公开(公告)号：EP1147438A4

公开(公告)日：2005-04-06

申请号：EP99969606

申请日：1999-11-30

Applicant: CORNING INC

Inventor： ALLAN DOUGLAS C ,  BORRELLI NICHOLAS F ,  FAJARDO JAMES C ,  FIACCO RICHARD M ,  HAWTOF DANIEL W ,  WEST JAMES A

IPC: G02B6/02 ,  C03B37/012 ,  C03B37/028 ,  C03C13/04 ,  G02B6/024 ,  G02B6/036 ,  G02B6/16

CPC classification number: G02B6/02338 ,  B82Y20/00 ,  C03B37/01205 ,  C03B37/028 ,  C03B2203/42 ,  G02B6/02347 ,  G02B6/02352 ,  G02B6/02366 ,  G02B6/02371 ,  H01S3/06741

Abstract: Disclosed is an optical waveguide fiber preform which is an assembly of one or more core rods (14) surrounded by a plurality of clad rods (10). The clad rods (10) have a central portion (12) and a surrounding layer (22), in which the refractive index of the central portion is lower than that of the surrounding layer. The preform is drawn into an optical waveguide fiber that has a two component clad layer. Proper choice of the central portion (12) and surrounding layer provide a waveguide fiber that is endlessly single mode. Alternative embodiments include fibers containing dopants that enhance fiber photosensitivity or which provide stress-induced or asymmetric-refractive-index-induced birefringence in the waveguide fiber.

Abstract translation: 公开了一种光波导纤维预制件，其是由多个包覆棒包围的一个或多个芯棒的组件。 复合棒具有中心部分和周围层，其中中心部分的折射率低于周围层的折射率。 预成型件被拉入具有双组分包覆层的光波导纤维中。 中心部分和周围层的适当选择提供无限单模光纤。 替代实施方案包括含有增强纤维光敏性或在波导纤维中提供应力诱导或不对称折射率诱导的双折射的掺杂剂的纤维。

公开(公告)号：EP1266249A4

公开(公告)日：2003-07-16

申请号：EP00970526

申请日：2000-09-29

Applicant: CORNING INC

Inventor： BORRELLI NICHOLAS F ,  ALLAN DOUGLAS C ,  SMITH CHARLENE M

IPC: G02B6/122 ,  G02B6/12 ,  G02B6/13 ,  G02B6/02

CPC classification number: G02B6/13 ,  G02B2006/121 ,  G02B2006/12107 ,  G02B2006/12147 ,  G02B2006/12159

Abstract: A method of writing a light guiding structure (26) in a bulk glass substrate (4) including selecting a bulk glass substrate (4) made from a soft silica based material. An excimer laser beam (5) is focused at a focus point (3) within the substrate while translating the focus relative to the substrate along the scan path. The laser beam (5) is moved at a scan speed so as to induce an increase in the refractive index of the material along the scan path relative to that of the unexposed material, while at the same time incurring very little laser induced breakdown of the material along the scan path. Various optical devices, including waveguides, can be made in this way.

Abstract translation: 一种在散装玻璃基板（4）中写入导光结构（26）的方法，包括选择由软二氧化硅基材料制成的散装玻璃基板（4）。 准分子激光束（5）聚焦在衬底内的焦点（3）处，同时沿扫描路径相对于衬底平移焦点。 激光束（5）以扫描速度移动，以引起材料沿着扫描路径相对于未曝光材料的折射率的增加，同时产生非常少的激光诱发的 材料沿扫描路径。 可以以这种方式制造包括波导在内的各种光学装置。

公开(公告)号：EP1417530A4

公开(公告)日：2008-10-08

申请号：EP02750066

申请日：2002-07-16

Applicant: CORNING INC

Inventor： ALLAN DOUGLAS C ,  WEBB JAMES E ,  BRUNING JOHN H

IPC: G01L1/24 ,  G02B1/02 ,  G02B5/30 ,  G02B17/08 ,  G02F1/01 ,  G03F7/20 ,  H01L21/027 ,  G02B27/14 ,  G01J4/00 ,  G01R33/02 ,  G02F1/07 ,  G02F1/1333 ,  H01J40/14

CPC classification number: G02B17/0892 ,  G01L1/241 ,  G02B1/02 ,  G02B5/3091 ,  G02B17/0808 ,  G02B17/086 ,  G02F1/0131 ,  G03F7/70225 ,  G03F7/70566 ,  G03F7/70958 ,  G03F7/70966

Abstract: Stress-induced photoelastic birefringence compensates for intrinsic birefringence of cubic crystalline structures (12) in deep ultraviolet (less than 200 nm) microlithographic imaging systems (10). Both the photoelastic birefringence and the intrinsic birefringence are expressed in a tensor format simplified by the symmetries of cubic crystalline structures. The stress-induced photoelastic birefringence can be sized to individually compensate for intrinsic birefringence exhibited in the same optical elements or preferably to collectively compensate for the cumulative effects of intrinsic birefringence in other optical elements in the lithography system.

