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1.发明公开ISOTOPICALLY-ENRICHED BORON-CONTAINING COMPOUNDS, AND METHODS OF MAKING AND USING SAME 有权同位素富集含硼的生产和使用的化合物和方法
公开(公告)号：EP2606004A4
公开(公告)日：2014-02-19
申请号：EP11818672
申请日：2011-08-16
发明人： KAIM ROBERT , SWEENEY JOSEPH D , BYL OLEG , YEDAVE SHARAD N , JONES EDWARD E , ZOU PENG , TANG YING , CHAMBERS BARRY LEWIS , RAY RICHARD S
CPC分类号： C01B35/061 , C01P2006/88 , H01J2237/006 , H01J2237/08 , H01J2237/31701 , Y02P20/134
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公开(公告)号：EP2021528A4
公开(公告)日：2011-03-23
申请号：EP07761374
申请日：2007-04-26
发明人： DIMEO FRANK JR , DIETZ JAMES , OLANDER W KARL , KAIM ROBERT , BISHOP STEVEN E , NEUNER JEFFREY W , ARNO JOSE I , MARGANSKI PAUL J , SWEENEY JOSEPH D , ELDRIDGE DAVID , YEDAVE SHARAD , BYL OLEG , STAUF GREGORY T
IPC分类号： C25B7/00
CPC分类号： C23C14/564 , C23C16/4405 , H01J37/32412 , H01J37/32862
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公开(公告)号：EP2776368A4
公开(公告)日：2015-07-29
申请号：EP12839531
申请日：2012-10-09
发明人： BYL OLEG , JONES EDWARD E , PYDI CHIRANJEEVI , SWEENEY JOSEPH D
CPC分类号： C01B35/061 , B01J3/03 , B01J7/00 , B01J15/00 , B01J19/0073 , B01J19/129 , B01J2219/00094 , B01J2219/00148 , B01J2219/0254 , B01J2219/0272 , B01J2219/0277 , B01J2219/0886 , Y02P20/149
摘要： A reaction system and method for preparing compounds or intermediates from solid reactant materials is provided. In a specific aspect, a reaction system and methods are provided for preparation of boron-containing precursor compounds useful as precursors for ion implantation of boron in substrates. In another specific aspect, a reactor system and methods are provided for manufacture of boron precursors such as B2F4.
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公开(公告)号：EP2494581A4
公开(公告)日：2015-03-18
申请号：EP10828832
申请日：2010-10-25
发明人： JONES EDWARD E , YEDAVE SHARAD N , TANG YING , CHAMBERS BARRY LEWIS , KAIM ROBERT , SWEENEY JOSEPH D , BYL OLEG , ZOU PENG
IPC分类号： H01J37/317 , H01J37/08 , H01L21/265
CPC分类号： H01L21/265 , C23C14/48 , C23C14/52 , H01J37/08 , H01J37/3171 , H01J37/32055 , H01J37/32412 , H01J37/32449 , H01J2237/006 , H01J2237/022
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公开(公告)号：EP2248153A4
公开(公告)日：2012-01-18
申请号：EP09709805
申请日：2009-02-11
申请人： SWEENEY JOSEPH D , YEDAVE SHARAD N , BYL OLEG , KAIM ROBERT , ELDRIDGE DAVID , SERGI STEVEN , FENG LIN , BISHOP STEVEN E , OLANDER KARL W , TANG YING , ADVANCED TECH MATERIALS
发明人： SWEENEY JOSEPH D , YEDAVE SHARAD N , BYL OLEG , KAIM ROBERT , ELDRIDGE DAVID , SERGI STEVEN , FENG LIN , BISHOP STEVEN E , OLANDER KARL W , TANG YING
IPC分类号： H01L21/265 , C23C16/44 , C23G5/00 , H01J37/08 , H01J37/16 , H01J37/18 , H01J37/317
CPC分类号： H01J37/3171 , C23C14/48 , C23C14/54 , C23C14/564 , H01J37/08 , H01J37/16 , H01J37/18 , H01J2237/082 , H01J2237/22
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