公开(公告)号：EP2309025A4

公开(公告)日：2011-09-21

申请号：EP09804845

申请日：2009-07-13

申请人： JX NIPPON MINING & METALS CORP

发明人： ITO JUNICHI ,  YABE ATSUSHI ,  SEKIGUCHI JUNNOSUKE ,  IMORI TORU ,  YAMAKOSHI YASUHIRO ,  SENDA SHINICHIRO

IPC分类号： C23C18/38 ,  C23C18/16 ,  C23C18/18 ,  C23C18/54 ,  C23C28/02 ,  H01L21/768

CPC分类号： C23C18/54 ,  C23C18/1637 ,  C23C18/165 ,  C25D3/38 ,  H01L21/288 ,  H01L21/76843 ,  H01L21/76873 ,  H01L21/76874 ,  Y10T428/12431 ,  Y10T428/12438 ,  Y10T428/12493 ,  Y10T428/12569 ,  Y10T428/12826 ,  Y10T428/1284 ,  Y10T428/12854 ,  Y10T428/12903

公开(公告)号：EP3165947A4

公开(公告)日：2018-04-25

申请号：EP15814732

申请日：2015-06-10

申请人： JX NIPPON MINING & METALS CORP

发明人： MURAKAMI MASAOMI ,  MIKAMI MAKOTO ,  MURAKAMI KOUJI ,  NODA AKIRA ,  IMORI TORU

IPC分类号： G01T1/24 ,  H01L27/144 ,  H01L27/146 ,  H01L31/08

CPC分类号： G01T1/24 ,  H01L24/05 ,  H01L24/06 ,  H01L24/09 ,  H01L27/144 ,  H01L27/146 ,  H01L27/14634 ,  H01L27/14636 ,  H01L27/14676 ,  H01L27/14696 ,  H01L31/02005 ,  H01L31/022408 ,  H01L31/0296 ,  H01L31/02966 ,  H01L31/08 ,  H01L31/115 ,  H01L2224/0345 ,  H01L2224/03464 ,  H01L2224/0558 ,  H01L2224/05583 ,  H01L2224/05584 ,  H01L2224/05644 ,  H01L2224/05655 ,  H01L2224/05664

摘要： The present invention provides a radiation detector UBM electrode structure body and a radiation detector which suppress the degradation of metal electrode layers at the time of formation of UBM layers and achieve sufficient electric characteristics, and a method of manufacturing the same. A radiation detector UBM electrode structure body according to the present invention includes a substrate made of CdTe or CdZnTe, comprising a Pt or Au electrode layer formed on the substrate by electroless plating, an Ni layer formed on the Pt or Au electrode layer by sputtering, and an Au layer formed on the Ni layer by sputtering.