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公开(公告)号：EP2035776B1
公开(公告)日：2017-06-28
申请号：EP07724834.2
申请日：2007-05-03
发明人： AIGNER, Robert
IPC分类号： G01C19/5698
CPC分类号： G01C19/5698
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公开(公告)号：EP1105344B1
公开(公告)日：2012-04-25
申请号：EP99952247.7
申请日：1999-08-03
发明人： AIGNER, Robert , BEVER, Thomas , TIMME, Hans-Jörg
CPC分类号： B81C1/00801 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81B2207/015 , B81C2201/0136 , H04R19/005 , H04R19/04 , H04R31/00
摘要： The invention relates to a micromechanical sensor and to a corresponding production method, comprising the following steps: a) preparing a doped semiconductor wafer (4); b) applying an epitaxial layer (1) that is doped in such a way that a jump in the charge carrier density in the interface (11) between the semiconductor wafer and the epitaxial layer occurs; c) optionally etching ventilation holes (2) traversing the epitaxial layer and optionally filling the ventilation holes with a sacrificial material; d) depositing at least one sacrificial layer (9), at least one spacing layer (10), a membrane (5) and optionally a semiconductor circuit (8) on the top side of the epitaxial layer using a technology known per se, wherein the semiconductor circuit may be applied after the membrane is formed or while depositing the layers required to form the membrane; e) etching a hole (6) on the back part of the sensor, wherein the etching method is selected in such a way that etching advances in the direction of the top side and ceases in the interface between the wafer (4) and the epitaxial layer (1) by changing charge carrier concentration. The invention also relates to the utilization of the micromechanical sensor in pressure sensors or microphones.
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3.发明授权BULK ACOUSTIC WAVE RESONATOR WITH TWO PIEZOELECTRIC LAYERS AS BALUN IN FILTERS AND DUPLEXERS 有权与两个压电层比平衡 - 不平衡滤波器和双工器主要部件表面声波
公开(公告)号：EP1464115B1
公开(公告)日：2009-10-14
申请号：EP03729291.9
申请日：2003-01-03
发明人： ELLÄ, Juha , AIGNER, Robert
CPC分类号： H03H9/0571 , H03H7/42 , H03H9/0095 , H03H9/589 , H03H9/706
摘要： A bulk acoustic wave device having two resonators in a stacked-up configuration separated by a dielectric layer. The device can be coupled to a lattice filter or a ladder filter to form a passband filter with an unbalanced input port and two balanced output ports. One or more such passband filters can be used, together with another lattice or ladder filter, to form a duplexer having an unbalanced antenna port, two balanced ports for one tranceiver part and two balanced ports for another tranceiver part.
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4.发明授权
公开(公告)号：EP1301949B1
公开(公告)日：2008-01-09
申请号：EP01967197.3
申请日：2001-07-17
发明人： AIGNER, Robert , ELBRECHT, Lueder , HERZOG, Thomas, Rainer , MARKSTEINER, Stephan , NESSLER, Winfried
CPC分类号： H03H3/02 , H01L37/02 , H01L41/319 , H03H2003/025
摘要： At least one bottom electrode (U), a piezoelectric or pyroelectric layer (S) over said bottom electrode and a top electrode (O) over said layer are produced as parts of the layer sequence. The bottom electrode (U) is produced by depositing a conductive material and then chemically-mechanically polished in order to smooth out surface roughness. The thickness of the deposited conductive material is preferably reduced by 10 nm to 100 nm by the chemical-mechanical polishing process.
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公开(公告)号：EP1726093A1
公开(公告)日：2006-11-29
申请号：EP05708723.1
申请日：2005-03-11
发明人： ELLÄ, Juha , AIGNER, Robert
IPC分类号： H03H9/58
摘要： A duplexer comprising a transmit resonator device and a receive resonator device for filtering transmit and receive signals. The resonator device has a first BAW resonator for generating an acoustic wave signal from an input electric signal, a first acoustic delay for delaying the acoustic wave signal, and an intermediate BAW resonator for receiving the delayed acoustic wave signal at one end and converting the delayed acoustic wave signal to an electric signal. Through electrical coupling, the electric signal also appears at another end of the intermediate BAW resonator for generating a further acoustic wave signal at the other end. The resonator further comprises a second delay for delaying the further acoustic wave signal, and a second BAW resonator for producing an output electric signal from the delayed further acoustic wave signal. The duplexer can be used in a transceiver in a mobile phone.