公开(公告)号：EP1685513A4

公开(公告)日：2007-05-23

申请号：EP04796812

申请日：2004-10-29

Applicant: CORNING INC

Inventor： LAPP JOSEF C ,  ALLAN DOUGLAS C ,  ANMA MOTOYA

IPC: G05B13/02 ,  G06F19/00 ,  H01L20060101

CPC classification number: G05B13/024

Abstract: A method of determining parameters of plurality of thermal cycles to achieve a set glass strain level includes providing a plurality of input parameters for a glass substrate and a plurality of parameters for a plurality of thermal cycles. The method also includes iteratively modifying at least one of the pluralities of thermal cycle parameters so the glass strain is not greater than the set glass strain level after a final thermal cycle is completed. An aspect of the method usefully enables a user to determine from the material parameters and processing sequences of the glass manufacturer and further entities that may further process the glass (e.g., the glass manufacturer's customers) whether a particular glass strain can be achieved; and if not the example embodiments allows the manufacturer to calculate changes in the customers' processes to meet the desired glass strain.

Abstract translation: 确定多个热循环的参数以实现设定的玻璃应变水平的方法包括提供玻璃基板的多个输入参数和多个热循环的多个参数。 该方法还包括迭代地修改多个热循环参数中的至少一个，使得在最终热循环完成之后玻璃应变不大于设定的玻璃应变水平。 该方法的一个方面有用地使用户能够根据玻璃制造商和可能进一步处理玻璃的其他实体（例如，玻璃制造商的顾客）的材料参数和处理顺序来确定是否可以实现特定的玻璃应变; 如果不是这些示例性实施例，则制造商可以计算客户工艺中的变化以满足所需的玻璃应变。

公开(公告)号：EP0960074A4

公开(公告)日：2002-09-04

申请号：EP97945187

申请日：1997-08-27

Applicant: CORNING INC

Inventor： ALLAN DOUGLAS C ,  POWELL WILLIAM R ,  BORRELLI NICHOLAS FRANCIS ,  SEWARD THOMAS PHILIP III ,  SMITH CHARLENE MARIE

IPC: G02B1/00 ,  C03B8/02 ,  C03B8/04 ,  C03B19/06 ,  C03B19/10 ,  C03B19/14 ,  C03B20/00 ,  C03C1/00 ,  C03C3/06 ,  C03C23/00 ,  G02B1/02 ,  G03F7/20 ,  C03C3/076 ,  C03C4/00

CPC classification number: G03F7/70958 ,  C03B19/06 ,  C03B19/066 ,  C03B19/1065 ,  C03B19/1453 ,  C03B20/00 ,  C03B2207/32 ,  C03C1/006 ,  C03C3/06 ,  C03C23/0025 ,  C03C2201/02 ,  C03C2203/50 ,  G03F7/70058 ,  G03F7/70216 ,  Y10S65/13

Abstract: The invention relates to fused silica having low compaction under high energy irradation, particularly adaptable for use in photolithography applications.

公开(公告)号：EP1456695A4

公开(公告)日：2006-07-19

申请号：EP02787033

申请日：2002-12-11

Applicant: CORNING INC

Inventor： ALLAN DOUGLAS C ,  BROWN JOHN T ,  CHACON LISA C ,  ELLISON ADAM J G ,  FAJARDO JAMES C ,  GRAY STUART ,  HOUSE KEITH L ,  KOCH KARL W III ,  POWERS DALE R ,  WEST JAMES A

IPC: G02B6/00 ,  C03B37/014 ,  C03B37/018 ,  C03C13/04 ,  G02B6/02 ,  G02B6/036 ,  G02F1/35 ,  G02B1/00

CPC classification number: C03C13/045 ,  C03B37/01413 ,  C03B37/01446 ,  C03B37/01807 ,  C03B37/01823 ,  C03B37/01853 ,  C03B2201/20 ,  C03B2201/22 ,  C03B2201/31 ,  C03B2203/22 ,  C03B2207/30 ,  C03B2207/36 ,  C03C4/0042 ,  C03C13/046 ,  G02B6/02 ,  G02B6/02228 ,  G02B6/02271 ,  G02B6/03644 ,  G02B6/03677 ,  G02B6/03694

