-07-07

    IPC分类号: G02F3/00

    CPC分类号: G02F3/02

    摘要: A switch matrix comprises non-linear optical (e.g. bistable) elements each consisting of an optically active layer applied to a substrate (7). The surface of the substrate has a microstructure composed of pillars (2) each of which functions as a switch element and has at least one optically active layer (4). The pillar structure prevents interaction due to thermal contact and diffusion of charge carriers across the optically active layer and the substrate. The lithographic-galvanic (LIGA) process described is suited to the mass production of these structured substrates by moulding plastics. Both transparent and opaque substrates with high aspect ratios and adequate stability can be advantageously manufactured in this way.