摘要:
A wavelength-selective add-drop multiplexer is disclosed for adding and/or dropping spectral components from a wavelength-division-multiplexed optical signal. (1×1) or (2x2) optical switches are used, either alone or in conjunction with other optical elements, to separate spectral components identified for drop from other spectral components.
摘要:
The present invention provides a micro-electro-mechanical system (MEMS) optical device (100). The micro-electro-mechanical system (MEMS) optical device (100) includes a mirror (110) having a substrate (140) with an implanted light reflective optical layer (130) thereover, and a mounting substrate (120) on which the mirror (110) is movably mounted. The inclusion of the dopant (150) within the light reflective optical layer (130) increases the tensile stress of the device (100) and tends to correct the concave curvature of the mirror structure toward a desirably flat configuration.
摘要:
The present invention provides a micro-electro-mechanical system (MEMS) optical device (100). The micro-electro-mechanical system (MEMS) optical device (100) includes a mirror (110) having a substrate (140) with an implanted light reflective optical layer (130) thereover, and a mounting substrate (120) on which the mirror (110) is movably mounted. The inclusion of the dopant (150) within the light reflective optical layer (130) increases the tensile stress of the device (100) and tends to correct the concave curvature of the mirror structure toward a desirably flat configuration.
摘要:
A method for forming micron-sized or smaller drops of liquid, and the use of the method in fabricating micro electro mechanical and micro mechanical devices is disclosed. A micropipette (4) is formed having an inside diameter no larger than the size of the drops to be formed. The micropipette is connected to a system (14) capable of developing a positive and optionally negative pressure within the micropipette. The tip of the micropipette is placed in liquid. The liquid is drawn into the micropipette via capillary action or from the negative pressure developed by the system. The micropipette is then positioned to deliver liquid to an intended location on a surface. To deliver the liquid, a positive pressure is developed within the micropipette (4). The positive pressure forces a micron-sized or smaller drop of liquid out of the micropipette. The method can be used to form micron-sized or smaller drops of adhesive for fixing in place various structural members that form microdevices.
摘要:
An article comprising a light-actuated photonic switch is disclosed. The light-actuated photonic switch advantageously includes a photogenerator that powers a micro-electromechanical systems (MEMS) switch having very low voltage requirements. The MEMS switch is operable to move a reflector into or out of a path of an optical signal travelling between two waveguides. Since the MEMS switch has such low voltage requirements, a long wave photogenerator, which generates relatively low voltages, can be used. As long wavelength light experiences relatively little attenuation in optical fiber, active lightwave circuits incorporating the present light-actuated photonic switch can have very long fiber runs to remote nodes.
摘要:
A hinged mask and a method for its use in manufacturing MEMS device are disclosed. According to the invention, the hinged mask and a portion of the MEMS device are formed at the same time on a support. Openings are formed in the mask, the openings defining a pattern that is transferable in the form of a patterned layer. After release of the MEMS device, the hinged mask is rotated out-of-plane about 180° to lie on top of the MEMS device. The hinged mask is used as a micro-sized shadow mask to deposit a patterned film of arbitrary composition on the MEMS device. Since the hinged plate is formed by the original lithography, it is aligned to the MEMS device with a high degree of accuracy.
摘要:
A method for forming micron-sized or smaller drops of liquid, and the use of the method in fabricating micro electro mechanical and micro mechanical devices is disclosed. A micropipette (4) is formed having an inside diameter no larger than the size of the drops to be formed. The micropipette is connected to a system (14) capable of developing a positive and optionally negative pressure within the micropipette. The tip of the micropipette is placed in liquid. The liquid is drawn into the micropipette via capillary action or from the negative pressure developed by the system. The micropipette is then positioned to deliver liquid to an intended location on a surface. To deliver the liquid, a positive pressure is developed within the micropipette (4). The positive pressure forces a micron-sized or smaller drop of liquid out of the micropipette. The method can be used to form micron-sized or smaller drops of adhesive for fixing in place various structural members that form microdevices.
摘要:
A wavelength-selective add-drop multiplexer is disclosed for adding and/or dropping spectral components from a wavelength-division-multiplexed optical signal. (1x1) or (2x2) optical switches are used, either alone or in conjunction with other optical elements, to separate spectral components identified for drop from other spectral components.
摘要:
A wavelength-selective add-drop multiplexer is disclosed for adding and/or dropping spectral components from a wavelength-division-multiplexed optical signal. (1×1) or (2x2) optical switches are used, either alone or in conjunction with other optical elements, to separate spectral components identified for drop from other spectral components.
摘要:
An article (400) for directing optical signals among optical waveguides (410, 412, 414) is disclosed. The article comprises a plurality of mirror elements (452) that are mechanically and electrically interconnected to form a reflective surface. The reflective surface is deformable upon application of a voltage. Optical signals delivered from a source waveguide (414) may be directed to different destination waveguides (410, 412) as the reflective surface is deformed. The plurality of minor elements is actuated by a single actuator (406).