Abstract: An isotopically-altered, silica based optical fiber is provided having lower losses, broader bandwidth, and broader Raman gain spectrum characteristics than conventional silica-based fiber. A heavier, less naturally abundant isotope of silicon or oxygen is substituted for a lighter, more naturally abundant isotope to shift the infrared absorption to a slightly longer wavelength. In one embodiment, oxygen-18 is substituted for the much more naturally abundant oxygen-16 at least in the core region of the fiber. The resulting isotopically-altered fiber has a minimum loss of 0.044 dB/km less than conventional fiber, and a bandwidth that is 17 percent broader for a loss range between 0.044-0.034 dB/km. The fiber may be easily manufactured with conventional fiber manufacturing equipment by way of a plasma chemical vapor deposition technique. When a 50 percent substitution of oxygen-18 for oxygen-16 is made in the core region of the fiber, the Raman gain spectrum is substantially broadened.

公开(公告)号：EP1405110A4

公开(公告)日：2006-03-22

申请号：EP02726866

申请日：2002-05-14

Applicant: CORNING INC

Inventor： ALLAN DOUGLAS C ,  BORRELLI NICHOLAS F ,  SMITH CHARLENE M ,  STONE BRYAN D

IPC: G02B1/02 ,  C30B33/00 ,  G03F7/20 ,  H01L21/027

CPC classification number: G02B1/08 ,  C30B29/12 ,  C30B33/00 ,  G02B1/02 ,  G03F7/70966

Abstract: The invention provides a method of making a crystal direction of the optical calcium fluoride crystal. In a preferred embodiment, the below 194 nm transmitting optical element is a oriented calcium fluoride lens. In a preferred embodiment, the below 194 nm transmitting optical element is a oriented calcium fluoride beam splitter.

公开(公告)号：EP1430340A4

公开(公告)日：2005-10-26

申请号：EP02770387

申请日：2002-08-01

Applicant: CORNING INC

Inventor： ALLAN DOUGLAS C

IPC: G02B6/02 ,  G02B6/255 ,  G02B6/26

CPC classification number: G02B6/2551

Abstract: The present invention includes a composite optical waveguide fiber. The composite optical waveguide fiber includes a first optical waveguide fiber. The first optical waveguide fiber has a first diameter and a first outermost layer having a first coefficient of thermal expansion. The composite optical waveguide fiber further includes a second optical waveguide fiber coupled to the first optical waveguide fiber. The second optical waveguide fiber has a second diameter and a second outermost layer, the second outermost layer having a second coefficient of thermal expansion. Wherein the first coefficient of thermal expansion is greater than the second coefficient of thermal expansion. Wherein the first diameter is greater than the second diameter.

公开(公告)号：EP1410077A4

公开(公告)日：2005-01-26

申请号：EP01964054

申请日：2001-08-15

Applicant: CORNING INC

Inventor： ALLAN DOUGLAS C ,  COTTEVERTE JEAN-CHARLES JOSEPH ,  KUCHINSKY SERGEY A ,  RENVAZE CHRISTOPHE F P

IPC: G02B6/122 ,  G02B6/125 ,  G02B6/35 ,  G02F1/01 ,  G02B6/10

CPC classification number: G02F1/011 ,  B82Y20/00 ,  G02B6/1225 ,  G02B6/125 ,  G02B6/3538 ,  G02B6/3546 ,  G02B6/3582 ,  G02B6/3584 ,  G02B6/3596 ,  G02F1/01 ,  G02F1/0147 ,  G02F2202/32

Abstract: An active photonic crystal device for controlling an optical signal is disclosed. The device includes a planar photonic crystal (100) with a defect waveguide (102) bounded on the top and bottom by an upper cladding region (106) and a lower cladding region (104). An optical signal propagating in the defect waveguide (102) is confined in the plane of the photonic crystal (100) by the photonic bandgap, and in the direction normal to the photonic crystal (100) by the upper clad region (106) and the lower clad region (104). The propagation of the optical signal in the defect waveguide (102) is controlled by varying the optical properties at least one of the upper clad region (106) or the lower clad region (104). The variation of the optical properties of the controllable regions may be achieved using a thermo-optic effect, an electro-optic effect, a stress-effect, or a mechano-optic effect, or by moving a material into or out of the controllable region.

Abstract translation: 公开了一种用于控制光信号的有源光子晶体器件。 该器件包括具有通过上包层区域和下包层区域在顶部和底部限定的缺陷波导的平面光子晶体。 在缺陷波导中传播的光信号通过光子带隙被限制在光子晶体的平面中，并且通过上包层区域和下包层区域在与光子晶体垂直的方向上被限制。 光信号在缺陷波导中的传播通过改变上包层区域或下包层区域中的至少一个的光学特性来控制。 可控区域的光学特性的变化可以使用热光效应，电光效应，应力光学效应或机械光学效应，或者通过将材料移入或移出可控的 地区。