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    MEMS DIGITAL VARIABLE CAPACITOR DESIGN WITH HIGH LINEARITY
    2.
    发明公开
    MEMS DIGITAL VARIABLE CAPACITOR DESIGN WITH HIGH LINEARITY 审中-公开
    数字变压器MEMS-KONDENSATOR MIT HOHERLINEARITÄT

    公开(公告)号：EP2981981A1

    公开(公告)日：2016-02-10

    申请号：EP14724902.3

    申请日：2014-04-02

    Applicant: Cavendish Kinetics Inc.

    Inventor： KNIPE, Richard, L. ,  VAN KAMPEN, Robertus, Petrus

    IPC: H01G5/16 ,  H01H59/00 ,  H01G5/18

    CPC classification number: H01G5/18 ,  B81B3/0051 ,  B81B3/007 ,  B81B2201/0221 ,  H01G5/011 ,  H01G5/0136 ,  H01G5/16 ,  H01H59/0009 ,  H01H2059/0072

    Abstract: The present invention generally relates to a MEMS DVC and a method for fabrication thereof. The MEMS DVC comprises a plate movable from a position spaced a first distance from an RF electrode and a second position spaced a second distance from the RF electrode that is less than the first distance. When in the second position, the plate is spaced from the RF electrode by a dielectric layer that has an RF plateau over the RF electrode. One or more secondary landing contacts and one or more plate bend contacts may be present as well to ensure that the plate obtains a good contact with the RF plateau and a consistent Cmax value can be obtained. On the figure PB contact is the plate bend contact, SL contact is the Second Landing contact and the PD electrode is the Pull Down electrode.

    Abstract translation: 本发明一般涉及一种MEMS DVC及其制造方法。 MEMS DVC包括可从距离RF电极间隔第一距离的位置移动的板和距离RF电极间隔第二距离的第二位置小于第一距离的板。 当处于第二位置时，板通过在RF电极上具有RF平台的电介质层与RF电极间隔开。 也可以存在一个或多个次级着陆触点和一个或多个板弯曲触点，以确保板获得与RF平台的良好接触，并且可以获得一致的C max值。 在图中，PB接触是板弯接触，SL接触是第二着陆接触，PD电极是下拉电极。

    STRESS CONTROL DURING PROCESSING OF A MEMS DIGITAL VARIABLE CAPACITOR (DVC)
    4.
    发明公开
    STRESS CONTROL DURING PROCESSING OF A MEMS DIGITAL VARIABLE CAPACITOR (DVC) 审中-公开
    曝光控制微机电DIGITAL可变电容器的加工过程中（DVC）

    公开(公告)号：EP3014639A1

    公开(公告)日：2016-05-04

    申请号：EP14733050.0

    申请日：2014-06-04

    Applicant: Cavendish Kinetics, Inc.

    Inventor： VAN KAMPEN, Robertus, Petrus ,  KNIPE, Richard, L.

    IPC: H01G5/16 ,  H01G5/18

    CPC classification number: H01G5/16 ,  H01G5/18 ,  H01L28/60

    Abstract: The present invention generally relates to a MEMS digital variable capacitor (DVC) (900) and a method for manufacture thereof. The movable plate (938) within a MEMS DVC should have the same stress level to ensure proper operation of the MEMS DVC. To obtain the same stress level, the movable plate is decoupled from CMOS ground during fabrication. The movable plate is only electrically coupled to CMOS ground after the plate has been completely formed. The coupling occurs by using the same layer (948) that forms the pull-up electrode as the layer that electrically couples the movable plate to CMOS ground. As the same layer couples the movable plate to CMOS ground and also provides the pull-up electrode for the MEMS DVC, the deposition occurs in the same processing step. By electrically coupling the movable plate to CMOS ground after formation, the stress in each of the layers of the movable plate can be substantially identical.

    MEMS DEVICE ANCHORING
    7.
    发明公开
    MEMS DEVICE ANCHORING 审中-公开
    VERANKERUNG EINER MEMS-VORRICHTUNG

    公开(公告)号：EP2751022A2

    公开(公告)日：2014-07-09

    申请号：EP12781188.3

    申请日：2012-08-31

    Applicant: Cavendish Kinetics Inc.

