IMPRINTING LITHOGRAPHY USING THE LIQUID/SOLID TRANSITION OF METALS AND THEIR ALLOYS
    2.
    发明公开
    IMPRINTING LITHOGRAPHY USING THE LIQUID/SOLID TRANSITION OF METALS AND THEIR ALLOYS 有权
    压力光刻使用液体/固体过渡金属及其合金

    公开(公告)号:EP1756669A2

    公开(公告)日:2007-02-28

    申请号:EP05757746.2

    申请日:2005-06-08

    发明人: CHEN, Yong

    IPC分类号: G03F7/00

    摘要: A method is provided for imprinting a pattern (18a) having nanoscale features from a mold (10) into the patternable layer (18) on a substrate (14). The method comprises: providing the mold (10); forming the patternable layer (18) on the substrate (14); and imprinting the mold (10) into the patternable layer (18), wherein the patternable layer (18) comprises a metal or alloy having a transition temperature from its solid form to its liquid form that is within a range of at least 10° above room temperature.

    TRANSISTOR AND SENSORS MADE FROM MOLECULAR MATERIALS WITH ELECTRIC DIPOLES
    4.
    发明公开
    TRANSISTOR AND SENSORS MADE FROM MOLECULAR MATERIALS WITH ELECTRIC DIPOLES 审中-公开
    TRANSISTORS和电偶极分子材料的多个传感器

    公开(公告)号:EP1518280A2

    公开(公告)日:2005-03-30

    申请号:EP03762044.0

    申请日:2003-06-26

    IPC分类号: H01L51/20 G01N27/414

    摘要: A polarization-dependent device is provided that includes organic materials having electric dipoles. The polarization-dependent device comprises: (a) a source region and a drain region separated by a channel region having a length L, formed on a substrate: (b) a dielectric layer on a least a portion of the channel region; and (c) a molecular layer on the dielectric layer, the molecular layer comprising molecules having a switchable dipolar moiety. Addition of a gate over the molecular layer permits fabrication of a transistor, while omission of the gate, and utilization of suitable molecules that are sensitive to various changes in the environment permits fabrication of a variety of sensors. The molecular transistor and sensors are suitable for high density nanoscale circuits and are less expensive than prior art approaches.

    NANOWIRE DEVICE WITH (111) VERTICAL SIDEWALLS AND METHOD OF FABRICATION
    6.
    发明授权
    NANOWIRE DEVICE WITH (111) VERTICAL SIDEWALLS AND METHOD OF FABRICATION 有权
    具有垂直(111),侧板和方法纳米线设备

    公开(公告)号:EP1765725B1

    公开(公告)日:2009-08-05

    申请号:EP05856851.0

    申请日:2005-06-28

    IPC分类号: B81B7/00

    摘要: A nano-scale device 10, 20, 30, 60 and method 40, 50, 70 of fabrication provide a nanowire 14, 24, 34, 64 having (111) vertical sidewalls 14a, 22e, 34a, 64a. The nano-scale device includes a semiconductor-on-insulator substrate 12, 22, 32, 62 polished in a [110] direction, the nanowire, and an electrical contact 26, 35 at opposite ends of the nanowire 24, 34. The method 40, 50, 70 includes wet etching 42, 52, 72 a semiconductor layer 12a, 22a, 32a. 62a of the semiconductor-on-insulator substrate to form 44, 54 the nanowire 24, 34 extending between a pair of islands 22f, 32f in the semiconductor layer 22a, 32a. The method 50 further includes depositing 56 an electrically conductive material on the pair of islands to form the electrical contacts 26, 36. A nano-pn diode 60 includes the nanowire 64 as a first nano-electrode, a pn-junction 66 verically stacked on the nanowire 64, and a second nano-electrode 68 on a (110) horizontal planar end of the pn-junction. The nano-pn diode 60 may be fabricated in array of the diodes on the semiconductor-on-insulator substrate 62.

    NANOWIRE DEVICE WITH (111) VERTICAL SIDEWALLS AND METHOD OF FABRICATION
    7.
    发明公开
    NANOWIRE DEVICE WITH (111) VERTICAL SIDEWALLS AND METHOD OF FABRICATION 有权
    具有垂直(111),侧板和方法纳米线设备

    公开(公告)号:EP1765725A2

    公开(公告)日:2007-03-28

    申请号:EP05856851.0

    申请日:2005-06-28

    IPC分类号: B81B7/00

    摘要: A nano-scale device 10, 20, 30, 60 and method 40, 50, 70 of fabrication provide a nanowire 14, 24, 34, 64 having (111) vertical sidewalls 14a, 22e, 34a, 64a. The nano-scale device includes a semiconductor-on-insulator substrate 12, 22, 32, 62 polished in a [110] direction, the nanowire, and an electrical contact 26, 35 at opposite ends of the nanowire 24, 34. The method 40, 50, 70 includes wet etching 42, 52, 72 a semiconductor layer 12a, 22a, 32a. 62a of the semiconductor-on-insulator substrate to form 44, 54 the nanowire 24, 34 extending between a pair of islands 22f, 32f in the semiconductor layer 22a, 32a. The method 50 further includes depositing 56 an electrically conductive material on the pair of islands to form the electrical contacts 26, 36. A nano-pn diode 60 includes the nanowire 64 as a first nano-electrode, a pn-junction 66 verically stacked on the nanowire 64, and a second nano-electrode 68 on a (110) horizontal planar end of the pn-junction. The nano-pn diode 60 may be fabricated in array of the diodes on the semiconductor-on-insulator substrate 62.

    IMPRINTING LITHOGRAPHY USING THE LIQUID/SOLID TRANSITION OF METALS AND THEIR ALLOYS
    9.
    发明授权
    IMPRINTING LITHOGRAPHY USING THE LIQUID/SOLID TRANSITION OF METALS AND THEIR ALLOYS 有权
    压力光刻使用液体/固体过渡金属及其合金

    公开(公告)号:EP1756669B1

    公开(公告)日:2011-10-05

    申请号:EP05757746.2

    申请日:2005-06-08

    发明人: CHEN, Yong

    IPC分类号: G03F7/00

    摘要: A method is provided for imprinting a pattern (18a) having nanoscale features from a mold (10) into the patternable layer (18) on a substrate (14). The method comprises: providing the mold (10); forming the patternable layer (18) on the substrate (14); and imprinting the mold (10) into the patternable layer (18), wherein the patternable layer (18) comprises a metal or alloy having a transition temperature from its solid form to its liquid form that is within a range of at least 10° above room temperature.