公开(公告)号：EP2949015A4

公开(公告)日：2016-09-07

申请号：EP14742754

申请日：2014-01-24

Applicant: KLA TENCOR CORP

Inventor： CHUANG YUNG-HO ALEX ,  ARMSTRONG J JOSEPH ,  DRIBINSKI VLADIMIR ,  DENG YUJUN ,  FIELDEN JOHN

IPC: H01S3/00 ,  G01N21/95 ,  G01N21/956 ,  G02F1/35 ,  G02F1/39

CPC classification number: H01S3/1083 ,  G01N21/84 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/95676 ,  G02F1/3534 ,  G02F1/3536 ,  G02F1/39 ,  G02F2001/3507 ,  G02F2201/16 ,  H01S3/0078 ,  H01S3/0092 ,  H01S3/0602 ,  H01S3/067

Abstract: A laser for generating an output wavelength of approximately 193.4 nm includes a fundamental laser, an optical parametric generator, a fourth harmonic generator, and a frequency mixing module. The optical parametric generator, which is coupled to the fundamental laser, can generate a down-converted signal. The fourth harmonic generator, which may be coupled to the optical parametric generator or the fundamental laser, can generate a fourth harmonic. The frequency mixing module, which is coupled to the optical parametric generator and the fourth harmonic generator, can generate a laser output at a frequency equal to a sum of the fourth harmonic and twice a frequency of the down-converted signal.

公开(公告)号：EP3117495A4

公开(公告)日：2017-11-29

申请号：EP15809376

申请日：2015-06-18

Applicant: KLA-TENCOR CORP

Inventor： CHUANG YUNG-HO ALEX ,  LOIU JUSTIN DIANHUAN ,  LU XIAOXU ,  ARMSTRONG J JOSEPH ,  DENG YUJUN ,  FIELDEN JOHN

IPC: H01S3/00 ,  G03F7/20

CPC classification number: H01S3/10046 ,  G03F7/70025 ,  H01S3/005 ,  H01S3/0071 ,  H01S3/08004 ,  H01S3/08054 ,  H01S3/08059 ,  H01S3/083 ,  H01S3/10 ,  H01S3/10061 ,  H01S2301/20 ,  H01S2301/203 ,  H01S2301/206

Abstract: A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.

公开(公告)号：EP2929558A4

公开(公告)日：2016-08-03

申请号：EP13860524

申请日：2013-12-03

Applicant: KLA TENCOR CORP

Inventor： CHUANG YUNG-HO ALEX ,  LIOU JUSTIN DIANHUAN ,  ARMSTRONG J JOSEPH ,  DENG YUJUN

IPC: H01L21/66

CPC classification number: H01S3/005 ,  C23C16/00 ,  G02B17/00 ,  G02B17/0848 ,  G02B27/00 ,  G02B27/108 ,  H01S3/00 ,  H01S3/10

公开(公告)号：EP3120427A4

公开(公告)日：2017-11-01

申请号：EP15765616

申请日：2015-03-19

Applicant: KLA-TENCOR CORP

Inventor： DENG YUJUN ,  CHUANG YUNG-HO ALEX ,  FIELDEN JOHN

IPC: H01S3/10 ,  G01N21/39

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G02F1/3534 ,  G02F1/39 ,  H01S3/0078 ,  H01S3/0092 ,  H01S3/094015

Abstract: A DUV laser includes an optical bandwidth filtering device, such as etalon, which is disposed outside of the laser oscillator cavity of the fundamental laser, and which directs one range of wavelengths into one portion of a frequency conversion chain and another range of wavelengths into another portion of the frequency conversion train, thereby reducing the bandwidth of the DUV laser output while maintaining high conversion efficiency in the frequency conversion chain.