    Inventor： RENAULT, Mickael ,  JOSHI, Vikram ,  KNIPE, Richard, L. ,  UNAMUNO, Anartz ,  VAN KAMPEN, Robertus, Petrus

    IPC: B81C1/00 ,  H01H59/00

    CPC classification number: B81B7/00 ,  B81B2201/016 ,  B81B2203/0307 ,  B81C1/00039 ,  B81C2203/0136 ,  H01G5/16 ,  H01H59/0009 ,  Y10T29/49105

    Abstract: Embodiments of the present invention generally relate to a MEMS device that is anchored using the layer that is deposited to form the cavity sealing layer and/or with the layer that is deposited to form the pull-off electrode. The switching element of the MEMS device will have a flexible or movable portion and will also have a fixed or anchor portion that is electrically coupled to ground. The layer that is used to seal the cavity in which the switching element is disposed can also be coupled to the fixed or anchor portion of the switching element to anchor the fixed or anchor portion within the cavity. Additionally, the layer that is used to form one of the electrodes may be used to provide additional leverage for anchoring the fixed or anchor portion within the cavity. In either situation, the movement of the flexible or movable portion is not hindered.

    Abstract translation: 本发明的实施例一般涉及使用沉积以形成空腔密封层和/或沉积以形成拉出电极的层来锚定的MEMS器件。 MEMS器件的开关元件将具有柔性或可移动部分，并且还将具有电耦合到地的固定或锚定部分。 用于密封其中设置有开关元件的空腔的层也可以耦合到开关元件的固定部分或锚定部分，以将固定部分或锚固部分固定在腔体内。 另外，用于形成电极之一的层可以用于提供用于将固定或锚定部分固定在腔内的额外的杠杆作用。 在这两种情况下，柔性或可动部分的运动不受阻碍。

    FABRICATION OF A FLOATING ROCKER MEMS DEVICE FOR LIGHT MODULATION
    10.
    发明公开
    FABRICATION OF A FLOATING ROCKER MEMS DEVICE FOR LIGHT MODULATION 有权
    HERSTELLUNG EINES SCHWEBENDEN KIPPERSFÜREINE MEMS-VORRICHTUNG ZUR LICHTMODULATION

    公开(公告)号：EP2470938A2

    公开(公告)日：2012-07-04

    申请号：EP10747775.4

    申请日：2010-08-24

    Applicant: Cavendish Kinetics Inc.

    Inventor： SMITH, Charles, Gordon ,  KNIPE, Richard, L.

    IPC: G02B26/00

    CPC classification number: G02B26/0833 ,  B81B2201/042 ,  B81C1/00317 ,  B81C2203/0136 ,  B81C2203/0145 ,  G02B26/0841

    Abstract: The current disclosure shows how to make a fast switching array of mirrors for projection displays. Because the mirror does not have a via in the middle connecting to the underlying spring support, there is an improved contrast ratio that results from not having light scatter off the legs or vias like existing technologies. Because there are no supporting contacts, the mirror can be made smaller making smaller pixels that can be used to make higher density displays. In addition, because there is not restoring force from any supporting spring support, the mirror stays in place facing one or other direction due to adhesion. This means there is no need to use a voltage to hold the mirror in position. This means that less power is required to run the display.

    Abstract translation: 目前的公开内容显示了如何制作用于投影显示器的快速反射镜阵列。 因为镜子在连接到下面的弹簧支撑件的中间没有通孔，所以具有改善的对比度，这是由于不像现有技术那样从腿部或通孔没有光散射。 因为没有支持触点，所以可以使镜子更小，从而可以使更小的像素用于制作更高密度的显示器。 另外，由于没有来自任何支撑弹簧支撑件的恢复力，所以由于粘附，反射镜保持在面向一个或另一个方向的位置。 这意味着不需要使用电压将镜子保持在适当的位置。 这意味着运行显示器需要较少的电力。

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