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公开(公告)号：EP1108203B1
公开(公告)日：2005-03-16
申请号：EP99953629.5
申请日：1999-08-27
发明人： AIGNER, Robert , HIEROLD, Christofer , KAPELS, Hergen , KOLB, Stefan , MAIER-SCHNEIDER, Dieter , OPPERMANN, Klaus-Günter , TIMME, Hans-Jörg , SCHEITER, Thomas , WERNER, Wolfgang
CPC分类号： G01L9/0042 , B81B2201/0235 , B81B2201/0257 , B81B2201/0264 , B81C1/00896 , B81C2201/053 , H01L2924/0002 , H01L2924/00
摘要： Disclosed is a method for the production of a micromechanical component, comprising the production of a micromechanical component with sensor holes, wherein at least one component protective layer and/or spacer coating is applied on the component before separating the wafer into chips, wherein the component protective layer sealingly covers at least the walls of the holes extending parallel to the surface of the wafer and perpendicular to the surface of the wafer and the spacer coating sealingly covers at least the walls of the holes extending parallel to the surface of the wafer. The invention also relates to a micromechanical component produced according to the method disclosed in the invention and to the use of said components in microphones, pressure sensors or acceleration sensors.
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公开(公告)号：EP1371135A1
公开(公告)日：2003-12-17
申请号：EP01917108.1
申请日：2001-03-23
发明人： AIGNER, Robert , TIKKA, Pasi , ELLÄ, Juha
IPC分类号： H03H9/46
CPC分类号： H03H9/0028 , H03H9/0095
摘要： The present invention provides a filter device constructed of a combined ladder and lattice filter topology. The filter device according to the present invention synergetically combines the good features of both types of filters. Using the filter device according to the present invention an integrated unbalanced-to-balanced filter device can be realized. Accordingly, a substantial decrease in the number of components can be achieved. Furthermore, the filter device according to the present invention can be integrated with further components, preferably active RF-components, on a single chip.
摘要翻译： 本发明提供了一种由组合梯形和格子滤波器拓扑结构构成的滤波器装置。 根据本发明的过滤器装置协同地组合了两种过滤器的良好特征。 使用根据本发明的过滤装置可以实现集成的不平衡 - 平衡过滤装置。 因此，可以实现部件数量的实质性减少。 此外，根据本发明的滤波器装置可以与另外的部件，优选有源RF部件集成在单个芯片上。
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公开(公告)号：EP1317797A1
公开(公告)日：2003-06-11
申请号：EP01976209.5
申请日：2001-09-10
发明人： AIGNER, Robert , ELBRECHT, Lueder , MARKSTEINER, Stephan , NESSLER, Winfried , TIMME, Hans-Joerg
IPC分类号： H03H9/17
CPC分类号： H03H9/02133 , H03H9/171
摘要： The resonator comprises a first electrode (E1), a second electrode (E2) and a piezoelectric layer (P) arranged between the above. A first acoustic compression layer (V1) is arranged between the piezoelectric layer (E1) and the first electrode (E1) with a higher acoustic impedance than the first electrode (E1).
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公开(公告)号：EP1219028A1
公开(公告)日：2002-07-03
申请号：EP00964249.7
申请日：2000-09-28
IPC分类号： H03H3/02
摘要： The acoustic mirror is essentially comprised of at least one first insulating layer (Il'), a first metal layer (M1') arranged thereon, a second insulating layer arranged thereon (I2') and a second metal layer (M2') arranged thereon. An auxiliary layer (H') is produced on the first insulating layer (I1') whereby a recess (V') extending as far as the first insulating layer (I1') is created therein. The first metal layer (M1') is substantially deposited and removed by chemical/mechanical polishing until the parts of the first metal layer (M1') arranged outside the recess (V') are no longer present. The second metal layer (M2') is also produced in a recess (V') with the aid of chemical/mechanical polishing. More than two insulating layers (I1', I2') and two metal layers (M1', M2') can be provided. The first metal layer (M1') and the second metal layer (M2') can be produced in the same recess (V').
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公开(公告)号：EP1113981A1
公开(公告)日：2001-07-11
申请号：EP99952425.9
申请日：1999-08-17
CPC分类号： G01L9/0073 , B81B2201/0264 , B81B2207/053 , B81C1/00158 , G01L9/0042
摘要： The invention relates to a micromechanical component placed on the face of a substrate. A counter-electrode of a cell capacitor is placed under a cavity (H), whereby said counter-electrode can be composed of a first part of a lower conductive layer. An optionally circular membrane used as an electrode of the capacitor is placed above said cavity (H). Said membrane is homogeneous and has a substantially uniform thickness. It can be part of an upper conductive layer which is preferably supported by a second part of the lower conductive layer. A caustic channel (A), which is used to remove the sacrificial coating in order to form the cavity (H), is laterally connected to said cavity (H). Said caustic channel (A) has a vertical dimension which is equal to the vertical dimension of the cavity (H). A closure (V) is adjacent to said caustic channel (A) and placed outside said membrane. The inventive component can be used as a pressure sensor. It exhibits several cells which are each adjacent to six other cells.
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