System and method for wafer mounting and evacuation in an electron beam irradiation device
    1.
    发明公开
    System and method for wafer mounting and evacuation in an electron beam irradiation device 审中-公开
    系统和Verfahren zur Wafer-Halterung和Evakuierung在einer Elektronenbestrahlungsanlage

    公开(公告)号:EP1308985A1

    公开(公告)日:2003-05-07

    申请号:EP02257088.1

    申请日:2002-10-11

    IPC分类号: H01J37/18 H01J37/20

    摘要: An electron beam irradiation system is offered which is fitted with a rotary stage and capable of preventing vacuum deterioration when a target is mounted and removed without using a large stage as the rotary stage. The system has a pumping block at an end of a microscope column of electron optics. A method used for this purpose is also offered. The system has the rotary stage, the microscope column for shooting an electron beam at the target on the rotary stage, the pumping block for evacuating air in the gap between the column and the target, a moving mechanism for sliding the rotary stage between a working position and a mounting position, and a cover member. In the working position, the target is opposite to the column. In the mounting position, the target is spaced from the column. The cover member is brought into intimate contact with the rotary stage or target to prevent vacuum deterioration when the rotary stage moves from the working position to the mounting position.

    摘要翻译: 提供一种电子束照射系统,其配备有旋转台,并且能够在不使用大台作为旋转台的情况下安装和拆卸靶时防止真空劣化。 该系统在电子光学显微镜柱的末端具有泵送块。 还提供了一种用于此目的的方法。 该系统具有旋转台,用于在旋转台上的目标处拍摄电子束的显微镜柱,用于在柱和靶之间的间隙中排空空气的泵送块,用于在工作之间滑动旋转台的移动机构 位置和安装位置,以及盖构件。 在工作状态下,目标与柱相反。 在安装位置,目标物与柱体间隔开。 当旋转台从工作位置移动到安装位置时,盖构件与旋转台或目标物紧密接触,以防止真空变质。

    Optical modeling apparatus
    4.
    发明公开
    Optical modeling apparatus 有权
    Optische Modelliervorrichtung

    公开(公告)号:EP1935620A3

    公开(公告)日:2010-07-07

    申请号:EP07123408.2

    申请日:2007-12-17

    申请人: Sony Corporation

    IPC分类号: B29C67/00 B22F3/105

    摘要: There is provided an optical modeling apparatus (1) that forms a model of a desired shape by sequentially forming hardened layers by irradiating a light-curable resin with light. The apparatus includes a first light source (11) that emits a light beam for plotting on the resin, a scanning device (21,22) that scans the light beam from the first light source over the resin, a second light source (31) that emits light that irradiates one fixed region of the resin at a time, and a spatial light modulator (32) that spatially modulates the light from the second light source (33) to blanket-expose a specified region of the resin. The light beam from the scanning device (21,22) and the light from the spatial light modulator (32) form each hardened layer.

    摘要翻译: 提供了一种通过用光照射光固化树脂依次形成硬化层来形成所需形状的模型的光学建模装置(1)。 该装置包括:发射用于在树脂上绘制的光束的第一光源(11);扫描装置(21,22),用于扫描来自第一光源的光束穿过树脂,第二光源(31) 一次发射树脂的一个固定区域的光,以及空间光调制器(32),空间调制来自第二光源(33)的光,以覆盖树脂的指定区域。 来自扫描装置(21,22)的光束和来自空间光调制器(32)的光形成每个硬化层。

    Optical recording medium and recording and/or reproducing method and apparatus employing the optical recording medium
    7.
    发明公开
    Optical recording medium and recording and/or reproducing method and apparatus employing the optical recording medium 有权
    光学记录介质和采用该光学记录介质的记录和/或再现方法和设备

    公开(公告)号:EP1063645A2

    公开(公告)日:2000-12-27

    申请号:EP00113255.4

    申请日:2000-06-21

    申请人: SONY CORPORATION

    IPC分类号: G11B7/24

    摘要: An optical recording medium is capable of linear recording in a photon mode. An organic material changed in molecular orientation on light illumination to exhibit birefringence is used as a recording material. For example, a recording layer having, as a recording material, an organic material changed in molecular orientation caused by trans-cis rearrangement, is changed in birefringence with changes in the molecular orientation of the organic material. The recording system which utilizes the changes in the molecular orientation of the organic material has linear characteristics and gives outputs different depending on e.g., the degree or the angle of orientation, thus enabling multi-valued recording.

    摘要翻译: 光记录介质能够以光子模式进行线性记录。 作为记录材料,使用光照射时分子取向发生变化而显示双折射的有机材料。 例如,具有由反式 - 顺式重排引起的分子取向改变的有机材料作为记录材料的记录层随着有机材料的分子取向的变化而双折射改变。 利用有机材料的分子取向变化的记录系统具有线性特性,并根据例如取向的程度或角度给出不同的输出,从而能够进行多值记录。

    Direct viewing picture image display apparatus
    9.
    发明授权
    Direct viewing picture image display apparatus 失效
    直视型图像显示装置。

    公开(公告)号:EP0473343B1

    公开(公告)日:1995-11-22

    申请号:EP91307578.4

    申请日:1991-08-16

    申请人: SONY CORPORATION

    IPC分类号: H04N13/04 G02B27/22

    摘要: A direct viewing picture image display apparatus wherein a good picture image can be displayed with a small amount of light and low power consumption using a laser beam without producing speckle noises. The display apparatus comprises a light source (1) for emitting a laser beam, an optical modulating system (3) for optically modulating the laser beam from the light source in response to a video signal (2), a scanning system (5) for horizontally and vertically scanning the modulated laser beam from the scanning signal in response to a scanning signal, and a projecting optical system (6) for projecting the scanned laser beam from the scanning system to form an image of the laser beam on the retina of an eye (7) of an observer of the display apparatus. Depth information is provided to the laser beam at a suitable stage after optical modulation by the optical modulating system so that a stereoscopic image is displayed with the display apparatus.